WO2024127845A1

WO2024127845A1 - Firing jig comprising setter and bottom plate

Info

Publication number: WO2024127845A1
Application number: PCT/JP2023/039647
Authority: WO
Inventors: 峻有馬
Original assignee: 三井金属鉱業株式会社
Priority date: 2022-12-13
Filing date: 2023-11-02
Publication date: 2024-06-20
Also published as: JP7531075B1

Abstract

The present invention addresses the problem of providing a firing jig that can effectively prevent sliding of a setter. This problem is solved by a firing jig comprising a setter and a bottom plate, wherein: the setter includes, on part of a proximity surface S that comes into proximity with the bottom plate, one or more linear protrusions having a substantially uniform cross-section in the lengthwise direction; the bottom plate includes, on part of a proximity surface P that comes into proximity with the setter, one or more linear grooves having a substantially uniform cross-section in the lengthwise direction; the protrusions and linear grooves are formed such that, when the setter is placed on the bottom plate, at least one of the protrusions is accommodated in at least one of the linear grooves; and 0.5≤(a/b)*100≤90 (expression A) is satisfied, where b is the in-perimeter area of the proximity surface S (excluding the area of a region that extends past the perimeter of the bottom plate in a view perpendicular to the proximity surface S when the setter is placed on the bottom plate), and a is the total of the projected area of the protrusions accommodated in the linear grooves during placement (the maximum cross-sectional area of said protrusions in a plane parallel to the proximity surface S of the setter).

Description

A firing jig consisting of a setter and a base plate

The present invention relates to a baking jig consisting of a setter and a base plate. More specifically, the present invention relates to a baking jig consisting of a setter and a base plate on which the setter is placed, which can effectively prevent the setter from sliding.

When firing ceramic electronic components or glass, it is common to place the objects to be fired on a ceramic sheet setter, also known as a shelf, and then fire the objects. Firing processes using such setters require high production efficiency to fire a large number of objects to be fired simultaneously. For this reason, firing is carried out in a multi-tiered configuration in which multiple setters are stacked at specified intervals using a firing jig in which a setter is placed on a member known as a firing base or firing rack.

Conventional ceramic setters include, for example, a setter for hot forming processing made of ceramics whose main component is aluminum nitride and consisting of a porous plate with many holes penetrating from the front to the back, and a ceramic firing kiln tool plate in which at least the front and back sides on which the fired object is placed are given an uneven shape and openings are formed. Also, as a technology for preventing cracks from occurring in the setter when the fired object is rapidly heated and cooled, a ceramic lattice body has been disclosed that has a plurality of first ceramic striated portions and a plurality of second ceramic striated portions that intersect with the first ceramic striated portions, and the first and second striated portions have a specific contact form (see Patent Document 1 for an example).

On the other hand, as a firing jig called a base plate or the like, for example, a firing jig has been disclosed that is characterized by having a frame body having a hollow part in the center and a plurality of bridge parts that span the hollow part of the frame body and cross each other at the hollow part, and the frame body and the bridge parts are integrally molded. It has been reported that this firing jig improves the productivity of manufacturing ceramic products by firing.
As another firing tool called a base plate, Patent Document 2 discloses a firing rack configured to place a flat setter on which the object to be fired is loaded, the firing rack comprising a frame having an opening on the surface of which the flat setter is placed, a column extending between the frames passing through the center of the frame, a plurality of surrounding parts surrounded by the frame and the column, and a plurality of sub-columns extending from the center of the surrounding parts toward the frame or the column. It has been reported that this firing rack can reduce unevenness in the in-plane temperature distribution of the loaded flat setter.

JP 2018-193274 A International Publication No. 2021/033375

As shown in Figure 1, such ceramic setters and base plates (firing racks) are often stacked in multiple tiers during firing, with a setter placed on each base plate and an object to be fired placed on each setter. In Figure 1, A is a setter, B is the base plates stacked in multiple tiers, and C is the object to be fired; a setter is placed on each base plate and an object to be fired is placed on top of it, and thus M, a multi-tiered firing jig, is subjected to the firing process. There are also cases where the combination of ceramic setters and base plates stacked in multiple tiers needs to be stored in that multi-tiered state, and even transported. If the setter slides on the base plate due to slight tilt or vibration (i.e., horizontal or vertical movement) during such stacking operations or when transporting the stacked products, the stability of the fired objects placed on it will not be maintained, which may lead to deformation or damage to the fired objects, firing defects, and the falling of fine fired objects such as electronic components from the setter. Therefore, when stacking the combination of ceramic setters and base plates or transporting them in a multi-layered state, there is a demand for good handling properties that prevent the setter from sliding easily on the base plate. However, no technology capable of sufficiently preventing such sliding has been developed until now.

The problem that this invention aims to solve is to provide a firing jig consisting of a combination of a ceramic setter and a base plate, which has good handling properties so that the setter does not slide easily on the base plate due to slight tilt or vibration (horizontal or vertical movement) during stacking operations or when transporting in a multi-layered state.

After extensive research, the inventors have discovered that in a firing jig consisting of a setter and a base plate on which the setter is placed, one or more linear convex portions are provided on a portion of the surface of the setter adjacent to the base plate, and one or more groove portions are provided on a portion of the surface of the base plate adjacent to the setter, so that when the setter is placed on the base plate, at least one of the convex portions on the setter is accommodated in at least one of the groove portions on the base plate, and that by designing the ratio of the area within the outline of the surface of the setter adjacent to the base plate to the sum of the projected areas of the convex portions of the setter accommodated in the groove portions of the base plate to be within a predetermined range, the convex portions are accommodated and engaged in the groove portions to a greater extent, thereby effectively restricting the movement of the setter on the base plate and making it possible to sufficiently prevent the setter from sliding on the base plate, and ultimately significantly improving the handleability of the firing jig for ceramic products, and have completed the firing jig of the present invention.

Thus, one exemplary embodiment of the present invention is as follows:
A firing jig consisting of a setter and a base plate on which the setter is placed,
The setter includes one or more linear protrusions having a substantially uniform cross section in the longitudinal direction on a portion of a surface S adjacent to the base plate,
The base plate includes one or more grooves having a substantially uniform cross section in the longitudinal direction on a portion of a surface P adjacent to the setter,
the protrusions and the grooves are formed so that at least one of the protrusions of the setter is received in at least one of the grooves of the base plate when the setter is placed on the base plate,
here,
The area within the contour of the proximity surface S of the setter (excluding the area of the region that protrudes from the contour of the sole plate when the proximity surface S is viewed vertically when the setter is placed on the sole plate) is b,
When the setter is placed on the base plate, the total projected area of the convex portion accommodated in the groove portion (wherein the projected area here refers to the maximum cross-sectional area of the convex portion in a plane parallel to the adjacent surface S of the setter) is a,
The relationship of 0.5≦(a/b)*100≦90 (Formula A) is satisfied.
Firing fixture.

In this application, the convex portion of the setter being "housed" in the groove portion of the base plate refers to a state in which, when the proximity surface P of the base plate relative to the setter is viewed horizontally in a cross section perpendicular to the longitudinal direction of the groove portion, at least a portion of the convex portion of the setter is positioned below the uppermost surface of the groove portion (an imaginary surface corresponding to the proximity surface P).

In accordance with the present invention, a firing jig consisting of a setter and a base plate on which it is placed can be adjusted so that the ratio of the area within the contour of the adjacent surface of the setter relative to the base plate and the sum of the projected areas of the convex portions of the setter housed in the grooves of the base plate is within a specified range, allowing the convex portions to be housed and engaged in the grooves to a greater extent, thereby effectively restricting the movement of the setter on the base plate and making it possible to sufficiently prevent the setter from sliding on the base plate, thus providing the advantage of greatly improving the handleability of the firing jig for ceramic products.

