JP6259943B1 - Ceramic lattice - Google Patents

Abstract

A ceramic lattice body having high strength and excellent spalling resistance is provided. A ceramic lattice body has a plurality of first linear portions and a plurality of second linear portions. The first striated portion 10 has a shape in which the cross section is composed of a straight line portion 10A and a convex curve portion 10B having both ends of the straight line portion 10A as ends in a portion other than the intersecting portion 2. is doing. The second linear portion 20 has a circular or elliptical cross section at a portion other than the intersecting portion 2. In the longitudinal sectional view of the intersecting portion 2, the first linear portion 10 and the second linear portion 20 are the top of the convex curved portion 10 </ b> B in the first linear portion 10 and the second linear stripe. Only the downwardly convex top of the circular or elliptical shape in the portion 20 is in contact. [Selection] Figure 3

Description

  The present invention relates to a ceramic lattice.

  When firing ceramic electronic parts or glass, firing is generally performed by placing an object to be fired on a setter called a shelf board or a floor board. In order to shorten the degreasing and firing time of the material to be fired and increase the number of products manufactured per unit time, it is necessary to rapidly heat and cool the firing process. When heated and / or rapidly cooled, defects such as cracks are likely to occur. Moreover, it becomes easy to produce defects, such as a crack, by repeated use. In addition, it has been pointed out that when a metal setter is used, it cannot be used in an oxidizing atmosphere, and when it is repeatedly used in a high temperature region of 1200 ° C. or more, it is greatly deformed.

  As a conventional technology related to ceramic setters, for example, a heat setter setter made of a perforated plate made of ceramics mainly composed of aluminum nitride and having a large number of holes penetrating the front and back is known (Patent Literature). 1). According to this document, by using aluminum nitride as ceramics, the maximum usable temperature is higher than that of oxide ceramics typified by alumina and magnesia, and the thermal conductivity is large. The resistance to heat shock is said to increase.

  Patent Document 2 describes a ceramic firing kiln tool plate that is provided with at least uneven shapes on the front surface side and back surface side on which the object to be fired is placed, and in which an opening is formed. According to this document, according to this kiln tool plate, the heat capacity can be reduced and the cost can be reduced, and the contact area with the fired product is reduced, so that the escape of gas is improved and the atmosphere is uniform. It describes that a to-be-baked thing can be manufactured uniformly by conversion.

JP-A-6-207785 No. 2009/110400

  However, even when the techniques described in the above patent documents are used, it is easy to prevent the setter from cracking or the like to a satisfactory level when rapidly heating and cooling the object to be fired. Not.

  Therefore, the subject of this invention is providing the ceramic lattice body which can eliminate the various fault which the prior art mentioned above has.

The present invention includes a plurality of first filaments made of ceramics extending in one direction, and a plurality of second filaments made of ceramics extending in a direction intersecting with the first filaments. A ceramic lattice body having
The intersection of the first filament part and the second filament part has the second filament part arranged on the first filament part in any of the intersection parts,
In the intersecting portion, the first linear portion has a shape in which the cross section is composed of a straight portion and a convex curved portion having both ends of the straight portion as ends.
In the crossing portion, the second linear portion has a circular or elliptical cross section,
In a longitudinal sectional view of the intersecting portion, the first and second linear portions are the top of the convex curved portion in the first linear portion and the second linear portion, respectively. The present invention provides a ceramic lattice body in which only the downwardly convex tops in a circular or elliptical shape are in contact.

  The ceramic lattice of the present invention has high strength and excellent spalling resistance.

Fig.1 (a) is a perspective view which shows one Embodiment of the ceramic lattice body of this invention, FIG.1 (b) is the perspective view which looked at the ceramic lattice body shown to Fig.1 (a) from the other side. is there. 2 is a cross-sectional view taken along line II-II in FIG. 3 is a cross-sectional view taken along line III-III in FIG. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 5 is a cross-sectional view taken along line VV in FIG. FIG. 6 is a projection view of the vicinity of the intersecting portion of the ceramic lattice body shown in FIG. 1 viewed from the second filament portion side. FIG. 7 is a projection view of the vicinity of the intersecting portion as seen from the first filament portion side in the ceramic lattice shown in FIG. FIG. 8 is a schematic diagram showing the shape of the through hole in the ceramic lattice shown in FIG. 9 (a) and 9 (b) are schematic views showing another embodiment of the ceramic lattice body of the present invention. FIG. 10 is a schematic view showing still another embodiment of the ceramic lattice body of the present invention.

  The present invention will be described below based on preferred embodiments with reference to the drawings. 1 (a) and 1 (b) show an embodiment of the ceramic lattice body of the present invention. A ceramic lattice body (hereinafter also simply referred to as “lattice body”) 1 shown in these drawings has a plurality of first filament portions 10 made of ceramics extending in one direction X. Each 1st filament part 10 is carrying out the straight line, and is mutually extended in parallel. The ceramic lattice body 1 has a plurality of ceramic second linear portions 20 extending in the Y direction, which is a direction different from the X direction. Each of the second linear portions 20 is straight and extends in parallel with each other. Since the X direction and the Y direction are different directions, the first linear portion 10 and the second linear portion 20 intersect each other. The intersecting angle between the two filaments 10 and 20 can be set according to the specific application of the ceramic lattice 1. For example, the crossing angle of the second linear portion 20 with respect to the first linear portion 10 can be 90 degrees. Or the crossing angle of the 2nd filament part 20 with respect to the 1st filament part 10 can also be changed in the range of 90 degree +/- 10 degree. The grid body 1 is formed by the plurality of first linear portions 10 and the plurality of second linear portions 20 intersecting each other.

  The ceramic lattice body 1 forms a lattice when the first linear portion 10 and the second linear portion 20 intersect, and has a plate-like shape having a plurality of through holes 3 defined by the lattice. doing. The ceramic lattice body 1 has the 1st surface 1a and the 2nd surface 1b facing this as shown in FIG.

