WO2024034256A1

WO2024034256A1 - Firing jig comprising setter and base plate

Info

Publication number: WO2024034256A1
Application number: PCT/JP2023/022077
Authority: WO
Inventors: 峻有馬
Original assignee: 三井金属鉱業株式会社
Priority date: 2022-08-08
Filing date: 2023-06-14
Publication date: 2024-02-15

Abstract

Disclosed is a firing jig comprising a setter and a base plate, the setter being a ceramic sheet including a mesh-like part, wherein: the mesh-like part includes a first filament portion layer consisting of a plurality of first filament portions, and a second filament portion layer consisting of a plurality of second filament portions; (1) at least one engaging projecting piece for engaging the setter is provided in a predetermined region opposing the mesh-like part on a surface of the base plate on a side on which the setter is placed; (2) the setter is formed such that, when the setter is placed on the base plate, some or all of the engaging projecting pieces come into contact simultaneously with each of the adjacent first filament portions; and (3) in a predetermined region of the first filament portion layer including the contacting sites, if an average perpendicular distance between centers of the adjacent first filament portions is A, and an average distance between points of contact of the engaging projecting piece and the adjacent first filament portions is B, the relationship A>B is satisfied.

Description

Firing jig consisting of a setter and a bottom plate

The present invention relates to a baking jig consisting of a setter and a bottom plate. More specifically, the present invention relates to a baking jig that includes a setter and a bottom plate on which the setter is placed, and can effectively prevent the setter from sliding.

When firing ceramic electronic components or glass, it is common to place the object to be fired on a ceramic sheet setter, also called a shelf board, and perform the firing. In a firing process using such a setter, high production efficiency is required to simultaneously fire a large number of objects to be fired. For this reason, firing is performed in a multi-tiered structure in which multiple setters are stacked at predetermined intervals using a firing jig in which setters are placed on a member called a firing plate or a firing rack. There is.

Conventional techniques related to ceramic setters include, for example, setters for hot molding processing that are made of ceramics whose main component is aluminum nitride and have a large number of holes penetrating the front and back sides, and setters that carry objects to be fired. There is known a ceramic firing kiln tool plate which is provided with at least an uneven shape on the front and back sides on which the ceramic is placed, and has openings formed therein. In addition, as a technique to prevent cracks from occurring in the setter when rapidly heating and cooling the object to be fired, we have developed a technique to prevent cracks from occurring in the setter when rapidly heating and cooling the fired object. A ceramic lattice body having a plurality of second filament parts, in which the first filament part and the second filament part have a specific contact form, is disclosed (see Patent Document 1 as an example). .

On the other hand, a firing jig called a bottom plate or the like includes, for example, a frame body having a hollow part on the center side, and a plurality of bridge parts spanning the hollow part of the frame body and intersecting each other in the hollow part, A firing jig is disclosed in which a frame body and a bridge portion are integrally molded. It has been reported that this firing jig improves the productivity of manufacturing ceramic products by firing.
In addition, as another baking jig called a floor plate, Patent Document 2 discloses a baking rack configured to arrange a flat setter on which objects to be fired are loaded, and which has a flat plate on its surface. A frame body in which a setter is arranged and has an opening, a pillar part passing through the center of the frame body and extending between the frame bodies, a plurality of surrounding parts surrounded by the frame body and the pillar parts, and a center of the surrounding part. A baking rack is disclosed that includes a plurality of sub-pillars extending from the auxiliary column toward the frame or the column. It has been reported that this baking rack can reduce unevenness in the in-plane temperature distribution of the flat setters loaded thereon.

Japanese Patent Application Publication No. 2018-193274 International Publication 2021/033375

As illustrated in Fig. 1, such a ceramic setter and base plate (firing rack) are used to place a setter on each base plate during firing, and to place the object to be fired on top of each setter. They are often stacked in multiple tiers. In Fig. 1, S is a setter, P is a multi-layered bottom plate, and C is an object to be fired.A setter is placed on each bottom plate, and the object to be fired is placed on top of the setter. By doing so, M, which is a multi-tiered firing jig, is subjected to the firing process. There are cases where it is necessary to store and even transport a combination of ceramic setters and floor plates stacked in multiple tiers as they are stacked in multiple tiers. During such stacking operations or when transporting multi-level stacks, if the setter slides on the bottom plate due to slight inclination or vibration (i.e. horizontal or vertical movement), the setter may The stability of the fired object cannot be maintained, which may lead to deformation or breakage of the fired object, failure of firing, or falling of minute objects such as electronic parts from the setter. Therefore, there is a demand for good handling properties in which the setter does not easily slide on the floor plate when stacking the combination of the ceramic setter and the floor plate or when transporting them in a multi-tiered state. However, no technology has been developed to date that can sufficiently prevent such sliding.

Therefore, the problem to be solved by the present invention is to provide a firing jig consisting of a combination of a ceramic setter and a bottom plate, and when stacking them or transporting them in a multi-tiered state, it is difficult to avoid slight inclinations or It is an object of the present invention to provide a baking jig having good handling properties such that a setter does not easily slide on a bottom plate due to vibration (horizontal or vertical movement).

As a result of extensive research, the present inventors found that in a firing jig consisting of a setter, which is a ceramic sheet that includes at least a portion of a so-called mesh-like portion, and a bottom plate on which the setter is placed, the setter of the bottom plate is A setter is placed in a predetermined area facing the mesh portion on the surface to be placed so that when the setter is placed on the bottom plate, it simultaneously contacts and engages each of the adjacent first filament portions. is provided with at least one engagement protrusion, and in a predetermined region of the first filament layer including the contact point, the average vertical distance A between the centers of adjacent first filament portions is equal to or greater than the engagement protrusion. By designing the engagement protrusion to be larger than the average distance B between the contact points of the piece and the adjacent first filament, the engaging projection piece is arranged to fit between the adjacent first filament. As a result, the movement of the setter on the bottom plate is effectively restricted, making it possible to sufficiently prevent the setter from sliding on the bottom plate, which in turn improves handling as a firing jig for ceramic products. It was discovered that the firing jig according to the present invention was significantly improved.

Accordingly, one exemplary aspect of the invention is as follows:
A firing jig consisting of a setter and a bottom plate on which the setter is placed,
The setter is a ceramic sheet that includes a mesh-like portion at least in part, and the mesh-like portion includes a plurality of first filaments each of which is arranged at a predetermined interval and extends in one direction. a first filament layer consisting of a first filament layer, and each filament layer extending in one direction and arranged at a given interval so as to touch and intersect each filament of the first filament part; a second filament layer composed of a plurality of second filament portions, the first filament layer and the second filament layer being integrally formed;
(1) At least one engagement protrusion for engaging the setter is provided in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. Ori,
(2) When the setter is placed on the bottom plate, a portion or all of the engaging protrusions are formed to simultaneously contact each of the adjacent first linear portions,
(3) In a predetermined area of the first striation layer including the contact point,
The average vertical distance between the centers of adjacent first linear portions is A,
When the average distance between the contact points of the engaging protrusion and the adjacent first linear portion is B,
satisfies the relationship A>B,
Baking jig.

According to the firing jig comprising the setter and the bottom plate on which it is placed according to the present invention, the average vertical distance A between the centers of the adjacent first linear portions is the same as that of the engaging protrusion and the adjacent first line. By being larger than the average distance B between the points of contact with the striations, the engaging protrusion is arranged so as to fit between the adjacent first striations, thereby preventing the setter from moving on the bottom plate. can be effectively restricted. As a result, it becomes possible to sufficiently prevent the setter from sliding on the base plate, and the handling properties of the setter as a firing jig for ceramic products can be greatly improved.

FIG. 1 is a diagram illustrating a known stacked configuration in which a ceramic setter and a bottom plate (firing rack) are assembled in multiple stages. FIG. 2 is a diagram illustrating an embodiment of a mesh-like portion of a setter in a firing jig according to the present invention. FIG. 3 is a diagram showing an embodiment of the combination of a setter and a bottom plate in a baking jig according to the present invention. FIG. 4 is a diagram illustrating the relationship between the first linear portion of the mesh-like portion of the setter and the engagement protrusion of the bottom plate in the baking jig according to the present invention. FIGS. 5(a) to 5(c) are diagrams illustrating embodiments of the relationship between the first linear portion of the mesh-like portion of the setter and the engagement protrusion of the bottom plate in the baking jig according to the present invention. FIGS. 6(a) and 6(b) are diagrams showing an embodiment of a plurality of engaging protrusions provided on a bottom plate of a baking jig according to the present invention. FIG. 7 is a diagram illustrating the form of contact between the first linear portion of the mesh-like portion of the setter and the engagement protrusion of the bottom plate in the baking jig of Comparative Example 2, which is outside the present invention.

In the firing jig according to the present invention, the setter combined with the bottom plate is a ceramic sheet that includes a mesh-like part at least in part, and the mesh-like part consists of stripes arranged at a given interval in one direction. A first filament layer composed of a plurality of stretched first filament parts, and a first filament layer arranged at a given interval so as to touch and intersect each of the first filament parts. In addition, each strip includes a second filament layer composed of a plurality of second filament portions extending in one direction, and the first filament layer and the second filament layer are integrally formed. This is the ceramic sheet that is the formed part. The setter is not particularly limited as long as it includes such a mesh portion at least in part. Any known setter structure may be adopted for the portions of the setter other than the mesh portion. In one embodiment, a setter that is a mesh-shaped ceramic sheet sintered body integrally formed as a whole may be used.

