JP6617450B2 - 圧電駆動装置、モーターおよびロボット - Google Patents

圧電駆動装置、モーターおよびロボット Download PDF

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Publication number
JP6617450B2
JP6617450B2 JP2015133550A JP2015133550A JP6617450B2 JP 6617450 B2 JP6617450 B2 JP 6617450B2 JP 2015133550 A JP2015133550 A JP 2015133550A JP 2015133550 A JP2015133550 A JP 2015133550A JP 6617450 B2 JP6617450 B2 JP 6617450B2
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piezoelectric
conductor layer
electrode
piezoelectric vibrator
vibrator
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JP2015133550A
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Japanese (ja)
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JP2017017895A5 (enExample
JP2017017895A (ja
Inventor
智明 ▲高▼橋
智明 ▲高▼橋
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2015133550A priority Critical patent/JP6617450B2/ja
Priority to US15/194,943 priority patent/US10256749B2/en
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2015133550A 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット Expired - Fee Related JP6617450B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015133550A JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット
US15/194,943 US10256749B2 (en) 2015-07-02 2016-06-28 Piezoelectric actuator, motor, robot, and method of driving piezoelectric actuator

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Application Number Priority Date Filing Date Title
JP2015133550A JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット

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JP2017017895A JP2017017895A (ja) 2017-01-19
JP2017017895A5 JP2017017895A5 (enExample) 2018-08-02
JP6617450B2 true JP6617450B2 (ja) 2019-12-11

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JP2015133550A Expired - Fee Related JP6617450B2 (ja) 2015-07-02 2015-07-02 圧電駆動装置、モーターおよびロボット

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022165014A (ja) * 2021-04-19 2022-10-31 セイコーエプソン株式会社 圧電駆動装置およびロボット

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60148384A (ja) * 1984-01-10 1985-08-05 Kanto Jidosha Kogyo Kk 振動波モ−タ
JP3334450B2 (ja) * 1995-10-12 2002-10-15 松下電器産業株式会社 圧電アクチュエータおよびそれを用いた焦電型赤外線センサ
JPH09135585A (ja) * 1995-11-08 1997-05-20 Nikon Corp 振動アクチュエータ
SE0002885D0 (sv) * 2000-08-11 2000-08-11 Piezomotor Uppsala Ab Fine walking actuator
US7355325B2 (en) * 2006-06-15 2008-04-08 Piezomotor Uppsala Ab Wide frequency range electromechanical actuator
WO2012087193A1 (en) * 2010-12-20 2012-06-28 Piezomotor Uppsala Ab Electromechanical motor
DE102011087801B4 (de) * 2011-02-22 2013-04-25 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
JP2013240172A (ja) * 2012-05-14 2013-11-28 Seiko Epson Corp 圧電モーター、ロボットハンド、ロボット、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置、搬送装置
DE102013107154B4 (de) * 2013-07-08 2020-09-10 Physik Instrumente (Pi) Gmbh & Co. Kg Antriebsvorrichtung

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