  The ceramic lattice body 1 has the intersection part 2 in the site | part where each 1st filament part 10 and each 2nd filament part 20 intersect. The intersecting portion 2 is a portion where the first linear portion 10 and the second linear portion 20 overlap in the projected image of the ceramic lattice 1 in plan view.

  The first linear portion 10 has a constant width W1 (see FIG. 2) in a plan view at a position other than the intersecting portion 2 between the two linear portions 10 and 20. As shown in FIGS. 2 and 3, the first linear portion 10 has a cross-sectional shape along the thickness direction in a direction orthogonal to the longitudinal direction, and is located on the first surface 1 a side of the ceramic lattice body 1. The first surface 10a and the second surface 10b located on the second surface 1b side of the ceramic lattice body 1 are defined. Specifically, the first linear portion 10 has a straight portion 10A and both end portions of the straight portion 10A in a portion other than the intersecting portion 2 in a cross section along the thickness direction in a direction orthogonal to the longitudinal direction. And a curved portion 10B having a convex shape with the end portion as the end portion. As a result, the first surface 10 a of the first linear portion 10 has a flat cross section in the thickness direction of the linear portion 10. The flat surface is substantially parallel to the in-plane direction of the ceramic lattice body 1. On the other hand, the second surface 10b of the first linear portion 10 has a convex curved surface shape in which the cross section in the thickness direction of the linear portion 10 is directed from the first surface 1a to the second surface 1b of the ceramic lattice body 1. I am doing.

  Similar to the first filament part 10, the second filament part 20 also has a certain width W2 (see FIG. 5) in plan view at a position other than the intersecting part 2 of the two filament parts 10, 20. Have. The width W2 may be the same as or different from the width W1 of the first linear portion 10. As shown in FIGS. 4 and 5, the second linear portion 20 has a cross-sectional shape along the thickness direction in a direction orthogonal to the longitudinal direction thereof, which is located on the first surface 1 a side of the ceramic lattice body 1. The first surface 20a and the second surface 20b located on the second surface 1b side of the ceramic lattice 1 are defined. The first surface 20a of the second linear portion 20 has a convex curved shape from the second surface 1b of the ceramic lattice body 1 toward the first surface 1a. On the other hand, the second surface 20b of the second linear portion 20 has a convex curved surface shape in which the cross section in the thickness direction of the linear portion 20 is directed from the first surface 1a to the second surface 1b of the ceramic lattice 1. I am doing. The curved surface shape may be the same as or different from the curved surface shape in the first linear portion 10. In the present embodiment, the first surface 20a and the second surface 20b of the second linear portion 20 are symmetrical, and as a result, the second linear portion 20 is orthogonal to the longitudinal direction. The cross-sectional shape along the thickness direction in the direction is circular or elliptical.

  As shown in FIGS. 3 and 4, when the linear portion 10 </ b> A in the first linear portion 10, i.e., the first surface 10 a is placed on the plane P as a placement surface, all the first surfaces 10 a are all on the plane P. Located in. Since the first surface 10a forms the first surface 1a of the ceramic lattice body 1, the fact that each of the first surfaces 10a is all on the plane P means that the first surface 1a of the lattice body 1 is a flat surface. Means that Therefore, when the ceramic lattice body 1 is placed such that the first surface 1a is in contact with the flat placement surface, the entire area of the first surface 1a is in contact with the placement surface.

  As shown in FIG. 3, when the linear portion 10 </ b> A in the first linear portion 10, i.e., the first surface 10 a is placed on the plane P as the placement surface, the second linear portion 20 includes two adjacent linear portions 20. The crossing portions 2 are separated from the plane P. Therefore, a space S is formed between the second linear portion 20 and the plane P between two adjacent intersecting portions 2.

  On the other hand, the second surface 1b of the ceramic lattice body 1 is composed of the second surface 20b of the second linear portion 20 having a convex curved shape as shown in FIG. The surface is uneven.

  In the intersecting portion 2 between the first linear portion 10 and the second linear portion 20 in the ceramic lattice body 1, both the linear portions 10 and 20 are integrated. “Integrated” means that, when the cross section of the intersecting portion 2 is observed, the space between the two linear portions 10 and 20 is a continuous structure as ceramics. The through-holes 3 formed in the ceramic lattice 1 by the intersection of both the line portions 10 and 20 have the same dimensions and the same shape. Each through-hole 3 has a substantially rectangular shape. The through holes 3 are regularly arranged.

  As shown in FIG. 1, FIG. 3, and FIG. 4, the intersection 2 between the first filament 10 and the second filament 20 is on the first filament 10 in any intersection 2. The 2nd filament part 20 is distribute | arranged to. That is, in the intersection part 2 of the 1st filament part 10 and the 2nd filament part 20, among the two surfaces 1a and 1b of the grid | lattice body 1, it is relatively located in the 1st surface 1a side. On the 1 line part 10, the 2nd line part 20 located relatively on the 2nd surface 1b side is distribute | arranged. And the thickness in the intersection part 2 is larger than any of the thickness of the 1st filament part in the site | parts other than this intersection part, and the thickness of the 2nd filament part. That is, the thickness of the first filament 10 at a position other than the intersection 2 of the two filaments 10 and 20 is T1 (see FIG. 2), and the position of the both filaments 10 and 20 at a position other than the intersection 2. When the thickness of the second linear portion 20 is T2 (see FIG. 5) and the thickness at the intersecting portion is Tc (see FIGS. 3 and 4), Tc> T1 and Tc> T2. Therefore, on the second surface 1 b of the ceramic lattice body 1, the position of the intersecting portion between the two filament portions 10 and 20 is the highest. The thickness Tc of the intersecting portion 2 is also the thickness of the ceramic lattice body 1.

