JP6564401B2 - Ceramic lattice - Google Patents

Description

  The present invention relates to a ceramic lattice.

  When firing ceramic electronic parts or glass, firing is generally performed by placing an object to be fired on a setter called a shelf board or a floor board. In order to shorten the degreasing and firing time of the material to be fired and increase the number of products manufactured per unit time, it is necessary to rapidly heat and cool the firing process. When heated and / or rapidly cooled, defects such as cracks are likely to occur. Moreover, it becomes easy to produce defects, such as a crack, by repeated use. In addition, it has been pointed out that when a metal setter is used, it cannot be used in an oxidizing atmosphere, and when it is repeatedly used in a high temperature region of 1200 ° C. or more, it is greatly deformed.

  In order to solve the above-described problems, various two-dimensional or three-dimensional setters have been proposed. For example, Patent Document 1 describes a heat-forming setter made of a porous plate made of ceramics mainly composed of aluminum nitride and having a large number of holes penetrating the front and back surfaces. This setter is, for example, one having a grid-like mesh or one having a honeycomb-like mesh.

  Patent Document 2 discloses a ceramic fiber molded body comprising a ceramic long fiber woven fabric and a frame body to which the outer peripheral edge of the woven fabric is fixed, and the frame body is obtained by firing mainly ceramic fibers and ceramic particles. A ceramic mesh jig for firing electronic parts is described. Patent Document 3 has continuous pores having a porosity of more than 70% by volume to 98% by volume, a pore diameter of 100 μm to 2000 μm, and an opening area ratio of 20% to 90%, and has a three-dimensional network structure. A degreasing and firing setter made of porous ceramics is described.

  Patent Document 4 includes an outer wall, a component placement surface, and an in-furnace installation surface, and a partition wall having a thickness of 0.05 mm to 1.0 mm between the component placement surface and the in-furnace installation surface. A honeycomb structure in which a plurality of vent cells partitioned at a pitch of 0.5 mm to 5.0 mm are penetrated, and at least one vent hole penetrating between the outer wall is provided on the outer wall surface. A setter for firing is described. Patent Document 5 discloses a sheath made of nickel net and having a bottom plate and a rising portion provided on the entire circumference thereof, a plurality of ceramic rods arranged parallel to each other on the bottom surface of the sheath body, and the rod And a sheathing sheath provided with a nickel mesh that is welded to the bottom surface of the sheath body and supports the rod to the sheath body.

JP-A-6-207785 JP 2000-304559 A JP 2002-293651 A JP 2004-150661 A JP 2011-117669 A

  However, even if the techniques described in the above-mentioned patent documents are used, it is not easy to achieve a satisfactory level of rapid heating and cooling of the object to be fired. Further, the strength of the setter cannot be sufficiently increased.

  The subject of this invention is providing the ceramic lattice body which can eliminate the various fault which the prior art mentioned above has.

The present invention includes a plurality of first filaments made of ceramics extending in one direction, and a plurality of second filaments made of ceramics extending in a direction intersecting with the first filaments. A ceramic lattice body having
The intersection of the first filament and the second filament is the second filament on the first filament at any intersection.
The present invention provides a ceramic lattice body in which the thickness at the intersection is larger than both the thickness of the first filament and the thickness of the second filament at the portion other than the intersection.

  The ceramic lattice body of the present invention can be repeatedly used in a high temperature region, and has sufficient strength even if the thickness is reduced to reduce the heat capacity and the air permeability is increased.

FIG. 1 is a perspective view showing an embodiment of a ceramic lattice body of the present invention. 2 is a cross-sectional view taken along line II-II in FIG. 3 is a cross-sectional view taken along line III-III in FIG. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 5 is a cross-sectional view taken along line VV in FIG. 6 is a plan view of the ceramic lattice shown in FIG. FIG. 7 is an SEM photograph of the ceramic lattice obtained in Example 1 observed from the first surface side. FIG. 8 is an SEM photograph of the ceramic lattice obtained in Example 1 observed from the second surface side.

  The present invention will be described below based on preferred embodiments with reference to the drawings. FIG. 1 shows an embodiment of the ceramic lattice body of the present invention. A ceramic lattice body 1 (hereinafter, also simply referred to as “grid body”) 1 shown in FIG. 1 has a plurality of ceramic first linear portions 10 extending in one direction X. Each first linear portion 10 extends in parallel with each other. The ceramic lattice body 1 has a plurality of ceramic second linear portions 20 extending in the Y direction, which is a direction different from the X direction. Each 2nd filament part 20 is extended in parallel mutually. Since the X direction and the Y direction are different directions, the first linear portion 10 and the second linear portion 20 intersect each other. The crossing angle between the two line sections 10 and 20 can be set according to the specific application of the ceramic lattice body 10. For example, the crossing angle of the second linear portion 20 with respect to the first linear portion 10 can be 90 degrees. Or the crossing angle of the 2nd filament part 20 with respect to the 1st filament part 10 can also be changed in the range of 90 degree +/- 10 degree. The grid body 1 is formed by the plurality of first linear portions 10 and the plurality of second linear portions 20 intersecting each other.

  The ceramic lattice body 1 forms a lattice when the first linear portion 10 and the second linear portion 20 intersect, and has a plate-like shape having a plurality of through holes 3 defined by the lattice. doing. As shown in FIGS. 2 to 5, the ceramic lattice body 1 has a first surface 1a and a second surface 1b opposite to the first surface 1a.

