JP6746827B1 - Ceramic structure - Google Patents

Abstract

The ceramic structure (1) is made of ceramics and extends in one direction. Ceramics passing on a diagonal line of a quadrangle defined by a plurality of second linear portions (20) intersecting the first linear portion (10) and the second linear portion (20) And a third linear portion (30) made of. A plurality of triangular through holes defined by the first linear portion (10), the second linear portion (20) and the third linear portion (30) are formed.

Description

The present invention relates to a structure formed by combining ceramic linear portions.

The present applicant has previously found that a plurality of first linear filaments made of ceramics extending in one direction and a plurality of second linear filaments made of ceramics extending in a direction intersecting with the first linear filaments. A ceramic grid body having a strip portion has been proposed (see Patent Documents 1 and 2). In any intersection of the first line portion and the second line portion in this ceramic lattice, the second line portion is arranged on the first line portion. It has a rectangular through hole in a plan view.

JP, 2018-184304, A JP, 2008-193274, A

The ceramic lattice bodies described in Patent Documents 1 and 2 have high strength and excellent spalling resistance due to the lattice structure. In particular, the strength along the direction parallel to the lattice becomes extremely high. However, in the diagonal direction of the lattice, further improvement in strength may be required.

Therefore, an object of the present invention is to improve a structure composed of a plurality of ceramic linear parts, and more specifically to make the structure have higher strength and higher thermal shock resistance. ..

The present invention provides a plurality of first linear filament parts made of ceramics extending in one direction, and a plurality of second linear filament parts made of ceramics extending in a direction intersecting with the first linear filament parts. , A third filament portion made of ceramics that passes on a diagonal of a quadrangle defined by the first filament portion and the second filament portion intersecting each other,
By providing a plate-shaped ceramic structure having a plurality of triangular through holes defined by the first linear portion, the second linear portion and the third linear portion, It is a solution to the problem.

FIG. 1 is a plan view showing an embodiment of the ceramic structure of the present invention. FIG. 2 is a perspective view of the ceramic structure shown in FIG. 1 viewed from the upper surface side. FIG. 3 is a perspective view of the ceramic structure shown in FIG. 1 viewed from the lower surface side. FIG. 4 is a cross-sectional view taken along the line AA in FIG. FIG. 5 is a sectional view taken along line BB in FIG. FIG. 6 is a cross-sectional view of the third filament portion in the ceramic structure shown in FIG. FIGS. 7A and 7B are cross-sectional views of the first linear portion and the second linear portion in the ceramic structure shown in FIG. 1, respectively. FIG. 8A is a plan view showing another embodiment of the ceramic structure of the present invention, and FIG. 8B is a sectional view taken along the line AA in FIG. 8A. FIG. 9A is a plan view showing still another embodiment of the ceramic structure of the present invention, and FIG. 9B is a sectional view taken along the line AA in FIG. 9A.

The present invention will be described below based on its preferred embodiments with reference to the drawings. 1 to 7 show one embodiment of the ceramic structure of the present invention. A ceramics structure (hereinafter, also simply referred to as “structure”) 1 shown in these figures is a flat plate-shaped product and has a first surface 1a and a second surface 1b facing the first surface 1a.

The structure 1 of the present embodiment has a plurality of first linear filaments 10 made of ceramics extending in the one direction X. Each first linear portion 10 is substantially straight and extends parallel to each other. The intervals between the adjacent first linear portions 10 are substantially equal.

The structure 1 has a plurality of second filament portions 20 made of ceramics and extending in the Y direction which is a direction different from the X direction. Each second linear portion 20 is a straight line and extends parallel to each other. The intervals between the adjacent second linear portions 20 are substantially equal. Since the X direction and the Y direction are different directions, the first linear portion 10 and the second linear portion 20 intersect. The intersection angle between the two linear portions 10 and 20 can be set according to the specific application of the ceramic structure 1. For example, the intersecting angle of the second linear portion 20 with respect to the first linear portion 10 can be 90 degrees. Alternatively, as shown in FIG. 1, when viewed along the counterclockwise direction with the first linear portion 10 as a reference, the angle of intersection between the first linear portion 10 and the second linear portion 20. It is also possible to change θ within the range of 60°±40° or 90°±40°. The plurality of first linear portions 10 and the plurality of second linear portions 20 intersect with each other, whereby a lattice having quadrangular apertures is formed in the plan view of the structure 1. .. FIG. 1 shows a state in which a lattice having diamond-shaped openings is formed by the intersection of the first linear portions 10 and the second linear portions 20, but the shape is rhombic. Other quadrilaterals, such as rectangles and squares not shown, can also be used.

The structure 1 further has a plurality of third filament portions 30 made of ceramics. Each of the third linear portions 30 is a straight line and extends parallel to each other. The third linear portion 30 extends along the Z direction, which is a direction different from both the extending direction X of the first linear portion 10 and the extending direction Y of the second linear portion 20. Each 3rd linear part 30 is arrange|positioned so that it may pass on the diagonal of the quadrangle defined by the 1st linear part and the 2nd linear part intersecting. As a result, in the structure 1 of the present embodiment, a plurality of triangular through holes 3 defined by the first linear portion 10, the second linear portion 20, and the third linear portion 30 are formed. Has been done. FIG. 1 shows a state in which a substantially equilateral triangular through hole 3 is formed.

As described above, in the structure 1, the third linear portion 30 passes on the diagonal line of the quadrangle defined by the intersection of the first linear portion and the second linear portion. Therefore, it is preferable that the first to third linear portions 10, 20, 30 always intersect at one intersection 2 in the plan view of the structure 1. In other words, it is preferable that the structure 1 does not substantially have an intersecting portion where only two of the three linear portions 10, 20, 30 intersect.

As in the present embodiment, the structure 1 in which the triangular through holes are formed by using the three types of linear portions in combination has high strength along the three directions of the X direction, the Y direction, and the Z direction. .. Therefore, the anisotropy of strength reduction is smaller than that of the lattice bodies described in Patent Documents 1 and 2 which have high strength along the two directions. In particular, when the through hole 3 is a substantially equilateral triangle as shown in FIG. 1, each side of the equilateral triangle has substantially the same length, and among the first to third linear portions 10, 20, 30. Since it is formed of any one of the above, it is substantially equivalent in strength. Therefore, the anisotropy of strength decrease is further reduced, and the strength is almost equal in all directions.