  As shown in FIG. 4, the first line portion 10 has the highest position of the second surface 10 b in the first line portion 10, that is, the position of the top portion in the portion other than the intersecting portion 2. It is the same along the direction in which the strip 10 extends. With respect to the second striated portion 20, as shown in FIG. 3, the highest position of the second surface 20b in the second striated portion 20 is the position of the intersecting portion 2 and the position other than the intersecting portion 2, They are in the same position along the direction in which the first linear portion 10 extends. The lowest position of the first surface 20 a in the second linear portion 20 is the same position along the direction in which the second linear portion 20 extends in a portion other than the intersecting portion 2.

  As shown in FIGS. 3 and 4, when the intersecting portion 2 of the ceramic lattice body 1 is viewed in a longitudinal section, the first linear portion 10 and the second linear portion 20 are the first linear portion 10. The top of the convex curved portion 10B in FIG. 5 and the top of the downwardly convex curve in the circular or elliptical shape of the second linear portion 20, that is, only the top of the first surface 20a are in contact. In other words, the 1st filament part 10 and the 2nd filament part 20 are in the state which made the surface contact close | similar to a point contact or a point contact. According to the study of the present inventor, the ceramic grid body 1 has improved spalling resistance because the first linear portion 10 and the second linear portion 20 are in such a contact state. The result turned out. The reason for this is that the first and second linear portions 10 and 20 are joined by point contact or surface contact close thereto, so that the two linear portions 10 and 20 are excessively strong. This is considered to be because it becomes difficult to bond, and the volume change that occurs during rapid heating and / or cooling can be mitigated. From this point of view, the intersecting portion 2 has a thickness Tc of a thickness T1 of the first filament portion 10 at a position other than the intersection portion 2 and a thickness T2 of the second filament portion 20 at a position other than the intersection portion 2. Is preferably 0.5 or more and 1.0 or less, more preferably 0.8 or more and 1.0 or less, and still more preferably 0.9 or more and 1.0 or less with respect to (T1 + T2). About point contact.

  The ceramic lattice body 1 of the present embodiment is composed of one layer of the first linear portion 10 and one layer of the second linear portion 20, and the ceramic lattice body 1 has n layers. Of the first linear portion 10 and the second linear portion 20 of the m layer (n and m are each independently an integer of 1 or more, provided that n and m are not 1 at the same time. )), The thickness T of the ceramic lattice body 1 is preferably 0.5 or more and 1.0 or less, more preferably 0.8 or more and 1.0 or less, with respect to (nT1 + mT2). The point contact state is preferably in the range of 0.9 to 1.0.

  In order to make the 1st filament part 10 and the 2nd filament part 20 the state which carried out the point contact or the surface contact close | similar to a point contact, what is necessary is just to manufacture the ceramic lattice body 1 by the method mentioned later, for example. .

  As shown in FIG. 1A and FIG. 6, the second linear portion 20 has a width W2a of the projected image in plan view at the intersecting portion 2 so that the projected image in plan view in a portion other than the intersecting portion 2 It is substantially the same as the width W2b or slightly larger than W2b. Specifically, in the second linear portion 20, (i) the contour along the longitudinal direction of the projected image in plan view is substantially straight lines 21 and 21 at the intersecting portion 2, or (ii) the width. A very gentle convex curve (not shown) is drawn outward in the direction X. In the case of (ii), the contour along the longitudinal direction of the projected image in plan view of the second linear portion 20 has a maximum width portion having a width W2a, and the width increases as the distance from the maximum width portion increases. It gradually decreases gradually and becomes a width W2b at the position between the intersecting portions 2. The width W2b is the same as the width W2 described above. W2a is preferably 1 to 1.5 times W2, more preferably 1 to 1.3 times, and still more preferably 1 to 1.1 times.

  On the other hand, as shown in FIG. 1B and FIG. 7, the first linear portion 10 is projected in a plan view in a portion other than the intersecting portion 2 in which the width W1a of the projected image in the plan view in the intersecting portion 2 is. It is approximately the same as the image width W1b or slightly larger than W1b. Specifically, the first linear portion 10 has (i) the outline along the longitudinal direction of the projected image in plan view is substantially straight lines 11 and 11 at the intersecting portion 2, or (ii) the width. A very gentle convex curve (not shown) is drawn outward in the direction Y. In the case of (ii), the contour along the longitudinal direction of the projection image in the plan view of the first linear portion 10 has the maximum width portion having the width W1a, and the width increases as the distance from the maximum width portion increases. It gradually decreases gradually, and becomes a width W1b at a position between the intersecting portions 2. The width W1b is the same as the width W1 described above. W1a is preferably 1 to 1.5 times W1, more preferably 1 to 1.3 times, and still more preferably 1 to 1.1 times W1b.

  FIG. 8 shows a plan view of the ceramic lattice body 1. As shown in the figure, the grid body 1 has a plurality of first line sections 10 and a plurality of second line sections 20 substantially orthogonal to each other, so that the grid body has a substantially rectangular shape in plan view. A plurality of through holes 3 are formed. The substantially rectangular through-hole 3 has first sides 3a and 3a that are a pair of opposing sides. At the same time, the through-hole 3 has second sides 3b and 3b which are another set of sides facing each other. The first sides 3 a and 3 a are sides corresponding to both side edges of the first linear portion 10. On the other hand, the second sides 3 b and 3 b are sides corresponding to both side edges of the second linear portion 20. The through hole 3 is defined by these four sides. The opposing first sides 3a, 3a are straight and extend parallel to each other. Similarly, the opposing second sides 3b, 3b are straight and extend parallel to each other. And when the 1st filament part 10 and the 2nd filament part 20 have the substantially linear shape mentioned above in those intersection parts 2, the 1st filament part 10 and the 2nd filament part 20 As shown in the schematic diagram of FIG. 8, the through-hole 3 formed by and being substantially orthogonal to each other has a rectangular shape with corners 30 having a substantially right angle.