FIG. 1 is a diagram illustrating a known layered configuration in which ceramic setters and base plates (firing racks) are stacked in multiple stages. FIG. 2 is a diagram showing a combination of a setter and a base plate of a firing jig according to one embodiment of the present invention. Figure 3 is a diagram illustrating the relationship between the contour area b of the proximity surface S of the setter relative to the base plate and the total projected area a of the convex parts accommodated in the groove portion of the base plate when the setter is placed on the base plate in a combination of a setter and base plate of a firing jig according to one embodiment of the present invention. FIG. 4 is a diagram illustrating the relationship between the maximum width Wc of the convex portion of the setter and the maximum width Wp of the groove portion of the base plate in a combination of a setter and base plate of a firing jig according to one embodiment of the present invention. FIG. 5 is a diagram illustrating the relationship between the average depth Dg·av of the grooves of the base plate and the vertical minimum distance Ig between the grooves in a combination of a setter and base plate of a firing jig according to one embodiment of the present invention. FIG. 6 is a diagram illustrating the relationship (aspect ratio) between the maximum width Wc of the convex portion of the setter and the length Lc between both ends in the longitudinal direction in a combination of a setter and a base plate of a firing jig according to one embodiment of the present invention. FIG. 7 is a diagram illustrating the relationship between the maximum height Hc of the convex portion of the setter and the depth Dg of the groove portion of the base plate in which the convex portion is accommodated, in a combination of a setter and base plate of a firing jig according to one embodiment of the present invention. FIG. 8 is a diagram illustrating the relationship between the maximum height Hc of the convex portion of the setter and the maximum width Wc of the convex portion in a combination of the setter and the base plate of the firing jig according to one embodiment of the present invention. FIG. 9 is a diagram illustrating a mesh-shaped portion of a setter in a baking jig according to an embodiment of the present invention. FIG. 10 is a diagram illustrating an outline of the relationship between a base plate provided with a V-shaped groove and a setter provided with a protrusion in the embodiment.

The setter constituting the firing jig of the present invention includes, on a portion of the adjacent surface S to the base plate which also constitutes the firing jig, one or more linear convex portions with a generally uniform cross section in the longitudinal direction. On the other hand, the base plate constituting the firing jig of the present invention includes, on a portion of the adjacent surface P to the setter which also constitutes the firing jig, one or more groove portions with a generally uniform cross section in the longitudinal direction. In this firing jig, when the setter is placed on the base plate, in order to prevent the setter from sliding on the base plate, the convex portions and the groove portions must be formed so that at least one of the convex portions of the setter is accommodated in at least one of the groove portions of the base plate.

An embodiment of a combination of a setter and a base plate of a baking jig according to the present invention is shown in Fig. 2. Neither the setter nor the base plate of the baking jig according to the present invention is limited to the form shown in Fig. 2, which is merely an example.
In Figure 2, 1 indicates a firing jig (combination), 2 indicates a setter (a setter of a mesh-like ceramic sheet as an example), 2S indicates the surface of the setter 2 adjacent to the base plate (the back side of the paper in this figure), 3 indicates the base plate, 3P indicates the surface of the base plate 3 adjacent to the setter, 4 indicates a base portion of the base plate, 5 indicates a peripheral wall portion (rib: provided optionally), 6 indicates a groove portion of the base plate corresponding to at least a part of a protrusion portion (not shown as it is on the back side of the paper) provided on the surface 2S of the setter adjacent to the base plate, and HL indicates an opening (provided optionally).

The setter 2, which is one of the components of the firing jig 1 in this example, is a mesh ceramic sheet setter formed entirely of a mesh-like portion consisting of a first striated portion layer made up of first striated portions extending in one direction at approximately constant intervals, and a second striated portion layer made up of second striated portions extending in one direction at approximately constant intervals and approximately perpendicular to the first striated portion. The base plate 3, which is the other component of the firing jig 1, has a base portion 4 which is a substantially rectangular plate-like body, and a peripheral wall portion 5 (rib) formed upright around the entire periphery. Although not shown, the base portion 4 of the base plate 3 may have legs for stacking at each of the four corners of the substantially rectangular shape, or may be configured so that such legs can be attached. The peripheral wall portion 5 is illustrated as forming the entire periphery, but it may also be a part of the periphery. The setter-facing surface 3P of the sole plate 3 forms a plane that can accommodate the entire contour (periphery) of the setter 2's proximity surface 2S, and the peripheral wall 5 is formed so that when the setter 2 is placed on the proximity surface 3P of the sole plate 3, the entire peripheral portion of the setter 2 has a predetermined distance to the peripheral wall. When the setter 2 is a mesh-shaped ceramic sheet setter as illustrated in this figure, the contact surface of the second striated portion layer with the first striated portion layer forms the proximity surface 2S (back side of the paper) of the setter, and the first striated portion constituting the first striated portion layer forms the convex portion of the setter. In this case, there are multiple convex portions formed on the setter 2's proximity surface 2S. The setter 2's proximity surface 3P of the sole plate 3 is provided with multiple groove portions 6, and the positions of these groove portions 6 correspond to the positions of at least some of the multiple convex portions (first striated portions) of the setter, and the convex portions can be accommodated in the groove portions 6 at those locations. In this way, when the setter 2 is placed on the base plate 3, the convex parts and the groove parts are formed so that at least one of the convex parts of the setter 2 is accommodated in at least one of the groove parts of the base plate 3, thereby providing the ability to prevent and suppress sliding. In addition, when the firing jig 1 is stacked in multiple layers, ventilation is ensured between the multiple legs, between the peripheral wall parts 5 if they are formed in part of the periphery, and also in the openings HL if they are formed in part of the base plate, allowing for an efficient firing process.

FIG. 3 illustrates a cross section perpendicular to the longitudinal direction of a plurality of protrusions of a setter when the setter is placed on a base plate in a combination of the setter and base plate of a firing jig according to one embodiment of the present invention.
In Figure 3, 7 indicates the main body (base) of the setter, 7S indicates the surface of the setter adjacent to the base plate, 8 indicates a plurality of linear convex portions formed on part of the adjacent surface 7S and having a substantially uniform and substantially circular cross-section in the longitudinal direction, 9 indicates the main body (base) of the base plate, 9P indicates the surface of the base plate adjacent to the setter, and 10 indicates a plurality of groove portions formed on part of the adjacent surface 9P and having a substantially uniform and substantially circular cross-section in the longitudinal direction.

In FIG. 3, for ease of illustration, the case where two convex portions 8 and two groove portions 10 are formed (outline of only a part of the firing jig consisting of a combination of a setter and a base plate) is shown. However, the number of convex portions and groove portions may be one or more, and the number is not particularly limited. The number of convex portions is preferably two or more, and more preferably three or more, five or more, ten or more, twenty or more, or thirty or more. Similarly, the number of groove portions is preferably two or more, and more preferably three or more, five or more, ten or more, twenty or more, or thirty or more. The number of convex portions and groove portions may each be 100 or less from the viewpoint of manufacturing efficiency. In FIG. 3, the cross-sectional shape of the convex portion is illustrated as being approximately circular, but is not limited thereto. The cross-sectional shape of the convex portion may be, for example, approximately semicircular, approximately triangular, approximately rectangular, or approximately trapezoidal. From the viewpoint of facilitating the formation of the convex portion, it is preferable that the cross-sectional shape of the convex portion is approximately circular. When the setter is a mesh-like ceramic sheet, the cross-sectional shape of the convex portion is approximately circular. In addition, the cross-sectional shape of the groove portion is exemplified as approximately semicircular in FIG. 3, but is not limited thereto. The cross-sectional shape of the groove portion may be, for example, approximately V-shaped (approximately triangular), approximately rectangular, or approximately trapezoidal. Regardless of these cross-sectional shapes of the convex portion and the groove portion, the desired effect can be achieved as long as the requirements described in this specification are satisfied. From the viewpoint of manufacturing efficiency, the cross-sectional shape of the convex portion may be approximately circular (especially when a mesh-like ceramic sheet is used), and the cross-sectional shape of the groove portion may be approximately V-shaped.

In FIG. 3, two convex portions 8 are formed approximately parallel to each other, and two groove portions 10 are formed approximately parallel to each other, and when the setter 7 is placed on the base plate 9, both of the two convex portions 8 are accommodated in each of the two groove portions 10 arranged in the corresponding positions. In this way, two or more convex portions of the setter and groove portions of the base plate are formed approximately parallel to each other, and when the setter is placed on the base plate, the majority of the convex portions, preferably 70% or more of the convex portions, and more preferably substantially all of the convex portions are accommodated in the groove portions of the base plate. This configuration more effectively prevents the setter from sliding on the base plate, and thus significantly improves the handleability of the setter as a firing jig for ceramic products.

In FIG. 3, an example is shown in which two convex portions 8 are formed approximately parallel to each other and two groove portions 10 are formed approximately parallel to each other, but in another embodiment, when the setter has three or more convex portions, these convex portions may be formed approximately equally spaced apart, and/or when the base plate has three or more groove portions, these groove portions may be formed approximately equally spaced apart. This configuration further increases the probability that the convex portions of the setter will be successfully accommodated in the groove portions of the base plate, thereby further improving the anti-sliding properties of the setter on the base plate.