Moreover, according to the structure of the present embodiment, it is possible to easily form the small through holes as compared with the lattice bodies described in Patent Documents 1 and 2. Therefore, when the structure of the present embodiment is used as a setter also called a shelf plate or a floor plate, which is used when firing a body to be fired, for example, a body to be fired of a smaller size is mounted on the structure. It is possible to place it. This is particularly advantageous when manufacturing chip monolithic ceramic capacitors (MLCC) by firing.

In addition, the structure of the present embodiment can be made lighter in mass than the lattice bodies when exhibiting the same strength as the lattice bodies described in Patent Documents 1 and 2. As a result, when the structure of the present embodiment is used as a setter, there is an advantage that temperature unevenness in the structure during firing is reduced and thermal shock resistance is improved.

As shown in FIGS. 4 and 5, in the structure 1, the third linear portion 30 is located on the first surface 1a side, and the first linear portion 10 is located on the second surface 1b side. ing. Then, the second linear portion 20 is arranged on the third linear portion 30, and the first linear portion 10 is arranged on the second linear portion 20. Further, as shown in FIG. 1 to FIG. 5, the third line portion 30 and the second line portion 20 have a second line on the third line portion 30 at any intersection 2. The strip 20 is arranged. That is, in the intersection portion 2, of the two surfaces 1a and 1b of the structure 1, on the third linear portion 30 located relatively on the first surface 1a side, the second surface 1b side relatively. The second linear portion 20 located at is arranged. In addition to this, the first filament 10 is arranged on the second filament 20 at any intersection 2 between the second filament 20 and the first filament 10. ing. That is, in the intersecting portion 2, of the two surfaces 1a and 1b of the structure 1, on the second linear portion 20 located relatively on the first surface 1a side, the second surface 1b side relatively. The 1st linear part 10 located in is arranged.

The thickness of the intersecting portion 2 is larger than the sum of the thickness of the first linear portion 10, the thickness of the second linear portion 20, and the thickness of the third linear portion 30 in the portion other than the intersecting portion. May be. Alternatively, the thickness of the intersecting portion 2 is the same as the sum of the thickness of the first linear portion 10, the thickness of the second linear portion 20, and the thickness of the third linear portion 30 in the portion other than the intersecting portion. It may be present or may be smaller than the sum. Therefore, the maximum thickness portion of the structure 1 exists at the intersection portion 2 or at a portion other than the intersection portion.

As shown in FIG. 6, the third linear portion 30 has a constant width W3 in a plan view at a position other than the intersection 2. As shown in FIG. 6, the cross-sectional shape of the third linear portion 30 along the thickness direction in the direction orthogonal to the longitudinal direction is the first surface 30a located on the first surface 1a side of the ceramic structure 1. And a second surface 30b located on the second surface 1b side of the ceramic structure 1. Specifically, the third linear portion 30 has a straight line portion 30A and both end portions of the straight line portion 30A in a portion other than the intersecting portion 2 in a cross section along the thickness direction in a direction orthogonal to the longitudinal direction thereof. Has a shape composed of a convex curved portion 30B whose end portion is. As a result, the first surface 30a of the third linear portion 30 has a flat cross section in the thickness direction of the linear portion 30. The flat surface is substantially parallel to the in-plane direction of the ceramic structure 1. On the other hand, in the second surface 30b of the third linear portion 30, the cross section in the thickness direction of the linear portion 30 is a convex curved surface shape from the first surface 1a to the second surface 1b of the ceramic structure 1. Are doing

Similar to the third linear portion 30, as shown in FIGS. 7A and 7B, the first linear portion 10 and the second linear portion 20 are also flat at positions other than the intersection 2. When viewed, it has constant widths W1 and W2. The widths W1 and W2 may be the same as or different from each other. The widths W1 and W2 may be the same as or different from the width W3 of the third linear portion 30. From the viewpoint of manufacturing the structure 1, it is easy to make W1, W2 and W3 the same. The first linear portion 10 and the second linear portion 20 have a ceramic structure, as shown in FIGS. 7A and 7B, whose sectional shapes along the thickness direction in the direction orthogonal to the longitudinal direction thereof are as shown in FIGS. It is defined by the first surfaces 10a and 20a located on the first surface 1a side of the body 1 and the second surfaces 10b and 20b located on the second surface 1b side of the ceramic structure 1. The cross sections in the thickness direction of the first surfaces 10a, 20a of the first linear portion 10 and the second linear portion 20 are convex from the second surface 1b of the ceramic structure 1 toward the first surface 1a. It has a curved shape. On the other hand, the second surfaces 10b and 20b of the first linear portion 10 and the second linear portion 20 have a cross section in the thickness direction directed from the first surface 1a to the second surface 1b of the ceramic structure 1. It has a convex curved shape. This curved surface shape may be the same as or different from the curved surface shape of the third linear portion 30. In the present embodiment, the first surface 10a, 20a and the second surface 10b, 20b of the first linear portion 10 and the second linear portion 20 are symmetrical, and as a result, the first linear portion 10a, 20a The linear portions 10 and the second linear portions 20 have a circular or elliptical cross-sectional shape along the thickness direction in the direction orthogonal to the longitudinal direction.

As shown in FIG. 5, when the linear portion 30A in the third linear portion 30, that is, the first surface 10a is placed on the plane P as the placement surface, all the first surfaces 30a are located on the plane P. .. Since the first surface 30a forms the first surface 1a of the ceramic structure 1, the fact that all the first surfaces 30a are located on the plane P means that the first surface 1a of the structure 1 is a flat surface. It means that it has become. Therefore, when the structure 1 is mounted such that the first surface 1a thereof contacts the flat mounting surface, the entire area of the first surface 1a contacts the mounting surface.