Here, the fact that the first filament layer and the second filament layer are mesh-like sintered bodies that are "integrally formed" means that the filament group constituting the first filament layer and This means that the filament groups constituting the second filament layer are fired and connected to form an integral structure at their contact points, so that they cannot be easily separated. In one embodiment, the first striation layer and the second striation layer are such that the striation group forming the first striation layer and the striation group forming the second striation layer are different from each other. The first filament layer and the second filament layer are fired and connected to form an integral structure at the contact point so that they cannot be easily separated, and the first filament layer and the second filament layer are connected to each other. Different parts of the sublayer may be formed from a single composition. In another aspect, the first striated layer and the second striated layer include a group of striations that constitute the first striated layer and a group of striations that constitute the second striated layer. The first filament layer and the second filament layer are fired and connected to form an integral structure at their contact points so that they cannot be easily separated, and the first filament layer and the second filament layer are Different portions of each striation layer may be formed from a plurality of different compositions.

FIG. 2 illustrates one embodiment of the mesh portion of the setter. In FIG. 2, the mesh-like portion 1 includes a first filament layer composed of a plurality of first filament portions 2 arranged at substantially constant intervals and each of which extends in one direction; Consisting of a plurality of second filament parts 3, each of which extends in one direction, and which are arranged at approximately constant intervals so as to touch and intersect each filament of the first filament part 2. Contains a second striated layer. The intersecting angle between the two

filament parts

2 and 3 can be set as appropriate, and for example, the intersecting angle of the second filament part 3 with respect to the first filament part 2 can be 90 degrees. Alternatively, the intersecting angle of the second filament portion 3 with respect to the first filament portion 2 may be changed within a range of 90 degrees ±10 degrees. The cross-sectional shapes of the first filament portion 2 and the second filament portion 3 are not particularly limited, but may be approximately circular or approximately elliptical as shown. The cross-sectional shapes of the first filament portion 2 and the second filament portion 3 may be substantially polygonal, such as a substantially rectangular shape, in addition to a substantially circular or substantially elliptical shape, or a shape in which a portion thereof is cut linearly. obtain.

The ceramic raw material powder of the plurality of first linear portions and the plurality of second linear portions of the mesh-like portion of the ceramic sheet is not particularly limited, and may contain various ceramic materials. Examples of ceramic materials used as ceramic raw material powder include alumina (Al ₂ O ₃ ), zirconia (ZrO ₂ ), magnesium oxide (MgO), mullite (3Al ₂ O ₃ -2SiO ₂ ), silicon carbide (SiC), Silicon nitride (Si ₃ N ₄ ), aluminum nitride (AlN), boron carbide (B ₄ C), cordierite (MgO/Al ₂ O ₃ /SiO ₂ ), aluminum titanate (Al ₂ TiO ₅ ), magnesium titanate (MgTiO ₃ ), titanium diboride (TiB ₂ ), or a combination of two or more thereof. Furthermore, a sintered body manufactured using raw material powder that is one or a combination of two or more of these ceramic materials naturally has a composition that can be produced from these materials. In the mesh portion of the ceramic sheet according to one embodiment, the first striation layer and the second striation layer, or different portions of each striation layer may be formed from a single composition. In the mesh portion of the ceramic sheet according to another embodiment, the first striation layer and the second striation layer, or different portions of each striation layer may be formed from a plurality of different compositions. . In one embodiment, a setter that is a mesh-shaped ceramic sheet sintered body integrally formed of a single type of material may be used. By using such a setter, the strength of the ceramic sheet as a whole becomes extremely high, and it also leads to efficient production of the setter.

When the mesh-like part occupies a part of the ceramic sheet, the ceramic raw material powder in the part other than the mesh-like part is not particularly limited, and may be the same as or different from the raw material powder in the mesh-like part described above. . When there is a portion of the ceramic sheet other than the mesh portion, the raw material powder thereof is preferably the same as the raw material powder of the mesh portion that is in contact with the portion. Furthermore, in a preferred embodiment, the mesh portion and the portion other than the mesh portion may be an integrally formed ceramic sheet sintered body. If the mesh part and the part other than the mesh part form an integrally formed sintered body, and if the raw material powder of both parts is the same, the strength of the entire ceramic sheet will be increased, and the heating and heating during firing will be improved. Deterioration of bonding strength due to thermal history of cooling (repetition of expansion and contraction) can be prevented.

In one embodiment, the mesh portion of the ceramic sheet has a cross section of the first linear portion that is a straight portion and both ends of the straight portion at any intersection of the first linear portion and the second linear portion. It has a shape consisting of a convex curved part with the end at the end, and the cross section of the second filament part has a circular or elliptical shape, and the vertical cross section of the intersection part has a circular or elliptical shape. It has a configuration in which only the top of the convex curved portion in the first linear portion and the downwardly convex top of the circular or oval shape in the second linear portion are in contact (a so-called point contact configuration) when viewed visually. Can be done.

In another embodiment, the mesh portion of the ceramic sheet has a cross section of the first filament portion including a straight portion at a portion other than the intersection of the first filament portion and the second filament portion; It has a shape consisting of a convex curved part having both ends of the straight part as ends, and the cross section of the front second linear part is circular or elliptical at a part other than the intersection part. It is possible to have a configuration in which the first filament portion and the second filament portion each form an intersection portion in contact not only at one point but at a surface. This configuration may be referred to as a surface contact structure as opposed to the so-called point contact described above.

In an embodiment corresponding to a subordinate concept of the above structure example based on such surface contact, the mesh portion of the ceramic sheet has a cross section of the first filament portion that is the same as that of the first filament portion and the second striation portion. The part other than the intersection part has a shape consisting of a straight part and a convex curved part having both ends of the straight part as ends, and the cross section of the front second linear part is The part other than the intersection has a circular or elliptical shape, and the projected image of the second filament in plan view curves outward in the width direction at the intersection. As a result, the width of the projected image at the intersection is larger than the width of the projected image at a portion other than the intersection.

In yet another embodiment, the mesh portion of the ceramic sheet is such that the cross section of the first linear portion meets the linear portion at a portion other than the intersection of the first linear portion and the second linear portion. It has a shape consisting of a convex curved part with both ends of the straight part as ends, and the cross section of the second linear part is the intersection of the first linear part and the second linear part. The sintered body has a circular or elliptical shape in other parts, and this sintered body has a straight side part in at least a part of the outline in plan view, and the first line part and the second line part have a straight side part. It may have a structure in which the strips and the linear sides (outer sides) each independently intersect at an angle of 10 degrees or more and 170 degrees or less (that is, in a wide range of angles including non-right angle angles).

In yet another embodiment, the mesh portion of the ceramic sheet includes a plurality of first linear portions and a plurality of second linear portions, as well as a first linear portion and a second linear portion. It has a plurality of third striations made of ceramics passing on the diagonal lines of the quadrilateral defined by intersecting each other, and the first striation, the second striation, and the third striation It may be a plate-shaped ceramic structure in which a plurality of defined triangular through holes are formed.

When the mesh-like part occupies a part of the ceramic sheet, the part other than the mesh-like part is not particularly limited. /including those with different pore densities), and sheets in which the first striation layer (support layer) and the second striation layer are arranged in a shape other than mesh (an example is a so-called screen-like sheet) etc.

The bottom plate in the baking jig according to the present invention is not particularly limited as long as it satisfies the following relationship with the setter placed there:
(1) At least one engagement protrusion for engaging the setter is provided in a predetermined area facing the mesh-like portion on the side of the floor plate on which the setter is placed,
(2) When the setter is placed on the floor plate, part or all of the engaging protrusions are formed to simultaneously contact each of the adjacent first linear portions,
(3) In a predetermined area of the first filament layer including the contact point,
The average vertical distance between the centers of adjacent first striations is A,
When the average distance between the contact points between the engaging protrusion and the adjacent first linear portion is B,
Satisfies the relationship A>B.

In a preferred embodiment included in this, the bottom plate of the firing jig satisfies the following relationship with the setter placed there:
(1a) A plurality of engaging protrusions for engaging the setter are provided in a predetermined area facing the mesh-like portion on the side of the floor plate on which the setter is placed,
(2a) When the setter is placed on the bottom plate, all of the engaging protrusions are formed to simultaneously contact each of the adjacent first linear portions,
(3a) At all contact points,
Let Ax be the vertical distance between the centers of adjacent first linear parts,
When the distance between the contact points of the engaging protrusion and the adjacent first linear portion is Bx,
The relationship Ax>Bx is satisfied.

