JP6663492B2 - 太陽電池、太陽電池の製造方法及び太陽電池の製造システム - Google Patents
太陽電池、太陽電池の製造方法及び太陽電池の製造システム Download PDFInfo
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Description
前記第一主表面に、前記第一導電型と同じ導電型を有する第一導電型層を形成する装置と、
前記第一主表面に位置する第一導電型層上に第一集電電極を形成する装置と、
前記第一主表面に位置する第二導電型層上に第二集電電極を形成する装置とを有する太陽電池の製造システムであって、
前記第二導電型を有する第二導電型層を形成する装置において、前記半導体基板の側面に前記第二導電型を有する第二導電型層を、前記第一主表面に位置する第二導電型層と連続して形成することにより、前記第二導電型を有する第二導電型層が前記第一主表面から前記側面にかけて連続して形成された太陽電池を製造することを特徴とする太陽電池の製造システムを提供する。
以下、本発明の太陽電池について、図面を用いて説明するが、本発明はこれに限定されるものではない。
以下に、本発明の太陽電池の製造方法の一例を、第一導電型を有する半導体基板がN型シリコン基板である場合を例にとって、図2を用いて説明するが、本発明はこれに限定されるものではない。
厚さ200μm、比抵抗1Ω・cmの、リンドープ{100}N型アズカットシリコン基板10枚に対し、熱濃水酸化カリウム水溶液によりダメージ層を除去後、72℃の水酸化カリウム/2−プロパノール水溶液中に浸漬しテクスチャ形成を行い、引き続き75℃に加熱した塩酸/過酸化水素混合溶液中で洗浄を行った。
塗布剤であるホウ酸・ポリビニルアルコール水溶液を裏面上にスピン塗布する際のスピン回転数を1分あたり4000回転とした以外は、実施例と同様に太陽電池を作製した。比較例においては、スピン塗布した際に受光面及び側面に塗布剤の回り込みは確認されなかった。そのため、エミッタ層は裏面のみに形成されていた。
Claims (8)
- 第一導電型を有する半導体基板を備え、
該基板の第一主表面に、前記第一導電型と同じ導電型を有する第一導電型層及び前記第一導電型と反対の第二導電型を有する第二導電型層を備え、
前記第一主表面に位置する第一導電型層上に第一集電電極を備え、
前記第一主表面に位置する第二導電型層上に第二集電電極を備える太陽電池であって、
前記半導体基板の側面には前記第二導電型を有する第二導電型層が、前記第一主表面に位置する第二導電型層と連続して形成されており、
前記半導体基板の第二主表面には外周部のみに前記第二導電型を有する第二導電型層が、前記半導体基板の側面を介して前記第一主表面に位置する第二導電型層と連続して形成されていることを特徴とする太陽電池。 - 前記第一主表面の最外周端から最も近くに位置する電極が前記第二集電電極であることを特徴とする請求項1に記載の太陽電池。
- 第一導電型を有する半導体基板の第一主表面に、前記第一導電型と反対の第二導電型を有する第二導電型層を形成する工程と、
前記第一主表面に、前記第一導電型と同じ導電型を有する第一導電型層を形成する工程と、
前記第一主表面に位置する第一導電型層上に第一集電電極を形成する工程と、
前記第一主表面に位置する第二導電型層上に第二集電電極を形成する工程とを有する太陽電池の製造方法であって、
前記第二導電型を有する第二導電型層を形成する工程において、前記半導体基板の側面及び前記半導体基板の第二主表面の外周部のみに前記第二導電型を有する第二導電型層を、前記第一主表面に位置する第二導電型層と連続して形成することにより、前記第二導電型を有する第二導電型層が前記第一主表面から前記側面にかけて連続して形成された太陽電池を製造することを特徴とする太陽電池の製造方法。 - 前記第二導電型を有する第二導電型層を形成する工程において、前記第一主表面に位置する第二導電型層と前記側面に位置する第二導電型層とを、塗布拡散処理によって形成し、該塗布拡散処理は一度の塗布ステップ及び拡散熱処理ステップからなることを特徴とする請求項3に記載の太陽電池の製造方法。
- 前記第二導電型を有する第二導電型層を形成する工程において、前記第一主表面に位置する第二導電型層と前記側面に位置する第二導電型層とを、前記第一導電型を有する半導体基板を2枚重ね合わせた状態で気相拡散熱処理することによって形成することを特徴とする請求項3に記載の太陽電池の製造方法。
- 第一導電型を有する半導体基板の第一主表面に、前記第一導電型と反対の第二導電型を有する第二導電型層を形成する装置と、
前記第一主表面に、前記第一導電型と同じ導電型を有する第一導電型層を形成する装置と、
前記第一主表面に位置する第一導電型層上に第一集電電極を形成する装置と、
前記第一主表面に位置する第二導電型層上に第二集電電極を形成する装置とを有する太陽電池の製造システムであって、
前記第二導電型を有する第二導電型層を形成する装置において、前記半導体基板の側面及び前記半導体基板の第二主表面の外周部のみに前記第二導電型を有する第二導電型層を、前記第一主表面に位置する第二導電型層と連続して形成することにより、前記第二導電型を有する第二導電型層が前記第一主表面から前記側面にかけて連続して形成された太陽電池を製造することを特徴とする太陽電池の製造システム。 - 前記第二導電型を有する第二導電型層を形成する装置において、前記第一主表面に位置する第二導電型層と前記側面に位置する第二導電型層とを、塗布拡散処理によって形成し、該塗布拡散処理は一度の塗布ステップ及び拡散熱処理ステップからなることを特徴とする請求項6に記載の太陽電池の製造システム。
- 前記第二導電型を有する第二導電型層を形成する装置において、前記第一主表面に位置する第二導電型層と前記側面に位置する第二導電型層とを、前記第一導電型を有する半導体基板を2枚重ね合わせた状態で気相拡散熱処理することによって形成することを特徴とする請求項6に記載の太陽電池の製造システム。
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