JP5926190B2 - Euvリソグラフィ用反射マスク - Google Patents
Euvリソグラフィ用反射マスク Download PDFInfo
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- 238000001900 extreme ultraviolet lithography Methods 0.000 title claims description 21
- 239000000758 substrate Substances 0.000 claims description 104
- 239000000463 material Substances 0.000 claims description 56
- 238000002310 reflectometry Methods 0.000 claims description 41
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 35
- 229910052710 silicon Inorganic materials 0.000 claims description 35
- 239000010703 silicon Substances 0.000 claims description 35
- 230000036961 partial effect Effects 0.000 claims description 34
- 229910052707 ruthenium Inorganic materials 0.000 claims description 25
- 230000004888 barrier function Effects 0.000 claims description 23
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 22
- 230000005855 radiation Effects 0.000 claims description 21
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 12
- 229910052750 molybdenum Inorganic materials 0.000 claims description 12
- 239000011733 molybdenum Substances 0.000 claims description 12
- 229910052580 B4C Inorganic materials 0.000 claims description 8
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 8
- 230000000737 periodic effect Effects 0.000 claims description 8
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910039444 MoC Inorganic materials 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- -1 ruthenium nitride Chemical class 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- LGLOITKZTDVGOE-UHFFFAOYSA-N boranylidynemolybdenum Chemical compound [Mo]#B LGLOITKZTDVGOE-UHFFFAOYSA-N 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 181
- 238000000034 method Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 238000000576 coating method Methods 0.000 description 5
- 238000005286 illumination Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 239000006096 absorbing agent Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- YPFBRNLUIFQCQL-UHFFFAOYSA-K tribromomolybdenum Chemical compound Br[Mo](Br)Br YPFBRNLUIFQCQL-UHFFFAOYSA-K 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
Description
基板/…/ (0.4 B4C 2.799 Mo 0.4 B4C 3.409 Si)*50/5.275 Si 0.4 B4C 2.0 Mo 1.5 Ru
基板/…/ (0.373 B4C 2.725 Si 0.373 B4C 4.601 Mo)*8/ (0.373 B4C 3.867 Mo 0.373 B4C 2.716 Si)*5/ (3.274 Si 0.373 B4C 3.216 Mo 0.373 B4C)*16/2.975 Si 0.373 B4C 2.0 Mo 1.5 Ru
基板/…/ (4.420 Si 0.373 B4C 2.185 Mo 0.373 B4C)*28/ (3.212 Si 0.373 B4C 2.009 Mo 0.373 B4C)*5/ (3.287 Si 0.373 B4C 2.979 Mo 0.373 B4C)*15/2.722 Si 0.373 B4C 1.866 Mo 1.340 Ru
基板/…/ (1.566 Si 0.373 B4C 5.285 Mo 0.373 B4C)*27/ (3.544 Si 0.373 B4C 2.663 Mo 0.373 B4C)*14/1.399 Si 0.373 B4C 1.866 Mo 1.340 Ru
を有するマスクに対しては、アポダイゼーションは、図12に示すように、10°及び12°の両入射角範囲に対して20%未満である。
基板/…/ (0.4 B4C 4.132 Mo 0.4 B4C 2.78Si)*6/ (3.608 Si 0.4 B4C 3.142 Mo 0.4 B4C)*16/ 2.027 Si 0.4 B4C 2 Mo 1.5 Ru
の構造を有し、基板から2番目に遠い部分系の最後のシリコン層の後に基板から最も遠い部分系の第1のシリコン層が続き、図13に示すように10°及び12°の入射角範囲に対するアポダイゼーションは全域で20%未満であり、反射率は全域で40%超である。