As shown in FIG. 5, when the linear portion 30A in the third linear portion 30, that is, the first surface 30a is placed on the plane P as the mounting surface, the first linear portion 10 and the second linear portion The part 20 has a shape that is separated from the plane P between two adjacent intersecting parts 2. Therefore, a space S is formed between the first linear portion 10 and the second linear portion 20 and the plane P between the two adjacent intersecting portions 2.

On the other hand, the second surface 1b of the structure 1 is composed of the second surface 10b of the first linear portion 10 having a convex curved surface shape as shown in FIG. Instead, it has an uneven surface.

At the intersection portion 2 of the structure 1, the three types of filament portions 10, 20, 30 are integrated. "Integrated" means that, in observing the cross section of the intersecting portion 2, the three types of linear portions 10, 20, 30 are a continuous structure as ceramics. The through holes 3 formed in the structure 1 by the intersection of the three types of linear portions 10, 20, 30 have the same size and the same shape. The through holes 3 are regularly arranged.

In the third linear portion 30, the highest position of the second surface 30b of the third linear portion 30, that is, the position of the top of the third linear portion 30, extends in the portion other than the intersection portion 2 of the third linear portion 30. It is the same along the direction.
Regarding the second linear portion 20, in the portion other than the intersecting portion 2, the highest position of the second surface 20b of the second linear portion 20 is along the extending direction of the second linear portion 20. They are in the same position as each other. The lowest position of the first surface 20a of the second linear portion 20 is the same position as the second linear portion 20 in the extending direction of the second linear portion 20 except for the intersection 2.
Further, with respect to the first linear portion 10, the highest position of the second surface 10b in the first linear portion 10 is the first position at both the position of the intersection 2 and the position other than the intersection 2. It is located at the same position along the extending direction of the linear portion 10. The lowest position of the first surface 10a of the first linear portion 10 is the same position as the first linear portion 10 in the extending direction of the first linear portion 10 except the intersection 2.

As shown in FIGS. 4 and 5, when the cross section 2 of the structure 1 is viewed in a vertical cross section, the third linear portion 30 and the second linear portion 20 are similar to each other in the third linear portion 30. Only the top of the convex curved portion 30B is in contact with the top of the downwardly convex curved portion of the circular or elliptical shape of the second linear portion 20, that is, the top of the first surface 20a. In other words, the third linear portion 30 and the second linear portion 20 are in a state of point contact or surface contact close to point contact. The second linear portion 20 and the first linear portion 10 are the tops of the upwardly convex curved lines in the circular or elliptical shape of the second linear portions 20, that is, the tops of the second surface 20b, Only the apex of the downward convex curve in the circular or elliptical shape of the linear portion 10, ie, the apex of the first surface 10a is in contact. As a result of the study by the present inventor, it has been found that the structure 1 has improved spalling resistance because the three types of linear portions 10, 20, 30 are in such a contact state. The reason for this is that the three types of linear portions 10, 20, 30 are connected by point contact or surface contact close thereto, and these linear portions 10, 20, 30 are excessively strongly bonded. It is considered that this is because it becomes difficult to reduce the volume change caused by rapid heating and/or cooling due to the difficulty. From this point of view, the intersection portion 2 has a thickness Tc of a thickness T1 of the first linear portion 10 at a position other than the intersection portion 2 and a thickness T2 of the second linear portion 20 at a position other than the intersection portion 2. And (T1+T2+T3) which is the sum of the thickness T3 of the third linear portion 30 at a position other than the intersection portion 2, preferably 0.5 or more and 1.0 or less, more preferably 0.8 or more 1 The point contact state is such that it is 0.0 or less, more preferably 0.9 or more and 1.0 or less.

In order to bring the first linear portion 10, the second linear portion 20, and the third linear portion 30 into the point contact or the surface contact close to the point contact, for example, a structure described later is used. The body 1 may be manufactured.

When the ceramic structure 1 having the above structure is used as, for example, a setter for firing a body to be fired, if the body to be fired is placed on the first surface 1a of the structure 1, the first surface 1a Since is a flat surface, it is suitable for placing an object to be fired that requires flatness. Examples of the object to be fired required to have flatness include a small chip-shaped electronic component such as a laminated ceramic capacitor. Since these small electronic components are required not to be caught by the setter in the firing process, it is advantageous that the first surface 1a of the structure 1 is flat. Further, since the object to be fired contacts only the first linear portion 10 which is a member forming the first surface 1a, the contact area between the structure 1 and the object to be fired is significantly reduced, and thus the object to be fired It facilitates rapid heating and cooling of the body. Further, since the structure 1 is formed by the intersection of the three kinds of linear portions 10, 20, 30 and the plurality of through holes 3 are formed, the heat capacity is small, and also from this point, the abruptness of the object to be fired is sharp. Easy to heat and cool. Furthermore, since the structure 1 has good air permeability due to the presence of the plurality of through holes 3, this also facilitates rapid cooling of the body to be fired. The good air permeability becomes more remarkable due to the fact that the second linear portion 20 floats between the adjacent intersecting portions 2. Moreover, in the structure 1, since the three kinds of linear portions 10, 20, 30 are integrated at the intersection portion 2, the structural body 1 has sufficient strength.

On the other hand, it is advantageous to mount a mm-order object to be fired on the second surface 1b of the structure 1. Where the second surface 1b is an uneven surface due to the curved surface of the first linear portion 10, an electronic component of this order may have unevenness on the surface on which it is placed. This is because it is advantageous from the viewpoint of enhancing the sex.

As described above, in the structure 1 of the present embodiment, one surface thereof is flat and the other surface thereof is the uneven surface, so that the mounting surface can be properly used according to the type of the object to be fired. That is advantageous.

From the viewpoint of making the various advantageous effects described above more remarkable, the value of T3 is preferably 50 μm or more and 5 mm or less, and more preferably 200 μm or more and 2 mm or less. On the other hand, the values of T1 and T2 are preferably each independently 50 μm or more and 5 mm or less, and more preferably 200 μm or more and 2 mm or less. There is no particular limitation on the magnitude relationship between the values of T1, T2, and T3.