The shape of this floor plate is such that the base of the upper surface (reference surface) is flat at least in the area where the setter is likely to be placed, and has an outer periphery that can accommodate the entire setter, and the setter is stable. Although there is no particular limitation as long as it can be placed, for example, it may have a flat plate shape such as a polygon such as a substantially circular shape, a substantially elliptical shape, and a substantially rectangular shape. The thickness of the base material part of the floorboard is not particularly limited, at least in the area where the setter may be placed, but may be, for example, 1 mm or more and 50 mm or less, 2 mm or more and 30 mm or less, or 3 mm or more and 20 mm or less. It's fine. The thickness of the base material portion of the bottom plate may be the same throughout the bottom plate, at least in the area where the setter is likely to be placed, or the thickness may vary in a portion. Further, at least a portion of the bottom plate may be provided with a peripheral wall or ribs. The bottom plate may be provided with a peripheral wall or ribs around its entire circumference. In addition, the bottom plate may be provided with legs at a portion of its bottom (usually at a plurality of locations near the periphery) from the viewpoint of ensuring ease of handling and ventilation during firing by stacking in multiple stages. Alternatively, the pedestal may be provided with support posts at a portion of the top (usually at multiple locations near the periphery) instead of such legs. In order to maintain air permeability during the firing process, it is usually preferable that one or more openings (hollow parts) be formed in the bottom plate. From the viewpoint of breathability, it is also preferable that the majority of the bottom plate other than the vicinity of the periphery be an opening.

At least one engaging protrusion for engaging the setter is provided in a predetermined area facing the mesh-like portion on the side of the bottom plate where the setter is placed. In this specification, "engagement" means that the bottom board is provided with at least one protrusion (protrusion) in a predetermined area facing the mesh-like portion on the surface of the bottom board on which the setter is placed. Assuming that the predetermined area on the surface on which the setter is placed is a flat surface with no protrusions, compare the frictional resistance to sliding when the setter is placed on the flat surface. is intended to refer to any event that provides greater frictional resistance.

The "predetermined area" on the side of the floorboard on which the setter is placed is not particularly limited as long as it includes a position facing at least a part of the mesh part, and this area may be one. There may also be a plurality of numbers (for example, 2 or more and 10 or less). That is, the "predetermined area" on the surface of the bottom plate can be appropriately determined in accordance with various factors such as the arrangement of the mesh portions in the setter and the shape design of the mesh. At least one engaging protrusion may be provided in each of one or a plurality of separated predetermined regions. When at least one engaging protrusion is provided in a plurality of separated predetermined regions, the number of engaging protrusions in each region may be the same or different. The number of engaging protrusions provided in one of the predetermined areas on the bottom plate is not particularly limited, but for example, from 1 to 100, from 1 to 50, from 1 to 30, and from 1 to 30. 20 or less, 1 to 10, 2 to 100, 2 to 50, 2 to 30, 2 to 20, 2 to 10, 5 to 100 5 to 50 pieces, 5 to 30 pieces, 5 to 20 pieces, 5 to 10 pieces, 10 to 100 pieces, 10 to 50 pieces, 10 to 30 pieces The number may be less than or equal to 10 or more and less than or equal to 20.

The shape of the engaging protrusion provided in a predetermined area on the bottom plate is approximately hemispherical, approximately semi-ellipsoidal, approximately conical, approximately truncated conical, and has a curved surface on the top periphery (top periphery It may be substantially prismatic (with a so-called R curve given to its cross section), or a combination thereof. In a preferred embodiment, the shape of the engaging protrusion may be approximately hemispherical or approximately semi-ellipsoidal from the viewpoint of manufacturing efficiency, engagement performance, and prevention of breakage of the setter. In another preferred embodiment, the shape of the engagement protrusion does not substantially include straight portions in its cross-sectional profile. In yet another preferred embodiment, the shape of the engaging protrusion is such that, in its cross-sectional profile, the front portion includes 0% or more and 20% or less of the upper surface contour length, or 0% or more and 10% or less.
When at least one engagement protrusion is provided in a plurality of separated predetermined areas on the bottom plate, the shape of the engagement protrusion in each area may be the same or different. Further, when a plurality of engaging protrusions are provided in one predetermined area on the bottom plate, the shapes of the engaging protrusions may be the same or different.

When the setter is placed on the bottom plate, a part or all of the engagement protrusions provided in a predetermined area on the bottom plate simultaneously contact each of the adjacent first linear portions. It is formed like this. The engaging protrusions are formed so that when the setter is placed on the bottom plate, all of the engaging protrusions within a predetermined area on the bottom plate simultaneously contact each of the adjacent first linear portions. is preferred. The definition that the engaging protrusions "contact each of the adjacent first linear parts at the same time" means that under the dynamic situation where the setter slides on the bottom plate, the engaging protrusions contact each other at a predetermined time difference. A form of contact in which the first filament is sequentially contacted with each of the first filament parts (i.e., a dynamic contact form that can occur when the gap/pitch of adjacent first filament parts is larger than the width of the protrusion) is excluded. Ru.

FIG. 3 shows an embodiment of the combination of a setter and a bottom plate in a baking jig according to the present invention. Neither the setter nor the bottom plate of the firing jig according to the present invention is limited to the form shown in FIG. 3, and this is merely an example.
In Fig. 3, 4 is a firing jig (combination), 5 is a setter (ceramic sheet), 6 is a floor plate, 7 is a frame (base material of the floor plate), 8 is a hollow part (opening), and 9 is a peripheral wall. (rib), 10 is a leg portion, and 11 is a group of engaging protrusions. The setter 5, which is a part of the firing jig 4, has a first filament layer consisting of a first filament layer extending in one direction at approximately constant intervals, and a first filament layer consisting of a first filament layer extending in one direction at approximately constant intervals, and a first filament layer consisting of a first filament layer extending in one direction at approximately constant intervals. It is entirely formed of a mesh-like portion made of a second filament layer composed of second filament portions extending in the direction. The bottom plate 6, which is the other member of the baking jig 4, is composed of a frame 7 which is a substantially rectangular plate-like body having a hollow part 8, and an upright peripheral wall part 9 is formed all around the frame 7. In addition, each of the four corners of the rectangle is provided with legs 10 for multi-stage stacking. Although the peripheral wall portion (rib) 9 is illustrated as forming the entire periphery, it may be a part of the periphery. The upper surface of the frame 7 of the bottom plate 6 forms a flat surface on which the entire peripheral edge of the setter 5 can be placed, and at the same time, the peripheral wall portion 9 serves as a flat surface on which the setter 5 can be placed when the setter 5 is placed on the frame 7 of the bottom plate 6. The entire peripheral edge portion of 5 is formed so as to have a predetermined distance from the peripheral wall portion. A plurality of engaging protrusions 11 are formed at predetermined positions on each side of the frame 7 of the bottom plate 6, respectively. When the setter 5 is placed on the frame body 7 of the bottom plate 6, the mesh-like portion forming the entire setter 5 is placed on at least a portion of the plurality of engaging protrusions 11 on each side surface of the frame body 7. The material is placed and engaged with the material to provide prevention and suppression performance against sliding. By vertically stacking a plurality of firing jigs 4, each of which is a combination of the setter 5 and the bottom plate 6, a multi-tiered firing jigs can be formed. In such multi-tiered stacking, ventilation is ensured not only in the hollow part 8 but also between the plurality of leg parts 10 and, if a peripheral wall part is formed in a part of the periphery, between them, increasing efficiency. A typical firing process can be performed.

As shown in FIG. 3 as an example, at least one engagement protrusion (more preferably a plurality of engagement protrusions) is provided in each of a plurality of predetermined regions facing the mesh-like portion on the side of the floorboard on which the setter is placed. (an engaging protrusion) is provided, and the engaging protrusion is arranged so that when the setter is placed on the bottom plate, each of the plurality of areas of the bottom plate corresponds to the vicinity of the periphery of the setter. , is a preferred embodiment of the firing jig according to the present invention. By satisfying the relationship between the engaging protrusion and the first linear portion, which will be described later, and by adopting such an arrangement, the setter can be more stably placed on the bottom plate, and the sliding of the setter on the bottom plate can be improved. This makes it possible to effectively prevent and suppress motion.
Further, in order to enjoy this effect more reliably, it is preferable that the total area of the area on the bottom plate where the engaging protrusions are provided is 0.004% or more of the entire area of the opposing setter surface, It is more preferably 0.2% or more, and even more preferably 0.5% or more. On the other hand, from the viewpoint of reducing the incidence of defective products during the production of floor plates and efficiently firing the objects to be fired with the floor plates and setters stacked in multiple stages, this ratio may be 15% or less, and typically It may be 10% or less, 8% or less, or 6% or less.

FIG. 4 shows an embodiment of a combination of a setter and a bottom plate in a baking jig according to the present invention. This figure shows the setter placed on the bottom plate. Here, 12 is a first linear portion adjacent to the mesh-like part of the setter, 13 is a bottom plate (base material part), and 14 is an engagement protrusion formed in a predetermined area on the bottom plate (a predetermined part on the bottom plate). If a plurality of engaging protrusions are formed in the region, one of them is shown. In this figure, when the setter is placed on the bottom plate, the engaging protrusions 14 are in contact with each of the adjacent first linear portions 12 at the same time. When a plurality of engagement protrusions are formed in a predetermined area on the bottom plate, at least some (i.e., part or all) of the plurality of engagement protrusions are connected to the adjacent first linear portions in this way. contact each of them at the same time. Note that hereinafter, this contact state may be abbreviated as "simultaneous contact."