基板/…/ (5.4348 Si 0.4 B4C 3.0701 Ru 0.4 B4C)*23/ 5.7348 Si 0.4 B4C 3.0701 Ru
Claims (15)
- EUV域内の作業波長用に構成された該作業波長で屈折率の異なる実数部を有する少なくとも2つの材料の層を備える積層体を有する反射多層膜系を基板上に備えるEUVリソグラフィ用の反射マスクであって、前記反射多層膜系(V)は、中心波長を中心に±2%の幅の波長範囲内のEUV放射によって12°の最小及び最大入射角間の角度範囲で照射されるとき、アポダイゼーションが30%未満になるように構成され、
前記多層膜系は複数の部分系(P′,P″,P′′′)を備え、各部分系は少なくとも2つの個別層の積層体(P 1 ,P 2 ,P 3 )の周期的配列からなり、各部分系(P″,P′′′)内の積層体の層は隣接する部分系の積層体の厚さと異なる積層体の厚さ(d 2 、d 3 )をもたらす一定の厚さを有し、前記基板から最も遠い部分系(P′′′)の高い屈折率実数部を有する第1の層(H′′′)が前記基板から2番目に遠い部分系(P″)の高い屈折率実数部を有する最後の層(H″)に直接続くように構成されている、反射マスク。 - EUV域内の作業波長用に構成された該作業波長で屈折率の異なる実数部を有する少なくとも2つの材料の層を備える積層体を有する反射多層膜系を基板上に備えるEUVリソグラフィ用の反射マスクであって、前記反射多層膜系(V)は、中心波長を中心に±2%の幅の波長範囲内のEUV放射によって12°の最小及び最大入射角間の角度範囲で照射されるとき、反射率が30%以上になるように構成され、
前記多層膜系は複数の部分系(P′,P″,P′′′)を備え、各部分系は少なくとも2つの個別層の積層体(P 1 ,P 2 ,P 3 )の周期的配列からなり、各部分系(P″,P′′′)内の積層体の層は隣接する部分系の積層体の厚さと異なる積層体の厚さ(d 2 、d 3 )をもたらす一定の厚さを有し、前記基板から最も遠い部分系(P′′′)の高い屈折率実数部を有する第1の層(H′′′)が前記基板から2番目に遠い部分系(P″)の高い屈折率実数部を有する最後の層(H″)に直接続くように構成されている、反射マスク。 - 前記多層膜系(V)は13.0nm〜14.0nmの波長域で最大反射率になるように構成されている、請求項1又は2記載の反射マスク。
- 前記多層膜系は複数の部分系(P″,P′′′)を備え、各部分系は少なくとも2つの個別層の積層体(P 2 ,P 3 )の周期的配列からなり、各部分系(P″,P′′′)内の積層体の層は隣接する部分系の積層体の厚さと異なる積層体の厚さ(d 2 、d 3 )をもたらす一定の厚さを有し、前記基板から最も遠い部分系(P′′′)の層積層体(P 3 )の数(N 3 )が前記基板から2番目に遠い部分系(P″)の積層体(P 2 )の数(N 2 )より多い、請求項1−3のいずれかに記載の反射マスク。
- 前記多層膜系は複数の部分系(P″,P′′′)を備え、各部分系は少なくとも2つの個別層の積層体(P 2 ,P 3 )の周期的配列からなり、各部分系(P″,P′′′)内の積層体の層は隣接する部分系の積層体の厚さと異なる積層体の厚さ(d 2 、d 3 )をもたらす一定の厚さを有し、前記基板から最も遠い部分系(P′′′)の高い屈折率実数部を有する層(H′′′)の厚さが前記基板から2番目に遠い部分系(P″)の高い屈折率実数部を有する層(H″)の厚さから0.1nm以上相違する、請求項1−4のいずれかに記載の反射マスク。
- 前記部分系(P″,P′′′)は同じ材料からなる、請求項1−5のいずれかに記載の反射マスク。
- 前記基板(S)から最も遠い部分系(P′′′)の積層体(P 3 )の低い屈折率実数部を有する層(L′′′)は前記基板(S)から2番目に遠い部分系(P″)の積層体(P 2 )の低い屈折率実数部を有する層(L″)の厚さの80%より小さい厚さを有する、請求項1−6のいずれかに記載の反射マスク。
- 前記基板(S)から最も遠い部分系(P′′′)の積層体(P 3 )の高い屈折率実数部を有する層(H′′′)は前記基板(S)から2番目に遠い部分系(P″)の積層体(P2)の高い屈折率実数部を有する層(H″)の厚さの120%より大きい厚さを有する、請求項1−7のいずれかに記載の反射マスク。
- 前記多層膜系は少なくとも3つの部分系(P′,P″,P′′′)を備え、前記基板(S)に最も近い部分系(P′)の積層体(P 1 )の数(N 1 )は前記基板(S)から最も遠い部分系(P′′′)の積層体(P 3 )の数及び/又は前記基板(S)から2番目に遠い部分系(P″)の積層体(P 2 )の積層体の数より多い、請求項1−8のいずれかに記載の反射マスク。
- 前記基板(S)から2番目に遠い部分系(P″)の積層体(P 2 )の数(N 2 )は2〜12の値である、請求項1−9のいずれかに記載の反射マスク。
- 前記基板(S)から最も遠い部分系(P′′′)の積層体(P 3 )の数(N 3 )は9〜16の値である、請求項1−10のいずれかに記載の反射マスク。
- 作業波長で異なる屈折率実数部を有する材料の少なくとも2つの前記層の間に、炭化ホウ素、炭素、窒化ケイ素、炭化ケイ素、ホウ化ケイ素、窒化モリブデン、炭化モリブデン、ホウ化モリブデン、窒化ルテニウム、炭化ルテニウム、ホウ化ルテニウム又はそれらの組み合わせからなる障壁層が配置されている、請求項1−11のいずれかに記載の反射マスク。
- 少なくとも一つの積層体に対して、高い屈折率実数部を有する前記材料はシリコンであり、低い屈折率実数部を有する前記材料はルテニウムである、請求項1−12のいずれかに記載の反射マスク。
- 少なくとも一つの積層体に対して、高い屈折率実数部を有する前記材料はシリコンであり、低い屈折率実数部を有する前記材料はモリブデンである、請求項1−13のいずれかに記載の反射マスク。
- 請求項1−14のいずれかに記載の反射マスクを備えるEUVリソグラフィ装置。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009054986.2A DE102009054986B4 (de) | 2009-12-18 | 2009-12-18 | Reflektive Maske für die EUV-Lithographie |
DE102009054986.2 | 2009-12-18 | ||
US30571710P | 2010-02-18 | 2010-02-18 | |
US61/305,717 | 2010-02-18 | ||
PCT/EP2010/070171 WO2011073441A2 (en) | 2009-12-18 | 2010-12-17 | Reflective mask for euv lithography |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013514651A JP2013514651A (ja) | 2013-04-25 |
