JP2017083789A5 - - Google Patents
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- JP2017083789A5 JP2017083789A5 JP2015215041A JP2015215041A JP2017083789A5 JP 2017083789 A5 JP2017083789 A5 JP 2017083789A5 JP 2015215041 A JP2015215041 A JP 2015215041A JP 2015215041 A JP2015215041 A JP 2015215041A JP 2017083789 A5 JP2017083789 A5 JP 2017083789A5
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- JP
- Japan
- Prior art keywords
- optical element
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- 230000003287 optical effect Effects 0.000 claims description 55
- 239000010408 film Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 13
- 239000012788 optical film Substances 0.000 claims description 13
- 238000010521 absorption reaction Methods 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 238000005286 illumination Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 20
- 235000012239 silicon dioxide Nutrition 0.000 claims 10
- 239000000377 silicon dioxide Substances 0.000 claims 10
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 4
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 4
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 4
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims 4
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 4
- 239000004408 titanium dioxide Substances 0.000 claims 2
- 230000003595 spectral effect Effects 0.000 description 30
- 230000000052 comparative effect Effects 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000001579 optical reflectometry Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015215041A JP6632331B2 (ja) | 2015-10-30 | 2015-10-30 | 反射光学素子及び露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015215041A JP6632331B2 (ja) | 2015-10-30 | 2015-10-30 | 反射光学素子及び露光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017083789A JP2017083789A (ja) | 2017-05-18 |
| JP2017083789A5 true JP2017083789A5 (enExample) | 2018-12-13 |
| JP6632331B2 JP6632331B2 (ja) | 2020-01-22 |
Family
ID=58710995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015215041A Active JP6632331B2 (ja) | 2015-10-30 | 2015-10-30 | 反射光学素子及び露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6632331B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111344609A (zh) * | 2018-02-27 | 2020-06-26 | 株式会社岛津制作所 | 介电体多层膜镜 |
| KR102774704B1 (ko) | 2018-08-27 | 2025-02-27 | 마테리온 코포레이션 | 디스플레이 제작을 위한 uv 반사 미러 |
| CN114206149A (zh) * | 2019-07-26 | 2022-03-18 | 耐克创新有限合伙公司 | 结构着色的物品以及用于制造和使用结构着色的物品的方法 |
| JP7612377B2 (ja) | 2020-10-28 | 2025-01-14 | キヤノン株式会社 | 光学部品および光学機器 |
| EP4092453A1 (en) | 2021-05-20 | 2022-11-23 | Canon Kabushiki Kaisha | Film, element, and equipment |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0312605A (ja) * | 1989-06-09 | 1991-01-21 | Topcon Corp | 紫外・可視二波長反射多層膜ミラー |
| JP3799696B2 (ja) * | 1996-12-02 | 2006-07-19 | 株式会社ニコン | エキシマレーザー用ミラー |
| JPH11311704A (ja) * | 1998-02-26 | 1999-11-09 | Nikon Corp | 紫外光用ミラー |
-
2015
- 2015-10-30 JP JP2015215041A patent/JP6632331B2/ja active Active
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