  When the ceramic lattice body 1 having the above configuration is used as, for example, a setter for firing a body to be fired, the first surface 1a can be obtained by placing the body to be fired on the first surface 1a of the lattice body 1. Since it is a flat surface, it is suitable for mounting a fired body that requires flatness. As a to-be-fired body from which flatness is calculated | required, small chip-shaped electronic components, such as a multilayer ceramic capacitor, etc. are mentioned, for example. Since these small electronic components are required not to be caught by the setter in the firing process, it is advantageous that the first surface 1a of the lattice body 1 is flat. Moreover, since the to-be-fired body contacts only the 1st filament part 10 which is the member which comprises the 1st surface 1a, the contact area of the grid | lattice body 1 and a to-be-fired body reduces significantly, and, thereby, to-be-fired It becomes easy to perform rapid heating and cooling of the body. Further, since the lattice body 1 is formed by the intersection of the first and second linear portions 10 and 20 and the plurality of through holes 3 are formed, the heat capacity is small. Easy heating and cooling. Furthermore, since the lattice body 1 has good air permeability due to the presence of the plurality of through holes 3, this also facilitates rapid cooling of the fired body. Good air permeability becomes more remarkable by the fact that the second linear portion 20 floats between the adjacent intersecting portions 2. Moreover, in the lattice body 1, the first and second linear portions 10 and 20 are integrated at the intersecting portion 2, so that the lattice body 1 has sufficient strength.

  On the other hand, it is advantageous to place an object to be fired in the order of mm on the second surface 1b of the lattice body 1. The second surface 1b is an uneven surface caused by the curved surface of the second linear portion 20, and the electronic component of this order size has an uneven surface on which it is placed. This is because it is advantageous from the viewpoint of enhancing the performance.

  As described above, the lattice body 1 of the present embodiment has one surface that is flat and the other surface is an uneven surface, so that the mounting surface can be properly used according to the type of the body to be fired. This is advantageous.

  From the viewpoint of making the various advantageous effects described above more remarkable, the value of T1 is preferably 50 μm or more and 5 mm or less, and more preferably 200 μm or more and 2 mm or less. On the other hand, the value of T2 is preferably 50 μm or more and 5 mm or less, and more preferably 200 μm or more and 2 mm or less. The magnitude relationship between the values of T1 and T2 is not particularly limited, and may be T1> T2, conversely, T1 <T2, or T1 = T2.

  From the same viewpoint, the thickness Tc at the intersection 2 is preferably not less than 20 μm and not more than 5 mm, preferably not less than 5 μm and not more than 2 mm, with respect to (T1 + T2). More preferably, it is as follows.

  Moreover, when the cross-sectional shape (refer FIG. 5) in the thickness direction of the 2nd filament part 20 is an ellipse, an elliptical short axis corresponds to the thickness direction of the grid | lattice body 1, and an elliptical long axis Is preferably coincident with the planar direction of the lattice body 1 from the viewpoint of successfully placing the object to be fired. In this case, the ratio of the major axis / minor axis is preferably 1 or more and 5 or less, and more preferably 1 or more and 3 or less. In addition, the fact that the cross-sectional shape in the thickness direction of the second linear portion 20 is an ellipse or a circle contributes to an improvement in the strength of the lattice 1.

The through hole 3 formed in the ceramic lattice body 1 has an area of 100 μm ² or more and 100 mm ² or less, particularly 2500 μm ² or more and 1 mm ² or less, which reduces the heat capacity of the lattice body 1 and improves air permeability. This is preferable from the viewpoint of maintaining the strength of the grid body 1. Further, the ratio of the total area of the through holes 3 to the apparent area of the ceramic lattice 1 in plan view is preferably 1% or more and 80% or less, and more preferably 3% or more and 70% or less, More preferably, it is 10% or more and 70% or less. This ratio is obtained by cutting the ceramic lattice body 1 into a rectangular shape in plan view, calculating the sum of the areas of the through holes 3 included in the rectangle, and dividing the sum by the rectangular area. Calculated by multiplying by Moreover, the area of each through-hole 3 can be measured by image analysis of the microscope observation image of the lattice 1.

  In relation to the area of the through-hole 3, the width W1 of the first linear portion 10 is preferably 50 μm or more and 10 mm or less, and more preferably 75 μm or more and 1 mm or less. On the other hand, the width W2 of the second linear portion 20 is preferably 50 μm or more and 10 mm or less, and more preferably 75 μm or more and 1 mm or less. There is no particular limitation on the magnitude relationship between the values of W1 and W2, W1> W2 may be satisfied, W1 <W2 may be conversely, or W1 = W2.

  In relation to the widths W1 and W2 of the first and second linear portions 10 and 20, the pitch P1 between the adjacent first linear portions 10 is preferably 100 μm or more and 10 mm or less, and 150 μm or more and 5 mm. More preferably, it is as follows. On the other hand, the pitch P2 between the adjacent second linear portions 20 is preferably 100 μm or more and 10 mm or less, and more preferably 150 μm or more and 5 mm or less.

  As for the 1st filament part 10, it is preferable that the 1st surface 10a is smooth among the surfaces. Since the first surface 10a of the linear portion 10 is smooth, there is an advantage that when the object to be fired is placed on the ceramic lattice body 1, the object to be fired is hardly damaged. In addition, there is an advantage that the fired body obtained by firing the body to be fired is not easily caught by the ceramic lattice body 1 and the take-out property is improved. Furthermore, if the body to be fired is a thin tape molded body such as a substrate, the surface state of the first surface 10a is transferred to the bottom surface of the body to be fired, so that the bottom surface of the body to be fired can be finished more smoothly. is there. On the other hand, when the surface roughness is large, there is an advantage that the degreasing easily proceeds smoothly because the gas flow under the fired body is improved when the fired body is placed. From these viewpoints, the surface roughness Ra of the first surface 10a of the first filament 10 is preferably 0.01 μm or more and 10 μm or less, and more preferably 0.01 μm or more and 5 μm or less. On the other hand, the surface roughness Ra of the second surface 20b of the second linear portion 20 is preferably 5 μm or more and 100 μm or less, and more preferably 10 μm or more and 50 μm or less. Specifically, the surface roughness Ra is a cross-sectional curve scanned using a color 3D laser microscope (for example, VK-8710, manufactured by Keyence Corporation) with an imaging magnification of 200 times in accordance with JIS B0601 (2001). Is the value of the centerline surface roughness calculated by For the first surface 10a of the first filament 10, the surface roughness was measured along the middle line of the first surface 10a, and an average value was calculated from the 20 measured values, which was Ra. On the other hand, on the second surface 20b of the second striated portion 20, the surface roughness was measured along the middle line of the second surface 20b, and an average value was calculated from the 20 measured values to be Ra.