  The first striated portion 10 has a constant width W1 (see FIG. 2) in a plan view at a position other than the intersection 2 between the striated portions 10 and 20. As shown in FIGS. 2 and 3, the cross-sectional shape of the first linear portion 10 in the thickness direction is the first surface 10 a located on the first surface 1 a side of the ceramic lattice 1 and the first shape of the ceramic lattice 1. It is defined by the second surface 10b located on the second surface 1b side. The first surface 10 a of the first linear portion 10 has a flat cross section in the thickness direction of the linear portion 10. The flat surface is substantially parallel to the in-plane direction of the ceramic lattice body 1. On the other hand, the second surface 10b of the first striated portion 10 has a convex curved shape in which the cross section in the thickness direction of the striated portion 10 is directed from the first surface 1a of the ceramic lattice body 1 to the second surface 1b. I am doing.

  Similar to the first filament part 10, the second filament part 20 also has a constant width W2 (see FIG. 5) in plan view at a position other than the intersection 2 of the two filament parts 10, 20. However, in some cases, the width W2 may change along the direction in which the second linear portion 20 extends. The width W2 may be the same as or different from the width W1 of the first linear portion 10. As shown in FIGS. 4 and 5, the cross-sectional shape of the second linear portion 20 in the thickness direction is the first surface 20 a located on the first surface 1 a side of the ceramic lattice body 1 and the first shape of the ceramic lattice body 1. It is defined by the second surface 20b located on the second surface 1b side. As for the 1st surface 20a of the 2nd filament part 20, the cross section in the thickness direction of this filament part 20 is a flat surface. The flat surface is substantially parallel to the in-plane direction of the ceramic lattice body 1. On the other hand, the second surface 20b of the second linear portion 20 has a convex curved shape in which the cross section in the thickness direction of the linear portion 20 is directed from the first surface 1a to the second surface 1b of the ceramic lattice body 1. I am doing. The curved shape may be the same as or different from the curved shape in the first linear portion 10.

  As shown in FIGS. 3 and 4, the first surface 10 a of the first linear portion 10 and the first surface 20 a of the second linear portion 20 are flush with each other, and between the both surfaces 10 a and 20 a. There is no difference in level. Since both surfaces 10a and 20a form the first surface 1a of the ceramic lattice body 1, the fact that both surfaces 10a and 20a are flush with each other means that the first surface 1a of the lattice body 1 is a flat surface. Means that Therefore, when the ceramic lattice body 1 is placed such that the first surface 1a is in contact with the flat placement surface, the entire area of the first surface 1a is in contact with the placement surface.

  On the other hand, the 2nd surface 1b in the ceramic lattice body 1 is the 2nd surface 10b of the 1st linear part 10 which is a convex curved surface shape, and the 2nd linear part which is also a convex curved shape. Since it is comprised from 20 2nd surface 20b, it is not a flat surface but an uneven surface.

  At the intersection 2 between the first linear portion 10 and the second linear portion 20 in the ceramic lattice 1, both linear portions 10 and 20 are integrated. “Integrated” means that, when the cross section of the intersection 2 is observed, the space between the two linear portions 10 and 20 is a continuous structure as ceramics. The through-holes 3 formed in the ceramic lattice 1 by the intersection of both the line portions 10 and 20 have the same dimensions and the same shape. Each through-hole 3 has a substantially rectangular shape. The through holes 3 are regularly arranged.

  As shown in FIGS. 1, 3, and 4, the intersection 2 between the first filament 10 and the second filament 20 is located on the first filament 10 at any intersection 2. Two filament parts 20 are arranged. And the thickness in the intersection 2 is larger than both the thickness of the 1st filament part in the site | parts other than this intersection, and the thickness of the 2nd filament part. That is, the thickness of the first filament 10 at a position other than the intersection 2 between the two filaments 10 and 20 is T1 (see FIG. 2), and the second at a position other than the intersection 2 between the filaments 10 and 20 is the second. When the thickness of the linear portion 20 is T2 (see FIG. 5) and the thickness at the intersection is Tc (see FIG. 4), Tc> T1 and Tc> T2. Therefore, on the second surface 1 b of the ceramic lattice body 1, the position of the intersection of the two linear portions 10 and 20 is the highest.

  At the intersection 2 between the first linear portion 10 and the second linear portion 20, the first line relatively positioned on the first surface side 1 a out of the two surfaces 1 a and 1 b of the lattice 1. On the strip part 10, the 2nd linear part 20 located relatively on the 2nd surface 1b side is distribute | arranged. When the cross section in the thickness direction of the first and second linear portions 10 and 20 is observed at a portion other than the intersection 2 in the lattice body 1, these linear portions 10 and 20 have their first surfaces 10 a and 10 a, As described above, the 20a side has a flat shape parallel to the first surface 1a of the lattice 1. At the same time, the second surfaces 10b and 20b side has a curved surface shape that is convex from the first surface 1a of the lattice body 1 to the second surface 1b.

  As shown in FIG. 4, the highest position of the second surface 10 b in the first filament part 10, that is, the position of the top part is the same along the extending direction of the first filament part 10. In contrast to this, as shown in FIG. 3, the highest position of the second surface 20 b in the second linear portion 20, that is, the position of the top portion is periodically along the extending direction of the first linear portion 10. Has changed. Specifically, the position of the top is highest at the intersection point 2, lowest at the midpoint position of the adjacent intersection points, and the top position gradually decreases from the intersection point 2 toward the midpoint M. Then, the position of the top gradually increases from the midpoint M toward the intersection 2.

  When the ceramic lattice body 1 having the above configuration is used as a setter for firing a fired body, for example, if the fired body is placed on the second surface 1b of the grid body 1, the fired body is The grid body 1 comes into contact only at the intersection 2 on the second surface 1 b of the grid body 1. As a result, the contact area between the lattice body 1 and the body to be fired is greatly reduced, which facilitates rapid heating and cooling of the body to be fired. Further, since the lattice body 1 is formed by the intersection of the first and second linear portions 10 and 20 and the plurality of through holes 3 are formed, the heat capacity is small. Easy heating and cooling. Furthermore, since the lattice body 1 has good air permeability due to the presence of the plurality of through holes 3, this also facilitates rapid cooling of the fired body. Moreover, since the first and second linear portions 10 and 20 are integrated at the intersection point 2 in the lattice body 1, it has sufficient strength.

