JP6666477B2 - 流体回路及び流体回路の動作構成要素 - Google Patents
流体回路及び流体回路の動作構成要素 Download PDFInfo
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- 239000012530 fluid Substances 0.000 title claims description 162
- 239000004020 conductor Substances 0.000 claims description 98
- 229920002313 fluoropolymer Polymers 0.000 claims description 78
- 239000004811 fluoropolymer Substances 0.000 claims description 78
- 229920001940 conductive polymer Polymers 0.000 claims description 39
- 238000009428 plumbing Methods 0.000 claims description 28
- 238000012545 processing Methods 0.000 claims description 17
- 230000008878 coupling Effects 0.000 claims description 9
- 238000010168 coupling process Methods 0.000 claims description 9
- 238000005859 coupling reaction Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 description 33
- 239000004813 Perfluoroalkoxy alkane Substances 0.000 description 30
- 229920011301 perfluoro alkoxyl alkane Polymers 0.000 description 30
- 239000000463 material Substances 0.000 description 17
- 239000002861 polymer material Substances 0.000 description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 12
- 210000002445 nipple Anatomy 0.000 description 12
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 9
- 239000004810 polytetrafluoroethylene Substances 0.000 description 9
- 230000003068 static effect Effects 0.000 description 8
- 239000004812 Fluorinated ethylene propylene Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 7
- 229920009441 perflouroethylene propylene Polymers 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 6
- 210000001503 joint Anatomy 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 230000006378 damage Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- -1 polytetrafluoroethylene Polymers 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- QHSJIZLJUFMIFP-UHFFFAOYSA-N ethene;1,1,2,2-tetrafluoroethene Chemical group C=C.FC(F)=C(F)F QHSJIZLJUFMIFP-UHFFFAOYSA-N 0.000 description 3
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 3
- 239000012811 non-conductive material Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920000767 polyaniline Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 229920007925 Ethylene chlorotrifluoroethylene (ECTFE) Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 210000002310 elbow joint Anatomy 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000009972 noncorrosive effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L25/00—Constructive types of pipe joints not provided for in groups F16L13/00 - F16L23/00 ; Details of pipe joints not otherwise provided for, e.g. electrically conducting or insulating means
- F16L25/01—Constructive types of pipe joints not provided for in groups F16L13/00 - F16L23/00 ; Details of pipe joints not otherwise provided for, e.g. electrically conducting or insulating means specially adapted for realising electrical conduction between the two pipe ends of the joint or between parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/16—Other self-supporting filtering material ; Other filtering material of organic material, e.g. synthetic fibres
- B01D39/1692—Other shaped material, e.g. perforated or porous sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
- B01D63/06—Tubular membrane modules
- B01D63/067—Tubular membrane modules with pleated membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