From the same viewpoint, the thickness Tc at the intersection 2 is preferably 20 μm or more and 5 mm or less, and preferably 50 μm or more and 2 mm with respect to (T1+T2+T3), preferably 0.5 or more and 1.0 or less. The following is more preferable.

Moreover, when the cross-sectional shape in the thickness direction of the first linear portion 10 and the second linear portion 20 (see FIGS. 7A and 7B) is elliptical, the minor axis of the elliptical shape is the structure. It is preferable that the long axis of the elliptical shape matches the thickness direction of the body 1 and the long axis of the ellipse matches the plane direction of the structure 1 from the viewpoint that the object to be fired can be placed successfully. In this case, the ratio of the major axis/the minor axis is preferably 1 or more and 5 or less, and more preferably 1 or more and 3 or less. Further, the cross-sectional shape of the first linear portion 10 and the second linear portion 20 in the thickness direction being elliptical or circular also contributes to improving the strength of the structure 1.

The triangular through-hole 3 formed in the ceramic structure 1 has an area of 100 μm ² or more and 100 mm ² or less, and particularly 2500 μm ² or more and 1 mm ² or less, which reduces the heat capacity of the structure 1 and air permeability. Is preferable and the strength of the structure 1 is maintained. The ratio of the total area of the through holes 3 to the apparent area of the ceramic structure 1 in plan view is preferably 1% or more and 80% or less, more preferably 3% or more and 70% or less, It is more preferably 10% or more and 70% or less. This ratio is obtained by cutting the ceramic structure 1 in a plan view and cutting it into a rectangle of an arbitrary size, calculating the total area of the through holes 3 included in the rectangle, and dividing the total by the area of the rectangle. It is calculated by multiplying by. The area of each through hole 3 can be measured by image analysis of a microscope observation image of the structure 1.

In relation to the area of the through hole 3, the width W3 of the third linear portion 30 is preferably 50 μm or more and 10 mm or less, and more preferably 75 μm or more and 1 mm or less. On the other hand, the widths W1 and W2 of the first linear portion 10 and the second linear portion 20 are preferably each independently 50 μm or more and 10 mm or less, and more preferably 75 μm or more and 1 mm or less. There is no particular limitation on the magnitude relationship among the values of W1, W2, and W3.

In relation to the widths W1, W2 and W3 of the first, second and third linear portions 10, 20, 30 the distance D3 between the adjacent third linear portions 30 is 100 μm or more and 10 mm or less. The thickness is preferably 150 μm or more and 5 mm or less. On the other hand, it is preferable that the distance D1 between the adjacent first linear portions 10 and the distance D2 between the second linear portions 20 are independently 100 μm or more and 10 mm or less, and 150 μm or more and 5 mm or less. Is more preferable. D1, D2 and D3 may be the same as or different from each other. From the viewpoint of manufacturing the structure 1, it is easy to make D1, D2 and D3 the same.

Various materials can be used as the ceramic material forming the ceramic structure 1. Examples thereof include alumina, silicon carbide, silicon nitride, zirconia, mullite, zircon, cordierite, aluminum titanate, magnesium titanate, magnesia, titanium diboride, and boron nitride. These ceramic materials can be used alone or in combination of two or more. In particular, it is preferably made of ceramics containing alumina, mullite, cordierite, zirconia or silicon carbide. When ceramics containing zirconia is used, zirconia completely stabilized by adding yttria can be used in order to make the structure 1 more suitable for use at high temperature firing. When the ceramic structure 1 is subjected to rapid heating and cooling, it is particularly preferable to use silicon carbide as the ceramic material. Since silicon carbide may react with the object to be fired, when silicon carbide is used as the ceramic material, it is preferable to coat the surface with a ceramic material having low reactivity such as zirconia. As the raw material powder of the ceramic material forming the structure 1, it is preferable to use a powder having a particle diameter of 0.1 μm or more and 200 μm or less in consideration of viscosity and sinterability when formed into a paste. The ceramic materials forming the three types of linear portions 10, 20, 30 may be the same or different. From the viewpoint of increasing the integrity of the three types of linear portions 10, 20, 30 in the intersecting portion 2, it is preferable that the ceramic materials forming the linear portions 10, 20, 30 are the same.

Next, a suitable method for manufacturing the ceramic structure 1 of the present embodiment will be described. In the present manufacturing method, first, a raw material powder of a ceramic material is prepared, and the raw material powder is mixed with a medium such as water and a binder to prepare a paste for producing a linear portion.

As the binder, the same binder as that conventionally used for this type of paste can be used. Examples thereof are polyvinyl alcohol, polyethylene glycol, polyethylene oxide, dextrin, sodium lignin sulfonate and ammonium, carboxymethyl cellulose, ethyl cellulose, hydroxypropyl methyl cellulose, carboxymethyl cellulose, hydroxyethyl cellulose, hydroxyethyl methyl cellulose, sodium and ammonium alginate, epoxy resin, phenol. Resins, gum arabic, polyvinyl butyral, acrylic polymers such as polyacrylic acid and polyacrylamide, thickening polysaccharides such as xanthan gum and guar gum, gelatin, gelling agents such as agar and pectin, vinyl acetate resin emulsion, wax emulsion, Inorganic binders such as alumina sol and silica sol are also included. Two or more of these may be mixed and used.

It is preferable that the paste has a high viscosity at the temperature at which the paste is applied, since the structure 1 having the structure of the present embodiment can be manufactured successfully. Specifically, the viscosity of the paste is preferably 1.5 MPa·s or more and 5.0 MPa·s or less, and more preferably 1.7 MPa·s or more and 3.0 MPa·s or less at the temperature at the time of application. preferable. The viscosity of the paste was measured using a cone-plate type rotary viscometer or a rheometer at a rotational speed of 0.3 rpm and measured 4 minutes after the start of measurement.