In Figure 3, the symbol b indicates the area within the contour of the proximity surface 7S of the setter 7 relative to the base plate 9 (excluding the area of the region that extends beyond the contour of the base plate 9 when the proximity surface 7S is viewed vertically when the setter 7 is placed on the base plate 9). Also in Figure 3, the symbol a1 indicates the projected area of the convex portion 8 accommodated in the groove portion 10 on the left side of the figure when the setter 7 is placed on the base plate 9 (the maximum cross-sectional area of the convex portion in a plane parallel to the proximity surface 7S of the setter 7). The symbol a2 similarly indicates the projected area of the convex portion 8 accommodated in the groove portion 10 on the right side of the figure when the setter 7 is placed on the base plate 9 (the maximum cross-sectional area of the convex portion in a plane parallel to the proximity surface 7S of the setter 7). In this case, the symbol a is the sum of the projected areas a1 and a2 of the convex portions 8. In FIG. 3, only two protrusions 8 and two grooves 10 are shown as an example for ease of illustration, but if there are three or more protrusions 8 housed in the grooves 10, the sum (Σax) of their projected areas ax is a.

Here, the relationship between the total projected area a of the convex portion 8 and the contour inner area b of the adjacent surface 7S of the setter 7 satisfies the following formula A.
0.5≦(a / b) * 100≦90 (Formula A)
According to the firing jig of the present invention, which satisfies the relationship of formula A, the convex part of the setter is firmly and stably accommodated and engaged in the groove part of the base plate, which effectively limits the movement of the setter on the base plate, sufficiently prevents the setter from sliding on the base plate, and ensures ease of designing the layout of the convex part. These effects also greatly improve the handleability of the firing jig for ceramic products.

In one embodiment within the range in which the relationship of formula A is satisfied, from the above viewpoint, it is preferable that 1≦(a/b)*100≦90, it is even more preferable that 5≦(a/b)*100≦90, it is even more preferable that 10≦(a/b)*100≦90, it is even more preferable that 20≦(a/b)*100≦90, it is even more preferable that 30≦(a/b)*100≦90, it is even more preferable that 40≦(a/b)*100≦90, it is even more preferable that 50≦(a/b)*100≦90, it is even more preferable that 60≦(a/b)*100≦90, and it is most preferable that 70≦(a/b)*100≦90.
In another embodiment within the range in which the relationship of formula A is satisfied, from the above viewpoint, it is preferable that 1≦(a/b)*100≦85, it is even more preferable that 5≦(a/b)*100≦85, it is even more preferable that 10≦(a/b)*100≦85, it is even more preferable that 20≦(a/b)*100≦85, it is even more preferable that 30≦(a/b)*100≦85, it is even more preferable that 40≦(a/b)*100≦85, it is even more preferable that 50≦(a/b)*100≦85, it is even more preferable that 60≦(a/b)*100≦85, and it is most preferable that 70≦(a/b)*100≦85.
In yet another embodiment within the range in which the relationship of formula A is satisfied, from the above viewpoint, it is preferable that 1≦(a/b)*100≦80, it is even more preferable that 5≦(a/b)*100≦80, it is even more preferable that 10≦(a/b)*100≦80, it is even more preferable that 20≦(a/b)*100≦80, it is even more preferable that 30≦(a/b)*100≦80, it is even more preferable that 40≦(a/b)*100≦80, it is even more preferable that 50≦(a/b)*100≦80, it is even more preferable that 60≦(a/b)*100≦80, and it is most preferable that 70≦(a/b)*100≦80.

FIG. 4 illustrates the relationship between the maximum width Wc of the convex portion of the setter and the maximum width Wp of the groove portion of the base plate when the setter is placed on the base plate for a combination of a setter and base plate of a firing jig according to one embodiment of the present invention.
4, Wc indicates the maximum width of a cross section perpendicular to the longitudinal direction of the convex portion 8 of the setter 7, in a direction parallel to the adjacent surface 7S of the setter 7 relative to the base plate 9. Also, Wp indicates the maximum width of a cross section perpendicular to the longitudinal direction of the groove portion 10 in which the convex portion 8 is housed, in a direction parallel to the adjacent surface 9P of the base plate 9 relative to the setter 7, when the setter 7 is placed on the base plate 9.
In FIG. 4, the cross-sectional shape of the convex portion is exemplified as being substantially circular, and the cross-sectional shape of the groove portion is exemplified as being substantially semicircular, but as explained with reference to FIG. 3, they are not limited to these shapes.

Here, it is preferable that the ratio Wc/Wp of the maximum width Wc in a direction parallel to the adjacent surface 7S of a cross section perpendicular to the longitudinal direction of at least one of the convex portions 8 of the setter 7 and the maximum width Wp in a direction parallel to the adjacent surface 9P of a cross section perpendicular to the longitudinal direction of the groove portion 10 in which the convex portion 8 is accommodated when the setter 7 is placed on the base plate 9 is 2 or less (greater than 0).
In the firing jig according to one embodiment of the present invention, in which the ratio Wc/Wp is 2 or less, the convex portion of the setter is accommodated and engaged deep toward the bottom of the groove portion of the base plate, thereby effectively restricting the movement of the setter on the base plate and sufficiently preventing the setter from sliding on the base plate. In addition, these effects can greatly improve the handleability of the firing jig for ceramic products.

In one embodiment within the range in which the relationship that the ratio Wc/Wp is (greater than 0) 2 or less is satisfied, from the above viewpoint, Wc/Wp is preferably (greater than 0) 1.8 or less, more preferably 1.6 or less, even more preferably 1.4 or less, even more preferably 1.2 or less, even more preferably 1.0 or less, and most preferably 0.9 or less.
In another embodiment within the range in which the relationship that the ratio Wc/Wp is (greater than 0) 2 or less is satisfied, from the above viewpoint, Wc/Wp is preferably 0.2 or more and 1.8 or less, more preferably 0.2 or more and 1.6 or less, even more preferably 0.2 or more and 1.4 or less, even more preferably 0.2 or more and 1.2 or less, even more preferably 0.2 or more and 1.0 or less, and most preferably 0.2 or more and 0.9 or less.
In yet another embodiment within the range in which the relationship that the ratio Wc/Wp is (greater than 0) and 2 or less is satisfied, from the above viewpoint, Wc/Wp is preferably 0.4 or more and 1.8 or less, more preferably 0.4 or more and 1.6 or less, even more preferably 0.4 or more and 1.4 or less, even more preferably 0.4 or more and 1.2 or less, even more preferably 0.4 or more and 1.0 or less, and most preferably 0.4 or more and 0.9 or less.

Figure 5 illustrates the relationship between the average depth Dg·av of the groove portions of the base plate and the shortest vertical distance Ig between the groove portions when the setter is placed on the base plate for a combination of a setter and base plate of a firing jig according to one embodiment of the present invention.
5 shows an example in which two protrusions 8 are formed substantially parallel to each other, and two grooves 10 are formed substantially parallel to each other, each accommodating the two protrusions 8. In other embodiments, in addition to this, three or more protrusions 8 may be formed substantially parallel to each other and at substantially equal intervals, and three or more grooves 10 are formed substantially parallel to each other and at substantially equal intervals, each accommodating the three or more protrusions 8.
In FIG. 5, Dg·av indicates the average depth of the groove portion 10 of the sole plate 9 (the average value of each groove portion 10 in terms of the length from the adjacent surface 9P of the sole plate 9 relative to the setter 7 to the lowest position in the vertical direction of the cross section perpendicular to the longitudinal direction of the groove portion 10). The average value here refers to the average value of all the groove portions 10 provided on the sole plate 9 when the number of groove portions 10 provided on the sole plate 9 is up to 10, and refers to the average value of any 10 of the groove portions 10 provided on the sole plate 9 when the number of groove portions 10 provided on the sole plate 9 is 11 or more. Also, in FIG. 5, Ig indicates the vertical shortest distance between the groove portions 10 of the sole plate 9 (the average value of multiple vertical shortest distances when three or more groove portions are formed). The average value here refers to the average value of all the vertical shortest distances between the groove portions 10 when the number of the vertical shortest distances between the groove portions 10 is up to 9 (the number of groove portions 10 is up to 10), and refers to the average value of any 9 of the vertical shortest distances when the number of the vertical shortest distances between the groove portions 10 is 10 or more (the number of groove portions 10 is 11 or more).
In FIG. 5, the cross-sectional shape of the convex portion is illustrated as being substantially circular, and the cross-sectional shape of the groove portion is illustrated as being substantially semicircular, but as explained with reference to FIGS. 3 and 4, these shapes are not limited to these.