As shown in FIG. 4, in a predetermined region of the first filament layer including this simultaneous contact point, the average vertical distance between the centers of adjacent first filament portions 12 is defined as A, and the engaging protrusion 14 When the average distance between the contact points of the first linear portion 12 and the first linear portion 12 is defined as B, A is larger than B, that is, the relationship A>B is satisfied.
Here, the adjacent first filament portions 12 are arranged and designed to be stretched in the same direction at given intervals, but the intervals and directions are subject to minute errors caused by the firing process. can occur. Considering such errors in the interval and direction of the adjacent first filament parts 12, the average vertical distance A between the centers of the adjacent first filament parts 12, and the engagement protrusion 14 and the first filament part 12 are determined. Define the average distance B between the points of contact with the portion 12. That is, within a predetermined area, the center point of the width of the first linear part is the center point in a plan view parallel to the top surface of the bottom plate in the direction perpendicular to the design direction of the first linear part, and the adjacent The average of the distances between the centers of one linear portion at five arbitrary locations is defined as the average vertical distance A between the centers of adjacent first linear portions. In addition, the average distance between the contact points measured by specifying the contact points between the engaging protrusion and the first filament with markings within the predetermined area (if the distance is up to 5 within the predetermined area) (If the distance is 6 or more, the average of the 5 largest values) is the average distance B between the contact points of the engaging protrusion and the adjacent first filament. . Depending on the shape of the engagement protrusion, for example, if the engagement protrusion has a substantially prismatic shape with a curved surface on the top peripheral edge, the contact point between the engagement protrusion and the first linear portion may be a line. Alternatively, for example, the bottom of the first filament may have a flat surface, and the engaging protrusion may have a curved surface on the top peripheral edge. In the case of a substantially prismatic shape, the contact point between the engaging protrusion and the first linear portion may be planar (a contact surface that is a collection of contact points). In such a case, the shortest vertical distance between the contact points of the engaging protrusion and the first filament, that is, the average of the shortest distances in the direction perpendicular to the design direction of the first filament, is defined as B. Let's define it.

As shown in FIG. 4, in a predetermined region of the first filament layer including the simultaneous contact point, the average vertical distance between the centers of adjacent first filament portions 12 is defined as A, and the engaging protrusion 14 and When the average distance between the points of contact with the first linear portions 12 is B, the relationship A>B is satisfied so that the engaging protrusion 14 enters between the adjacent first linear portions 12. Therefore, the movement of the setter on the floor plate can be effectively restricted. As a result, it becomes possible to sufficiently prevent the setter from sliding on the bottom plate, and the unexpected and excellent effect of significantly improving handling properties as a firing jig for ceramic products can be obtained.
Regarding A and B, from the viewpoint of reliable expression of the above effects, it is more preferable that the relationship A≧1.2B is satisfied, it is even more preferable that the relationship A≧1.5B is satisfied, and A≧1.7B. It is most preferable that the following relationship is satisfied. On the other hand, from the viewpoint of preventing damage to the engaging protrusion 14 during sliding, typically A≦5.0B, and more preferably A≦4.0B or A≦3.0B.

Further, as shown in FIG. 4, in a predetermined region of the first filament layer, when the average value of the gap (also referred to as pitch) between adjacent first filament portions 12 is C, the engagement It is preferable that the average distance B between the contact points of the projecting piece 14 and the first linear portion 12 is greater than or equal to the value of C, that is, the relationship B/C≧1 is satisfied.
Here, the average value C of the gap (pitch) of the adjacent first linear portions is an arbitrary 5 in a plan view parallel to the upper surface of the floor plate in a direction perpendicular to the design direction of the first linear portions. Refers to the average gap (pitch) between locations.
As described above, the cross-sectional shape of the first linear portion of the setter and the shape of the engaging protrusion provided on the bottom plate are not particularly limited, but as exemplified above, the cross-sectional shape of the first linear portion is circular. Or, if it is elliptical and the shape of the engaging protrusion is approximately hemispherical, approximately semi-ellipsoidal, approximately conical, approximately truncated conical, or approximately prismatic with a curved surface at the top periphery, the above-mentioned When the condition of simultaneous contact is satisfied, the relationship of B/C≧1 is usually satisfied.

The above-mentioned average vertical distance A between the centers of the adjacent first linear portions, average distance B between the contact points of the engaging protrusion and the adjacent first linear portions, and the gap between the adjacent first linear portions. Each of the average values C of (pitch) is not particularly limited as long as the above-mentioned specific magnitude relationship is satisfied, and can take any numerical range.
For example, the above A may be generally 100 μm or more and 20 mm or less, preferably 200 μm or more and 10 mm or less, or 300 μm or more and 5 mm or less. The above B may generally be 80 μm or more and 15 mm or less, preferably 150 μm or more and 8 mm or less, or 200 μm or more and 5 mm or less. The above C may be generally 60 μm or more and 10 mm or less, preferably 100 μm or more and 5 mm or less, or 150 μm or more and 3 mm or less.

According to a preferred embodiment, a plurality of engagement protrusions are provided in a predetermined area on the side of the bottom plate on which the setter is placed, and all (or substantially all of the engagement protrusions) the center of the adjacent first filament at all (or substantially all) of the contact points; When the vertical distance between the two is Ax (according to the definition of A), and the distance between the contact points between the engaging protrusion and the first linear portion is Bx (according to the definition of B), the relationship Ax>Bx is satisfied. It will be done. As a result, all (or substantially all) of the engagement protrusions in the predetermined area on the bottom plate are arranged so as to fit between the adjacent first filament portions, and the setter is placed on the bottom plate of the setter. Movement can be more effectively restricted. Furthermore, this can significantly improve the handling properties of the ceramic product as a firing jig.
Regarding Ax and Bx, from the viewpoint of reliable expression of the above effects, it is more preferable that the relationship Ax≧1.2Bx is satisfied, it is even more preferable that the relationship Ax≧1.5Bx is satisfied, and it is even more preferable that the relationship Ax≧1.7Bx is satisfied. It is most preferable that the following relationship is satisfied. On the other hand, from the viewpoint of preventing damage to the engaging protrusion during sliding, typically Ax≦5.0Bx, and more preferably Ax≦4.0Bx or Ax≦3.0Bx.

5(a) to (c) illustrate various embodiments of the relationship between the first linear portion of the mesh-like portion of the setter and the engaging protrusion of the bottom plate in the baking jig according to the present invention. In these embodiments, a plurality of engagement protrusions for engaging the setter are arranged approximately linearly at predetermined intervals in a predetermined area facing the mesh-like portion on the side of the floor plate on which the setter is placed. The common assumption is that

FIG. 5(a) shows that when the setter is placed on the bottom plate, the center of the adjacent first filament portion 12 is located in a predetermined area of the first filament layer including the contact point caused by the above-mentioned simultaneous contact. When the average vertical distance between the two is A, and the average distance in the same direction as A between the center points of the tops of the engaging protrusions 14 provided in a predetermined area on the bottom plate (base member) 13 is E. , E are equal to A, that is, an embodiment is illustrated in which the relationship E=A (E=1A) is satisfied. In addition, FIG. 5(b) shows that when the setter is placed on the bottom plate, in the predetermined area of the first striation layer, E is equal to twice A, that is, the relationship E=2A is established. Embodiments are illustrated that satisfy the requirements. For reference, in FIGS. 5A and 5B, the virtual planes of the top and bottom surfaces of the first striation layer are shown as 15K and 15S, respectively. In these embodiments, when each of the engaging protrusions has the same shape, the cross-sectional shape of each first linear portion is the same, and the first linear portions are arranged at equal intervals, the

virtual plane

15K and 15S are parallel to the plane forming the upper surface of the bottom plate.
Here, the average vertical distance A between the centers of adjacent first linear portions follows the definition of A above. The center point of the top of the engaging protrusion is the point if the highest point relative to the top surface of the bottom plate is a point, and if the highest point relative to the top surface of the bottom plate is a planar shape, the center point of the top of the engagement protrusion is the circumcircle of the highest surface. Let be the center point of When three or more engaging protrusions are provided in a predetermined area on the bottom plate in a substantially straight line at predetermined intervals, that is, the distance between the center points of the tops of the engaging protrusions in the same direction as A is 2. If there are more than 7 engaging protrusions, the average of them is set as E, and if 7 or more engaging protrusions are provided in a predetermined area on the bottom plate in a substantially straight line at predetermined intervals, that is, the number of engaging protrusions is If there are six or more distances between the top center points in the same direction as A, the average of the five largest distances is taken as E.

In this way, when the setter is placed on the bottom plate, the relationship of E≧A (E≧1A) or E and In particular, by satisfying the relationship E≧0.95A, which takes into account a certain degree of variation and error in the design of A, E=yA (where E and A follow the above definitions, and y is an integer n of 1 or more). (In the case of the above embodiment, this y is 1 or 2) or is a non-integer within the range of 0.95n≦y<n, n<y≦1.05n, taking into account some variation and error in this design. By satisfying the relationship (.), the probability that the plurality of engaging protrusions will enter between the adjacent first linear portions increases, thereby preventing the setter from moving in the horizontal direction from front to back, left to right, and from side to side on the bottom plate. Sliding can be more effectively restricted, and as a result, handling properties as a firing jig for ceramic products can be further improved.

The average E of the distances in the same direction as A between the center points of the tops of the engaging protrusions provided in a predetermined area on the bottom plate is not particularly limited as long as the above-mentioned specific size relationship is satisfied; Numerical ranges are also possible. For example, E may be generally 100 μm or more and 40 mm or less, preferably 200 μm or more and 20 mm or less, or 300 μm or more and 10 mm or less.