  In order to reduce the value of the surface roughness Ra of the first surface 10a of the first striated portion 10 and the second surface 20b of the second striated portion 20, it is used for forming the striated portion, for example. A substrate having a small surface roughness may be used as the substrate on which the paste is applied, or a low viscosity material may be used as the paste. On the other hand, in order to increase the value of the surface roughness Ra of the first surface 10a of the first linear portion 10 and the second surface 20b of the second linear portion 20, for example, as the paste, a high viscosity What is necessary is just to use a thing or enlarge the nozzle diameter to discharge. In some cases, the first surface 1a and / or the second surface 1b of the ceramic lattice body 1 may be polished and processed to have a predetermined surface roughness.

  Various materials can be used as the ceramic material constituting the ceramic lattice body 1. Examples thereof include alumina, silicon carbide, silicon nitride, zirconia, mullite, zircon, cordierite, aluminum titanate, magnesium titanate, magnesia, titanium diboride, boron nitride and the like. These ceramic materials can be used singly or in combination of two or more. In particular, it is preferably made of a ceramic containing alumina, mullite, cordierite, zirconia or silicon carbide. In the case of using ceramics containing zirconia, zirconia that is completely stabilized by addition of yttria can be used in order to make the lattice body 1 more suitable for use in high-temperature firing. When the ceramic lattice body 1 is subjected to rapid heating and cooling, it is particularly preferable to use silicon carbide as the ceramic material. In addition, since silicon carbide has a concern about a reaction with a to-be-fired body, when using silicon carbide as a ceramic material, it is preferable to coat the surface with a low-reactivity ceramic material such as zirconia. As the raw material powder of the ceramic material constituting the lattice body 1, it is preferable to use a powder having a particle size of 0.1 μm or more and 200 μm or less in consideration of the viscosity and ease of sintering when the paste is made. The ceramic material constituting the first filament part 10 and the ceramic material constituting the second filament part 20 may be the same or different. From the viewpoint of increasing the integrity of the first and second linear portions 10 and 20 at the intersecting portion 2, it is preferable that the ceramic materials constituting both the linear portions 10 and 20 are the same.

  As a result of the study by the present inventor, in addition to the first linear portion 10 and the second linear portion 20 being in point contact at their intersecting portions 2, the first linear portion 10 and the first linear portion 10 It turns out that it is advantageous from the point of the further improvement of the intensity | strength of the ceramic lattice body 1, and the spalling resistance that all the 2 filament parts 20 consist of ceramics in which two or more crystal phases were mixed. did. The ceramic in which two or more crystal phases are mixed means that a ceramic made of a single material has two or more crystal phases. There are no particular restrictions on the type of two or more crystal phases. In particular, it is possible to further improve the strength of the ceramic lattice body 1 by the fact that each of the first linear portion 10 and the second linear portion 20 is made of partially stabilized zirconia in which tetragonal crystals and cubic crystals are mixed, and This is advantageous from the standpoint of further improving the spalling resistance. In order to partially stabilize zirconia and mix tetragonal crystals and cubic crystals, for example, yttria may be added to zirconia. The added amount of yttria may be more than 0 mol% and less than 8 mol% with respect to the total number of moles of Zr and Y.

  Next, the suitable manufacturing method of the ceramic lattice body 1 of this embodiment is demonstrated. In this manufacturing method, first, raw material powder of a ceramic material is prepared, and the raw material powder is mixed with a medium such as water and a binder to prepare a paste for manufacturing a filament portion.

  As the binder, those similar to those conventionally used for this type of paste can be used. Examples include polyvinyl alcohol, polyethylene glycol, polyethylene oxide, dextrin, sodium lignin sulfonate and ammonium, carboxymethylcellulose, ethylcellulose, hydroxypropylmethylcellulose, carboxymethylcellulose, hydroxyethylcellulose, hydroxyethylmethylcellulose, sodium and ammonium alginate, epoxy resin, phenol Resins, gum arabic, polyvinyl butyral, acrylic polymers such as polyacrylic acid and polyacrylamide, thickening polysaccharides such as xanthan gum and guar gum, gelling agents such as gelatin, agar and pectin, vinyl acetate resin emulsion, wax emulsion, And inorganic binders such as alumina sol and silica sol Etc., and the like. Two or more of these may be mixed and used.

  The viscosity of the paste is preferably high at the temperature at the time of application from the viewpoint that the lattice body 1 having the structure of this embodiment can be successfully manufactured. Specifically, the viscosity of the paste is preferably 1.5 MPa · s or more and 5.0 MPa · s or less, preferably 1.7 MPa · s or more and 3.0 MPa · s or less, at the temperature at the time of application. preferable. For the viscosity of the paste, a measured value at 4 minutes after the start of measurement was used at a rotation speed of 0.3 rpm using a cone plate type rotary viscometer or a rheometer.

  The ratio of the raw material powder of the ceramic material in the paste is preferably 20% by mass to 85% by mass, and more preferably 35% by mass to 75% by mass. The ratio of the medium in the paste is preferably 15% by mass to 60% by mass, and more preferably 20% by mass to 55% by mass. The proportion of the binder in the paste is preferably 1% by mass or more and 40% by mass or less, and more preferably 5% by mass or more and 25% by mass or less.