Here, it is preferable that the ratio Ig/Dg・av of the vertical shortest distance Ig between the groove portions 10 (if three or more groove portions 10 are formed, this refers to the average value of the multiple vertical shortest distances) to the average depth Dg・av of the groove portions 10 of the base plate 9 (which refers to the average value of each groove portion 10 in terms of the length from the adjacent surface 9P of the cross section perpendicular to the longitudinal direction of the groove portion 10 to the lowest vertical position) is 0.05 or more and 600 or less.
According to the firing jig of one embodiment of the present invention, in which the ratio Ig/Dg.av is 0.05 or more and 600 or less, the convex part of the setter is deeply and stably received and engaged with the groove part of the base plate with dense engagement points, thereby effectively restricting the movement of the setter on the base plate and sufficiently preventing the setter from sliding on the base plate. Furthermore, with these effects, the handling property of the firing jig for ceramic products can be significantly improved.

In one embodiment within the range in which the relationship that the ratio Ig/Dg·av is 0.05 or more and 600 or less is satisfied, from the above viewpoint, Ig/Dg·av is preferably 0.05 or more and 500 or less, more preferably 0.05 or more and 400 or less, even more preferably 0.05 or more and 300 or less, even more preferably 0.05 or more and 200 or less, even more preferably 0.05 or more and 100 or less, even more preferably 0.05 or more and 50 or less, even more preferably 0.05 or more and 10 or less, even more preferably 0.05 or more and 5 or less, and most preferably 0.05 or more and 2 or less.
In another embodiment within the range in which the relationship that the ratio Ig/Dg·av is 0.05 or more and 600 or less is satisfied, from the above viewpoint, Ig/Dg·av is preferably 0.1 or more and 500 or less, more preferably 0.1 or more and 400 or less, even more preferably 0.1 or more and 300 or less, even more preferably 0.1 or more and 200 or less, even more preferably 0.1 or more and 100 or less, even more preferably 0.1 or more and 50 or less, still more preferably 0.1 or more and 10 or less, even more preferably 0.1 or more and 5 or less, and most preferably 0.1 or more and 2 or less.

FIG. 6 illustrates an example of the relationship (aspect ratio) between the maximum width Wc of the convex portion of the setter and the length Lc between both ends in the longitudinal direction for a combination of a setter and a base plate of a firing jig according to one embodiment of the present invention.
Fig. 6 is a schematic diagram of one of the protruding parts 8 (linear parts in the case of a mesh-like ceramic sheet) provided on the adjacent surface 7S of the setter 7 relative to the base plate 9, viewed perpendicularly to the adjacent surface 7S. In Fig. 6, Wc indicates the maximum width of the cross section perpendicular to the longitudinal direction of the protruding part 8 of the setter 7, in the direction parallel to the adjacent surface 7S of the setter 7 relative to the base plate 9. Furthermore, Lc indicates the length between both ends of the protruding part 8 in the longitudinal direction.

Here, for at least one of the convex portions 8 of the setter 7, it is preferable that the aspect ratio Lc/Wc of the length Lc between both ends in the longitudinal direction to the maximum width Wc in a direction parallel to the adjacent surface 7S of the cross section perpendicular to the longitudinal direction is 10 or more.
According to the firing jig of one embodiment of the present invention, in which the aspect ratio Lc/Wc is 10 or more, the convex portion of the setter is stably accommodated and engaged with the groove portion of the base plate in a manner that has continuous engagement points over a longer distance, thereby effectively restricting the movement of the setter on the base plate and sufficiently preventing the setter from sliding on the base plate. Furthermore, these effects can be accompanied by a significant improvement in the handleability of the firing jig for ceramic products.

In one embodiment within the range in which the aspect ratio Lc/Wc is 10 or greater, from the above viewpoints, Lc/Wc is preferably 11 or greater, more preferably 12 or greater, even more preferably 13 or greater, even more preferably 20 or greater, even more preferably 30 or greater, even more preferably 50 or greater, even more preferably 70 or greater, and most preferably 100 or greater.

Figure 7 illustrates the relationship between the maximum height Hc of the convex portion of the setter when the setter is placed on the base plate and the depth Dg of the groove portion of the base plate in which this convex portion is accommodated, for a combination of a setter and a base plate of a firing jig according to one embodiment of the present invention.
7, Hc indicates the maximum height of a cross section perpendicular to the longitudinal direction of the protruding portion 8 of the setter 7, in a direction perpendicular to the adjacent surface 7S of the setter 7 relative to the base plate 9. Also, Dg indicates the depth from the adjacent surface 9P of the base plate 9 relative to the setter 7 to the lowest position in the vertical direction of a cross section perpendicular to the longitudinal direction of the groove portion 10 in which the protruding portion 8 is accommodated when the setter 7 is placed on the base plate 9.
In FIG. 7, the cross-sectional shape of the convex portion is illustrated as being substantially circular, and the cross-sectional shape of the groove portion is illustrated as being substantially semicircular, but as explained with reference to FIGS. 3 to 5, these shapes are not limited thereto.

Here, it is preferable that the ratio Dg/Hc of the depth Dg from the adjacent surface 9P of a cross section perpendicular to the longitudinal direction of the groove portion 10 in which the convex portion 8 is accommodated when the setter 7 is placed on the base plate 9 to the maximum height Hc in a direction perpendicular to the adjacent surface 7S of at least one cross section perpendicular to the longitudinal direction of the convex portion 8 of the setter 7 is 0.1 or more.
According to the firing jig of the present invention, in which the ratio Dg/Hc is 0.1 or more, the convex part of the setter is stably received and engaged deeper toward the bottom of the groove part of the base plate, which increases the resistance of the setter to movement on the base plate, effectively restricting the movement of the setter and sufficiently preventing the setter from sliding on the base plate. Furthermore, these effects can greatly improve the handleability of the firing jig for ceramic products.

In one embodiment within the range in which the relationship that the ratio Dg/Hc is 0.1 or greater is satisfied, from the above viewpoint, Dg/Hc is preferably 0.15 or greater, more preferably 0.2 or greater, even more preferably 0.25 or greater, even more preferably 0.3 or greater, even more preferably 0.35 or greater, even more preferably 0.4 or greater, even more preferably 0.45 or greater, even more preferably 0.50 or greater, even more preferably 0.55 or greater, and most preferably 0.60 or greater.

FIG. 8 illustrates the relationship between the maximum height Hc of the convex portion of the setter and the maximum width Wc of the convex portion for a combination of a setter and a base plate of a firing jig according to one embodiment of the present invention.
Fig. 8 is a schematic diagram of one of the protrusions 8 provided on the adjacent surface 7S of the setter 7 relative to the floor plate 9, viewed perpendicularly to the longitudinal direction of the protrusion 8. In Fig. 8, Hc is the maximum height of a cross section perpendicular to the longitudinal direction of the protrusion 8 of the setter 7, in a direction perpendicular to the adjacent surface 7S of the setter 7 relative to the floor plate 9. Also, Wc is the maximum width of the cross section perpendicular to the longitudinal direction of the protrusion 8, in a direction parallel to the adjacent surface 7S.

Here, it is preferable that the ratio Wc/Hc of the maximum width Wc in a direction parallel to the adjacent surface 7S of a cross section perpendicular to the longitudinal direction of at least one of the convex portions 8 of the setter 7 to the maximum height Hc in a direction perpendicular to the adjacent surface 7S of a cross section perpendicular to the longitudinal direction of this convex portion 8 is 0.3 or more and 4 or less.
According to the firing jig of one embodiment of the present invention, in which the ratio Wc/Hc is 0.3 to 4, the convex portion of the setter can easily form a deep and stable state of insertion and engagement with the groove portion of the base plate, regardless of or in accordance with the cross-sectional shape of the groove portion of the base plate, thereby effectively restricting the movement of the setter on the base plate and sufficiently preventing the setter from sliding on the base plate. Furthermore, these effects can greatly improve the handleability of the firing jig for ceramic products.

In one embodiment within the range in which the relationship of the ratio Wc/Hc being 0.3 or greater and 4 or less is satisfied, from the above viewpoints, Wc/Hc is preferably 0.4 or greater and 4 or less, more preferably 0.5 or greater and 4 or less, even more preferably 0.6 or greater and 4 or less, even more preferably 0.7 or greater and 4 or less, even more preferably 0.8 or greater and 4 or less, even more preferably 0.9 or greater and 4 or less, and most preferably 1 or greater and 4 or less.
In another embodiment within the range in which the relationship of the ratio Wc/Hc being 0.3 or greater and 4 or less is satisfied, from the above viewpoint, Wc/Hc is preferably 0.4 or greater and 3 or less, more preferably 0.5 or greater and 3 or less, even more preferably 0.6 or greater and 3 or less, even more preferably 0.7 or greater and 3 or less, even more preferably 0.8 or greater and 3 or less, even more preferably 0.9 or greater and 3 or less, and most preferably 1 or greater and 3 or less.
In yet another embodiment within the range in which the relationship of the ratio Wc/Hc being 0.3 or greater and 4 or less is satisfied, from the above viewpoint, Wc/Hc is preferably 0.4 or greater and 2 or less, more preferably 0.5 or greater and 2 or less, even more preferably 0.6 or greater and 2 or less, even more preferably 0.7 or greater and 2 or less, even more preferably 0.8 or greater and 2 or less, even more preferably 0.9 or greater and 2 or less, and most preferably 1 or greater and 2 or less.