  From the viewpoint of making the various advantageous effects described above more remarkable, the thickness T2 of the second linear portion 20 is more than the thickness T1 of the first linear portion 10 in a portion other than the intersection. It is preferable that it is large. That is, it is preferable that the relationship of Tc> T2> T1 is satisfied. As described above, the position of the second surface 20b in the second linear portion 20 varies between the two adjacent intersections 2 and 2, and the thickness T2 of the second linear portion 20 is as follows. The value at the lowest position among the positions of the second surface 20b in the second linear portion 20 is used. In the example shown in FIG. 3, the thickness of the second linear portion 20 at the position of the midpoint M between the two intersections 2 and 2 is T2.

  As described above, it is preferable that T2 is larger than T1, and the value of T2 / T1, which is the ratio of T2 to T1, is preferably 1.1 or more and 10 or less, and 1.5 or more and 3 or less. More preferably. The T1 value itself is preferably from 50 μm to 1 mm, and more preferably from 75 μm to 500 μm. On the other hand, the value of T2 itself is preferably 75 μm or more and 10 mm or less, and more preferably 80 μm or more and 5 mm or less, provided that it is larger than the value of T1.

  Further, as described above, the thickness Tc at the intersection point 2 is larger than T1 and T2, and the value of Tc / T1, which is the ratio of Tc to T1, is preferably 1.1 or more and 3 or less. More preferably, it is 2 or more and 2.5 or less. The value of Tc / T2, which is the ratio of Tc to T2, is preferably 1 or more and 2 or less, and more preferably 1.1 or more and 1.5 or less. The Tc value itself is preferably from 0.1 mm to 2 mm, and more preferably from 0.3 mm to 1.5 mm. The thickness Tc at the intersection 2 is smaller than T1 + T2, which is the sum of T1 and T2.

  It is preferable that 1st surface 10a, 20a is smooth among the 1st filament part 10 and the 2nd filament part 20 among those surfaces. Since the first surfaces 10a and 20a of the linear portions 10 and 20 are smooth, when the body to be fired is placed on the ceramic lattice body 1, the fired body is hardly damaged. There is. In addition, there is an advantage that the fired body obtained by firing the body to be fired is not easily caught by the ceramic lattice body 1 and the take-out property is improved. Furthermore, if the object to be fired is a thin tape molded body such as a substrate, the setter surface state is transferred to the bottom surface of the object to be fired, so that the bottom surface of the object to be fired can be finished more smoothly. On the other hand, when the surface roughness is large, there is an advantage that the degreasing easily proceeds smoothly because the gas flow under the fired body is improved when the fired body is placed. In addition, if the unevenness is large, the fired body is likely to be damaged by the sharp protrusions on the surface. However, in 10b and 20b, since the top of the unevenness is an arc, the fired body is damaged. There is an advantage that it is difficult to stick. From these viewpoints, the surface roughness Ra of the first surface 10a of the first linear portion 10 and the first surface 20a of the second linear portion 20 is preferably 0.01 μm or more and 20 μm or less. More preferably, it is not less than 0.01 μm and not more than 10 μm. On the other hand, the surface roughness Ra of the second surface 10b of the first filament part 10 and the second surface 20b of the second filament part 20 is preferably 10 μm or more and 300 μm or less, and 20 μm or more and 100 μm or less. More preferably. Specifically, the surface roughness Ra is measured by the following method. Using a color 3D laser microscope (manufactured by Keyence Co., Ltd., VK-8710), the measurement magnification was 200 times. Regarding the first surface, the surface roughness was measured along the middle line of the first surface 10a or 20a, and an average value was calculated from the 20 measured values, which was defined as Ra. On the other hand, in the second surfaces 10b and 20b, the direction of returning to the middle line of the second surfaces 10b and 20b again across the second linear portion 20 along the middle line of the second surfaces 10b and 20b (see FIG. 1, the surface roughness was measured along the X direction), and an average value was calculated from the 20 measured values to obtain Ra.

  In order to reduce the value of the surface roughness Ra of the first surfaces 10a, 20a of the linear portions, for example, a substrate having a small surface roughness is used as a substrate to which a paste used for forming the linear portions is applied. Alternatively, a paste having a low viscosity may be used. On the other hand, in order to increase the value of the surface roughness Ra of the second surface 10b, 20b of the linear portion, for example, a paste having a high viscosity is used, or the nozzle diameter to be discharged is increased. That's fine. In some cases, the first surface 1a and / or the second surface 1b of the ceramic lattice body 1 may be polished and processed to have a predetermined surface roughness. As will be described later, the ceramic lattice body 1 may be used by laminating a plurality of the lattice bodies 1, and in this case, the first surfaces 10a and 20a of the linear portion 10 are laminated. The first surfaces 10a and 20a of the linear portion 10 located on the most 1a surface side of the lattice body, and the roughness is the first surfaces 10a and 20a of the linear portion 10. Similarly, the 2nd surface 10b, 20b of the linear part 10 is the 1st surface 10b, 20b of this linear part 10 located in the 1b surface side most in the laminated | stacked lattice body, The roughness and Is the first surfaces 10b, 20b of the filament 10.