  The paste may contain a thickener, a flocculant, a thixotropic agent, etc. as a viscosity modifier. Examples of thickeners include polyethylene glycol fatty acid esters, alkylallyl sulfonic acids, alkyl ammonium salts, ethyl vinyl ether / maleic anhydride copolymers, fumed silica, albumin and other proteins. In many cases, the binder may be classified as a thickener because it has a thickening effect. However, if more precise viscosity adjustment is required, a thickener that is not classified separately as a binder. An agent can be used. Examples of the flocculant include polyacrylamide, polyacrylic acid ester, aluminum sulfate, and polyaluminum chloride. Examples of thixotropic agents include fatty acid amides, oxidized polyolefins, polyether ester type surfactants, and the like. As a solvent for preparing the paste, in addition to water, alcohol, acetone, ethyl acetate, and the like are used, and two or more of these may be mixed. In order to stabilize the discharge amount, a plasticizer, a lubricant, a dispersant, a sedimentation inhibitor, a pH adjuster, or the like may be added. Examples of the plasticizer include glycols such as trimethylene glycol and tetramethylene glycol, glycerin, butanediol, phthalic acid, adipic acid, and phosphoric acid. Examples of the lubricant include hydrocarbons such as liquid paraffin, micro wax, and synthetic paraffin, higher fatty acids, fatty acid amides, and the like. Examples of the dispersant include sodium polycarboxylate or ammonium salt, acrylic acid type, polyethyleneimine, and phosphoric acid type. Examples of the precipitation inhibitor include polyamide amine salts, bentonite, and aluminum stearate. Examples of the pH adjusting agent include sodium hydroxide, aqueous ammonia, oxalic acid, acetic acid, hydrochloric acid and the like.

  Using the obtained paste, a plurality of linear first coated bodies are formed in parallel and linearly on a flat substrate. The filament first coating body corresponds to the first filament portion 10 in the target lattice body 1. The 1st paste which is a paste used for formation of the filament 1st coated object contains the 1st raw material powder of the ceramic material mentioned above, a medium, and a binder. Various application apparatuses such as a small extruder and a printing machine can be used for forming the first filament coated body using the first paste.

  When the filament first coated body is formed, the medium is then removed from the filament first coated body and dried to perform an operation for further increasing the viscosity of the filament first coated body. In order to remove the medium from the filament first coated body, for example, hot air may be blown to the filament first coated body or infrared rays may be irradiated. The proportion of the medium in the first filament coated body after the medium is removed is preferably reduced to 50% by mass or less, more preferably 30% by mass or less, and the viscosity of the first filament coated body is extremely low. It becomes expensive and its shape retention is further enhanced.

  When the medium is removed from the first filament coated body, the second paste is then used so that the plurality of filament second coated bodies are parallel to each other so as to intersect the first filament coated body. And it forms in linear form. The filament second coated body corresponds to the second filament portion 20 in the target lattice body 1. As a 2nd paste, the thing of the composition similar to a 1st paste can be used, The 2nd raw material powder of a ceramic material, a medium, and a binder are included. For the formation of the second filament coated body, a coating device similar to the first filament coated body can be used. When the filament second coated body is formed, the medium is then removed from the filament second coated body and dried, and an operation for further increasing the viscosity of the filament second coated body is performed. This operation can be performed in the same manner as the operation performed on the filament first coated body. In this way, the formation of the linear first coated body and the removal of the medium, and the formation of the linear second coated body and the removal of the medium are sequentially performed, so that the second on the first linear portion 10. The lattice body 1 in which the linear portion 20 is located can be successfully obtained.

  The thus obtained lattice-shaped precursor is peeled off from the substrate and placed in a firing furnace for firing. The target ceramic lattice 1 is obtained by this firing. Baking can generally be performed in air. The firing temperature may be selected appropriately depending on the type of raw material powder of the ceramic material. The same applies to the firing time.

  The target ceramic lattice 1 is obtained by the above method. This ceramic lattice body 1 can be suitably used as a setter for degreasing or firing ceramic products such as shelf boards and floorboards, and can also be used as a kiln tool other than a setter, such as a firewood or beam. Furthermore, it can also be used as various jigs and various structural materials such as filters and catalyst carriers other than kiln tools. In this case, although it is common to place a to-be-fired body on the 2nd surface 1b which is an uneven surface in the lattice body 1, depending on the kind of to-be-fired body, on the 1st surface 1a which is a flat surface You may mount a to-be-fired body. For example, when performing a firing step in the manufacturing process of the multilayer ceramic capacitor (MLCC), it is preferable to place the body to be fired on the first surface 1a which is a flat surface.

  As mentioned above, although this invention was demonstrated based on the preferable embodiment, this invention is not restrict | limited to the said embodiment. For example, in the ceramic lattice body 1 of the above embodiment, the first linear portion 10 and the second linear portion 20 intersect so as to be substantially orthogonal, but the intersecting angle of both the linear portions 10, 20 is It is not limited to 90 degrees.

  Moreover, although the ceramic lattice body 1 of the said embodiment used two types of line | wire parts, the 1st line | wire part 10 and the 2nd line | wire part 20, in addition to this, it is the 3rd line | wire part. (Not shown), and further, three or more types of filaments such as fourth and fifth filaments (not shown) may be used. In the case of using three or more types of linear portions, the linear portions subsequent to the third linear portion are the first and second linear portions as described above with respect to the thickness T1, the width W1, and the pitch P1, respectively. It is desirable to have the same configuration as Also, the configuration of the intersection formed by the linear portions after the third linear portion may have the same configuration as the intersection formed by the first and second linear portions as described above. desirable.