- B01D69/107—Organic support material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/30—Polyalkenyl halides
- B01D71/32—Polyalkenyl halides containing fluorine atoms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L47/00—Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics
- F16L47/04—Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics with a swivel nut or collar engaging the pipe
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2201/00—Details relating to filtering apparatus
- B01D2201/50—Means for dissipating electrostatic charges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/02—Types of fibres, filaments or particles, self-supporting or supported materials
- B01D2239/0241—Types of fibres, filaments or particles, self-supporting or supported materials comprising electrically conductive fibres or particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/04—Additives and treatments of the filtering material
- B01D2239/0471—Surface coating material
- B01D2239/0478—Surface coating material on a layer of the filter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/06—Filter cloth, e.g. knitted, woven non-woven; self-supported material
- B01D2239/065—More than one layer present in the filtering material
- B01D2239/0654—Support layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/44—Cartridge types
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/26—Electrical properties
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Filtering Materials (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
- Infusion, Injection, And Reservoir Apparatuses (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Filtration Of Liquid (AREA)
Description
本願に含められる図面は、本明細書に組み込まれ且つその一部をなす。これらは、本開示の実施形態を示し、説明と共に本開示の原理を説明するのに役立つ。図面は、特定の実施形態の例示にすぎず、本開示を限定しない。
図5は、コネクタ継手300を示し、これは、動作構成要素の本体部分308と当接し、外側に延びて首部領域316、ねじ山領域320及びニップル部分324を形成する肩部領域304を含む。配管328は、ニップル部分324によって受けられ、これは、特定の実施形態ではフレアテック(FLARETEK)(登録商標)継手として構成され得る。
第1項。流体供給部から処理ステージに向かう流体のための流路を画定する流体回路であって、複数の動作構成要素を含み、各動作構成要素は、そこを通る流体流通路を有する本体部分と、複数の配管コネクタ継手とを含み、動作構成要素は、動作構成要素に対してそのそれぞれの配管コネクタ継手において接続する複数の配管セグメントによって接続され、複数の配管セグメント及び動作構成要素は、流体回路を通る流路を提供し、各本体部分は、非導電フルオロポリマー部分を含み、非導電フルオロポリマー部分は、流体通路を画定し、且つそれぞれの複数の配管コネクタ継手の各々の端まで延び、各本体部分は、複数の配管コネクタ継手の各々間に延び、且つ非導電フルオロポリマー部分と一体である外側導体をさらに含み、複数の配管セグメントは、非導電フルオロポリマー配管部分と、非導電フルオロポリマー配管部分上で軸方向に延び、且つそれと一体である導電ポリマーのストリップとをそれぞれ含み、コネクタの各々は、本体部分のそれぞれの外側導体を、コネクタに接続された配管部分の導電ポリマーのストリップに導電的に接続するための架橋構成要素を有する、流体回路。
第4項。動作構成要素の本体部分の少なくとも1つは、それぞれの動作構成要素の本体部分の外側導体に導電的に接続される取付特徴部を含む、第1項〜第3項の何れか1つに記載の流体回路。
第8項。流体回路の動作構成要素であって、入口部分と出口部分との間に延びる流体流路を画定する非導電フルオロポリマー部分を含む本体部分を含み、本体部分は、非導電フルオロポリマー部分と一体である内側にないフルオロポリマー導体をさらに含み、内側にないフルオロポリマー導体は、入口部分と出口部分との間に延び、少なくとも入口部分は、導電部分を有する配管端を受け、且つ内側にないフルオロポリマー導体部分を配管端の導電部分に導電的に接続するように構成される、流体回路の動作構成要素。
第11項。入口部分は、雄のニップル部分とナットとを含み、雄のニップル部分は、ナットと係合するためのねじ山付き部分を有し、それにより、ナットは、動作構成要素の本体部分の内側にないフルオロポリマー導体及び入口部分の配管端の導電部分と導電的に係合し、それによって前記フルオロポリマー導体と配管端の導電部分とを導電的に接続する、第8項〜第10項の何れか1つに記載の流体回路の動作構成要素。
第15項。取付特徴部は、ねじ山付きボス、タブ及びねじ山付き穴の1つを含む、第14項に記載の流体回路の動作構成要素。
第22項。配管セグメントの導電ポリマーは、配管コネクタ継手において本体部分の導電経路に導電的に接続される、前述の項の何れか1つに記載の流体回路。
第24項。導電部分は、本体部分の外面の5〜10%を形成する、前述の項の何れか1つに記載の流体回路。
Claims (4)
- 流体供給部から処理ステージに向かう流体のための流路を画定する流体回路であって、
複数の動作構成要素を含み、各動作構成要素は、そこを通る流体流通路を有する本体部分と、複数の配管コネクタ継手とを含み、前記動作構成要素は、該動作構成要素に対してそのそれぞれの配管コネクタ継手において接続する複数の配管セグメントによって接続され、前記複数の配管セグメント及び動作構成要素は流体回路を通る流路を提供し、