In FIG. 5(c), when the setter is placed on the bottom plate, E is equal to 1.3 times A in a predetermined area of the first filament layer including the contact point due to the above simultaneous contact. , that is, an embodiment in which the relationship E=1.3A is satisfied is illustrated. For reference, in FIG. 5(c), the virtual planes of the top surface and bottom surface of the first striation layer are shown as 15K and 15S, respectively, similarly to FIGS. 5(a) and 5(b). In this embodiment, when each engaging protrusion has the same shape, the cross-sectional shape of each first linear portion is the same, and the first linear portions are arranged at equal intervals, the

virtual plane

15K and 15S are inclined at a predetermined angle with respect to the plane forming the upper surface of the bottom plate. In this embodiment, it is intended that only the area around the predetermined area of the first striation layer has an inclination of a predetermined angle with respect to the plane forming the upper surface of the bottom plate, and the mesh-like Of course, it is not intended that the entire section or the entire setter including the mesh section have this slope.

In this way, when the setter is placed on the bottom plate, in a predetermined area of the first filament layer including the contact point due to the above simultaneous contact, E=yA (where E and A are according to the above definition). , y is a non-integer outside the range of 0.95n≦y<n or n<y≦1.05n (n is an integer of 1 or more) (in the above embodiment, y is 1.3) By satisfying the relationship (.), not only can the horizontal movement/sliding of the setter on the floor plate in the front, back, left, and right directions be restricted as effectively as in other embodiments, but also, surprisingly, A high degree of placement stability is provided even against vibrations (that is, vertical fluctuations) of the bottom plate and setter, and as a result, handling properties as a firing jig for ceramic products can be further improved.

In the case where a plurality of engagement protrusions are provided in a predetermined area facing the mesh portion on the side where the setter is placed of the floor plate, the arrangement of the engagement protrusions is similar to that of the above-mentioned engagement protrusions and the first line. Particularly limited as long as the relationship A>B between the striations is satisfied, or as long as one or more of the other preferable relationships between the engaging protrusion and the first striation are further satisfied. However, specific embodiments are illustrated in FIGS. 6(a) and 6(b). These embodiments are examples of arrangements of a plurality of engaging protrusions.

In the embodiment of FIG. 6(a), the engaging protrusions 16 having the same shape (for example, approximately hemispherical) are arranged in one direction at equal intervals X, and the engaging protrusions 16 having the same shape are They are arranged at equal intervals Y in one direction substantially perpendicular to the . X and Y may be the same length or different. In this embodiment, each engaging protrusion is illustrated as having the same shape, but may include engaging protrusions having different shapes. Further, when the engaging protrusions are arranged in two directions, the arrangement direction does not have to be substantially perpendicular as shown in this figure. Furthermore, the engaging protrusions may be arranged in three or more directions instead of in two directions. The shape and arrangement method of the engaging protrusions can be appropriately selected in accordance with the shape design of the mesh of the mesh portion in the setter.
As shown in FIG. 6(a), the engaging protrusions having the same shape (e.g. approximately hemispherical shape) are arranged at equal intervals in one direction, and the engaging protrusions having the same shape are arranged as above. If they are arranged at equal intervals in a direction substantially perpendicular to E, it will be easier to satisfy any of the desired relationships between E and A, and therefore the above advantages resulting from those relationships. is easy to obtain.

As shown in the embodiment of FIG. 6(b), the predetermined intervals between the at least three engagement protrusions formed in a substantially straight line may not be substantially equally spaced at least in part. This figure shows, as an example, a configuration in which three engaging protrusions 17 are formed substantially linearly with an interval of Z1 and an interval of Z2 (≠Z1), and one set of the engaging protrusions 17 are arranged in two rows. has been done. In this way, by allowing a configuration in which the predetermined intervals of the at least three engaging protrusions formed in a substantially straight line are not approximately equally spaced in at least some parts, it is possible to flexibly design the shape of the mesh of the mesh portion in the setter. It becomes possible to design the engaging protrusion corresponding to the above, and thereby the movement and sliding of the setter on the bottom plate can be effectively restricted.

A method for manufacturing a floor plate equipped with a setter and an engaging protrusion will be described below, but this should be understood as a non-limiting example.

As mentioned above, any known setter structure may be adopted for the part other than the mesh part of the setter (if any), and the mesh part and other parts may be formed by any known method. They may be combined, or may be a ceramic sheet sintered body in which both are integrally formed. Therefore, the following description will focus on the method for manufacturing the mesh portion of the setter.
Examples of the ceramic raw material powder for manufacturing the mesh portion of the setter are as described above. The mass proportion of the ceramic raw material powder in the raw material paste may be generally 20% by mass or more and 85% by mass or less, and preferably 30% by mass or more and 75% by mass or less, based on the mass of the entire paste.

The average particle size of the ceramic raw material powder used in the raw material paste may generally be in the range of 0.1 to 20 μm, preferably in the range of 0.2 to 10 μm. The average particle size of the ceramic raw material powder here is the value of the volume cumulative median diameter (D50) determined by laser diffraction/scattering method. When the average particle size of the ceramic raw material powder is within the above range, the structural strength and stability after firing are increased, and it becomes possible to obtain a sintered body with a reduced possibility of collapse.

Water is usually used as a medium for a raw material paste for creating a molded body that is a precursor of the first striation layer and the second striation layer of the mesh portion. Alcohol, acetone, ethyl acetate, etc. can also be used as a medium other than water. Two or more types of these media may be mixed. The mass proportion of the medium in the raw material paste may be generally 10% by mass or more and 60% by mass or less, and preferably 15% by mass or more and 55% by mass or less, based on the mass of the entire paste.

The raw material paste for creating the molded body, which is a precursor of the first striation layer and the second striation layer of the mesh-like portion, optionally contains any known sintering aid in an appropriate amount. It's okay to be there. The raw material paste may also contain any known binder. The mass proportion of the binder in the raw material paste may be, for example, 0 mass% or more and 40 mass% or less, and preferably 1 mass% or more and 40 mass% or less, based on the total mass of the raw material paste.

It is preferable that the viscosity of the raw material paste be high at the temperature at which the filament coated body is applied, from the viewpoint that the filament coated body can be successfully produced. The viscosity of the raw material paste is not particularly limited, but it is preferably 1.5 MPa·s or more and 5.0 MPa·s or less at the temperature during coating (typically room temperature such as about 25° C.). The viscosity of the raw material paste here refers to the value measured 4 minutes after the start of measurement using a cone-plate rotational viscometer or rheometer at a rotational speed of 0.3 rpm. The raw material paste can contain any known thickener, flocculant, thixotropic agent, etc. as a viscosity modifier.

In order to stabilize the discharge amount from the discharge device for obtaining a molded body which is a precursor of the first filament layer and the second filament layer of the mesh portion, the raw material paste may be prepared using any of the known methods, for example. It may also contain plasticizers, lubricants, dispersants, sedimentation inhibitors, pH adjusters, and the like.

By discharging the raw material paste obtained in this way onto a flat substrate from a dispensing device, a plurality of first filament coated bodies each having a plurality of filaments arranged at a given interval and stretched in one direction. form. The first filament coated body corresponds to the first filament portion of the mesh portion.
As the discharging device, various known devices such as a small extruder or a printing machine can be used. These dispensing devices may typically include a dispenser with a nozzle. After the first filament coated body is discharged, the medium contained in the first filament coated body can be removed and dried to increase the viscosity. The proportion of the medium in the first linear coated body after the medium removal operation may be reduced to preferably 50% by mass or less, more preferably 30% by mass or less.

Next, using the raw material paste, a plurality of filaments, each of which is stretched in one direction, are arranged at a given interval so as to touch and intersect each filament of the first filament coated body. A two-line coated body is formed. The second filament coated body corresponds to the second filament portion of the mesh portion. The raw material paste for forming the second filament coated body may be the same as or different from the raw material paste for forming the first filament coated body, but the efficiency of forming the filament coated body is It is more preferable that they be the same from the viewpoint of the properties and integrity of the structure and physical properties of the ceramic sheet sintered body to be produced.

The specific shapes of the plurality of first filament coated bodies and the plurality of second filament coated bodies formed as molded bodies are adjusted to match the desired shapes of the various mesh-like parts described above. Can be built.

In an additional embodiment, using a raw material paste, a given strip is applied so as to touch each strip of the second filament coated body and intersect with the first filament coated body and the second filament coated body. You may optionally form a plurality of third filament coated bodies arranged at intervals of , each of which is stretched in one direction. The raw material paste for forming the optional third filament coated body may be the same or different from the raw material paste for forming the first/second filament coated body, but It is more preferable that they be the same from the viewpoint of efficiency in forming the coated body and integrity of the structure and physical properties of the mesh portion to be produced.

The molded body containing the plurality of first filament coated bodies and the plurality of second filament coated bodies obtained in this way is peeled from the substrate (the molded body forming workbench), and then the baking jig ( By placing it in a firing furnace and firing it, the desired mesh-shaped portion can be obtained. By firing, a mesh-like portion including a first filament layer composed of a plurality of first filament portions and a second filament layer composed of a plurality of second filament portions is usually formed. It is constructed as a sintered body, which is an integral structure that does not include physical bonding of each member with adhesive.

