CN106849739B - 马达用压电驱动装置及其制造方法、马达、机器人以及泵 - Google Patents
马达用压电驱动装置及其制造方法、马达、机器人以及泵 Download PDFInfo
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- CN106849739B CN106849739B CN201611095429.9A CN201611095429A CN106849739B CN 106849739 B CN106849739 B CN 106849739B CN 201611095429 A CN201611095429 A CN 201611095429A CN 106849739 B CN106849739 B CN 106849739B
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Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0015—Driving devices, e.g. vibrators using only bending modes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B23/00—Pumping installations or systems
- F04B23/02—Pumping installations or systems having reservoirs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
- F04B43/082—Machines, pumps, or pumping installations having flexible working members having tubular flexible members the tubular flexible member being pressed against a wall by a number of elements, each having an alternating movement in a direction perpendicular to the axes of the tubular member and each having its own driving mechanism
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
- F04B43/09—Pumps having electric drive
- F04B43/095—Piezoelectric drive
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
- H02N2/004—Rectangular vibrators
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Robotics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015236648A JP6641944B2 (ja) | 2015-12-03 | 2015-12-03 | モーター用圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ |
| JP2015-236648 | 2015-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106849739A CN106849739A (zh) | 2017-06-13 |
| CN106849739B true CN106849739B (zh) | 2020-09-01 |
Family
ID=58798702
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611095429.9A Active CN106849739B (zh) | 2015-12-03 | 2016-12-01 | 马达用压电驱动装置及其制造方法、马达、机器人以及泵 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10644222B2 (enExample) |
| JP (1) | JP6641944B2 (enExample) |
| CN (1) | CN106849739B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6406538B2 (ja) * | 2014-06-17 | 2018-10-17 | Toto株式会社 | トイレ装置用のリモコン装置 |
| JP7031244B2 (ja) * | 2017-11-17 | 2022-03-08 | セイコーエプソン株式会社 | 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
| KR102739123B1 (ko) * | 2018-12-28 | 2024-12-06 | 삼성전자주식회사 | 공진기 및 그 제조방법과, 공진기를 포함하는 스트레인 센서 및 센서 어레이 |
| CN111472964B (zh) * | 2019-01-24 | 2022-02-11 | 研能科技股份有限公司 | 微机电泵模块 |
| CN111472965B (zh) * | 2019-01-24 | 2022-02-11 | 研能科技股份有限公司 | 微机电泵模块 |
| CN111502968B (zh) * | 2019-01-31 | 2022-06-28 | 研能科技股份有限公司 | 微机电泵模块 |
| US11872691B2 (en) * | 2019-04-24 | 2024-01-16 | Illinois Institute Of Technology | Soft, adaptive, self-cleaning electrostatic gecko-like adhesive and gripper |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1303172A (zh) * | 1999-12-20 | 2001-07-11 | 株式会社村田制作所 | 电子部件的外部涂层基底及压电谐振部件 |
| CN101238598A (zh) * | 2005-06-15 | 2008-08-06 | 京瓷株式会社 | 层叠型压电元件及使用其的喷射装置 |
| CN101842916A (zh) * | 2008-04-17 | 2010-09-22 | 株式会社村田制作所 | 层叠型压电元件及压电泵 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62299093A (ja) | 1986-06-18 | 1987-12-26 | Nippon Denso Co Ltd | 積層型圧電体の製造方法 |
| JPH02164284A (ja) | 1988-04-12 | 1990-06-25 | Tomio Kotaki | 超音波アクチュエータ |
| JPH06167664A (ja) | 1992-11-27 | 1994-06-14 | Omron Corp | 振動子及び光スキャナ |
| JPH10173476A (ja) | 1996-12-06 | 1998-06-26 | Riken Corp | 音叉型圧電振動子 |
| JPH11227198A (ja) | 1998-02-18 | 1999-08-24 | Seiko Epson Corp | インクジェット式記録ヘッド及びその製造方法 |
| JP2002067307A (ja) | 2000-08-24 | 2002-03-05 | Ricoh Co Ltd | 液滴吐出ヘッド |
| JP3972790B2 (ja) | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP2004320979A (ja) | 2003-04-03 | 2004-11-11 | Seiko Epson Corp | 稼働装置および電気機器 |
| JP2005237102A (ja) * | 2004-02-19 | 2005-09-02 | Seiko Epson Corp | 圧電アクチュエータ、時計及び電子機器 |
| JP2006353030A (ja) | 2005-06-17 | 2006-12-28 | Seiko Epson Corp | 駆動機構、及びこれを備える装置 |
| JP2008227123A (ja) | 2007-03-13 | 2008-09-25 | Seiko Epson Corp | 圧電振動体の製造方法および製造装置 |
| JP5125811B2 (ja) * | 2008-06-30 | 2013-01-23 | セイコーエプソン株式会社 | チューブユニット、制御ユニット、及びこれらを備えるマイクロポンプ |
| JP5776270B2 (ja) * | 2011-03-29 | 2015-09-09 | セイコーエプソン株式会社 | 圧電アクチュエーター、モーター、ロボットハンドおよびロボット |
| JP2014192797A (ja) | 2013-03-28 | 2014-10-06 | Seiko Epson Corp | 振動片、振動素子、振動子、電子機器、および移動体 |
| JP6164044B2 (ja) * | 2013-10-30 | 2017-07-19 | セイコーエプソン株式会社 | 圧電モーター、ロボットハンド、ロボット、指アシスト装置、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置 |
| JP6399386B2 (ja) * | 2014-07-02 | 2018-10-03 | 株式会社リコー | 電気機械変換部材の製造方法、液滴吐出ヘッドの製造方法及び画像形成装置の製造方法 |
-
2015
- 2015-12-03 JP JP2015236648A patent/JP6641944B2/ja not_active Expired - Fee Related
-
2016
- 2016-12-01 CN CN201611095429.9A patent/CN106849739B/zh active Active
- 2016-12-02 US US15/367,524 patent/US10644222B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1303172A (zh) * | 1999-12-20 | 2001-07-11 | 株式会社村田制作所 | 电子部件的外部涂层基底及压电谐振部件 |
| CN101238598A (zh) * | 2005-06-15 | 2008-08-06 | 京瓷株式会社 | 层叠型压电元件及使用其的喷射装置 |
| CN101842916A (zh) * | 2008-04-17 | 2010-09-22 | 株式会社村田制作所 | 层叠型压电元件及压电泵 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6641944B2 (ja) | 2020-02-05 |
| JP2017103953A (ja) | 2017-06-08 |
| CN106849739A (zh) | 2017-06-13 |
| US10644222B2 (en) | 2020-05-05 |
| US20170162780A1 (en) | 2017-06-08 |
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