  FIG. 6 shows a plan view of the ceramic lattice body 1. As shown in the figure, the grid body 1 has a plurality of first line sections 10 and a plurality of second line sections 20 substantially orthogonal to each other, so that the grid body has a substantially rectangular shape in plan view. A plurality of through holes 3 are formed. The through-hole 3 having a substantially rectangular shape has first sides 3a and 3a that are a pair of sides facing each other. At the same time, the through-hole 3 has second sides 3b and 3b which are another set of sides facing each other. The first sides 3a and 3a are sides corresponding to both side edges 11 and 11 (see FIG. 2) of the first linear portion 10. On the other hand, the second sides 3b and 3b are sides corresponding to both side edges 21 and 21 (see FIG. 5) of the second linear portion 20. The through hole 3 is defined by these four sides. And as shown in FIG. 6, the 2nd edge | sides 3b and 3b which oppose are curving inward so that it may mutually adjoin. Since the second sides 3b and 3b are curved inward as described above, there is an advantage that the strength of the ceramic lattice body 1 is further improved. Regarding the first sides 3a and 3a, the sides 3a and 3a are straight lines, but the sides 3a and 3a are also curved inward so as to be close to each other, like the second side 3b. Also good. By doing so, the strength of the ceramic lattice body 1 is further improved. In order to curve the second side 3b inward, for example, the lattice body 1 may be manufactured by a method described later.

The inward degree of the first side 3b is preferably 50 μm or more and 5000 μm or less, more preferably 100 μm or more and 1500 μm or less in terms of curvature. The curvatures of the two opposing second sides 3b may be the same or different.
The first side 3a is preferably a straight line. Alternatively, it may be an inward curve of 50 μm or more and 5000 μm or less, particularly 100 μm or more and 1500 μm or less, expressed in curvature. When the two opposing second sides 3a are inward curves, their curvatures may be the same or different.
Each curvature is measured by the method described below. The appearance of the ceramic lattice 1 is observed from the second surface side by SEM and a SEM photograph is taken. Based on this SEM photograph, a tangent line is drawn on the arc of the curved portion, both ends of the side to be measured and the contact are connected with each other by a line, the distance between both ends is sine L, and the distance between the midpoint between both ends and the contact is The radius of curvature was calculated by {(L / 2) ² + d ² / 2d}, where sine d.

The through hole 3 formed in the ceramic lattice body 1 has an area of 100 μm ² or more and 100 mm ² or less, particularly 2500 μm ² or more and 1 mm ² or less, which reduces the heat capacity of the lattice body 1 and improves air permeability. This is preferable from the viewpoint of maintaining the strength of the grid body 1. Further, the ratio of the total area of the through holes 3 to the apparent area of the ceramic lattice 1 in plan view is preferably 1% or more and 80% or less, and more preferably 3% or more and 70% or less, Most preferably, it is 10% or more and 70% or less. This ratio is obtained by cutting the ceramic lattice body 1 into a rectangular shape in plan view, calculating the sum of the areas of the through holes 3 included in the rectangle, and dividing the sum by the rectangular area. Calculated by multiplying by Moreover, the area of each through-hole 3 can be measured by image analysis of the microscope observation image of the lattice 1.

  In relation to the area of the through-hole 3, the width W1 of the first linear portion 10 is preferably 50 μm or more and 10 mm or less, and more preferably 75 μm or more and 1 mm or less. On the other hand, the width W2 of the second linear portion 20 is preferably 50 μm or more and 10 mm or less, and more preferably 75 μm or more and 1 mm or less. In addition, when the widths W1 and W2 are not uniform when viewed along the extending direction of the linear portions 10 and 20, the widths of the narrowest portions are defined as the widths W1 and W2.

  In relation to the widths W1 and W2 of the first and second linear portions 10 and 20, the pitch P1 between the adjacent first linear portions 10 is preferably 100 μm or more and 10 mm or less, and 150 μm or more and 5 mm. More preferably, it is as follows. On the other hand, the pitch P2 between the adjacent second linear portions 20 is preferably 100 μm or more and 10 mm or less, and more preferably 150 μm or more and 5 mm or less.

  Various materials can be used as the ceramic material constituting the ceramic lattice body 1. Examples thereof include alumina, silicon carbide, silicon nitride, zirconia, mullite, zircon, cordierite, aluminum titanate, magnesium titanate, magnesia, titanium diboride, boron nitride and the like. These ceramic materials can be used singly or in combination of two or more. In particular, it is preferably made of a ceramic containing alumina, mullite, cordierite, zirconia or silicon carbide. When the ceramic lattice body 1 is subjected to rapid heating and cooling, it is particularly preferable to use silicon carbide as the ceramic material. In addition, since silicon carbide has a concern about a reaction with a to-be-fired body, when using silicon carbide as a ceramic material, it is preferable to coat the surface with a low-reactivity ceramic material such as zirconia. The ceramic material constituting the first filament part 10 and the ceramic material constituting the second filament part 20 may be the same or different. From the viewpoint of increasing the integrity of the first and second linear portions 10 and 20 at the intersection point 2, it is preferable that the ceramic materials constituting both the linear portions 10 and 20 are the same.

  Next, the suitable manufacturing method of the ceramic lattice body 1 of this embodiment is demonstrated. In this manufacturing method, first, raw material powder of a ceramic material is prepared, and the raw material powder is mixed with a medium such as water and a binder to prepare a paste for manufacturing a filament portion. The ratio of the raw material powder of the ceramic material in the paste is preferably 30% by mass to 75% by mass, and more preferably 40% by mass to 60% by mass. The ratio of the medium in the paste is preferably 15% by mass to 60% by mass, and more preferably 20% by mass to 55% by mass. The proportion of the binder in the paste is preferably 1% by mass or more and 40% by mass or less, and more preferably 5% by mass or more and 25% by mass or less.