The firing process for obtaining the mesh portion may be performed in an atmospheric atmosphere (atmospheric pressure) or under pressure using an inert gas such as nitrogen, if necessary. An appropriate firing temperature may be selected depending on the type of raw material powder of the ceramic material. The same applies to the firing time. Non-limiting examples of firing temperatures may be 500°C or higher, 800°C or higher, or 1000°C or higher, and 4000°C or lower, 3500°C or lower, or 3000°C or lower. Non-limiting examples of firing times may be 30 minutes or more, 1 hour or more, or 2 hours or more, and 24 hours or less, 12 hours or less, or 6 hours or less.

The ceramic raw material powder and additives for manufacturing the base material part of the bottom plate (other than the engaging protrusions) and the engaging protrusions provided thereon are the same as those mentioned above for the mesh part of the setter. It can be selected as appropriate. For example, the ceramic raw material powder for the floor plate includes alumina (Al ₂ O ₃ ), zirconia (ZrO ₂ ), magnesium oxide (MgO), mullite (3Al ₂ O ₃ -2SiO ₂ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), aluminum nitride (AlN), boron carbide (B ₄ C), cordierite (MgO/Al ₂ O ₃ /SiO ₂ ), aluminum titanate (Al ₂ TiO ₅ ), magnesium titanate (MgTiO ₃ ) , titanium diboride (TiB ₂ ), or a combination of two or more thereof.

Even if the base material part of the floor plate (other than the engagement protrusion) and the engagement protrusion provided thereon are formed from the same raw material (i.e., a raw material containing the same ceramic raw material powder and additive mixture), they are different. It may be formed from raw materials. The base material of the bottom plate and the engaging protrusions provided thereon are susceptible to a decrease in bonding strength due to the thermal history of heating and cooling during firing (repeated expansion and contraction) and the base of the engaging protrusions caused by this. From the viewpoint of suppressing peeling from the material part, it is more preferable that they are formed from the same raw material.

A floor plate in which an engaging projection piece is provided on the base material part (other than the engagement projection piece) of the floor plate is made into an integral molded body by any known molding method such as press molding, casting molding, vibration molding, etc. After forming, it can be manufactured by firing under the same conditions as those described above for the firing process of the mesh portion.
Alternatively, for a floor plate in which an engaging protrusion is provided on the base portion of the floor plate, the formation and firing of the molded bodies of the base portion of the floor plate and the engaging protrusion provided thereon are performed separately. After this, the sintered engaging protrusion can be bonded to a predetermined region of the upper surface of the sintered body of the base plate portion using any known ceramic adhesive or the like.
In addition, as a further alternative method, the bottom plate in which the engaging protrusion is provided on the base part of the bottom plate can be produced by forming the molded body of the base part of the bed plate or by firing the molded body of the base part. It can also be obtained by manufacturing a sintered body and then machining its surface to form an engaging protrusion. Examples of such machining include, but are not particularly limited to, cutting using an edged tool such as a drill or file, polishing, and the like.
The method for manufacturing a floorboard in which an engaging protrusion is provided on the base material of the floorboard is to integrally mold the base material of the floorboard and the engagement protrusion from the viewpoint of structural strength, peeling resistance, etc. Manufacture by body forming and firing techniques is more preferred. The adhesive for ceramics used in the adhesive bonding method of the sintered material of the engaging protrusion is not particularly limited, but adhesive compositions containing polyimide resin, epoxy resin, or polyamide-imide resin may be used. , refractory ceramics such as alumina, and inorganic adhesive compositions containing inorganic polymers as main components (for example, "Aron Ceramic" manufactured by Toagosei Co., Ltd.).

Production of mesh-shaped ceramic sheet 1 as a setter (1) Preparation of paste for forming a linear coated body 65.3 parts of partially stabilized zirconia powder containing 3 mol% yttria with an average particle size of 0.8 μm and a water-based binder 5.0 parts of hydroxypropyl methyl cellulose (average degree of polymerization: 300,000 g/mol), 2.5 parts of glycerin as a plasticizer, 1.1 parts of a polycarboxylic acid dispersant (molecular weight 12,000), and 26 parts of water. .1 part was mixed and defoamed to prepare a paste. The viscosity of the paste was 2.3 MPa·s at 25°C.
(2) Formation of a linear coated body Using the above paste as a raw material, a first linear coated body was formed on a resin substrate using a dispenser having a nozzle with a circular cross section of 0.8 mm in diameter. Next, using a dryer, hot air was blown onto the first filament coated body to remove water and dry the first filament coated body. The water content of the first filament coated body after drying was 10%. Subsequently, a second filament coated body was formed which intersected the first filament coated body. The intersection angle of both filament coated bodies was 90 degrees. The second filament coated body was dried by blowing hot air onto the second filament coated body using a dryer to remove water. The water content of the second filament coated body after drying was 8%. Through these operations, a lattice-like precursor consisting of first and second filaments that crossed perpendicularly was obtained.
(3) Firing process After the dried lattice-like precursor was peeled from the resin substrate, it was placed in an atmospheric firing furnace. Degreasing and firing were performed in this firing furnace to obtain a mesh-shaped ceramic sheet 1 made of zirconia. The firing temperature was 1450°C and the firing time was 3 hours. In the mesh-like ceramic sheet 1, the first filament portion and the second filament portion (each having a substantially elliptical cross-sectional shape slightly shorter in the vertical direction) were in point contact at their intersections. The width W1 of the first linear portion (the length in the direction perpendicular to the design direction in plan view; the same applies to the following linear portions) in the obtained mesh-like zirconia sheet 1 is 800 μm, and the width W1 of the second linear portion is 800 μm. The width W2 was 800 μm. At the intersection, the width W1a of the first linear portion was 880 μm, and the width W2a of the second linear portion was 820 μm. The pitch P1 of the first linear portion was 400 μm, and the pitch P2 of the second linear portion was 400 μm (C=0.4 mm). Further, the size (opening size) of the through holes in the mesh ceramic sheet 1 was 0.4 mm square, and the area of the through holes was 0.16 mm ² . In mesh-like ceramic sheet 1, the angle between each linear portion and the side portion was 45°, and the intersection angle between the first linear portion and the second linear portion was 90°. The size of the mesh ceramic sheet 1 was 200 mm long x 200 mm wide. In this sheet, the average vertical distance A between the centers of adjacent first striations was 1.2 mm. Using a digital microscope (manufactured by Keyence Corporation, product name "VHX-5000"), examine the adjacent first linear sections in the direction perpendicular to the design direction of the first linear sections at any five locations on the sheet. The distance between the centers was measured, and the average thereof was defined as the average vertical distance A (the same applies hereinafter).

Production of the mesh-like ceramic sheet 2 as a setter A lattice- like precursor consisting of a first filament body and a second filament body crossed perpendicularly was produced by the same process as above except that a dispenser having a nozzle with a diameter of 0.2 mm was used. After obtaining the body, a mesh-shaped ceramic sheet 2 made of zirconia was obtained under the same firing conditions as above. The width W1 of the first linear portion in the mesh-like ceramic sheet 2 was 200 μm, and the width W2 of the second linear portion was 200 μm. At the intersection, the width W1a of the first linear portion was 220 μm, and the width W2a of the second linear portion was 205 μm. The pitch P1 of the first linear portion was 200 μm, and the pitch P2 of the second linear portion was 200 μm (C=0.2 mm). Further, the size (opening size) of the through holes in the mesh ceramic sheet 2 was 0.2 mm square, and the area of the through holes was 0.04 mm ² . In the mesh-like ceramic sheet 2, the angle between each filament and the side portion was 45°, and the intersection angle between the first filament and the second filament was 90°. The size of the mesh ceramic sheet 2 was 200 mm in length x 200 mm in width. In this sheet, the average vertical distance A between the centers of adjacent first striations was 0.4 mm.

Production of the mesh-like ceramic sheet 3 as a setter A lattice- like precursor consisting of a first filament body and a second filament body crossed perpendicularly is produced by the same process as above except that a dispenser having a nozzle with a diameter of 1.2 mm is used. After obtaining the body, a mesh-shaped ceramic sheet 3 made of zirconia was obtained under the same firing conditions as above. The width W1 of the first linear portion in the mesh-like ceramic sheet 3 was 1200 μm, and the width W2 of the second linear portion was 1200 μm. At the intersection, the width W1a of the first linear portion was 1320 μm, and the width W2a of the second linear portion was 1230 μm. The pitch P1 of the first linear portion was 800 μm, and the pitch P2 of the second linear portion was 800 μm (C=0.8 mm). Further, the size (opening size) of the through holes in the mesh ceramic sheet 3 was 0.8 mm square, and the area of the through holes was 0.64 mm ² . In the mesh-like ceramic sheet 3, the angle between each linear portion and the side portion was 45°, and the intersection angle between the first linear portion and the second linear portion was 90°. The size of the mesh ceramic sheet 3 was 200 mm long x 200 mm wide. In this sheet, the average vertical distance A between the centers of adjacent first striations was 2.0 mm.

