JP6654741B1 - 真空処理装置 - Google Patents
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Abstract
Description
図22に示すように、この真空処理装置101は、真空排気装置101aに接続された単一の真空雰囲気が形成される真空槽102を有している。
図23に示すように、基板保持器搬送機構103の一対の搬送駆動部材133には、それぞれ所定の間隔をおいて複数の第1の駆動部136が環状の搬送駆動部材133の搬送方向に対して外方側(以下、「搬送方向外方側」という。)に突出するように設けられている。
本発明は、前記搬送駆動部材がコンベヤチェーンである真空処理装置である。
本発明は、前記垂れ防止部材の第1の駆動部に、下方に延び前記基板保持器の第1の被駆動部と接触して当該第1の被駆動部を搬送方向に駆動する駆動面が設けられ、前記ガイド部に、第2の搬送方向に向って斜め上方に延びるように形成された上方傾斜部が設けられている真空処理装置である。
本発明は、前記第1及び第2の処理領域が、真空中で成膜を行う真空処理装置である。
本発明は、前記基板保持器は、前記第1及び第2の搬送方向に対して直交する方向に複数の成膜対象基板を並べて保持するように構成されている真空処理装置である。
図1は、本発明に係る真空処理装置の実施の形態の全体を示す概略構成図である。
また、本実施の形態においては、基板保持器11が当該搬送方向に対して直交する方向に複数の基板10を並べて保持するように構成されていることから、従来技術のような基板の搬送方向に複数の基板を並べて保持する基板保持器を搬送して処理を行う場合と比較して、基板保持器の長さ及びこれに伴う余剰スペースを削減することができるので、真空処理装置のより省スペース化を達成することができる。
2…真空槽
3…基板保持器搬送機構
4…第1の処理領域
4T…スパッタ源
5…第2の処理領域
5T…スパッタ源
6…基板搬入搬出機構
10…基板
11…基板保持器
12…第1の被駆動部
13…第2の被駆動部
17…ガイド部
17a…走行部
17b…上方傾斜部
17c…接触解除部
30A…基板保持器導入部
30B…搬送折り返し部
30C…基板保持器排出部
31…第1の駆動輪
32…第2の駆動輪
33…搬送駆動部材(搬送経路)
33a…往路側搬送部(第1の搬送部)
33b…折り返し部
33c…復路側搬送部(第2の搬送部)
35…垂れ防止部材
36…第1の駆動部
36a…第1の突部
36b…第2の突部
36e…駆動面
40…方向転換機構
41…第1のガイド部材
42…第2のガイド部材
43…第3のガイド部材
45…搬送駆動部材
46…第2の駆動部
51…第1の方向転換経路
52…第2の方向転換経路
Claims (5)
- 単一の真空雰囲気が形成される真空槽と、
前記真空槽内に設けられ、基板保持器に保持された基板上に所定の真空処理を行う第1及び第2の処理領域と、
鉛直面に対する投影形状が一連の環状となるように形成され、前記基板保持器を搬送する搬送経路と、
第1及び第2の被駆動部を有する複数の前記基板保持器を前記搬送経路に沿って搬送する基板保持器搬送機構とを備え、
前記搬送経路は、導入された前記基板保持器を水平にした状態で前記搬送経路に沿って第1の搬送方向に搬送する第1の搬送部と、前記基板保持器を水平にした状態で前記搬送経路に沿って前記第1の搬送方向と反対方向の第2の搬送方向に搬送して排出する第2の搬送部と、前記基板保持器を前記第1の搬送部から前記第2の搬送部に向って折り返して搬送する搬送折り返し部とを有し、前記第1の搬送部が、前記第1及び第2の処理領域のうち一方を通過し、かつ、前記第2の搬送部が、前記第1及び第2の処理領域のうち他方を通過するように構成され、
前記基板保持器搬送機構は、前記基板保持器の第1の被駆動部と接触して当該基板保持器を前記搬送経路に沿って駆動する複数の第1の駆動部を当該搬送経路の搬送方向に対して外方側に有し、
前記搬送経路の搬送折り返し部の近傍に、前記基板保持器の第2の被駆動部と接触して当該基板保持器を前記第1及び第2の搬送方向にそれぞれ駆動する複数の第2の駆動部と、前記基板保持器の第1及び第2の被駆動部を当該基板保持器を前記第1の搬送方向から前記第2の搬送方向へ方向転換するようにそれぞれ案内して搬送するための第1及び第2の方向転換経路とを有する方向転換機構が設けられ、
前記基板保持器搬送機構の第1の駆動部と前記方向転換機構の第2の駆動部とを同期して動作させ、前記基板保持器の第1及び第2の被駆動部を前記方向転換機構の第1及び第2の方向転換経路に沿ってそれぞれ案内して搬送することにより、前記基板保持器を上下関係を維持した状態で前記搬送経路の第1の搬送部から第2の搬送部に受け渡すように構成され、
前記基板保持器搬送機構の第1の駆動部に組み付けられて構成され、前記搬送方向に対して外方側の部分に、当該搬送方向に対して直交する方向に延びる回転軸線を中心として回転可能な走行ローラを有し、前記搬送経路の第2の搬送部を構成する搬送駆動部材の垂れを防止する垂れ防止部材が設けられるとともに、
前記基板保持器搬送機構の下方側に位置する前記搬送経路の第2の搬送部の下方に、前記第2の搬送方向に延びるガイド部が設けられ、
前記垂れ防止部材は、前記走行ローラが前記ガイド部に案内支持された状態で前記搬送経路の第2の搬送部に沿って走行し、かつ、前記基板保持器搬送機構の第1の駆動部が前記基板保持器の第1の被駆動部と接触して当該基板保持器を前記搬送経路に沿って第2の搬送方向へ駆動するように構成されている真空処理装置。 - 前記搬送駆動部材がコンベヤチェーンである請求項1記載の真空処理装置。
- 前記垂れ防止部材の第1の駆動部に、下方に延び前記基板保持器の第1の被駆動部と接触して当該第1の被駆動部を搬送方向に駆動する駆動面が設けられ、
前記ガイド部に、第2の搬送方向に向って斜め上方に延びるように形成された上方傾斜部が設けられている請求項1又は2のいずれか1項記載の真空処理装置。 - 前記第1及び第2の処理領域が、真空中で成膜を行うものである請求項1又は2のいずれか1項記載の真空処理装置。
- 前記基板保持器は、前記第1及び第2の搬送方向に対して直交する方向に複数の成膜対象基板を並べて保持するように構成されている請求項1乃至4のいずれか1項記載の真空処理装置。
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JP2009114502A (ja) * | 2007-11-07 | 2009-05-28 | Shin Meiwa Ind Co Ltd | 真空成膜装置 |
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