  As the binder, those similar to those conventionally used for this type of paste can be used. Examples include polyvinyl alcohol, polyethylene glycol, polyethylene oxide, dextrin, sodium lignin sulfonate and ammonium, carboxymethylcellulose, ethylcellulose, hydroxypropylmethylcellulose, carboxymethylcellulose, hydroxyethylcellulose, hydroxyethylmethylcellulose, sodium and ammonium alginate, epoxy resin, phenol Resins, gum arabic, polyvinyl butyral, acrylic polymers such as polyacrylic acid and polyacrylamide, thickening polysaccharides such as xanthan gum and guar gum, gelling agents such as gelatin, agar and pectin, vinyl acetate resin emulsion, wax emulsion, And inorganic binders such as alumina sol and silica sol Etc., and the like. Two or more of these may be mixed and used. The viscosity of the paste is preferably 1 Pa · s or more and 10,000 Pa · s or less, more preferably 50 Pa · s or more and 5000 Pa · s or less, at the temperature at the time of application. The viscosity of the paste is measured using a cone plate type rotary viscometer or a rheometer. At this time, a thickener, a flocculant, a thixotropic agent, or the like can be used as a viscosity modifier. Examples of the thickener include polyethylene glycol fatty acid ester, alkylallyl sulfonic acid, alkyl ammonium salt, ethyl vinyl ether / maleic anhydride copolymer, fumed silica, albumin and other proteins. In many cases, the binder may be classified as a thickener because it has a thickening effect. However, if more precise viscosity adjustment is required, a thickener that is not classified separately as a binder. An agent can be used. Examples of the flocculant include polyacrylamide, polyacrylic acid ester, aluminum sulfate, and polyaluminum chloride. Examples of thixotropic agents include fatty acid amides, oxidized polyolefins, polyether ester type surfactants, and the like. As a solvent for preparing the paste, in addition to water, alcohol, acetone, ethyl acetate, and the like are used, and two or more of these may be mixed. In order to stabilize the discharge amount, a plasticizer, a lubricant, a dispersant, a sedimentation inhibitor, a pH adjuster, or the like may be added. Examples of the plasticizer include glycols such as trimethylene glycol and tetramethylene glycol, glycerin, butanediol, phthalic acid, adipic acid, and phosphoric acid. Examples of the lubricant include hydrocarbons such as liquid paraffin, micro wax, and synthetic paraffin, higher fatty acids, fatty acid amides, and the like. Examples of the dispersant include sodium polycarboxylate or ammonium salt, acrylic acid type, polyethyleneimine, and phosphoric acid type. Examples of the precipitation inhibitor include polyamide amine salts, bentonite, and aluminum stearate. Examples of the pH adjusting agent include sodium hydroxide, aqueous ammonia, oxalic acid, acetic acid, hydrochloric acid and the like.

  Using the obtained paste, a plurality of linear first coated bodies are formed in parallel to each other on a flat substrate. The filament first coating body corresponds to the first filament portion 10 in the target lattice body 1. Various coating apparatuses can be used for forming the first filament coated body. For example, a dispenser can be used.

  After the filament first coated body is formed, a plurality of filament second coated bodies are then formed in parallel with each other so as to intersect with the filament first coated body. The filament second coated body corresponds to the second filament portion 20 in the target lattice body 1. For the formation of the second filament coated body, a coating device similar to the first filament coated body can be used. Thus, the grid body 1 in which the 2nd filament part 20 is located on the 1st filament part 10 is succeeded by forming a filament 1st coating body and a filament 2nd coating body sequentially. Well obtained. Further, the second side 3b of the through-hole 3 in the lattice body 1 can be curved inward.

  In this way, a lattice-shaped precursor formed by two types of linear coated bodies is obtained. The lattice precursor is dried to develop shape retention. Drying is performed, for example, by heating the lattice precursor at a temperature of 40 ° C. or higher and 80 ° C. or lower in the atmosphere. The heating time can be, for example, 0.5 hours or more and 12 hours or less.

  The dried lattice-like precursor is peeled off from the substrate, degreased in a degreasing furnace, and then placed in a firing furnace for firing. The target ceramic lattice 1 is obtained by this degreasing and firing. Degreasing and baking can be generally performed in the atmosphere, but from the viewpoint of smoothly degreasing without generating cracks, it is preferable to use a degreasing furnace or a microwave furnace that circulates the atmosphere as a heating device. The setter preferably has a porous shape with high air permeability. Further, as another degreasing method, it is desirable to apply a method of heating in contact with superheated steam or a supercritical carbon dioxide degreasing method from the viewpoint of promoting degreasing. The firing temperature may be selected appropriately depending on the type of raw material powder of the ceramic material. The same applies to the firing temperature.

  The target ceramic lattice 1 is obtained by the above method. This ceramic lattice body 1 can be suitably used as a setter for degreasing or firing ceramic products such as shelf boards and floorboards, and can also be used as a kiln tool other than a setter, such as a firewood or beam. Furthermore, it can also be used for various uses other than kiln tools, for example, various jigs such as filters and catalyst carriers, and various structural materials. In this case, although it is common to place a to-be-fired body on the 2nd surface 1b which is an uneven surface in the lattice body 1, depending on the kind of to-be-fired body, on the 1st surface 1a which is a flat surface You may mount a to-be-fired body. For example, when performing the firing step in the manufacturing process of the multilayer ceramic capacitor (MLCC), it is preferable to place the body to be fired on the first surface 1a which is a flat surface.

  As mentioned above, although this invention was demonstrated based on the preferable embodiment, this invention is not restrict | limited to the said embodiment. For example, in the ceramic lattice body 1 of the above embodiment, the first linear portion 10 and the second linear portion 20 intersect so as to be substantially orthogonal, but the intersecting angle of both the linear portions 10, 20 is It is not limited to 90 degrees.

  Moreover, although the ceramic lattice body 1 of the said embodiment used two types of linear parts, the 1st linear part 10 and the 2nd linear part 20, in addition to this, a 3rd linear part ( (Not shown) may be used.