  Further, the ceramic lattice body 1 of the above embodiment has a single-layer structure, but instead of this, a plurality of the lattice bodies 1 are used, for example, as shown in FIGS. 9 (a) and 9 (b). Multiple layers may be used. In the embodiment shown in FIG. 9 (a), a first lattice body 1 ′ composed of a first linear portion 10 ′ and a second linear portion 20 ′, a first linear portion 10 ″ and a second linear portion 10 ′. Are laminated to form a lattice body 1. The first linear portion 10 'in the first lattice body 1' and the second lattice body 1 are laminated. Are arranged so as to have the same pitch. Similarly, the second linear portion 20 ′ in the first grid 1 ′ and the second grid 1 ” It arrange | positions so that it may become the same pitch also as 2nd filament part 20 ".

  On the other hand, in the embodiment shown in FIG. 9B, the first filament 10 ′ in the first grid 1 ′ and the first filament 10 ″ in the second grid 1 ″ are half pitch. It is arranged so as to be displaced. Similarly, the second filament 20 'in the first grid 1' and the second filament 20 "in the second grid 1" are arranged so as to be shifted by a half pitch.

  In the ceramic lattice body 1 of the embodiment shown in FIG. 9A and FIG. 9B, at least the first linear portion 10 ′ and the second linear portion 20 ′ in the first lattice body 1 ′. Are preferably in point contact at their intersections. In particular, it is preferable that any pair of linear portions adjacent to each other in the vertical direction are in point contact at their intersecting portions.

  As a modification of the embodiment shown in FIGS. 9A and 9B, the ceramic lattice body 1 of the embodiment shown in FIG. The ceramic lattice body 1 of the embodiment shown in FIG. 10 has a plurality of third filaments made of ceramics extending in one direction in addition to having the first filaments 10 and the second filaments. A portion 33 is further provided. In the present embodiment, the direction in which the third linear portion 33 extends is the same as the direction in which the first linear portion 10 extends, but instead, the third linear portion 33 is: An oblique direction (specifically, preferably greater than −45 ° and less than 45 °, more preferably greater than −45 ° and 30 ° with respect to the direction in which the first linear portion 10 extends. It may be inclined to be smaller. The third striated portion 33 intersects the second striated portion 20, and the intersecting portion between the third striated portion 33 and the second striated portion 20 is in any of the intersecting portions. The third filament part 33 is arranged on the second filament part 20. In the present embodiment, the third linear portion 33 is arranged so as to be shifted from the arrangement pitch of the first linear portion 10 by a half pitch (0.5 pitch). This embodiment is the most preferable mode for preventing the electronic component from dropping from the linear portion when the electronic component is placed and fired. However, the present invention is not limited to this embodiment, and the deviation between the first linear portion 10 and the third linear portion 33 is zero (0) or more and half as long as the object of the present invention is not impaired. A range less than the pitch (0.5 pitch) can be taken. Also in this embodiment, the same effect as the ceramic lattice body 1 of the previous embodiment is produced. In a longitudinal sectional view of the intersection of the third filament part 33 and the second filament part 20, the third filament part 33 and the second filament part 20 are the same in the third filament part. It is preferable that only the downwardly convex top portion of the circular or elliptical shape is in contact with the upward convex top portion of the circular or elliptical shape of the second linear portion.

  Moreover, you may provide an outer frame in the outer periphery of this lattice body 1 in order to improve the intensity | strength of the ceramic lattice body 1 of each said embodiment. The outer frame may be integrally formed from the same material as that of the grid body 1 or may be manufactured separately from the grid body 1 and bonded by a predetermined bonding means. In addition, for the purpose of improving the spalling resistance, a slit is made inward in the width direction in a part of the side along the longitudinal direction of the first linear portion 10 and / or the second linear portion 20. May be. Further, for the purpose of improving the spalling resistance, each linear portion in the ceramic lattice body 1 of each embodiment is an aspect in which an end portion thereof is exposed, in other words, a reinforcement composed of a frame body on the outer edge of the ceramic lattice body 1. An embodiment in which no material is present is more preferable.

  Hereinafter, the present invention will be described in more detail with reference to examples. However, the scope of the present invention is not limited to such examples. Unless otherwise specified, “%” and “part” mean “% by mass” and “part by mass”, respectively.

[Example 1]
In this example, the ceramic lattice body 1 shown in FIGS. 1 to 8 was manufactured.

(1) Preparation of paste for forming a linear coated body 65.3 parts of 3 mol% yttria-added partially stabilized zirconia powder having an average particle diameter of 0.8 μm and hydroxypropyl methylcellulose (average polymerization degree: 30) as an aqueous binder 10 g / mol) 5.0 parts, 2.5 parts of glycerin as a plasticizer, 1.1 parts of a polycarboxylic acid-based dispersant (molecular weight 12000) and 26.1 parts of water are mixed and defoamed. A paste was prepared. The viscosity of the paste was 2.3 MPa · s at 25 ° C.
(2) Formation of filament coated body A filament first coated body was formed on a resin substrate using the above paste as a raw material and a dispenser having a nozzle having a diameter of 0.4 mm. Next, hot air was blown onto the filament first coated body using a dryer to remove water, and the filament first coated body was dried. The water content of the filament first coated body after drying was 10%. Subsequently, the filament 2nd coating body which cross | intersects a filament 1st coating body was formed. The crossing angle between the two filament coated bodies was 90 degrees. Using a drier, hot air was blown onto the second filament coated body to remove water, and the second filament coated body was dried. The water content of the filament second coated body after drying was 8%. Thus, a lattice precursor was obtained.
(3) Firing step After the dried lattice precursor was peeled from the resin substrate, it was placed in an atmospheric firing furnace. Degreasing and firing were performed in this firing furnace to obtain a ceramic lattice body having the shape shown in FIGS. The firing temperature was 1450 ° C., and the firing time was 3 hours. In the obtained lattice body, the 1st filament part and the 2nd filament part were point-contacting in those crossing parts. In the obtained lattice body, the thickness T1 of the first linear portion was 400 μm, the thickness T2 of the second linear portion was 410 μm, and the thickness Tc of the intersecting portion was 770 μm. Therefore, Tc is 0.95 with respect to (T1 + T2). The width W1 of the first filament part was 425 μm, and the width W2 of the second filament part was 420 μm. The width W1a of the first filament portion at the intersecting portion was 445 μm, and the width W2a of the second filament portion was 440 μm. Therefore, W2a was 1.05 times W2b, and W2a and W2b were substantially the same value. The pitch P1 of the 1st filament part was 800 micrometers, and the pitch P2 of the 2nd filament part was 720 micrometers. The surface roughness Ra of the ceramic lattice 1 was 0.3 μm on the first surface and 0.4 μm on the second surface. The area of the through holes in the ceramic grid 1 is 0.09 mm ^2, the hole area ratio was 17%.