Production of mesh-like ceramic sheet 4 as a setter A lattice- like precursor consisting of a first filament and a second filament intersecting perpendicularly is produced by the same process as above except that a dispenser having a nozzle with a diameter of 0.4 mm is used. After obtaining the body, a mesh-shaped ceramic sheet 4 made of zirconia was obtained under the same firing conditions as above. The width W1 of the first linear portion in the mesh-like ceramic sheet 4 was 400 μm, and the width W2 of the second linear portion was 400 μm. At the intersection, the width W1a of the first linear portion was 440 μm, and the width W2a of the second linear portion was 410 μm. The pitch P1 of the first linear portion was 800 μm, and the pitch P2 of the second linear portion was 800 μm (C=0.8 mm). Further, the size (opening size) of the through holes in the mesh ceramic sheet 4 was 0.8 mm square, and the area of the through holes was 0.64 mm ² . The angle between each linear portion and the side portion in the mesh-like ceramic sheet 4 was 45°, and the intersection angle between the first linear portion and the second linear portion was 90°. The size of the mesh ceramic sheet 4 was 200 mm long x 200 mm wide. In this sheet, the average vertical distance A between the centers of adjacent first striations was 1.2 mm.

As raw materials for manufacturing the floor plate 1 , a mixed material containing 65 parts by mass of alumina, 35 parts by mass of silica, and polyvinyl alcohol (PVA) as a binder was used to obtain a molded body as a precursor, and then baked at a firing temperature of 1700°C. Under the firing conditions of 4 hours, a rectangular base plate 1 measuring 220 mm long x 220 mm wide x 2 mm thick was obtained. A rectangular opening with a length of 180 mm and a width of 180 mm is provided in the center of the bottom plate 1, and a rectangular peripheral wall with a height of 3 mm and a top width of 7 mm is provided around the entire periphery of the bottom plate 1. A rectangular flat part with a width of 13 mm was provided between the peripheral wall part and the peripheral wall part. That is, when the above-mentioned mesh-shaped ceramic sheet measuring 200 mm in length x 200 mm in width is placed over the entire opening and the 10 mm wide area of the rectangular plane part, the mesh-shaped ceramic sheet is placed over the entire circumference of the floor plate. These dimensions were determined so that a gap of 3 mm was provided between the end of the sheet and the rectangular peripheral wall. On the rectangular plane part of the bottom plate 1, a circular base with a diameter of 1.0 mm and a height of 1.0 mm is placed in each of a total of 8 predetermined areas at the four corners and the center of each side of the rectangle. Nine engaging protrusions of a certain semi-elliptical shape were arranged in a set of three in one row in one direction at 1.5 mm intervals, and arranged in three rows in the same direction at 1.5 mm intervals. The bottom plate provided with these engaging protrusions was manufactured by forming a molded body of the base material/protrusion integrally on the above-mentioned flat part with a press die of the protrusions, and then firing it under the above conditions.

Manufacture of floor plate 2 (for comparison)
A floor plate 2 was obtained by the same procedure as for manufacturing the floor plate 1 described above, except that no engaging protrusion was provided on the rectangular flat surface of the floor plate.

Manufacture of floor plate 3 (for comparison)
On the rectangular flat part of the floorboard, each of the 8 predetermined areas at the 4 corners and the center of each side of the rectangle has a base approximately square with a side length of about 1.6 mm and a height of 1. A set of nine engaging protrusions each having a prismatic shape with a slightly curved surface and a slightly curved surface on the top periphery are arranged in one row in one direction at an interval of 1.5 mm. A floor plate 3 was obtained by the same procedure as for manufacturing the floor plate 1 described above, except that they were arranged in three rows in the same direction.

Example 1A
The mesh ceramic sheet 1 (adjacent first linear portion) is placed on the bottom plate 1 so that a gap of 3 mm is provided between the end of the mesh ceramic sheet and the rectangular peripheral wall over the entire circumference of the bottom plate. An average vertical distance A between centers of 1.2 mm) was set as a setter. In this placed state, the average distance B between the contact points between the engaging protrusion and the adjacent first linear portion was 0.6 mm.
Here, ink is applied to the bottom of the first filament layer of the mesh-like ceramic sheet, and the contact point between the engagement protrusion and the first filament is made in the area where the engagement protrusion of the bottom plate is provided. By identifying the contact points with markings, the average distance between the contact points (the average of the five largest ones) measured using a digital microscope (manufactured by Keyence, product name "VHX-5000") can be determined by The average distance between the contact points between the piece and the adjacent first linear portion was set as B (the same applies to the following examples).

Example 2A
The mesh ceramic sheet 2 (adjacent first linear portion) is attached to the bottom plate 1 so that a gap of 3 mm is provided between the edge of the mesh ceramic sheet and the rectangular peripheral wall over the entire circumference of the bottom plate. An average vertical distance A between centers of 0.4 mm) was set as a setter. In this placed state, the average distance B between the contact points between the engaging protrusion and the adjacent first linear portion was 0.2 mm.

Example 3A
The mesh ceramic sheet 3 (adjacent first filament portion An average vertical distance A between centers of 2.0 mm) was set as a setter. In this placed state, the average distance B between the contact points between the engaging protrusion and the adjacent first linear portion was 1.0 mm.

Example 4A
The mesh ceramic sheet 4 (adjacent first linear portion) is attached to the bottom plate 1 so that a gap of 3 mm is provided between the edge of the mesh ceramic sheet and the rectangular peripheral wall over the entire circumference of the bottom plate. An average vertical distance A between centers of 1.2 mm) was set as a setter. In this placed state, the average distance B between the contact points between the engaging protrusion and the adjacent first linear portion was 1.0 mm.
In each of Examples 1A to 4A, when any of the mesh ceramic sheets 1 to 4 serving as setters is placed on the bottom plate 1, all of the engaging protrusions are aligned with the adjacent first line. The vertical distance between the centers of the adjacent first linear portions is the same as that of the engaging protrusion and the adjacent first linear portion at all of the contact points. It was confirmed that the distance between the contact points was greater than the distance between the contact points.

Comparative example 1
The mesh ceramic sheet 1 (adjacent first filament portion An average vertical distance A between centers of 1.2 mm) was set as a setter.

Comparative example 2
The mesh ceramic sheet 1 (adjacent first linear portion) is attached to the bottom plate 3 so that a gap of 3 mm is provided between the edge of the mesh ceramic sheet and the rectangular peripheral wall over the entire circumference of the bottom plate. An average vertical distance A between centers of 1.2 mm) was set as a setter. In this placed state, the average distance B between the contact points between the engaging protrusion and the adjacent first linear portion was 1.2 mm.
Here, ink is applied to the bottom of the first filament layer of the mesh-like ceramic sheet, and a contact line between the engagement protrusion and the first filament is formed in the area where the engagement protrusion of the bottom plate is provided. The average distance between the contact lines measured using a digital microscope (manufactured by Keyence, product name "VHX-5000") (design of the first linear part) The average of the shortest distances in the direction perpendicular to the direction (the average of the five largest ones) was taken as the average distance B between the contact points of the engaging protrusion and the adjacent first filament.
In order to facilitate understanding, FIG. 7 shows a schematic diagram of the contact form between the first linear portion of the mesh-like ceramic sheet and the engagement protrusion of the bottom plate in Comparative Example 2. In FIG. 7, reference numeral 18 refers to an adjacent first linear portion, 19 refers to a bottom plate (base material portion), and 20 refers to a prismatic engagement protrusion with a slightly curved surface at the top peripheral edge. From this figure, it can be seen that in this comparative example, the engagement protrusion does not enter between the adjacent first filament parts, and the movement of the first filament layer is not restricted.

Example 1B (equivalent to Example 1A)
As described above in Example 1A, a mesh ceramic sheet is attached to the bottom plate 1 so that a gap of 3 mm is provided between the edge of the mesh ceramic sheet and the rectangular peripheral wall over the entire circumference of the bottom plate. 1 (average vertical distance A between the centers of adjacent first filament portions: 1.2 mm) was placed as a setter. Here, the average distance E (average of the five largest ones) of the distances in the same direction as A between the center points of the tops of adjacent engaging protrusions in the row of engaging protrusions provided in a predetermined area of the bottom plate is , as measured using a digital microscope (manufactured by Keyence Corporation, trade name "VHX-5000"), and found to be 1.2 mm.

Examples 2B to 7B
The average distance E in the same direction as A between the center points of the tops of adjacent engaging protrusions in the row of engaging protrusions provided in a predetermined area of the bottom plate 1 is 1.3 mm, 1.4 mm, and 1, respectively. Example 1B (equivalent to Example 1A) except that the bottom plates 4 to 9 were obtained in which the direction in which the engaging protrusions were arranged was adjusted to 6 mm, 2.4 mm, 2.2 mm, and 2.9 mm. Similarly, on each floor plate, the mesh ceramic sheet 1 (adjacent first linear portion The average vertical distance A between the centers of 1.2 mm) was set as a setter.

Measurement test of mesh-shaped ceramic sheet movement start angle Consists of a combination of the bottom plate obtained in Examples 1A to 4A and 1B to 7B and Comparative Examples 1 and 2 and a setter of mesh-shaped ceramic sheet placed thereon. Slowly raise one end of the firing jig, measure the inclination angle (°) of the bottom plate when the mesh ceramic sheet begins to slide on the bottom plate, and calculate this as the movement start angle when the sheet is tilted. defined. As the angle measuring device for this test, an angle meter manufactured by Iris Co., Ltd. under the trade name "AS ONE" model number BB01B was used.