  Further, for the purpose of improving the strength of the ceramic lattice body 1 of the embodiment, an outer frame may be provided on the outer periphery of the lattice body 1. Specifically, at least one of the two ends of the plurality of first linear portions 10 and / or at least one of the two ends of the plurality of second linear portions 20 is outside. It may be connected to the frame. Preferably, both ends of the plurality of first linear portions 10 are connected to the first outer frame, or both ends of the plurality of second linear portions 20 are connected to the second outer frame. Has been. More preferably, both end portions of the plurality of first linear portions 10 are connected to the two first outer frames, respectively, and both end portions of the plurality of second linear portions 20 are two second portions. Are connected to the outer frame of each. In this case, it is preferable that each end portion of each first outer frame and each end portion of each second outer frame are connected in series.

  The outer frame can be made of the same material as the first filament part 10 and / or the second filament part 20. The first linear portion 10 and / or the second linear portion 20 may be formed integrally. That is, the outer frame may be integrally formed from the same material as the grid body 1 or may be manufactured separately from the grid body 1 and bonded by a predetermined bonding means. By setting it as such a form, the intensity | strength of the grid | lattice body 1 increases as mentioned later, and especially a spalling resistance and a thermal shock resistance improve. As a result, the lattice body 1 is particularly suitable for uses such as rapid firing of the object to be fired.

  An outer frame is the same as the width | variety in the planar view of the 1st filament part 10 or the 2nd filament part 20, or is larger or smaller than the said width | variety. In particular, the width of the outer frame is preferably larger than the widths of the first and second linear portions 10 and 20. In particular, in order to effectively improve the spalling resistance, the width of the outer frame is preferably 3 mm or more, and more preferably 6 mm or more. As the width of the outer frame increases, the outer frame contributes to improving the strength of the lattice 1 and improving the spalling resistance. However, if the width of the outer frame becomes excessively large, the ratio of the grid body 1 occupying the whole decreases, and the ventilation effect of the grid body 1 is reduced due to this. From this viewpoint, the width of the outer frame is preferably 70 mm or less, and more preferably 50 mm or less. Both ends of the plurality of first linear portions 10 are connected to the two first outer frames, respectively, and both ends of the plurality of second linear portions 20 are connected to the two second outer frames. In the case where they are connected in series, the widths of the two first outer frames may be the same or different. Similarly, the widths of the two second outer frames may be the same or different. Further, the width of the first outer frame and the width of the second outer frame may be the same or different.

  The thickness of the outer frame is the same as the thickness of the first filament part 10 or the second filament part 20, or is larger or smaller than the thickness. In particular, the thickness of the outer frame is preferably 0.3 mm or more, and more preferably 0.5 mm or more from the viewpoint of improving the spalling resistance. As the thickness of the outer frame increases, it contributes to improving the strength of the lattice 1 and improving the spalling resistance. However, if the thickness of the outer frame becomes excessively large, the ventilation effect of the lattice body 1 tends to decrease. In this respect, the thickness of the outer frame is preferably 10 mm or less, and more preferably 2 mm or less. Even when the thickness of the outer frame is smaller than the thickness of the grid body 1, the thickness of the grid body 1 is not included in the thickness of the outer frame.

  Further, the ceramic lattice body 1 of the above embodiment has a single-layer structure, that is, a plurality of first linear portions 10 and a plurality of second linear portions 20 are only substantially orthogonal to each other. Instead, a plurality of the lattice bodies 1 may be used and stacked. In the case of stacking in this way, the dimensions and compositions of Tc, T1, T2, etc. of the respective lattice elements 1 may be the same or different. However, in order to further increase the bonding strength and thermal shock strength of the laminated lattice bodies, it is desirable that the ceramic compositions used for each laminated lattice body 1 be the same.

  Furthermore, in the said embodiment, although the thickness T2 of the 2nd filament part 20 was larger than the thickness T1 of the 1st filament part 10, it replaced with this and thickness T1 rather than thickness T2 You may enlarge it.

  Hereinafter, the present invention will be described in more detail with reference to examples. However, the scope of the present invention is not limited to such examples. Unless otherwise specified, “part” means “part by mass”.

[Example 1]
(1) Preparation of a paste for forming a linear coated body 55.6 parts of alumina powder having an average particle diameter of 0.5 μm, 11.1 parts of polyvinyl alcohol (average polymerization degree 500) as an aqueous binder, polyethylene glycol ( Average molecular weight 200) 11.1 parts and 22.2 parts of water were mixed and defoamed to prepare a paste.
(2) Formation of a linear coated body Using the above paste as a raw material, a linear first coated body was formed on a resin substrate using a dispenser, and then a linear second coated body that intersected with it was formed. . The crossing angle between the two filament coated bodies was 90 degrees. Thus, a lattice precursor was obtained. The lattice precursor was dried at 50 ° C. for 1 hour.
(3) Degreasing process After drying the lattice-shaped precursor from the resin substrate, it was placed in a degreasing furnace. The degreasing temperature was 600 ° C., the rate of temperature increase was 5 ° C./hour from room temperature to 300 ° C., 2.5 ° C./hour from 300 ° C. to 600 ° C., and the temperature was maintained at 600 ° C. for 3 hours.
(4) Firing step The degreased lattice precursor was placed in an atmospheric firing furnace. Firing was carried out in this firing furnace to obtain a ceramic lattice body having the shape shown in FIGS. The firing temperature was 1600 ° C., and the firing time was 3 hours. The specifications of the obtained lattice are shown in Table 1 below. In the obtained lattice body, as shown in FIG. 6, the opposing second sides 3b and 3b were curved inward so as to be close to each other. The curvature radius of the curve was 650 μm on any side. SEM photographs of the obtained lattice are shown in FIGS.

[Example 2]
Except that the dimensions and the like of the lattice body were set to the values shown in Table 1, the lattice body having the shape shown in FIGS. 1 to 6 was obtained in the same manner as in Example 1. In the obtained lattice body, as shown in FIG. 6, the opposing second sides 3b and 3b were curved inward so as to be close to each other. The curvature radius of the curve was 330 μm on any side.