[Comparative Example 1]
This comparative example is an example using a nickel net as a lattice. This nickel mesh is obtained by applying a zirconia spray coating to 32 mesh formed by plain weaving of a nickel wire having a thickness of 315 μm, and has a thickness of 0.6 mm.

[Comparative Example 2]
In this comparative example, a solution obtained by dissolving gelatin in hot water (the concentration of gelatin is 3% with respect to water) is prepared, and this solution is mixed with a yttria fully stabilized zirconia slurry prepared in advance. did. The mixing was performed so that the volume ratio of yttria fully stabilized zirconia to water in the mixed solution was 10:90. This mixed solution was allowed to stand in a refrigerator to be gelled. The gel was frozen with an ethanol freezer. After the frozen gel was dried (lyophilized), the obtained dried product was degreased and baked at 1600 ° C. for 3 hours. The fired body thus obtained had a porosity of 79%, a pore diameter of 95 μm, and a structure in which pores were oriented in the thickness direction.

[Evaluation]
About the lattice body obtained by the Example and the comparative example, the spalling-proof evaluation was performed with the following method. The results are shown in Table 2 below.

[Evaluation of spalling resistance]
A sample having a length of 150 mm, a width of 150 mm, and a thickness of 0.8 to 1.5 mm was prepared. A rack-shaped kiln tool with mullite foot (external dimension is 165 mm x 165 mm, cross-shaped width in the center is 15 mm, and there are four hollow structures of 60 mm x 60 mm between the outer frame and the cross) Place the sample on the base plate, set the sample on the rack, heat at high temperature in an atmospheric baking furnace and hold it at a desired temperature for 1 hour or more, then remove it from the electric furnace and expose it to room temperature. The presence or absence of warpage and cracking was evaluated. The set temperature was changed from 200 ° C. to 1100 ° C. while increasing the temperature by 50 ° C., and the upper limit of the temperature at which cracking did not occur was defined as the “endurance temperature upper limit value”.

[Evaluation of shape change by repeated firing]
Samples of 150 mm long and 150 mm wide were prepared, and the firing pattern was heated in a carbon crucible at 400 ° C./hr in an argon atmosphere, kept at 1300 ° C. for 5 minutes, and cooled at 400 ° C./hr. Repeated times, the difference between the initial and repeated sample shapes was evaluated from the appearance.

  As is clear from the results shown in Table 1, it can be seen that the lattice obtained in Example 1 has higher spalling resistance than each comparative example.

DESCRIPTION OF SYMBOLS 1 Ceramic lattice body 1a 1st surface 1b 2nd surface 2 Crossing part 3 Through-hole 10 1st filament part 10a 1st surface 10b 2nd surface 20 2nd filament part 20a 1st surface 20b 2nd surface

Claims (8)

A ceramic lattice having a plurality of first filaments made of ceramics extending in one direction and a plurality of second filaments made of ceramics extending in a direction intersecting the first filaments Body,
The intersection of the first filament part and the second filament part has the second filament part arranged on the first filament part in any of the intersection parts,
In the intersecting portion, the first linear portion has a shape in which the cross section is composed of a straight portion and a convex curved portion having both ends of the straight portion as ends.
In the crossing portion, the second linear portion has a circular or elliptical cross section,
In a longitudinal sectional view of the intersecting portion, the first and second linear portions are the top of the convex curved portion in the first linear portion and the second linear portion, respectively. A ceramic lattice body in which only the downwardly convex tops in a circular or elliptical shape are in contact.   When the linear portion of the first linear portion is placed on a plane as a placement surface, the second linear portion has a shape that is separated from the plane between two adjacent intersections. The ceramic lattice body according to claim 1.   The width of the projected image in a plan view at the intersecting portion of the second linear portion is substantially the same as the width of the projected image in a plan view at a portion other than the intersecting portion. The ceramic lattice body as described.   The ceramic lattice body according to any one of claims 1 to 3, wherein each of the first and second linear portions is made of a ceramic in which two or more crystal phases are mixed.   5. The ceramic lattice body according to claim 4, wherein each of the first filament part and the second filament part is made of partially stabilized zirconia in which tetragonal crystals and cubic crystals are mixed. A plurality of third filaments made of ceramics extending in the same direction as the direction in which the first filaments extend;
The third line part intersects the second line part,
The intersection of the third filament part and the second filament part has the third filament part arranged on the second filament part in any of the intersections,
6. The ceramic lattice body according to claim 1, wherein each of the third linear portions is arranged with a half-pitch deviation from a pitch of the arrangement of the first linear portions.   The ceramic lattice body as described in any one of Claim 1 thru | or 6 used as a setter for baking of ceramic products. A first paste containing a first raw material powder of ceramic material, a medium, and a binder is applied in a linear form on a flat substrate, and a plurality of linear first coated bodies are parallel to each other and linearly formed. Forming,
Removing the medium from a plurality of the filament first coated bodies, drying the filament first coated bodies,
The second paste containing the second raw material powder of the ceramic material, the medium, and the binder is applied in a line so as to intersect with the plurality of strips first coated bodies after drying. Form the second coated body in parallel and straight with each other,
Removing the medium from the plurality of filaments second coated body, drying the filaments second coated body to form a lattice precursor,
A method for producing a ceramic lattice, wherein the lattice precursor is fired.

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