The ratio of the raw material powder of the ceramic material in the paste is preferably 20% by mass or more and 85% by mass or less, and more preferably 35% by mass or more and 75% by mass or less. The proportion of the medium in the paste is preferably 15% by mass or more and 60% by mass or less, and more preferably 20% by mass or more and 55% by mass or less. The proportion of the binder in the paste is preferably 1% by mass or more and 40% by mass or less, and more preferably 5% by mass or more and 25% by mass or less.

The paste may contain a thickener, a coagulant, a thixotropic agent, etc. as a viscosity modifier. Examples of the thickener include polyethylene glycol fatty acid ester, alkylallyl sulfonic acid, alkyl ammonium salt, ethyl vinyl ether/maleic anhydride copolymer, fumed silica, proteins such as albumin and the like. In many cases, the binder is classified as a thickener because it has a thickening effect, but when more strict viscosity adjustment is required, it is not separately classified as a binder. Agents can be used. Examples of the aggregating agent include polyacrylamide, polyacrylic acid ester, aluminum sulfate, polyaluminum chloride and the like. Examples of thixotropic agents include fatty acid amides, polyolefin oxides, and polyetherester type surfactants. As the solvent for preparing the paste, alcohol, acetone, ethyl acetate and the like are used in addition to water, and two or more kinds thereof may be mixed. Further, in order to stabilize the discharge amount, a plasticizer, a lubricant, a dispersant, a sedimentation inhibitor, a pH adjuster, etc. may be added. Examples of the plasticizer include glycol type such as trimethylene glycol and tetramethylene glycol, glycerin, butanediol, phthalic acid type, adipic acid type and phosphoric acid type. Examples of the lubricant include liquid paraffin, micro wax, hydrocarbons such as synthetic paraffin, higher fatty acids, and fatty acid amides. Examples of the dispersant include sodium or ammonium polycarboxylic acid, acrylic acid-based, polyethylenimine, and phosphoric acid-based. Examples of sedimentation inhibitors include polyamine amine salts, bentonite, aluminum stearate and the like. Examples of the pH adjusting agent include sodium hydroxide, aqueous ammonia, oxalic acid, acetic acid, hydrochloric acid and the like.

Using the obtained paste, a plurality of linear filamentous third coated bodies are formed in parallel and linearly on a flat substrate. The third linear filament coated body corresponds to the third linear filament portion 30 in the target structure 1. The third paste, which is a paste used to form the third filament coating body, contains the above-mentioned third raw material powder of the ceramic material, a medium, and a binder. Various coating devices such as a small extruder or a printing machine can be used to form the third filament coating material using the third paste.

After the medium is removed from the third filament coating body, a second paste is then used to make a plurality of second filament coating bodies parallel to each other so as to intersect the third filament coating body. And it is formed linearly. The line-shaped second coated body corresponds to the second line-shaped portion 20 in the target structure 1. The second paste may have the same composition as the third paste, and contains the second raw material powder of the ceramic material, the medium and the binder. For forming the second filament coated body, the same coating device as that used for the third filament coated body can be used. After the second filament coated body is formed, the medium is removed from the second filament coated body and dried to further increase the viscosity of the second filament coated body. This operation can be performed in the same manner as the operation performed on the third filament coated body.

When the medium is removed from the second filament coated body, then, using the first paste, a plurality of filament first filaments are formed so as to intersect the second filament coated body and the third filament coated body. The coated bodies are formed parallel to each other and linearly. The first linear filament coated body corresponds to the first linear filament portion 10 in the target structure 1. The first paste may have the same composition as the second paste and/or the third paste, and contains the first raw material powder of a ceramic material, a medium, and a binder. The same coating device as that used for forming the line-shaped second coated body and the line-shaped third coated body can be used for forming the line-shaped first coated body. After the first filament coating material is formed, the medium is removed from the first filament coating material and dried to further increase the viscosity of the first filament coating object. This operation can be performed in the same manner as the operation performed on the line-shaped second coated body and/or the line-shaped third coated body. In this manner, the formation of the third linear filament coating body and the removal of the medium, the formation of the second linear filament coating body and the removal of the medium, and the formation of the first linear filament coating body and the removal of the medium are sequentially performed. By doing so, the structure 1 in which the second linear portion 20 is located on the third linear portion 30 and the first linear portion 10 is located on the second linear portion 20 is successful. can get.

The pre-fired structure thus obtained is separated from the substrate, placed in a firing furnace, and fired. By this firing, the intended ceramic structure 1 is obtained. Firing can generally be performed in the atmosphere. As the firing temperature, an appropriate temperature may be selected according to the type of raw material powder of the ceramic material. The same applies to the firing time.

By the above method, the target ceramic structure 1 is obtained. The ceramic structure 1 is suitably used as a setter for degreasing or firing ceramic products such as shelves and floor plates, and can also be used as a kiln tool other than the setter, for example, a jar or a beam. Further, it can also be used for applications other than kiln tools, for example, various jigs such as filters and catalyst carriers, and various structural materials. In this case, it is general that the object to be fired is placed on the second surface 1b which is the uneven surface of the structure 1, but depending on the kind of the object to be fired, it may be placed on the first surface 1a which is a flat surface. You may mount the to-be-baked body. For example, when performing a firing step in the process of manufacturing an electronic component such as a chip monolithic ceramic capacitor (MLCC) or a monolithic ceramic inductor, it is preferable to place the article to be fired on the first surface 1a which is a flat surface. The setter on which the article to be fired is placed may fire the article to be fired, or may further form another ceramic structure 1 or another structure that can serve as a lid so that the article to be fired does not scatter. It may be placed and fired. Further, in order to improve the efficiency of the firing process, the ceramic structures 1 on which the objects to be fired are placed may be stacked in a plurality of stages and may be fired, or a block-like structure may be formed between the plurality of stacked ceramic structures 1. A spacer may be placed and baked. In addition, in the ceramic structure 1, the ceramic structure 1 is placed on a mounting portion of another ceramic tray, and a body to be fired is placed on the ceramic structure 1 to form one unit. It is also applicable to a mode in which the units are fired in a stacked state.