[Comparative Example 1]
This comparative example is an example using a nickel net as a lattice. This nickel mesh is obtained by applying a zirconia spray coating to 32 mesh formed by plain weaving of a nickel wire having a thickness of 315 μm, and has a thickness of 0.6 mm.

[Comparative Example 2]
This comparative example is an example using alumina cloth (Nichibialk 1111-P made by Nichibi) as a lattice body. This alumina cloth has a mesh structure formed by plain weaving of alumina fibers having a thickness of 7 μm and has a thickness of 0.7 mm.

[Comparative Example 3]
A solution obtained by dissolving gelatin in hot water (the concentration of gelatin is 3% with respect to water) was prepared, and this solution was mixed with an alumina slurry prepared in advance. The mixing was performed so that the mass ratio of alumina to water in the mixed solution was 10:90. This mixed solution was allowed to stand in a refrigerator to be gelled. The gel was frozen with an ethanol freezer. After the frozen gel was dried (lyophilized), the obtained dried product was degreased and baked at 1600 ° C. for 3 hours. The lattice body obtained in this manner had a porosity of 80%, a pore diameter of 50 μm, and a structure in which pores were oriented in the thickness direction.

[Comparative Example 4]
In this comparative example, a ceramic foam filter (hereinafter referred to as “CFF”) is used instead of the lattice body. This CFF is SELEE CS-X grade 30, which has a pore diameter of 815-1010 μm and a porosity of 75%. Since the strength was relatively low and the pore diameter was large, it was difficult to process to a thickness of 2 mm, so the thickness was set to 5 mm.

[Comparative Example 5]
This comparative example is an example in which a regular hexagonal honeycomb structure made of alumina is used instead of the lattice body. This honeycomb structure has a thickness of 2 mm, an aperture ratio of 72%, a cell density of 820 CPSI, and a cell wall thickness of 135 μm.

[Evaluation]
About the lattice body obtained by the Example and the comparative example, the high temperature repetition test, bending strength, air permeability, spalling resistance evaluation, and comprehensive evaluation were performed with the following method. The results are shown in Table 2 below.

[Evaluation of high temperature repeat test]
First, a sample of length 100 mm × width 100 mm × thickness 2 mm to 5 mm was prepared. A 10φ alumina rod was bridged on a brick frame having V-shaped grooves with 20 mm spans on two opposite sides of the four sides, and a sample was placed thereon. Under Ar atmosphere, the temperature was raised at 200 ° C./hour, held at 1300 ° C. for 3 hours, and subjected to furnace cooling five times, and the state of the sample was evaluated by appearance observation based on the following criteria.
A: A state in which there is no significant change in appearance and it can be used continuously.
B: A state in which there is a change in the shape and color, which hinders continued use.
C: A state in which there is a great change in shape and color and it is difficult to use continuously.

[Evaluation of bending strength]
Each sample was processed to a width of 10 mm, a three-point bending test was performed at a span of 30 mm, an average value of ten points was used as a bending strength, and the following criteria were evaluated. For the calculation of the bending strength, the thickness value measured by observing the cross section of the fracture portion was used.
A: 10 MPa or more, and the probability of occurrence of cracks during handling is low.
B: 5-10 MPa, the probability of occurrence of cracks in handling is slightly high.
C: 5 MPa or less, the probability of occurrence of cracks during handling is extremely high.

[Evaluation of air permeability]
The air permeability of the grid was evaluated using a palm porometer manufactured by Seika Sangyo. A sample with a diameter of 30 mm was prepared, and the air flow rate (L / sec) at a differential pressure of 0.1 kPa (gas permeation test, dry mode) was measured and used as an index of air permeability. And the air permeability was evaluated according to the following criteria.
A: 50 L / sec or more: Degreasing improvement can be expected.
B: 10-50 L / sec: Some improvement in degreasing can be expected.
C: 10 L / sec or less: Degreasing improvement cannot be expected so much.

[Evaluation of spalling resistance]
Samples of length 100 mm × width 100 mm × thickness 2 mm to 5 mm were prepared. Place a four-point column on the base, set the sample on it, place an alumina plate (bulk specific gravity 3.16, length 65 mm x width 65 mm x thickness 2 mm) on top, and heat in an atmospheric firing furnace After heating and holding at a desired temperature for 1 hour or longer, the sample was taken out from the electric furnace and exposed to room temperature, and the presence or absence of cracking of the sample was evaluated with the naked eye. If the material is not rigid like alumina cloth and the sample cannot be set, a weight is placed at the end of the four points so that it can be held. The set temperature was changed from 250 ° C. to 600 ° C. while increasing the temperature by 50 ° C., and the upper limit of the temperature at which no cracks occurred was defined as “spoling resistance (1)”.
A: The possibility of spalling cracks being relatively low regardless of the product loading amount at 600 ° C. or higher.
B: 400-550 ° C. Depending on the product loading, there is a high possibility that spalling cracks will occur.
C: 350 ° C. or less, and there is a high possibility that spalling cracks occur regardless of the product load.

〔Comprehensive evaluation〕
Based on various evaluations, the suitability as a rapid firing jig was comprehensively evaluated according to the following criteria.
A: In various evaluations, all are A.
B: When there is even one B in various evaluations.
C: When there is even one C in various evaluations.

  As is apparent from the results shown in Table 2, it can be seen that the lattice bodies obtained in each example have higher strength than the comparative examples, and also have good quenching and rapid heating characteristics. Furthermore, it turns out that air permeability is sufficient.

Example 3
In the present embodiment, zirconia is used instead of alumina, and an outer frame is provided on the outer periphery of the lattice body. And it was made to be the same as that of Example 1 except setting the dimension of a lattice, etc. to the value shown in Table 3. A rectangular outer frame having a width of 10 mm and a thickness of 1.8 mm was provided on the outer periphery of each lattice. Two such lattice bodies were prepared and laminated so that the directions of the respective line portions coincided with each other to form a two-layer structure. Thus, an outer framed lattice body having a two-layer structure was obtained.