In a preferred embodiment, the setter combined with the base plate in the firing jig according to the present invention is a ceramic sheet including at least a mesh-like portion in a part thereof, and the mesh-like portion includes a first striated portion layer including a plurality of first striated portions arranged at a given interval and extending in one direction, and a second striated portion layer including a plurality of second striated portions arranged at a given interval so as to contact and cross each of the first striated portions and extend in one direction, and the first striated portion layer and the second striated portion layer may be integrally formed ceramic sheets. When the setter includes a mesh-like portion in a part thereof, any known setter structure may be adopted for the portion other than the mesh-like portion of the setter. In one embodiment, a setter that is a mesh-like ceramic sheet sintered body formed integrally as a whole may be used.
In one embodiment of the firing jig according to the present invention, when the setter (all or part of it) is a setter including a mesh-like ceramic sheet, the contact surface of the second striated portion layer with the first striated portion layer forms the adjacent surface of the setter with respect to the base plate, and the first striated portion constituting the first striated portion layer forms the convex portion of the setter.

Here, the fact that the first striated layer and the second striated layer are "integrally formed" mesh-like sintered bodies means that the striated groups constituting the first striated layer and the striated groups constituting the second striated layer are fired and connected to each other to form an integral structure at their contact points, and are formed so as not to be easily separated. In one embodiment, the first striated layer and the second striated layer are fired and connected to each other to form an integral structure at their contact points, and are formed so as not to be easily separated, and the first striated layer and the second striated layer, or different parts of each striated layer, may be formed from a single composition. In another embodiment, the first and second filamentary layers are formed such that the filaments constituting the first and second filamentary layers are sintered and connected to each other at the contact points to form an integral structure, and are not easily separated, and the first and second filamentary layers, or different portions of each filamentary layer, may be formed from a plurality of different compositions.

9 illustrates an embodiment of the mesh portion of the setter. In FIG. 9, the mesh portion 11 includes a first striated portion layer composed of a plurality of first striated portions 12 arranged at approximately regular intervals and each striated portion is stretched in one direction, and a second striated portion layer composed of a plurality of second striated portions 13 arranged at approximately regular intervals so as to contact and cross each striated portion of the first striated portion 12 and each striated portion is stretched in one direction. The intersection angle between the two

striated portions

12 and 13 can be set appropriately, but for example, the intersection angle of the second striated portion 13 with respect to the first striated portion 12 can be set to 90 degrees. Alternatively, the intersection angle of the second striated portion 13 with respect to the first striated portion 12 can be changed within a range of 90 degrees ± 10 degrees. The cross-sectional shape of the first striated portion 12 is not particularly limited, but may be approximately circular or approximately elliptical as shown in the figure. The cross-sectional shape of the second striated portion 13 is not particularly limited, but may be a straight line at the top as shown in the figure, and a curve starting from both ends of the straight line at the bottom (i.e., a shape in which a part of a substantially circular or substantially elliptical shape is cut in a straight line), so that the top surface of the entire second striated portion 13 (i.e., the top surface of the second striated portion layer) forms a single flat surface. The cross-sectional shapes of the first striated portion 12 and the second striated portion 13 can be substantially polygonal such as substantially rectangular, or a shape in which a part of the polygonal shape is cut in a straight line, in addition to the substantially circular and substantially elliptical shapes described above.

In another embodiment, the mesh portion of the setter may further have a plurality of third striated portions made of ceramics extending in one direction in addition to the first striated portion and the second striated portion (the third striated portion layer may be formed by this). In this embodiment, the direction in which the third striated portions extend may be the same as the direction in which the first striated portions extend, or may be inclined obliquely (for example, in a direction greater than -45° and smaller than 45°) with respect to the direction in which the first striated portions extend. When the third striated portions are formed in this manner, the cross-sectional shape of the second striated portion may be substantially circular or substantially elliptical, and the cross-sectional shape of the third striated portion may be a straight line at the upper portion and a curved line starting from both ends of the straight line at the lower portion (i.e., a shape in which a part of the substantially circular or substantially elliptical shape is cut in a straight line), so that the upper surface of the entire third striated portion (i.e., the upper surface of the third striated portion layer) may form a single flat surface.
In the same manner, a fourth linear portion or any subsequent linear portions can be formed.

In a preferred embodiment, a setter may be used that is a mesh-shaped ceramic sheet sintered body formed integrally from a single material. Using such a setter greatly increases the strength of the entire ceramic sheet and also leads to efficient manufacturing of the setter. In a preferred embodiment, when the mesh-shaped portion occupies a portion of the ceramic sheet, the mesh-shaped portion and the portion other than the mesh-shaped portion may be a ceramic sheet sintered body formed integrally. When a sintered body is formed in which the mesh-shaped portion and the portion other than the mesh-shaped portion are formed integrally, the strength of the entire ceramic sheet is increased by using the same raw material powder for both, and a decrease in the bonding strength due to the thermal history of heating and cooling during sintering (repeated expansion and contraction) can be prevented.

In one embodiment, the mesh-like portion of the ceramic sheet has a cross section in which the first striated portion and the second striated portion intersect with each other such that the cross section of the first striated portion has a circular or elliptical shape, and the cross section of the second striated portion has a shape (approximately arch-shaped) consisting of a straight portion and a convex curved portion having both ends of the straight portion as its ends, and further, when viewed in vertical cross section at the intersection, only the apex of the convex curved portion of the second striated portion and the upwardly convex apex of the circle or ellipse of the first striated portion are in contact (a so-called point contact configuration).

In another embodiment, the mesh-like portion of the ceramic sheet can have a configuration in which the cross section of the first striated portion has a circular or elliptical shape at a portion other than the intersection between the first striated portion and the second striated portion, and the cross section of the second striated portion has a shape (approximately arch-shaped) composed of a straight portion and a convex curved portion with both ends of the straight portion as ends at a portion other than the intersection, and the first striated portion and the second striated portion each form an intersection where they contact over a surface rather than just a single point. This configuration can be called a surface contact structure as opposed to the so-called point contact described above.

In one embodiment that corresponds to a sub-concept of the above structural example based on such surface contact, the mesh-like portion of the ceramic sheet has a cross section of the first striated portion that has a circular or elliptical shape at a portion other than the intersection of the first striated portion and the second striated portion, and a cross section of the second striated portion that has a shape (approximately arch-shaped) composed of a straight portion and a convex curved portion with both ends of the straight portion as ends at a portion other than the intersection, and further, the projected image of the first striated portion in a plan view has a shape that curves and bulges outward in the width direction at the intersection, so that the width of the projected image at the intersection is larger than the width of the projected image at the portion other than the intersection.

In yet another embodiment of the mesh-like portion of the ceramic sheet, the cross section of the first striated portion has a circular or elliptical shape at a portion other than the intersection of the first striated portion and the second striated portion, and the cross section of the second striated portion has a shape (approximately arch shape) consisting of a straight portion and a convex curved portion with both ends of the straight portion as ends at a portion other than the intersection of the first striated portion and the second striated portion, and the sintered body may have a straight side portion in at least a portion of the outline in a plan view, and the first striated portion and the second striated portion may each independently intersect with the straight side portion (outer side) at an angle of 10 degrees or more and 170 degrees or less (i.e., within a wide angle range including angles that are not right angles).

In yet another embodiment, the mesh portion of the ceramic sheet may be a plate-shaped ceramic structure having, in addition to a plurality of first striated portions and a plurality of second striated portions, a plurality of third striated portions made of ceramic passing on the diagonals of a quadrilateral defined by the intersection of the first striated portions and the second striated portions, and having a plurality of triangular through holes defined by the first striated portions, the second striated portions, and the third striated portions.

When the mesh-like portion occupies a portion of the ceramic sheet, the portion other than the mesh-like portion is not particularly limited, but examples include a ceramic plate having many fine pores (including a plate having different pore sizes/different pore densities in different areas) and a sheet in which a first striated layer (support layer) and a second striated layer are arranged in a shape other than a mesh (one example is a so-called lattice-shaped sheet).

A method for manufacturing the setter and sole plate will be described below, but these should be understood as non-limiting examples.

