JP6645012B2 - 蒸着材料 - Google Patents
蒸着材料 Download PDFInfo
- Publication number
- JP6645012B2 JP6645012B2 JP2015015379A JP2015015379A JP6645012B2 JP 6645012 B2 JP6645012 B2 JP 6645012B2 JP 2015015379 A JP2015015379 A JP 2015015379A JP 2015015379 A JP2015015379 A JP 2015015379A JP 6645012 B2 JP6645012 B2 JP 6645012B2
- Authority
- JP
- Japan
- Prior art keywords
- zro
- tio
- powder
- refractive index
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 title claims description 48
- 238000001704 evaporation Methods 0.000 title claims description 6
- 230000008020 evaporation Effects 0.000 title claims description 6
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 37
- 238000007740 vapor deposition Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 239000008188 pellet Substances 0.000 claims description 2
- 239000000843 powder Substances 0.000 description 41
- 239000010408 film Substances 0.000 description 11
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 238000010304 firing Methods 0.000 description 7
- 238000001771 vacuum deposition Methods 0.000 description 5
- 238000000869 ion-assisted deposition Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
Description
(蒸着材料)
(蒸着材料の製造方法)
(実施例1)
(実施例2)
(実施例3)
(実施例4)
(実施例5)
(実施例6)
(実施例7)
(実施例8)
(実施例9)
(実施例10)
(比較例1)
(比較例2)
(評価)
Claims (3)
- ZrO2、Ta2O5およびTiO2からなり、
Ta2O5/ZrO2の質量比が、0.8以上2.33以下であり、
TiO2/(ZrO2+Ta2O5+TiO2)の質量比が、0.01以上0.07以下であることを特徴とする蒸着材料。 - ペレット形状を有する請求項1に記載の蒸着材料。
- 電子線加熱方式により蒸着材料を使って光学薄膜を成膜したとき、その光学薄膜における屈折率の最大値と最小値の差から求めた屈折率変動幅が、0.032未満である請求項1または2に記載の蒸着材料。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015015379A JP6645012B2 (ja) | 2015-01-29 | 2015-01-29 | 蒸着材料 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015015379A JP6645012B2 (ja) | 2015-01-29 | 2015-01-29 | 蒸着材料 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016138327A JP2016138327A (ja) | 2016-08-04 |
JP6645012B2 true JP6645012B2 (ja) | 2020-02-12 |
Family
ID=56558978
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015015379A Active JP6645012B2 (ja) | 2015-01-29 | 2015-01-29 | 蒸着材料 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6645012B2 (ja) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH527916A (de) * | 1970-04-13 | 1972-09-15 | Balzers Patent Beteilig Ag | Verfahren zur Herstellung einer hochbrechenden lichtdurchlässigen Oxidschicht |
JPH04110918A (ja) * | 1990-08-31 | 1992-04-13 | Hoya Corp | 光学部品 |
JP3438738B2 (ja) * | 1993-03-31 | 2003-08-18 | 日本ゼオン株式会社 | 光学部材、及び光学部品 |
JP4043686B2 (ja) * | 2000-03-30 | 2008-02-06 | オリンパス株式会社 | 反射防止膜付きレンズ及び内視鏡 |
JP2002082208A (ja) * | 2000-09-08 | 2002-03-22 | Olympus Optical Co Ltd | 反射防止膜およびこれを有する光学部品 |
FR2860790B1 (fr) * | 2003-10-09 | 2006-07-28 | Snecma Moteurs | Cible destinee a etre evaporee sous faisceau d'electrons, son procede de fabrication, barriere thermique et revetement obtenus a partir d'une cible, et piece mecanique comportant un tel revetement |
JP2006284778A (ja) * | 2005-03-31 | 2006-10-19 | Hoya Corp | スプラッシュ抑制方法およびプラスチックレンズの製造方法 |
-
2015
- 2015-01-29 JP JP2015015379A patent/JP6645012B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2016138327A (ja) | 2016-08-04 |
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