Example 4
In Example 3, the width of the outer frame was 10 mm, and the thickness was 1.2 mm. Except this, it carried out similarly to Example 3, and obtained the lattice body with an outer frame which has a 2 layer structure.

Example 5
In this example, no outer frame was provided in Example 3. Otherwise in the same manner as in Example 3, a lattice having a two-layer structure was obtained.

[Evaluation]
About the lattice body obtained by the Example and the comparative example, evaluation of spalling resistance and the measurement of a center area | region and a peripheral region maximum temperature were performed with the following method. The results are shown in Table 3 below.

    [Evaluation of spalling resistance]
  A sample in which an outer frame was provided on a lattice body having a length of 150 mm, a width of 150 mm, and a thickness of 1.4 mm was prepared, and four samples were placed on the sample, and the sample was set thereon. Al particle size adjusted in advance by sieves with openings of 1000 μm and 500 μm₂O₃Aggregate has a density of 0.35 g / cm²In a state where the outer frame is on the top, the sample is homogeneously laid on the sample at a central portion of 140 mm × 140 mm excluding 5 mm from the periphery, and set in an atmospheric firing furnace. This Al₂O ₃The aggregate is assumed to be a small electronic component such as MLCC. Next, it was heated at a high temperature by an atmospheric baking furnace and maintained at a desired temperature for 1 hour or more. Then, the sample was taken out from the electric furnace and exposed to room temperature. And the presence or absence of the crack of a sample was evaluated with the naked eye. The set temperature for heating the sample was changed from 250 ° C. to 600 ° C. while increasing the temperature by 50 ° C., and the upper limit of the temperature at which no cracking occurred in the sample was defined as “Spalling resistance (2)”.

[Measurement of maximum temperature in the central and peripheral areas]
The lattice bodies obtained in the examples and comparative examples were heated. Heating was performed so that the furnace temperature was 500 ° C. After confirming that the furnace temperature was sufficiently stabilized, the heated lattice body was taken out of the heating furnace into the atmosphere and rapidly cooled. The time until the temperature of the central part in the plan view of the lattice was cooled to about 400 ° C. was measured. Moreover, when the temperature of the central portion in the plan view of the lattice body was about 400 ° C., the lowest temperature in the peripheral portion in the plan view of the lattice body was measured. The temperature was measured by thermography (CPA-640A manufactured by Chino). The results are shown in Table 3 below. In Table 3, Tc, T1 and T2 are measured and described in the respective layers, counting from the bottom side, that is, from the 1a side to the first and second layers in the case of a lattice having two layers. .

As is clear from the results shown in Table 3, the lattices obtained in Examples 3 and 4 have a higher heating temperature as a measure of spalling resistance than that of Example 5, and good quenching and rapid heating characteristics. It turns out that it is. The reason for this is that, as shown in Table 3, in Examples 3 and 4 having the outer frame, the peripheral region maximum temperature is higher than in Example 5 without the outer frame, and the temperature difference from the central region maximum temperature is small. This is presumed to be the cause.
Further, as is clear from the comparison between Example 3 and Example 4, Example 3 having a large outer frame thickness is higher in the central region than Example 4 having a smaller outer frame thickness than that of Example 4. It can be seen that there is a small temperature difference between the ambient temperature and the maximum ambient temperature.

Claims (10)

A ceramic lattice body having a plurality of first filaments made of ceramics extending in one direction and a plurality of second filaments made of ceramics extending in a direction intersecting the first filaments Because
The intersection of the first filament and the second filament is the second filament on the first filament at any intersection.
The thickness at the intersection is greater than both the thickness of the first filament and the thickness of the second filament at a site other than the intersection ,
By the plurality of first linear portions and the plurality of second linear portions being substantially orthogonal, a plurality of substantially rectangular through-holes are formed in the lattice body in plan view. And
In the rectangular shape, a ceramic lattice body in which two opposing sides are curved inward so as to be close to each other in the longitudinal central region . The lattice body has a first surface and a second surface located on the opposite side.
At the intersection of the first filament part and the second filament part, on the first filament part relatively located on the first surface side, the second relatively situated on the second surface side. When the thickness direction cross section of the 1st and 2nd line part is observed in parts other than the intersection, the 1st line part has those 1st surface sides, 2. The ceramic lattice body according to claim 1, wherein the ceramic lattice body has a flat shape parallel to the first surface, and a second curved surface shape of the second surface side from the first surface toward the second surface. The surface roughness Ra on the first surface side of the first and second linear portions is 0.01 μm or more and 20 μm or less , and the surface roughness Ra on the second surface side is 10 μm or more and 300 μm or less. The ceramic lattice body as described. The ceramic lattice body according to any one of claims 1 to 3 , wherein a thickness of the second linear portion is larger than a thickness of the first linear portion at a portion other than the intersection. The ceramic lattice body according to any one of claims 1 to 4 , comprising a ceramic containing alumina, mullite, cordierite, zirconia, silicon nitride, or silicon carbide. The ceramic lattice body according to claim 5 , wherein the surface is coated with zirconia. The ceramic lattice body as described in any one of Claim 1 thru | or 6 used as a setter for baking of ceramic products. The ceramic lattice body according to any one of claims 1 to 7 , wherein an outer frame is provided on an outer periphery. The outer frame is first made linear portions and or the same material as the second linear portions, the first linear portions and or the second linear portions and claim 8 which are integrally formed The ceramic lattice described in 1. The ceramic lattice body according to any one of claims 1 to 9 , wherein a plurality of the lattice bodies are used and stacked to form a multilayer structure of two or more layers.