Measurement test of retention time of mesh ceramic sheet during vibration From the combination of the bottom plate obtained in Examples 1A to 4A and 1B to 7B and Comparative Examples 1 and 2 and the setter of the mesh ceramic sheet placed thereon. The firing jig was set in a vibration testing machine and vibrated at a level 10 intensity, and the time (seconds) it took for the mesh ceramic sheet to slide 3 mm on the bottom plate was measured, and this was calculated as the holding time during sheet vibration. It was defined as As a 60 Hz vibration tester, a product name "VIBRATORY PACKER, TYPE VP-40" manufactured by SINFONIA TECHNOLOGY was used.

The measurement results of the movement start angle during seat inclination and the holding time during seat vibration for Examples 1A to 4A and Comparative Examples 1 and 2 above, together with the values of A to C, and the values of ratios A/B and B/C. , shown in Table 1.

The measurement results of the movement start angle during seat inclination and the holding time during seat vibration for Examples 1B to 7B above are shown in Table 2, along with the values of A and E, and the value of the ratio E/A.

From these results, it was found that the firing jig according to the present invention can sufficiently prevent the setter, which is a mesh-shaped ceramic sheet, from sliding on the bottom plate. It has also been found that by adjusting the distance between the center points of the tops of the engaging protrusions within a predetermined range, it is possible to further enhance the anti-sliding effect.

Note that aspects or embodiments that may be included in the present invention are summarized as follows.
[1].
A firing jig consisting of a setter and a bottom plate on which the setter is placed,
The setter is a ceramic sheet that includes a mesh-like portion at least in part, and the mesh-like portion includes a plurality of first filaments each of which is arranged at a predetermined interval and extends in one direction. a first filament layer consisting of a first filament layer, and each filament layer extending in one direction and arranged at a given interval so as to touch and intersect each filament of the first filament part; a second filament layer composed of a plurality of second filament portions, the first filament layer and the second filament layer being integrally formed;
(1) At least one engagement protrusion for engaging the setter is provided in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. Ori,
(2) When the setter is placed on the bottom plate, a portion or all of the engaging protrusions are formed to simultaneously contact each of the adjacent first linear portions,
(3) In a predetermined area of the first striation layer including the contact point,
The average vertical distance between the centers of adjacent first linear portions is A,
When the average distance between the contact points of the engaging protrusion and the adjacent first linear portion is B,
satisfies the relationship A>B,
Baking jig.
[2].
(1a) A plurality of engaging protrusions for engaging the setter are provided in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. ,
(2a) When the setter is placed on the bottom plate, all of the engaging protrusions are formed to simultaneously contact each of the adjacent first linear portions,
(3a) At all such contact points,
The vertical distance between the centers of adjacent first linear portions is Ax,
When the distance between the contact points of the engaging protrusion and the adjacent first linear portion is Bx,
Satisfying the relationship Ax>Bx,
The firing jig according to item [1] above.
[3].
A plurality of engaging protrusions for engaging the setter are arranged substantially linearly at a predetermined interval in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. It is provided,
When the setter is placed on the bottom plate, in a predetermined area of the first filament layer including the contact point,
The average vertical distance between the centers of adjacent first linear portions is A,
When the average distance in the same direction as A between the center points of the tops of the adjacent engaging protrusions is E,
satisfies the relationship E≧0.95A,
The firing jig according to item [1] or [2] above.
[4].
E=yA (where E and A follow the above definitions, and y is an integer n of 1 or more or a non-integer within the range of 0.95n≦y<n, n<y≦1.05n). satisfy,
The firing jig according to item [3] above.
[5].
E=yA (where E and A are according to the above definitions, and y is a non-integer outside the range of 0.95n≦y<n or n<y≦1.05n (n is an integer of 1 or more) .) satisfies the relationship,
The firing jig according to item [3] above.
[6].
Three or more engaging protrusions for engaging the setter are provided in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. The firing jig according to any one of items [1] to [5] above, wherein at least three of the engaging protrusions are formed substantially linearly at a predetermined interval.
[7].
The baking jig according to item [6] above, wherein the predetermined intervals between the at least three engaging protrusions formed in a substantially straight line are not substantially equal intervals in at least some of them.
[8].
At least one engagement protrusion for engaging the setter is provided in each of a plurality of predetermined regions facing the mesh portion on the side of the bottom plate on which the setter is placed. ,
The engaging protrusion is arranged such that each of the plurality of regions of the bottom plate corresponds to a vicinity of a peripheral edge of the setter when the setter is placed on the bottom plate.
The firing jig according to any one of items [1] to [7] above.
[9].
The shape of the engaging protrusion is approximately hemispherical, approximately semi-ellipsoidal, approximately conical, approximately truncated conical, approximately prismatic with a curved surface at the top periphery, or a combination thereof. The firing jig according to any one of items 1] to [8].

C: Object to be fired S: Setter P: Laminated bottom plate in multiple tiers M: Multi-tiered firing jig (The above symbols C, S, P, and M refer to FIG. 1 showing a known example.)
1: Mesh-like part 2: First filamentous part 3: Second filamentous part 4: Firing jig (combination)
5: Setter 6: Floor plate 7: Frame (base material of the floor plate)
8: Hollow part (opening)
9: Peripheral wall (rib)
10: Leg portion 11: Engagement protrusion group 12: Adjacent first filament portion 13: Bottom plate (base material portion)
14: Engagement protrusion A: Average vertical distance between the centers of adjacent first filament parts B: Average distance between the contact points of the engagement protrusion and the first filament part E: Top of the engagement protrusion Average distance between center points in the same direction as A 15K: Virtual plane of the top surface of the first striation layer 15S: Virtual plane of the bottom surface of the first striation layer 16: Engagement protrusion 17: Engagement protrusion 18: Adjacent first filament portion 19: Bottom plate (base material portion)
20: A prismatic engagement protrusion with a slightly curved surface on the top periphery

Claims

A firing jig consisting of a setter and a bottom plate on which the setter is placed,
The setter is a ceramic sheet that includes a mesh-like portion at least in part, and the mesh-like portion includes a plurality of first filaments each of which is arranged at a predetermined interval and extends in one direction. a first filament layer consisting of a first filament layer, and each filament layer extending in one direction and arranged at a given interval so as to touch and intersect each filament of the first filament part; a second filament layer composed of a plurality of second filament portions, the first filament layer and the second filament layer being integrally formed;
(1) At least one engagement protrusion for engaging the setter is provided in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. Ori,
(2) When the setter is placed on the bottom plate, a portion or all of the engaging protrusions are formed to simultaneously contact each of the adjacent first linear portions,
(3) In a predetermined area of the first striation layer including the contact point,
The average vertical distance between the centers of adjacent first linear portions is A,
When the average distance between the contact points of the engaging protrusion and the adjacent first linear portion is B,
satisfies the relationship A>B,
Baking jig.
(1a) A plurality of engaging protrusions for engaging the setter are provided in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. ,
(2a) When the setter is placed on the bottom plate, all of the engaging protrusions are formed to simultaneously contact each of the adjacent first linear portions,
(3a) At all such contact points,
The vertical distance between the centers of adjacent first linear portions is Ax,
When the distance between the contact points of the engaging protrusion and the adjacent first linear portion is Bx,
Satisfying the relationship Ax>Bx,
The firing jig according to claim 1.
A plurality of engaging protrusions for engaging the setter are arranged substantially linearly at a predetermined interval in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. It is provided,
When the setter is placed on the bottom plate, in a predetermined area of the first filament layer including the contact point,
The average vertical distance between the centers of adjacent first linear portions is A,
When the average distance in the same direction as A between the center points of the tops of the adjacent engaging protrusions is E,
satisfies the relationship E≧0.95A,
The firing jig according to claim 1.
E=yA (where E and A follow the above definitions, and y is an integer n of 1 or more or a non-integer within the range of 0.95n≦y<n, n<y≦1.05n). satisfy,
The firing jig according to claim 3.
E=yA (where E and A are according to the above definitions, and y is a non-integer outside the range of 0.95n≦y<n or n<y≦1.05n (n is an integer of 1 or more) .) satisfies the relationship,
The firing jig according to claim 3.
Three or more engaging protrusions for engaging the setter are provided in a predetermined area facing the mesh portion on the side of the bottom plate on which the setter is placed. 3. The baking jig according to claim 1, wherein at least three of the engaging protrusions are formed substantially linearly at predetermined intervals.
The baking jig according to claim 6, wherein the predetermined intervals between the at least three engaging protrusions formed in a substantially straight line are not substantially equally spaced in at least some portions.
At least one engagement protrusion for engaging the setter is provided in each of a plurality of predetermined regions facing the mesh portion on the side of the bottom plate on which the setter is placed. ,
The engaging protrusion is arranged such that each of the plurality of regions of the bottom plate corresponds to a vicinity of a peripheral edge of the setter when the setter is placed on the bottom plate.
The firing jig according to claim 1 or 2.
The shape of the engaging protrusion is approximately hemispherical, approximately semiellipsoidal, approximately conical, approximately truncated conical, approximately prismatic with a curved surface at the top peripheral portion, or a combination thereof. 2. The firing jig according to 1 or 2.