There is no particular limitation on the method for producing the setter constituting the firing jig according to the present invention, so long as it is possible to produce a setter including a protrusion satisfying the above requirements on a part of the surface adjacent to the base plate.
The raw material powder for manufacturing the setter is not particularly limited and may contain various ceramic materials. Examples of ceramic materials used as the ceramic raw material powder include alumina (Al ₂ O ₃ ), zirconia (ZrO ₂ ), magnesium oxide (MgO), mullite (3Al ₂ O ₃ -2SiO ₂ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), aluminum nitride (AlN), boron carbide (B ₄ C), cordierite (MgO/Al ₂ O ₃ /SiO ₂ ), aluminum titanate (Al ₂ TiO ₅ ), magnesium titanate (MgTiO ₃ ), titanium diboride (TiB ₂ ), and the like, or a combination of two or more of them. In addition, a sintered body manufactured using raw material powder that is a combination of one or two or more of these ceramic materials will naturally have a composition that can be produced from these materials. The mass ratio of the ceramic raw material powder in the raw material paste may be generally 20 mass % or more and 85 mass % or less, and preferably 30 mass % or more and 75 mass % or less, based on the mass of the entire paste.

The setter may be made entirely of a single composition or may be a combination of parts made of different compositions, in one embodiment, a setter may be used that is integrally made entirely of a single type of material.
Hereinafter, we will mainly explain the manufacturing method when the setter is a ceramic sheet including a mesh-like portion, but those skilled in the art will understand that other setters can also be manufactured by methods similar to those explained below.

In an embodiment in which the setter is a ceramic sheet including a mesh-like portion, the first and second striated layers of the mesh-like portion, or different portions of each striated layer, may be formed from a single composition. In another embodiment, the first and second striated layers of the mesh-like portion, or different portions of each striated layer may be formed from a plurality of different compositions. In one embodiment, a setter may be used that is a mesh-like ceramic sheet sintered body integrally formed as a whole from a single type of material. Use of such a setter significantly increases the strength of the entire ceramic sheet and also leads to efficient manufacture of the setter.

The average particle size of the ceramic raw material powder used in the raw material paste may usually be in the range of 0.1 to 20 μm, and preferably in the range of 0.2 to 10 μm. The average particle size of the ceramic raw material powder here is the volume cumulative median diameter (D50) value measured by the laser diffraction/scattering method. By having the average particle size of the ceramic raw material powder within the above range, it is possible to obtain a sintered body with increased structural strength and stability after firing and reduced possibility of collapse.

Water is usually used as the medium of the raw material paste for producing a molded body that is a precursor of the first and second striated layers of the mesh-like portion. As a medium other than water, alcohol, acetone, ethyl acetate, etc. can also be used. Two or more of these media may be mixed. The mass ratio of the medium in the raw material paste may usually be 10% by mass or more and 60% by mass or less, and preferably 15% by mass or more and 55% by mass or less, based on the mass of the entire paste.

The raw material paste for producing the molded body that is the precursor of the first and second striated layers of the mesh-like portion may optionally contain an appropriate amount of any known sintering aid. The raw material paste may also contain any known binder. The mass proportion of the binder in the raw material paste may be, for example, 0% by mass or more and 40% by mass or less, and is preferably 1% by mass or more and 40% by mass or less, relative to the total mass of the raw material paste.

It is preferable that the viscosity of the raw material paste is high at the temperature when the linear coated body is applied, in order to be able to successfully manufacture the linear coated body. The viscosity of the raw material paste is not particularly limited, but is preferably 1.5 MPa·s or more and 5.0 MPa·s or less at the temperature when it is applied (typically room temperature, such as about 25°C). The viscosity of the raw material paste here refers to the measured value 4 minutes after the start of measurement at a rotation speed of 0.3 rpm using a cone-plate type rotational viscometer or rheometer. The raw material paste may contain any known thickener, flocculating agent, thixotropic agent, etc. as a viscosity adjusting agent.

In order to stabilize the amount of material discharged from the discharge device to obtain a molded body that is a precursor of the first and second striated layers of the mesh-like portion, the raw material paste may contain, for example, any known plasticizer, lubricant, dispersant, settling inhibitor, pH adjuster, etc.

The raw material paste thus obtained is discharged from a discharge device onto a flat substrate to form a first linear coated body having a plurality of stripes arranged at given intervals and each stripe extending in one direction. The first linear coated body corresponds to the second linear portion of the mesh-like portion.
As the discharge device, various known devices such as a small extruder or a printer can be used. These discharge devices may typically include a dispenser having a nozzle. After the first striated coated body is discharged, an operation can be performed to remove the medium contained in the first striated coated body, dry it, and increase the viscosity. The ratio of the medium in the first striated coated body after the medium removal operation may be reduced to preferably 50% by mass or less, more preferably 30% by mass or less.

Then, using the raw material paste, a second filamentary coated body is formed, each filament extending in one direction and arranged at a given interval so as to contact and intersect with each filament of the first filamentary coated body. The second filamentary coated body corresponds to the first filamentary portion of the mesh-like portion. The raw material paste for forming the second filamentary coated body may be the same as or different from the raw material paste for forming the first filamentary coated body, but it is more preferable that they are the same from the viewpoints of efficiency in forming the filamentary coated body and integrity of the structure and physical properties of the ceramic sheet sintered body to be produced.

The specific shapes of the first multiple filamentary coated body and the second multiple filamentary coated body formed as a molded body can be constructed to match the desired shapes of the various mesh-like portions described above.

In an additional embodiment, the raw material paste may be used to optionally form a third filamentary coating body having multiple stripes that are arranged at given intervals so as to contact each stripe of the second filamentary coating body and intersect with the first and second filamentary coating bodies, each stripe being stretched in one direction. The raw material paste for forming the optional third filamentary coating body may be the same as or different from the raw material paste for forming the first and second filamentary coating bodies, but it is more preferable that they are the same from the viewpoints of efficiency in forming the filamentary coating body and integrity of the structure and physical properties of the mesh-like portion produced.

The molded body thus obtained, including the multiple first filamentary coated bodies and the multiple second filamentary coated bodies, is peeled off from the substrate (the workbench on which the molded bodies are formed) and placed in a firing jig (firing furnace), where it is fired to obtain the desired mesh-like portion. Through firing, the mesh-like portion including the first filamentary layer made up of the multiple first filamentary portions and the second filamentary layer made up of the multiple second filamentary portions is usually constructed as a sintered body, which is an integrated structure that does not involve physical bonding of the individual components by adhesive.

The firing process to obtain the mesh-like portion may be carried out in an air atmosphere (atmospheric pressure) as necessary, or may be carried out under pressure with an inert gas such as nitrogen. The firing temperature may be selected appropriately depending on the type of raw powder of the ceramic material. The same applies to the firing time. Non-limiting examples of the firing temperature may be 500°C or more, 800°C or more, or 1000°C or more, and 4000°C or less, 3500°C or less, or 3000°C or less. Non-limiting examples of the firing time may be 30 minutes or more, 1 hour or more, or 2 hours or more, and 24 hours or less, 12 hours or less, or 6 hours or less.

In an embodiment in which part or all of the setter is a ceramic sheet including a mesh-like portion, the contact surface of the second striated portion layer with the first striated portion layer in the mesh-like portion forms the adjacent surface S with respect to the base plate of the setter, and the first striated portion constituting the first striated portion layer forms the convex portion of the setter, so there is no need to form the convex portion separately.

In setters other than ceramic sheets that include mesh-like portions, it is necessary to separately form convex portions with a substantially uniform cross section in the longitudinal direction on the flat surface of the ceramic sheet surface of the setter. In this case, the ceramic sheet (base portion other than the convex portions) and the convex portions provided on the flat surface of the surface may be formed from the same raw material (i.e., raw material containing the same mixture of ceramic raw material powder and additives) or from different raw materials. It is more preferable that the ceramic sheet (base portion other than the convex portions) and the convex portions provided on the flat surface of the surface of the ceramic sheet be formed from the same raw material, from the viewpoint of preventing a decrease in bonding strength due to the thermal history of heating and cooling during firing (repeated expansion and contraction) and the resulting peeling of the convex portions from the sheet.