Next, another embodiment of the ceramic structure of the present invention will be described with reference to FIGS. 8(a) and 8(b) and FIGS. 9(a) and 9(b). Regarding these embodiments, only the points different from the above-described embodiments will be described, and for the points that are not particularly described, the description of the above-described embodiments will be applied as appropriate. Further, in FIGS. 8A and 8B and FIGS. 9A and 9B, the same members as those in FIGS. 1 to 7 are denoted by the same reference numerals.

The ceramic structure 1A of the embodiment shown in FIGS. 8(a) and 8(b) differs from the embodiment shown in FIG. 1 in the way of stacking the first, second and third linear portions 10, 20, 30. It's different. Specifically, the second linear portion 20 is arranged on the first linear portion 10, and the third linear portion 30 is arranged on the second linear portion 20. The 3rd linear part 30 is arrange|positioned so that it may pass on the diagonal of the quadrangle defined by the 1st linear part and the 2nd linear part intersecting.

The first linear portion 10, the second linear portion 20, and the third linear portion 30 intersect at one intersecting portion 2. Then, at any intersection 2, the second linear portion 20 is arranged on the first linear portion 10. Further, at any intersection 2, the third linear portion 30 is arranged on the second linear portion 20.

As shown in FIG. 8( b ), the first linear portion 10 has a cross-sectional shape along the thickness direction in a direction orthogonal to the longitudinal direction thereof, which is located on the first surface 1 a side of the ceramic structure 1. It is defined by one surface 10a and a second surface 10b located on the second surface 1b side of the ceramic structure 1. Specifically, the first linear portion 10 has a cross-section along the thickness direction in a direction orthogonal to the longitudinal direction at a portion other than the intersecting portion 2 and the straight portion 10A and both end portions of the straight portion 10A. Has a shape including a curved portion 10B having a convex shape whose end portion is. As a result, the first surface 10a of the first linear portion 10 has a flat cross section in the thickness direction of the linear portion 10. The flat surface is substantially parallel to the in-plane direction of the ceramic structure 1. On the other hand, in the second surface 10b of the first linear portion 10, the cross section in the thickness direction of the linear portion 10 is a convex curved surface shape from the first surface 1a to the second surface 1b of the ceramic structure 1. Are doing On the other hand, the cross section of the second linear portion 20 and the third linear portion 30 has a circular or elliptical shape in a portion other than the intersecting portion 2.

The ceramic structure 1B of the embodiment shown in FIGS. 9A and 9B is also the same as the ceramic structure 1A of the embodiment shown in FIGS. 8A and 8B. The method of stacking the linear portions 10, 20, 30 is different from that of the embodiment shown in FIG. Specifically, the third linear portion 30 is arranged on the second linear portion 20, and the first linear portion 10 is arranged on the third linear portion 30. The 3rd linear part 30 is arrange|positioned so that it may pass on the diagonal of the quadrangle defined by the 1st linear part and the 2nd linear part intersecting.

The first linear portion 10, the second linear portion 20, and the third linear portion 30 intersect at one intersecting portion 2. And in any intersection 2, the 3rd line part 30 is arranged on the 2nd line part 20. Further, at any intersection 2, the first linear portion 10 is arranged on the third linear portion 30.

As shown in FIG. 9( b ), the second linear portion 20 has a cross-sectional shape along the thickness direction in a direction orthogonal to the longitudinal direction thereof located on the first surface 1 a side of the ceramic structure 1. It is defined by one surface 20a and a second surface 20b located on the second surface 1b side of the ceramic structure 1. Specifically, in the second linear portion 20, the cross section along the thickness direction in the direction orthogonal to the longitudinal direction of the second linear portion 20 is a linear portion 20A and both end portions of the linear portion 20A in a portion other than the intersection portion 2. Has a shape composed of a curved portion 20B having a convex shape having an end portion of. As a result, the first surface 20a of the second linear portion 20 has a flat cross section in the thickness direction of the linear portion 20. The flat surface is substantially parallel to the in-plane direction of the ceramic structure 1. On the other hand, in the second surface 20b of the second linear portion 20, the cross section in the thickness direction of the linear portion 20 is a convex curved surface shape from the first surface 1a to the second surface 1b of the ceramic structure 1. Are doing The cross sections of the second linear portion 30 and the first linear portion 10 have a circular or elliptical shape in a portion other than the intersecting portion 2.

The above-described embodiments shown in FIGS. 8A and 8B and FIGS. 9A and 9B also achieve the same effects as those of the embodiments shown in FIGS. 1 to 7.

Next, items common to the above-described embodiments will be described. The shape of the ceramic structure of each embodiment described above is not particularly limited in plan view, and may be, for example, a circular shape, an elliptical shape, a rectangular shape, or the like. Alternatively, it may have a contour that is a combination of straight lines and curved lines. When the ceramic structure has a straight side portion on at least a part of its contour, any one of the first, second and third linear portions 10, 20, 30 is a straight line portion. It is preferable that the ceramic structure is arranged in parallel with the side portions, from the viewpoint of more strongly maintaining impact resistance near the linear side portions of the ceramic structure. Further, it is preferable that the straight side portion intersects with the intersecting portion at any position of the straight side portion in order to prevent chipping due to chipping at the end portion of the ceramic structure.

Particularly, in the case of the ceramic structure 1 of the embodiment shown in FIG. 1, it is preferable that the first linear portion 10 or the third linear portion 30 be arranged in parallel with the straight side portion. In this case, the second linear portion 20 and the straight side portion are 10 degrees or more and 80 degrees or less or 100 degrees or more and 170 degrees or less, particularly 20 degrees or more and 70 degrees or less, or 110 degrees or more and 160 degrees or less, and particularly 30 degrees or more 60. It is preferable that they intersect at an angle of less than or equal to 105 degrees or greater than or equal to 105 degrees and 150 degrees from the viewpoint of effectively preventing propagation of defects such as cracks generated in the ceramic structure 1.
In the case of the ceramic structure 1A of the embodiment shown in FIG. 8A, it is preferable that the first linear portion 10 or the third linear portion 30 be arranged in parallel with the straight side portion. In this case, it is more preferable that the second linear portion 20 intersects with the straight side portion at the above-mentioned angle from the viewpoint of effectively preventing propagation of defects such as cracks generated in the ceramic structure 1A.
In the case of the ceramic structure 1B of the embodiment shown in FIG. 9A, it is preferable that the third linear portion 30 is arranged in parallel with the straight side portion. In this case, it is preferable that the second linear portion intersects the straight side portion at the above-mentioned angle from the viewpoint of effectively preventing propagation of defects such as cracks generated in the ceramic structure 1B.

