JP6641944B2 - モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ - Google Patents

モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ Download PDF

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Publication number
JP6641944B2
JP6641944B2 JP2015236648A JP2015236648A JP6641944B2 JP 6641944 B2 JP6641944 B2 JP 6641944B2 JP 2015236648 A JP2015236648 A JP 2015236648A JP 2015236648 A JP2015236648 A JP 2015236648A JP 6641944 B2 JP6641944 B2 JP 6641944B2
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Japan
Prior art keywords
substrate
piezoelectric
motor
wafer
longitudinal direction
Prior art date
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Expired - Fee Related
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JP2015236648A
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English (en)
Japanese (ja)
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JP2017103953A (ja
JP2017103953A5 (enExample
Inventor
智明 ▲高▼橋
智明 ▲高▼橋
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Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2015236648A priority Critical patent/JP6641944B2/ja
Priority to CN201611095429.9A priority patent/CN106849739B/zh
Priority to US15/367,524 priority patent/US10644222B2/en
Publication of JP2017103953A publication Critical patent/JP2017103953A/ja
Publication of JP2017103953A5 publication Critical patent/JP2017103953A5/ja
Application granted granted Critical
Publication of JP6641944B2 publication Critical patent/JP6641944B2/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B23/00—Pumping installations or systems
    • F04B23/02—Pumping installations or systems having reservoirs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/082—Machines, pumps, or pumping installations having flexible working members having tubular flexible members the tubular flexible member being pressed against a wall by a number of elements, each having an alternating movement in a direction perpendicular to the axes of the tubular member and each having its own driving mechanism
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Robotics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2015236648A 2015-12-03 2015-12-03 モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ Expired - Fee Related JP6641944B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015236648A JP6641944B2 (ja) 2015-12-03 2015-12-03 モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ
CN201611095429.9A CN106849739B (zh) 2015-12-03 2016-12-01 马达用压电驱动装置及其制造方法、马达、机器人以及泵
US15/367,524 US10644222B2 (en) 2015-12-03 2016-12-02 Piezoelectric drive apparatus for motor and method for manufacturing the same, motor, robot, and pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015236648A JP6641944B2 (ja) 2015-12-03 2015-12-03 モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Publications (3)

Publication Number Publication Date
JP2017103953A JP2017103953A (ja) 2017-06-08
JP2017103953A5 JP2017103953A5 (enExample) 2018-11-15
JP6641944B2 true JP6641944B2 (ja) 2020-02-05

Family

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JP2015236648A Expired - Fee Related JP6641944B2 (ja) 2015-12-03 2015-12-03 モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Country Status (3)

Country Link
US (1) US10644222B2 (enExample)
JP (1) JP6641944B2 (enExample)
CN (1) CN106849739B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6406538B2 (ja) * 2014-06-17 2018-10-17 Toto株式会社 トイレ装置用のリモコン装置
JP7031244B2 (ja) * 2017-11-17 2022-03-08 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
KR102739123B1 (ko) * 2018-12-28 2024-12-06 삼성전자주식회사 공진기 및 그 제조방법과, 공진기를 포함하는 스트레인 센서 및 센서 어레이
CN111472964B (zh) * 2019-01-24 2022-02-11 研能科技股份有限公司 微机电泵模块
CN111472965B (zh) * 2019-01-24 2022-02-11 研能科技股份有限公司 微机电泵模块
CN111502968B (zh) * 2019-01-31 2022-06-28 研能科技股份有限公司 微机电泵模块
US11872691B2 (en) * 2019-04-24 2024-01-16 Illinois Institute Of Technology Soft, adaptive, self-cleaning electrostatic gecko-like adhesive and gripper

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62299093A (ja) 1986-06-18 1987-12-26 Nippon Denso Co Ltd 積層型圧電体の製造方法
JPH02164284A (ja) 1988-04-12 1990-06-25 Tomio Kotaki 超音波アクチュエータ
JPH06167664A (ja) 1992-11-27 1994-06-14 Omron Corp 振動子及び光スキャナ
JPH10173476A (ja) 1996-12-06 1998-06-26 Riken Corp 音叉型圧電振動子
JPH11227198A (ja) 1998-02-18 1999-08-24 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法
DE10063265A1 (de) * 1999-12-20 2001-07-05 Murata Manufacturing Co Äußeres Überzugsubstrat für ein elektronisches Bauteil und ein piezoelektrisches Resonanzbauteil
JP2002067307A (ja) 2000-08-24 2002-03-05 Ricoh Co Ltd 液滴吐出ヘッド
JP3972790B2 (ja) 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP2004320979A (ja) 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP2005237102A (ja) * 2004-02-19 2005-09-02 Seiko Epson Corp 圧電アクチュエータ、時計及び電子機器
CN101238598B (zh) * 2005-06-15 2012-07-11 京瓷株式会社 层叠型压电元件及使用其的喷射装置
JP2006353030A (ja) 2005-06-17 2006-12-28 Seiko Epson Corp 駆動機構、及びこれを備える装置
JP2008227123A (ja) 2007-03-13 2008-09-25 Seiko Epson Corp 圧電振動体の製造方法および製造装置
WO2009128245A1 (ja) * 2008-04-17 2009-10-22 株式会社村田製作所 積層型圧電素子及び圧電ポンプ
JP5125811B2 (ja) * 2008-06-30 2013-01-23 セイコーエプソン株式会社 チューブユニット、制御ユニット、及びこれらを備えるマイクロポンプ
JP5776270B2 (ja) * 2011-03-29 2015-09-09 セイコーエプソン株式会社 圧電アクチュエーター、モーター、ロボットハンドおよびロボット
JP2014192797A (ja) 2013-03-28 2014-10-06 Seiko Epson Corp 振動片、振動素子、振動子、電子機器、および移動体
JP6164044B2 (ja) * 2013-10-30 2017-07-19 セイコーエプソン株式会社 圧電モーター、ロボットハンド、ロボット、指アシスト装置、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置
JP6399386B2 (ja) * 2014-07-02 2018-10-03 株式会社リコー 電気機械変換部材の製造方法、液滴吐出ヘッドの製造方法及び画像形成装置の製造方法

Also Published As

Publication number Publication date
JP2017103953A (ja) 2017-06-08
CN106849739A (zh) 2017-06-13
US10644222B2 (en) 2020-05-05
CN106849739B (zh) 2020-09-01
US20170162780A1 (en) 2017-06-08

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