For example, a setter ceramic sheet having a convex portion having a substantially uniform cross section in the longitudinal direction formed separately on the flat surface of the front surface can be manufactured by forming an integral molded body using any of the known molding methods such as press molding, slip casting, vibration molding, etc., and then firing the body under conditions similar to those described above for the firing process of the mesh-like portion.
Alternatively, for the manufacture of a ceramic sheet for a setter in which a convex portion having a substantially uniform cross section in the longitudinal direction is separately formed on the flat surface of the front surface, a similar method to that used for manufacturing a ceramic sheet including a mesh-like portion can be adopted, in which the raw material paste is discharged from a discharge device onto a flat substrate to form a first filament coating body and then fired. Alternatively, for a ceramic sheet for a setter in which a convex portion having a substantially uniform cross section in the longitudinal direction is separately formed on the flat surface of the front surface, the ceramic sheet (other than the convex portion) and the convex portion provided on the flat surface of the front surface are separately formed and fired, and then the sintered product of the convex portion can be bonded to a predetermined region on the upper surface of the sintered product of the ceramic sheet (other than the convex portion) with any known ceramic adhesive. Non-limiting examples of such ceramic adhesives include adhesive compositions containing polyimide resins, epoxy resins, or polyamideimide resins, and inorganic adhesive compositions mainly composed of fire-resistant ceramics such as alumina and inorganic polymers (for example, "Aron Ceramic" manufactured by Toa Gosei Co., Ltd.).
As another alternative method, the ceramic sheet of the setter having a convex portion having a substantially uniform cross section in the longitudinal direction formed separately on the flat surface of the front surface can be obtained by forming a molded body of the ceramic sheet (other than the convex portion) or by sintering this molded body to produce a sintered body, and then machining the surface to form the convex portion. Examples of such machining include, but are not limited to, cutting and polishing using cutting tools such as drills and files.

The method for manufacturing the base plate constituting the firing jig according to the present invention is not particularly limited, so long as it is possible to manufacture a base plate including a groove portion satisfying the above requirements on a portion of the surface adjacent to the setter.
The ceramic raw material powder and additives for producing the base plate can be appropriately selected from the items described above for the setter. For example, the ceramic raw material powder for the base plate can be one or a combination of two or more of alumina (Al ₂ O ₃ ), zirconia (ZrO ₂ ), magnesium oxide (MgO), mullite (3Al ₂ O ₃ -2SiO ₂ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), aluminum nitride (AlN), boron carbide (B ₄ C), cordierite (MgO/Al ₂ O ₃ /SiO ₂ ), aluminum titanate (Al ₂ TiO ₅ ), magnesium titanate (MgTiO ₃ ), titanium diboride (TiB ₂ ), etc.

The base plate including the groove portion can be manufactured by forming an integral molded body having grooves with the desired cross-sectional shape and longitudinal length on its surface using any known molding method such as press molding, cast molding, vibration molding, etc., and then firing the body under conditions similar to those described above for the firing process of the mesh-like portion.
Alternatively, the floor plate including the grooves can be obtained by forming a molded body of the base plate (one without grooves) or by sintering the molded body of the base plate to produce a sintered body, and then machining the surface to form the grooves. Examples of such machining include, but are not limited to, cutting and polishing using cutting tools such as drills and files.

Manufacturing of a setter for a mesh-like ceramic sheet 1 (1) Preparation of a paste for forming a filamentary coating body 65.3 parts of 3 mol% yttria-added partially stabilized zirconia powder with an average particle size of 0.8 μm, 5.0 parts of hydroxypropylmethylcellulose (average degree of polymerization: 300,000 g/mol) as an aqueous binder, 2.5 parts of glycerin as a plasticizer, 1.1 parts of a polycarboxylic acid-based dispersant (molecular weight 12,000), and 26.1 parts of water were mixed and degassed to prepare a paste. The viscosity of the paste was 2.3 MPa·s at 25°C.
(2) Formation of a linear coated body Using the above paste as a raw material, a first linear coated body was formed on a resin substrate using a dispenser having a circular nozzle with a diameter of 4.0 mm. Next, hot air was blown onto the first linear coated body using a dryer to remove water and dry the first linear coated body. The water content of the first linear coated body after drying was 10%. Subsequently, a second linear coated body intersecting the first linear coated body was formed. The intersection angle of both linear coated bodies was 90 degrees. Hot air was blown onto the second linear coated body using a dryer to remove water and dry the second linear coated body. The water content of the second linear coated body after drying was 8%. Through these operations, a lattice-shaped precursor consisting of a first linear body (dried product of the second linear coated body) and a second linear body (dried product of the first linear coated body) perpendicularly intersecting each other was obtained.
(3) Firing process The dried lattice-shaped precursor was peeled off from the resin substrate and then placed in an air firing furnace. Degreasing and firing were performed in this firing furnace to obtain a mesh-shaped ceramic sheet 1 made of zirconia. The firing temperature was 1450°C, and the firing time was 3 hours. In the mesh-shaped ceramic sheet 1, the first linear portion (having a substantially circular cross-sectional shape) and the second linear portion (having a cross-sectional shape in which a portion of the substantially circular shape is cut linearly) were in point contact at their intersections. The maximum width Wc of the first linear portion in the obtained mesh-shaped zirconia sheet 1 (length in a direction perpendicular to the longitudinal direction, which is the design direction in a plan view, i.e., the maximum width Wc of the cross section perpendicular to the longitudinal direction of the first linear portion in a direction parallel to the adjacent surface of the setter's floor plate) was 4.0 mm. In addition, since the cross-sectional shape of the first filamentary portion was approximately circular, the maximum height Hc of the first filamentary portion (the maximum height of the cross section perpendicular to the longitudinal direction of the first filamentary portion in the direction perpendicular to the adjacent surface of the setter to the floor plate) was estimated to be 4.0 mm, the same as Wc. The interval between the first filamentary portions was 0.1 mm. That is, the size (opening size) of the through hole in the mesh-like ceramic sheet 1 was 0.1 mm□, and the area of the through hole was ^0.01 mm2. The angle between each filamentary portion and the side portion in the mesh-like ceramic sheet 1 was 45°, and the intersection angle between the first filamentary portion and the second filamentary portion was 90°. The outer dimensions of the mesh-like ceramic sheet 1 were 300 mm long x 300 mm wide. Therefore, in this example, the volume b within the contour of the adjacent surface of the mesh-like ceramic sheet 1 relative to the base plate (described later) serving as the setter was ^90,000 mm2 (the base plate described later was designed so that when the adjacent surface S is viewed vertically when the setter is placed on the base plate, no area protrudes from the contour of the base plate). The aspect ratio Lc/Wc of the length Lc between both ends of the first filamentary portion in the longitudinal direction to the maximum width Wc of the first filamentary portion of the mesh-like ceramic sheet 1 (here, the length is defined as a representative length between both ends that is the same as the length and width of the sheet) was 75, and the ratio Wc/Hc of the maximum width Wc of the first filamentary portion to the maximum height Hc of the first filamentary portion was estimated to be 1.0. In addition, assuming that the mesh-like ceramic sheet 1 is designed so that all of the convex portions (first linear portions) can be accommodated in the groove portions of the base plate (described later) when the mesh-like ceramic sheet 1 is placed on the base plate (described later), the total projected area a of the convex portions accommodated in the groove portions was 69,600 ^mm2 as determined by image analysis using a digital microscope (manufactured by Keyence, product name "VHX-5000").
Table 1 shows the length and width external dimensions of this setter and the outline inner area b of the setter determined thereby, as well as the maximum width Wc (and maximum height Hc) of the first filamentary portions, the spacing between the first filamentary portions, and the total projected area a of the convex portions determined by adjusting these.

Manufacturing of setters for mesh-like ceramic sheets 2 to 4 and 6 to 8, and setter for comparative ceramic sheet 9 Setters for ceramic sheets 2 to 4 and 6 to 8, and comparative ceramic sheet 9 were manufactured in the same manner as for mesh-like ceramic sheet 1 for setters, except that the length and width external dimensions of the setter and the outline inner area b of the setter determined thereby, as well as the maximum width Wc of the first filamentary portion, the spacing between the first filamentary portions, and the total projected area a of the convex portions determined by adjusting these were changed as shown in Table 1.
Table 1 shows the vertical and horizontal external dimensions of these setters and the outline inner area b of the setters determined thereby, as well as the maximum width Wc of the first filamentary portions, the spacing between the first filamentary portions, and the total projected area a of the convex portions determined by adjusting these.

