JP6594602B2 - ロータ、真空ポンプ、及び、真空ポンプの組立方法 - Google Patents
ロータ、真空ポンプ、及び、真空ポンプの組立方法 Download PDFInfo
- Publication number
- JP6594602B2 JP6594602B2 JP2012086499A JP2012086499A JP6594602B2 JP 6594602 B2 JP6594602 B2 JP 6594602B2 JP 2012086499 A JP2012086499 A JP 2012086499A JP 2012086499 A JP2012086499 A JP 2012086499A JP 6594602 B2 JP6594602 B2 JP 6594602B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- cylindrical portion
- reinforcing ring
- ring member
- inner diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
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- 239000000853 adhesive Substances 0.000 claims description 5
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- 238000010586 diagram Methods 0.000 description 6
- FBOUIAKEJMZPQG-AWNIVKPZSA-N (1E)-1-(2,4-dichlorophenyl)-4,4-dimethyl-2-(1,2,4-triazol-1-yl)pent-1-en-3-ol Chemical compound C1=NC=NN1/C(C(O)C(C)(C)C)=C/C1=CC=C(Cl)C=C1Cl FBOUIAKEJMZPQG-AWNIVKPZSA-N 0.000 description 5
- 230000011218 segmentation Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000003733 fiber-reinforced composite Substances 0.000 description 4
- 230000002787 reinforcement Effects 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000011151 fibre-reinforced plastic Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004606 Fillers/Extenders Substances 0.000 description 1
- 102100040287 GTP cyclohydrolase 1 feedback regulatory protein Human genes 0.000 description 1
- 101710185324 GTP cyclohydrolase 1 feedback regulatory protein Proteins 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 101710107464 Probable pyruvate, phosphate dikinase regulatory protein, chloroplastic Proteins 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920006231 aramid fiber Polymers 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
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- 238000012937 correction Methods 0.000 description 1
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- 230000009467 reduction Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012086499A JP6594602B2 (ja) | 2012-04-05 | 2012-04-05 | ロータ、真空ポンプ、及び、真空ポンプの組立方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012086499A JP6594602B2 (ja) | 2012-04-05 | 2012-04-05 | ロータ、真空ポンプ、及び、真空ポンプの組立方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019133928A Division JP6752945B2 (ja) | 2019-07-19 | 2019-07-19 | ロータ、真空ポンプ、及び、真空ポンプの組立方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013217226A JP2013217226A (ja) | 2013-10-24 |
| JP2013217226A5 JP2013217226A5 (ko) | 2015-05-21 |
| JP6594602B2 true JP6594602B2 (ja) | 2019-10-23 |
Family
ID=49589627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012086499A Active JP6594602B2 (ja) | 2012-04-05 | 2012-04-05 | ロータ、真空ポンプ、及び、真空ポンプの組立方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6594602B2 (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6427963B2 (ja) * | 2014-06-03 | 2018-11-28 | 株式会社島津製作所 | 真空ポンプ |
| JP7108377B2 (ja) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法 |
| JP2022074413A (ja) | 2020-11-04 | 2022-05-18 | エドワーズ株式会社 | 真空ポンプ |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0191096U (ko) * | 1987-12-07 | 1989-06-15 | ||
| JP3160039B2 (ja) * | 1991-08-22 | 2001-04-23 | エヌティエヌ株式会社 | ターボ分子ポンプと動翼の加工方法 |
| DE19915307A1 (de) * | 1999-04-03 | 2000-10-05 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit |
| JP4133233B2 (ja) * | 2002-11-06 | 2008-08-13 | 株式会社島津製作所 | ターボ分子ポンプおよびそのロータ |
| JP5577798B2 (ja) * | 2010-04-02 | 2014-08-27 | 株式会社島津製作所 | ターボ分子ポンプ |
| US9790946B2 (en) * | 2010-09-28 | 2017-10-17 | Edwards Japan Limited | Exhaust pump |
-
2012
- 2012-04-05 JP JP2012086499A patent/JP6594602B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013217226A (ja) | 2013-10-24 |
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