In addition, the ceramic structure of each of the above-described embodiments may be provided with an outer frame (not shown) on the outer periphery of the structure for the purpose of improving its strength. The outer frame may be integrally formed from the same material as the structure, or may be manufactured separately from the structure and joined by a predetermined joining means. The outer frame may have a constant width, or may have a wide portion and a narrow portion. When the width of the outer frame is constant, the width is preferably 0.4 mm or more and 10 mm or less. When the width of the outer frame is not constant, the width is preferably 1 mm or more and 10 mm or less in the widest part, and is preferably 0.5 mm or more and 1 mm or less in the narrowest part.

Although the present invention has been described above based on its preferred embodiment, the present invention is not limited to the embodiment. For example, in each of the above-described embodiments, three types of linear strips composed of the first, second and third linear strips 10, 20 and 30 are used to form a structure in which three layers form one unit. However, instead of this, two or more repeating units composed of the first, second and third linear portions 10, 20, 30 may be laminated to form a structure. ..

Further, in the embodiment shown in FIG. 1, the first linear portion 10 is arranged below the third linear portion 30, or the third linear portion is arranged on the first linear portion 10. You may. Similarly, in the embodiment shown in FIG. 8A, the third linear portion 30 is arranged below the first linear portion 10, and the first linear portion 30 is provided with the first linear portion 30. The streak portion 10 may be arranged. Further, similarly, in the embodiment shown in FIG. 9A, the first linear portion 10 is arranged below the second linear portion 20, and the second linear portion 10 is provided with the second linear portion 10 on the lower side. The linear portions 20 may be arranged.

Hereinafter, the present invention will be described in more detail with reference to Examples. However, the scope of the invention is not limited to such embodiments. Unless otherwise specified, "part" means "part by mass". The form of the ceramic structure, the number of laminated filaments, the distance between filaments, the mass, etc. are as shown in Table 1.

[Example 1]
In this example, the flat plate-shaped ceramic structure 1 shown in FIG. 1 was manufactured.
(1) Preparation of paste for forming linear coated body: 65.3 parts of 8 mol% yttria-added completely stabilized zirconia powder having an average particle size of 0.8 μm, and 5.0 parts of a methylcellulose-based binder as an aqueous binder, As a plasticizer, 2.5 parts of glycerin, 1.1 parts of a polycarboxylic acid type dispersant (molecular weight 12000), and 26.1 parts of water were mixed and defoamed to prepare a paste. The viscosity of the paste was 2.0 MPa·s at 25°C.
(2) Formation of filament coating body A filament coating third coating body is formed on a resin substrate in an environment of 25° C. using the above-mentioned paste as a raw material and a small extruder having a nozzle having a diameter of 0.8 mm. Then, subsequently, the second linearly-coated body and the first linearly-coated body were formed. The intersecting angle between the second filament-coated body and the first filament-coated body was set to 60° so that a rhombic lattice was formed. The line-shaped third coated body was designed to pass on the shorter diagonal line of the diamond-shaped diagonal lines. In this way, a pre-fired structure was obtained.
(3) Firing step After the dried pre-firing structure was separated from the resin substrate, it was placed in an atmospheric firing furnace. Degreasing and firing were performed in this firing furnace to obtain a rectangular ceramic structure having the shape shown in FIG. The firing temperature was 1600° C. and the firing time was 3 hours. The specifications of the obtained structure are shown in Table 1 below. In this structure, the third linear portion was parallel to the straight side portion.
The first filament portion 10 in the structure thus obtained has a width W1 of 425 μm and a thickness T1 of 400 μm, and the second filament portion 20 of the structure has a width W2 of 420 μm and a thickness T2 of 410 μm. The width W3 of the third filament portion 30 in the structure was 425 μm and the thickness T3 was 410 μm. The thickness Tc of the intersection 2 was 1160 μm.

[Example 2]
In this example, the flat plate-shaped ceramic structure 1A shown in FIG. 8A was manufactured.
Using the same paste as in Example 1, as a raw material, a small extruder having a nozzle having a diameter of 0.8 mm was used to form a first linear filament coating body on a resin substrate in an environment of 25° C., and subsequently intersected with it. A second filament coating body and a third filament coating body were formed. The intersecting angle between the second filament-coated body and the first filament-coated body was set to 60° so that a rhombic lattice was formed. The line-shaped third coated body was designed to pass on the shorter diagonal line of the diamond-shaped diagonal lines. Other than that was carried out similarly to Example 1, and obtained the rectangular ceramics structure of the shape shown to Fig.8 (a). The specifications of the obtained structure are shown in Table 1 below. In this structure, the third linear portion was parallel to the straight side portion.

[Example 3]
In this example, a flat plate-shaped ceramic structure 1B shown in FIG. 9A was manufactured.
Using a paste similar to that used in Example 1 as a raw material and using a small extruder having a nozzle having a diameter of 0.8 mm, a second filament coating body is formed on a resin substrate in an environment of 25° C., and subsequently crosses it. The 3rd filament coating object and the 1st filament coating object were formed. The intersecting angle between the second filament-coated body and the first filament-coated body was set to 60° so that a rhombic lattice was formed. The line-shaped third coated body was designed to pass on the shorter diagonal line of the diamond-shaped diagonal lines. Other than that was carried out similarly to Example 1, and obtained the rectangular ceramics structure of the shape shown to Fig.9 (a). The specifications of the obtained structure are shown in Table 1 below. In this structure, the third linear portion was parallel to the straight side portion.

