JP6687033B2 - 導電性基板 - Google Patents

導電性基板 Download PDF

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Publication number
JP6687033B2
JP6687033B2 JP2017543247A JP2017543247A JP6687033B2 JP 6687033 B2 JP6687033 B2 JP 6687033B2 JP 2017543247 A JP2017543247 A JP 2017543247A JP 2017543247 A JP2017543247 A JP 2017543247A JP 6687033 B2 JP6687033 B2 JP 6687033B2
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Japan
Prior art keywords
layer
conductive substrate
copper
metal layer
blackening
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JP2017543247A
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English (en)
Japanese (ja)
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JPWO2017057262A1 (ja
Inventor
智治 渡邊
智治 渡邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
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Sumitomo Metal Mining Co Ltd
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Publication of JPWO2017057262A1 publication Critical patent/JPWO2017057262A1/ja
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5873—Removal of material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112—Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)
JP2017543247A 2015-09-30 2016-09-26 導電性基板 Active JP6687033B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015195199 2015-09-30
JP2015195199 2015-09-30
PCT/JP2016/078245 WO2017057262A1 (ja) 2015-09-30 2016-09-26 導電性基板

Publications (2)

Publication Number Publication Date
JPWO2017057262A1 JPWO2017057262A1 (ja) 2018-08-16
JP6687033B2 true JP6687033B2 (ja) 2020-04-22

Family

ID=58427471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017543247A Active JP6687033B2 (ja) 2015-09-30 2016-09-26 導電性基板

Country Status (5)

Country Link
JP (1) JP6687033B2 (zh)
KR (1) KR102533946B1 (zh)
CN (1) CN108027688B (zh)
TW (1) TWI730988B (zh)
WO (1) WO2017057262A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110545996B (zh) * 2017-04-17 2021-12-31 住友金属矿山株式会社 导电性基板
JP7323293B2 (ja) * 2019-02-12 2023-08-08 日東電工株式会社 導電性フィルムおよびタッチパネル
CN112735634B (zh) * 2021-01-11 2023-03-14 江苏软讯科技有限公司 一种具有金属网格的导电膜及其生产工艺

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002367428A (ja) * 2001-06-04 2002-12-20 Asahi Glass Co Ltd 着色透明導電膜形成用塗布液、着色透明導電膜付き基体およびその製造方法、ならびに表示装置
JP4086132B2 (ja) 2001-11-16 2008-05-14 株式会社ブリヂストン 透明導電性フィルムおよびタッチパネル
JP5192767B2 (ja) * 2006-09-28 2013-05-08 富士フイルム株式会社 導電膜の製造方法
WO2009078283A1 (ja) * 2007-12-14 2009-06-25 Ulvac, Inc. タッチパネル、タッチパネルの製造方法
JP5739742B2 (ja) * 2010-11-04 2015-06-24 日東電工株式会社 透明導電性フィルムおよびタッチパネル
JP5914036B2 (ja) * 2011-04-20 2016-05-11 日東電工株式会社 導電性積層フィルムの製造方法
JP6099875B2 (ja) * 2011-11-22 2017-03-22 東レ株式会社 積層体の製造方法
TWI554475B (zh) * 2011-12-09 2016-10-21 Nippon Catalytic Chem Ind A compound, a metal oxide particle, a method for producing the same, and a method for producing the same
JP5781428B2 (ja) * 2011-12-20 2015-09-24 日東電工株式会社 導電性フィルムおよび導電性フィルムロール
JP5531029B2 (ja) * 2012-01-05 2014-06-25 日東電工株式会社 導電性フィルム及び導電性フィルムロール
JP5826656B2 (ja) * 2012-02-06 2015-12-02 日東電工株式会社 導電性フィルムロールの製造方法
JP2013206315A (ja) 2012-03-29 2013-10-07 Toppan Printing Co Ltd フィルム状タッチパネルセンサー及びその製造方法
KR20150013293A (ko) * 2012-07-04 2015-02-04 닛뽕소다 가부시키가이샤 기능성 반사 방지 적층체
JP2014073642A (ja) * 2012-10-05 2014-04-24 Nippon Electric Glass Co Ltd 透明導電性ガラス基板、及びタッチパネル
JP6330818B2 (ja) * 2013-10-31 2018-05-30 住友金属鉱山株式会社 導電性基板、導電性基板の製造方法
JP6107637B2 (ja) * 2013-12-16 2017-04-05 住友金属鉱山株式会社 導電性基板の製造方法
JP2015164030A (ja) * 2014-01-31 2015-09-10 住友金属鉱山株式会社 導電性基板、積層導電性基板、導電性基板の製造方法、及び積層導電性基板の製造方法
JP6201804B2 (ja) * 2014-02-17 2017-09-27 住友金属鉱山株式会社 細線パターンの形成方法、及び導電性基板の製造方法

Also Published As

Publication number Publication date
KR102533946B1 (ko) 2023-05-17
CN108027688A (zh) 2018-05-11
TWI730988B (zh) 2021-06-21
CN108027688B (zh) 2021-04-13
WO2017057262A1 (ja) 2017-04-06
KR20180061171A (ko) 2018-06-07
TW201726381A (zh) 2017-08-01
JPWO2017057262A1 (ja) 2018-08-16

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