JP5926190B2 true JP5926190B2 (ja) | 2016-05-25 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012543808A Active JP5926190B2 (ja) | 2009-12-18 | 2010-12-17 | Euvリソグラフィ用反射マスク |
Country Status (7)
Country | Link |
---|---|
US (1) | US8486590B2 (ja) |
EP (1) | EP2513721B1 (ja) |
JP (1) | JP5926190B2 (ja) |
KR (1) | KR101714818B1 (ja) |
CN (1) | CN102770806B (ja) |
DE (1) | DE102009054986B4 (ja) |
WO (1) | WO2011073441A2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011077983A1 (de) * | 2011-06-22 | 2012-12-27 | Carl Zeiss Smt Gmbh | Verfahren zur Herstellung eines reflektiven optischen Elements für die EUV-Lithographie |
DE102012222451A1 (de) * | 2012-12-06 | 2014-06-26 | Carl Zeiss Smt Gmbh | Reflektives optisches Element für die EUV-Lithographie |
DE102012222466A1 (de) | 2012-12-06 | 2014-06-12 | Carl Zeiss Smt Gmbh | Reflektives optisches Element für die EUV-Lithographie |
DE102013200294A1 (de) * | 2013-01-11 | 2014-07-17 | Carl Zeiss Smt Gmbh | EUV-Spiegel und optisches System mit EUV-Spiegel |
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JP2007134464A (ja) * | 2005-11-09 | 2007-05-31 | Canon Inc | 多層膜を有する光学素子及びそれを有する露光装置 |
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DE102009017096A1 (de) | 2009-04-15 | 2010-10-21 | Carl Zeiss Smt Ag | Spiegel für den EUV-Wellenlängenbereich, Projektionsobjektiv für die Mikrolithographie mit einem solchen Spiegel und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Projektionsobjektiv |
DE102009017095A1 (de) | 2009-04-15 | 2010-10-28 | Carl Zeiss Smt Ag | Spiegel für den EUV-Wellenlängenbereich, Projektionsobjektiv für die Mikrolithographie mit einem solchen Spiegel und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Projektionsobjektiv |
DE102009032779A1 (de) * | 2009-07-10 | 2011-01-13 | Carl Zeiss Smt Ag | Spiegel für den EUV-Wellenlängenbereich, Projektionsobjektiv für die Mikrolithographie mit einem solchen Spiegel und Projektionsbelichtungsanlage für die Mikrolithographie mit einem solchen Projektionsobjektiv |
DE102009054653A1 (de) * | 2009-12-15 | 2011-06-16 | Carl Zeiss Smt Gmbh | Spiegel für den EUV-Wellenlängenbereich, Substrat für einen solchen Spiegel, Verwendung einer Quarzschicht für ein solches Substrat, Projektionsobjektiv für die Mikrolithographie mit einem solchen Spiegel oder einem solchen Substrat und Projetktionsbelichtungsanlage für die Mikrolithographie mit einem solchen Projektionsobjektiv |
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CN102770806A (zh) | 2012-11-07 |
KR101714818B1 (ko) | 2017-03-09 |
WO2011073441A2 (en) | 2011-06-23 |
CN102770806B (zh) | 2014-07-16 |
US8486590B2 (en) | 2013-07-16 |
KR20120098886A (ko) | 2012-09-05 |
EP2513721B1 (en) | 2017-09-27 |
JP2013514651A (ja) | 2013-04-25 |
EP2513721A2 (en) | 2012-10-24 |
WO2011073441A3 (en) | 2011-10-06 |
DE102009054986B4 (de) | 2015-11-12 |
DE102009054986A1 (de) | 2011-06-22 |
US20120320348A1 (en) | 2012-12-20 |
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