[Comparative Example 1]
In this comparative example, a lattice-shaped ceramic structure was manufactured.
Using the same paste as in Example 1, as a raw material, a small extruder having a nozzle with a diameter of 0.8 mm was used to form a first linear filament coating body on a resin substrate in an environment of 25° C. A filamentous second coated body was formed. A first linear filament coating body and a second linear filament coating body were formed thereon to obtain a lattice-shaped pre-fired structure composed of a total of four layers of coating bodies. The first linear portion and the second linear portion are arranged at an angle of 90° and are orthogonal to each other, and the intersecting angle between the straight side portion and each linear portion is 0° (parallel) to 90° (orthogonal). .. A rectangular ceramic structure was obtained in the same manner as in Example 1 except for the above. The specifications of the obtained structure are shown in Table 1 below.

[Comparative Example 2]
In this comparative example, a lattice-shaped ceramic structure was manufactured.
Using the same paste as in Example 1, as a raw material, a small extruder having a nozzle with a diameter of 0.8 mm was used to form a first linear filament coating body on a resin substrate in an environment of 25° C. A filamentous second coated body was formed. A linear first coating body was formed thereon, and a lattice-shaped pre-fired structure consisting of a total of three layers of coating bodies was obtained. The first linear portion and the second linear portion are arranged so that they are orthogonal to each other at 90°, and the intersection angle between the side portion and each linear portion is 0° (parallel) or 90° (orthogonal). A rectangular ceramic structure was obtained in the same manner as in Example 1 except for the above. The specifications of the obtained structure are shown in Table 1 below.

[Examples 4 to 6 and Comparative Examples 3 and 4]
Ceramic structures were obtained in the same manner as in Examples 1 to 3 and Comparative Example 2 except that the width of the filaments and the distance between the filaments were as shown in Table 1.

[Evaluation]
The thermal shock resistance and strength of the ceramic structures obtained in the examples and comparative examples were measured by the following methods. The results are shown in Table 1.

[Heat-resistant shock temperature]
The ceramic structure is placed in a firing furnace, held for 1 hour, taken out into the air at once, and rapidly cooled. Check for cracks after the ceramic structure has returned to room temperature. The evaluation starts at 200° C., and if there is no crack, the preset temperature of the firing furnace is further raised by 25° C. and the test is repeated. The thermal shock resistance temperature is defined as the upper temperature limit of the furnace that maintains durability without cracking.

[Strength evaluation 1]
The strength of the obtained ceramic structure was evaluated. For the ceramic structures obtained in the examples, the strength when bent in the direction parallel to the straight side portion where the third linear portion intersects was obtained. With respect to the ceramic structures obtained in the comparative examples, the strength when bent in a direction orthogonal to the first linear portion having two layers was obtained. For strength evaluation, a 4-point bending test was adopted. The four-point bending test conformed to the JIS R1601:2008 fine ceramics room temperature bending strength test method. At this time, the cross-sectional area was calculated from the width and thickness of the structure.

[Strength evaluation 2]
With respect to the obtained ceramic structures, for Example 1 and Comparative Example 2, the strength in the direction orthogonal to the strength evaluation 1 was also measured.

As is clear from the results shown in Table 1, it can be seen that the area of the through hole can be made smaller in the example even though the width and the interval of the filamentous body are the same in the example and the comparative example. It is also understood that although the width and the spacing of the filaments are the same in the example and the comparative example, the example can reduce the mass. In addition, it can be seen that the examples are superior in thermal shock resistance and strength to the comparative examples, though the mass is lighter.
Further, in Example 1, the strength of the strength evaluation 2 was a slight decrease of -2% with respect to the strength of the strength evaluation 1, but the comparative example 2 was decreased by -35%, and a large anisotropy was observed. Was done. Therefore, it was found that the examples also have excellent strength anisotropy.

According to the present invention, a ceramic structure having higher strength than conventional ones can be obtained. Further, according to the present invention, it is possible to obtain a ceramic structure having higher thermal shock resistance than ever before.

Claims (10)

A plurality of first linear filaments made of ceramics extending in one direction, a plurality of second linear filaments made of ceramics extending in a direction intersecting with the first linear filaments; And a third filament portion made of ceramics that passes on a diagonal of a quadrangle defined by the intersection of the filament portion and the second filament portion,
A plate-shaped ceramic structure having a plurality of triangular through holes defined by the first linear portion, the second linear portion, and the third linear portion. The ceramic structure according to claim 1, wherein the second linear portion is arranged on the third linear portion, and the first linear portion is arranged on the second linear portion. The first linear portion, the second linear portion and the third linear portion intersect at one intersection,
In any of the intersections, the second linear portion is arranged on the third linear portion,
The ceramic structure according to claim 2, wherein the first linear portion is arranged on the second linear portion at any of the intersecting portions. The cross section of the second linear portion has a circular or elliptical shape in a portion other than the intersecting portion,
The ceramic structure according to claim 3, wherein a cross section of the first linear portion has a circular or elliptical shape in a portion other than the intersecting portion. The ceramic structure according to claim 1, wherein the second linear portion is arranged on the first linear portion, and the third linear portion is arranged on the second linear portion. The first linear portion, the second linear portion and the third linear portion intersect at one intersection,
In any of the intersections, the second linear portion is arranged on the first linear portion,
The ceramic structure according to claim 5, wherein a third linear portion is arranged on the second linear portion at any of the intersecting portions. The cross section of the second linear portion has a circular or elliptical shape in a portion other than the intersecting portion,
The ceramic structure according to claim 6, wherein a cross section of the third linear portion has a circular or elliptical shape in a portion other than the intersecting portion. At least a part of the contour in a plan view has a straight side portion,
Any one of the 1st line|wire part, the 2nd line|wire part, and the 3rd line|wire part is arrange|positioned in parallel with the said linear side part, Either of Claim 1 thru|or 7. The ceramic structure according to item 1. The ceramic structure according to claim 8, wherein the first linear portion or the third linear portion is arranged in parallel with the straight side portion. The ceramic structure according to any one of claims 1 to 9, wherein two or more repeating units each composed of a first linear portion, a second linear portion and a third linear portion are laminated. ..