JP6632331B2 - 反射光学素子及び露光装置 - Google Patents

反射光学素子及び露光装置 Download PDF

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JP6632331B2
JP6632331B2 JP2015215041A JP2015215041A JP6632331B2 JP 6632331 B2 JP6632331 B2 JP 6632331B2 JP 2015215041 A JP2015215041 A JP 2015215041A JP 2015215041 A JP2015215041 A JP 2015215041A JP 6632331 B2 JP6632331 B2 JP 6632331B2
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JP2017083789A5 (enExample
JP2017083789A (ja
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世治 桑原
世治 桑原
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Canon Inc
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JP2015215041A 2015-10-30 2015-10-30 反射光学素子及び露光装置 Active JP6632331B2 (ja)

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JP2017083789A5 JP2017083789A5 (enExample) 2018-12-13
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Publication number Priority date Publication date Assignee Title
CN111344609A (zh) * 2018-02-27 2020-06-26 株式会社岛津制作所 介电体多层膜镜
IL281070B2 (en) * 2018-08-27 2025-08-01 Materion Corp UV reflective mirrors for display manufacturing
WO2021021562A1 (en) * 2019-07-26 2021-02-04 Nike, Inc. Structurally-colored articles and methods for making and using structurally-colored articles
JP7612377B2 (ja) 2020-10-28 2025-01-14 キヤノン株式会社 光学部品および光学機器
KR20220157302A (ko) 2021-05-20 2022-11-29 캐논 가부시끼가이샤 막, 소자, 및 기기

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JPH0312605A (ja) * 1989-06-09 1991-01-21 Topcon Corp 紫外・可視二波長反射多層膜ミラー
JP3799696B2 (ja) * 1996-12-02 2006-07-19 株式会社ニコン エキシマレーザー用ミラー
JPH11311704A (ja) * 1998-02-26 1999-11-09 Nikon Corp 紫外光用ミラー

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