JP6706983B2 - インプリント装置及び物品の製造方法 - Google Patents

インプリント装置及び物品の製造方法 Download PDF

Info

Publication number
JP6706983B2
JP6706983B2 JP2016137957A JP2016137957A JP6706983B2 JP 6706983 B2 JP6706983 B2 JP 6706983B2 JP 2016137957 A JP2016137957 A JP 2016137957A JP 2016137957 A JP2016137957 A JP 2016137957A JP 6706983 B2 JP6706983 B2 JP 6706983B2
Authority
JP
Japan
Prior art keywords
substrate
mold
imprint
unit
abnormality
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016137957A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018010942A5 (enExample
JP2018010942A (ja
Inventor
勝利 酒井
勝利 酒井
服部　正
服部　　正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2016137957A priority Critical patent/JP6706983B2/ja
Priority to US15/637,421 priority patent/US10871709B2/en
Priority to KR1020170084715A priority patent/KR102172881B1/ko
Publication of JP2018010942A publication Critical patent/JP2018010942A/ja
Publication of JP2018010942A5 publication Critical patent/JP2018010942A5/ja
Application granted granted Critical
Publication of JP6706983B2 publication Critical patent/JP6706983B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/58—Measuring, controlling or regulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2007/00—Flat articles, e.g. films or sheets
    • B29L2007/002—Panels; Plates; Sheets

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2016137957A 2016-07-12 2016-07-12 インプリント装置及び物品の製造方法 Active JP6706983B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016137957A JP6706983B2 (ja) 2016-07-12 2016-07-12 インプリント装置及び物品の製造方法
US15/637,421 US10871709B2 (en) 2016-07-12 2017-06-29 Imprint apparatus and method of manufacturing article
KR1020170084715A KR102172881B1 (ko) 2016-07-12 2017-07-04 임프린트 장치 및 물품 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016137957A JP6706983B2 (ja) 2016-07-12 2016-07-12 インプリント装置及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2018010942A JP2018010942A (ja) 2018-01-18
JP2018010942A5 JP2018010942A5 (enExample) 2020-04-09
JP6706983B2 true JP6706983B2 (ja) 2020-06-10

Family

ID=60940918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016137957A Active JP6706983B2 (ja) 2016-07-12 2016-07-12 インプリント装置及び物品の製造方法

Country Status (3)

Country Link
US (1) US10871709B2 (enExample)
JP (1) JP6706983B2 (enExample)
KR (1) KR102172881B1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7091138B2 (ja) 2018-05-15 2022-06-27 キヤノン株式会社 インプリント装置、インプリント方法、および物品製造方法
JP7233174B2 (ja) 2018-05-17 2023-03-06 キヤノン株式会社 インプリント装置、物品製造方法、平坦化層形成装置、情報処理装置、及び、決定方法
JP7265824B2 (ja) * 2018-11-02 2023-04-27 キヤノン株式会社 成形装置および物品製造方法
JP7383450B2 (ja) 2019-10-23 2023-11-20 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法
JP7657631B2 (ja) * 2021-03-29 2025-04-07 キヤノン株式会社 評価装置、プログラム、評価方法、成形システム、および物品製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8945444B2 (en) * 2007-12-04 2015-02-03 Canon Nanotechnologies, Inc. High throughput imprint based on contact line motion tracking control
JP2010147294A (ja) * 2008-12-19 2010-07-01 Canon Inc 基板保持方法及び基板保持装置、それを用いた露光装置及びデバイスの製造方法
JP5665336B2 (ja) * 2009-04-06 2015-02-04 キヤノン株式会社 基板保持装置、及びそれを用いたリソグラフィー装置
JP5173944B2 (ja) * 2009-06-16 2013-04-03 キヤノン株式会社 インプリント装置及び物品の製造方法
JP5455583B2 (ja) 2009-11-30 2014-03-26 キヤノン株式会社 インプリント装置
WO2011118006A1 (ja) * 2010-03-25 2011-09-29 パイオニア株式会社 転写装置及び方法、並びにコンピュータプログラム
US20120261849A1 (en) * 2011-04-14 2012-10-18 Canon Kabushiki Kaisha Imprint apparatus, and article manufacturing method using same
JP6004738B2 (ja) 2011-09-07 2016-10-12 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
JP2014033050A (ja) * 2012-08-02 2014-02-20 Toshiba Corp インプリントシステム及びインプリント方法
US9269712B2 (en) * 2013-10-31 2016-02-23 Stmicroelectronics, Inc. Semiconductor device providing enhanced fin isolation and related methods
JP6315963B2 (ja) 2013-12-09 2018-04-25 キヤノン株式会社 インプリント装置、及び物品の製造方法
JP6413533B2 (ja) * 2014-09-16 2018-10-31 大日本印刷株式会社 物品の品質判別方法、物品の品質判別システムおよび物品の製造方法

Also Published As

Publication number Publication date
US20180017863A1 (en) 2018-01-18
KR102172881B1 (ko) 2020-11-02
KR20180007313A (ko) 2018-01-22
US10871709B2 (en) 2020-12-22
JP2018010942A (ja) 2018-01-18

Similar Documents

Publication Publication Date Title
JP6706983B2 (ja) インプリント装置及び物品の製造方法
US10751930B2 (en) Imprint apparatus, imprint method, and method of manufacturing article
US11833736B2 (en) Method of controlling imprint apparatus, imprint apparatus, and method of manufacturing article
US10583608B2 (en) Lithography apparatus, control method therefor, and method of manufacturing article
TWI545621B (zh) 壓印方法、壓印設備及製造裝置之方法
KR102330473B1 (ko) 임프린트 장치, 임프린트 방법, 물품 제조 방법, 성형 장치 및 성형 방법
US11681216B2 (en) Imprint apparatus, imprint method, article manufacturing method, molding apparatus, and molding method
US11462404B2 (en) Imprint apparatus and method of manufacturing article
US11567402B2 (en) Imprint apparatus, imprint method, and method of manufacturing article
JP6643022B2 (ja) インプリント装置、インプリント方法、異物検出方法および物品製造方法
JP7402672B2 (ja) 保持装置、リソグラフィ装置、および物品製造方法
US11693309B2 (en) Imprint apparatus, imprint method, and method for manufacturing article
JP2019054211A (ja) インプリント装置、および物品製造方法
KR102877962B1 (ko) 정보 처리 장치, 성형 장치, 성형 방법, 및 물품 제조 방법
JP7043199B2 (ja) インプリント方法、プログラム、インプリント装置及び物品の製造方法
JP7361831B2 (ja) 情報処理装置、成形装置、成形方法及び物品の製造方法
TWI906524B (zh) 資訊處理設備、成型設備、成型方法及物品製造方法
JP7566668B2 (ja) 装置、方法及び物品の製造方法
CN117301703A (zh) 评价装置、信息处理装置、存储介质、膜形成系统、物品制造方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190619

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200227

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200311

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200420

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200519

R151 Written notification of patent or utility model registration

Ref document number: 6706983

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151