各本体部分は、非導電フルオロポリマー部分を含み、前記非導電フルオロポリマー部分は、流体通路を画定し、且つ前記複数の配管コネクタ継手の各々の端まで延び、前記本体部分の各々は、前記複数の配管コネクタ継手の各々間に延び、且つ前記非導電フルオロポリマー部分と一体である外側導体をさらに含み、前記複数の配管セグメントは、非導電フルオロポリマー配管部分と、前記非導電フルオロポリマー配管部分上で軸方向に延び、且つそれと一体である導電ポリマーのストリップとをそれぞれ含み、
前記コネクタの各々は、前記本体部分のそれぞれの外側導体を、前記コネクタに接続された前記配管部分の導電ポリマーのストリップに導電的に接続するための架橋構成要素を有する、流体回路。 - 流体供給部から処理ステージに向かう流体のための流路を画定する流体回路であって、
複数の動作構成要素を含み、前記複数の動作構成要素の各々は、そこを通る流体流通路を有する本体部分と、複数の配管コネクタ継手とを含み、前記動作構成要素は、該動作構成要素に対してそのそれぞれの配管コネクタ継手において接続する複数の配管セグメントによって相互接続され、前記複数の配管セグメント及び動作構成要素は、流体回路を通る流路を提供し、
それぞれの動作構成要素の本体部分は、非導電フルオロポリマー部分を含み、前記非導電フルオロポリマー本体部分は、前記流体流通路を画定し、それぞれの動作構成要素の本体部分は、前記非導電フルオロポリマー部分と一体であり、且つ前記流体流通路から外側に変位された導電部分をさらに含み、前記導電部分は、該導電部分に対する外側に露出されたコネクタを有し、前記複数の動作構成要素の各々は、相互に導電的に接続される、流体回路。 - 流体回路の動作構成要素であって、
入口部分と出口部分との間に延びる流体流路を画定する非導電フルオロポリマー部分を含む本体部分を含み、前記本体部分は、前記非導電フルオロポリマー部分と一体である内側にないフルオロポリマー導体をさらに含み、前記内側にないフルオロポリマー導体は、前記入口部分と前記出口部分との間に延び、少なくとも前記入口部分は、導電部分を有する配管端を受け、且つ前記内側にないフルオロポリマー導体部分を前記配管端の導電部分に導電的に接続するように構成される、流体回路の動作構成要素。 - 流体回路の動作構成要素であって、
本体部分と少なくとも2つのコネクタ部分とを含み、前記本体部分は、前記少なくとも2つのコネクタ部分間に延びる流体流路を画定する非導電フルオロポリマー部分を含み、前記本体部分は、前記少なくとも2つのコネクタ部分間に延びる内側にないフルオロポリマー導体をさらに含み、各コネクタ部分は、導電部分を有する配管端を受け、且つ前記内側にないフルオロポリマー導体部分を前記配管端の導電部分に導電的に接続するように構成され、前記非導電フルオロポリマー部分及び前記フルオロポリマー導体部分の一方は、前記非導電フルオロポリマー部分及び前記フルオロポリマー導体部分の他方の上にオーバモールドされる、流体回路の動作構成要素。
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US201662344168P | 2016-06-01 | 2016-06-01 | |
US201662344171P | 2016-06-01 | 2016-06-01 | |
US62/344,171 | 2016-06-01 | ||
US62/344,168 | 2016-06-01 | ||
PCT/US2017/035213 WO2017210293A1 (en) | 2016-06-01 | 2017-05-31 | Fluid circuit with integrated electrostatic discharge mitigation |
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JP2018562365A Active JP6750043B2 (ja) | 2016-06-01 | 2017-05-31 | 導電性フィルター装置 |
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US (3) | US20190091617A1 (ja) |
JP (2) | JP6666477B2 (ja) |
KR (2) | KR102193491B1 (ja) |
CN (2) | CN109195682A (ja) |
DE (2) | DE112017002783T5 (ja) |
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ITUB20159777A1 (it) * | 2015-12-30 | 2017-06-30 | Bmc Srl | Filtro aria provvisto di un dispositivo riscaldatore |
SG11202010624WA (en) * | 2018-05-07 | 2020-11-27 | Entegris Inc | Fluid circuit with integrated electrostatic discharge mitigation |
CN116989192A (zh) * | 2018-09-27 | 2023-11-03 | 恩特格里斯公司 | 静电耗散性含氟聚合物复合物及由其所形成的物品 |
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JP2019523848A (ja) | 2019-08-29 |
TW201805054A (zh) | 2018-02-16 |
US20190145560A1 (en) | 2019-05-16 |
WO2017210293A1 (en) | 2017-12-07 |
TWI645889B (zh) | 2019-01-01 |
JP6750043B2 (ja) | 2020-09-02 |
TW201805053A (zh) | 2018-02-16 |
TWI644712B (zh) | 2018-12-21 |
JP2019520197A (ja) | 2019-07-18 |
KR20190012202A (ko) | 2019-02-08 |
KR20190014545A (ko) | 2019-02-12 |
DE112017002783T5 (de) | 2019-02-21 |
US20220307634A1 (en) | 2022-09-29 |
US11384879B2 (en) | 2022-07-12 |
WO2017210291A2 (en) | 2017-12-07 |
DE112017002800T5 (de) | 2019-04-04 |
DE112017002800B4 (de) | 2023-05-17 |
CN109195682A (zh) | 2019-01-11 |
KR102319767B1 (ko) | 2021-11-02 |
US20190091617A1 (en) | 2019-03-28 |
CN109312883A (zh) | 2019-02-05 |
CN109312883B (zh) | 2021-03-19 |
KR102193491B1 (ko) | 2020-12-22 |
WO2017210291A3 (en) | 2018-01-04 |
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