A ceramic molded body having a length of 150 mm and a width of 150 mm (inner contour area b = 22,500 ^mm2 ) was prepared using raw materials having the same composition as the paste for forming the linear coating body for the ceramic sheet 1. On the flat surface of the front surface of this ceramic molded body, two linear coating bodies were formed with the same raw materials at an interval of 148 mm using a dispenser having a circular nozzle with a diameter of 1.0 mm, and then a firing process was carried out under the same conditions as for the ceramic sheet 1, to obtain a setter for ceramic sheet 5.
The maximum width Wc of the cross section perpendicular to the longitudinal direction of the convex portion of the setter obtained from this linear coating body in the direction parallel to the adjacent surface of the setter to the sole plate was 1.0 mm. The cross-sectional shape of the convex portion was a shape in which a part of an approximately circular shape was cut linearly by the flat surface of the sheet. The maximum height Hc of the convex portion (the maximum height of the cross section perpendicular to the longitudinal direction of the convex portion in the direction perpendicular to the adjacent surface of the setter to the sole plate) was estimated to be 0.5 mm. In addition, the aspect ratio Lc/Wc of the length Lc between both ends of the convex portion in the longitudinal direction to the maximum width Wc of the convex portion of the ceramic sheet 5 was 150, and the ratio Wc/Hc of the maximum width Wc of the convex portion to the maximum height Hc of the convex portion was estimated to be 2.0.
Table 1 shows the vertical and horizontal external dimensions of this setter and the outline inner area b of the setter determined thereby, as well as the maximum width Wc of the convex portions, the spacing between the convex portions, and the total projected area a of the convex portions determined by adjusting these.

A precursor molded body was obtained using a mixed material containing 65 parts by mass of alumina, 35 parts by mass of silica, and polyvinyl alcohol (PVA) as a binder as the raw material for manufacturing the floor plate 1 , and then the material was fired at 1700° C. for 4 hours to obtain a rectangular floor plate 1. A rectangular peripheral wall portion 3 mm high and 7 mm wide at the top was provided around the entire periphery of the floor plate 1, and the dimensions were measured so that when a mesh-like ceramic sheet 1 measuring 300 mm long and 300 mm wide was placed on the surface of the floor plate 1, the entire sheet would fit therein and a gap of 3 mm would be provided between the edge of the sheet and the rectangular peripheral wall portion around the entire periphery of the floor plate.
By processing the molded body with a press mold, a V-shaped groove was provided so that all of the protrusions, which are the first linear portions of the ceramic sheet 1, could be accommodated on the entire surface of the floor plate 1 except for the peripheral wall portion. The V-shaped press processing of the floor plate 1 was performed so that the depth Dg (average depth Dg·av: according to the above definition, in this case the average value of the depth of any 10 pieces) of the floor plate was 1.00 mm, the maximum width Wp of the groove was 4.00 mm (the maximum width of the cross section perpendicular to the longitudinal direction of the groove in the direction parallel to the adjacent surface P of the floor plate relative to the setter), the vertical shortest distance Ig between the grooves was 0.1 mm (in this case the average value of the vertical shortest distance between each groove) and the ratio Ig/Dg·av was 0.1, as shown in Table 2.

The relationship between the depth Dge of the groove of the sole plate when a ceramic sheet having a convex portion is accommodated in the sole plate 1 having the V-shaped groove portion on the surface thereof and the sole plate according to the following example, and the maximum height Hce of the setter in the direction perpendicular to the adjacent surface of the setter to the sole plate, in a cross section perpendicular to the longitudinal direction of the convex portion of the setter, is illustrated in Fig. 10. In this figure, 7e is the main body (base) of the setter, 7Se is the adjacent surface of the setter to the sole plate, 8e is the convex portion of the setter, 9e is the main body (base) of the sole plate, 9Pe is the adjacent surface of the sole plate to the setter, 10e is the V-shaped groove of the sole plate, Hce is the maximum height of the convex portion of the setter, Dge is the depth of the groove of the sole plate, and Dg' is the distance from the adjacent surface 9Pe of the sole plate to the setter to the lowest position of the convex portion 8e.
When a V-shaped groove portion is provided on the surface, as in this floor plate 1 and the floor plate in the example below, when the convex portion 8e of the setter is accommodated in the groove portion 10e of the floor plate, as shown in Figure 10, the lowest vertical position of the convex portion 8e of the setter and the lowest vertical position of the groove portion 10e are not in contact.
Therefore, for this sole plate 1, the grooves were designed so that the ratio Dge/Hce of the depth Dge of the sole plate to the maximum height Hce of the convex part of the setter is sufficiently large, and the ratio Dg'/Hce of the distance from the proximal surface 9Pe of the sole plate to the setter to the lowest position of the convex part 8e to Hce is in the range of 0.1 or more. Dg' can be calculated by subtracting the vertical distance between the proximal surface 7Se of the setter to the sole plate and the proximal surface 9Pe of the sole plate to the setter (the gap between the main body 7e of the setter and the main body 9e of the sole plate) from the maximum height Hce of the convex part.

Plates 2 to 8 and comparative plate 9 were manufactured in the same manner as plate 1, except that the ceramic sheets 2 to 8 and comparative ceramic sheet 9, which are manufacturing setters, were made to fit the entirety of each sheet and had the above-mentioned peripheral wall portion around the entire circumference of the plate, and groove portions of the shape shown in Table 2 (depth Dg (average depth Dg・av), maximum width Wp, shortest vertical distance Ig, ratio Ig/Dg・av) were formed by processing using a press mold.
For plates 2 to 6 and comparative plate 9, the grooves were designed so that the ratio Dg'/Hce was in the range of 0.1 or more, as in plate 1 (see FIG. 10 again). For

plates

7 and 8, the grooves were designed so that the ratio Dg'/Hce was in the range of 0.05 or more and 0.02 or more, respectively.

Examples 1 to 8 and Comparative Example 1: Evaluation of anti-slip properties using a firing jig The ceramic sheets 1 to 8 and comparative ceramic sheet 9 of the setter were placed on the corresponding base plates 1 to 8 and comparative base plate 9, respectively, so that all of the convex parts of the sheets were contained on the entire surface except for the peripheral wall parts of the base plates, thereby forming the firing jigs of Examples 1 to 8 and Comparative Example 1 in which the setter and base plates were combined.
For each of the baking jigs of Examples 1 to 8 and Comparative Example 1, the relationship between the convex portion of the setter and the groove portion of the bottom plate is shown in Table 3.

Each of the firing jigs in Examples 1 to 8 and Comparative Example 1 was subjected to the following base plate tilt test and base plate vibration test.

Plate inclination test For the firing tool consisting of the plate obtained in Examples 1 to 8 and Comparative Example 1 and the ceramic sheet setter placed on it, one end having an angle of 45° with respect to the longitudinal direction of the convex portion and the groove portion was slowly raised, and the inclination angle (°) of the plate was measured when the setter started to slide on the plate, and this was defined as the start angle of the setter's movement when the plate was inclined. As an angle measuring device for this test, a goniometer with the product name "AS ONE" model number BB01B manufactured by Iris Corporation was used.
The evaluation criteria for the setter's movement start angle when the floor plate was inclined were as follows:
AA (best): 60° or more A (good): 40° or more and less than 60° B (acceptable): 20° or more and less than 40° C (unacceptable): Less than 20°

Plate Vibration Test The firing jig consisting of the plate obtained in Examples 1 to 8 and Comparative Example 1 and the ceramic sheet setter placed thereon was set in a vibration tester and vibrated at a level of 10. The time (seconds) until the setter slid 3 mm on the plate was measured and defined as the time when the setter started to move when the plate was vibrating (setter retention time). A 60 Hz vibration tester, manufactured by SINFONIA TECHNOLOGY under the trade name "VIBRATORY PACKER, TYPE VP-40", was used.
The evaluation criteria for the time when the setter started to move when the base plate was vibrated were as follows:
AA (best): 50 seconds or more A (good): 30 seconds or more but less than 50 seconds B (passable): 10 seconds or more but less than 30 seconds C (unacceptable): Less than 10 seconds

For each of the above Examples 1 to 8 and Comparative Example 1, the setter start angle when the floor plate is tilted and the time when the setter start moving when the floor plate is vibrated, as well as the evaluation results, are shown in Table 4.

From these results, it was found that with the firing jig of the present invention, it is possible to sufficiently prevent the setter from sliding on the base plate by controlling the ratio of the projected area of the convex portion to the inner contour area of the setter within a specific range.
It was also found that the anti-slip effect can be further improved by controlling the ratio of the depth Dg of the groove portion in which the convex portion is accommodated to the maximum height Hc of the convex portion of the setter within a specific range.

Various aspects or embodiments that can be included in the present invention are summarized as follows.
[1]
A firing jig consisting of a setter and a base plate on which the setter is placed,
The setter includes one or more linear protrusions having a substantially uniform cross section in the longitudinal direction on a portion of a surface S adjacent to the base plate,
The base plate includes one or more grooves having a substantially uniform cross section in the longitudinal direction on a portion of a surface P adjacent to the setter,
the protrusions and the grooves are formed so that at least one of the protrusions of the setter is received in at least one of the grooves of the base plate when the setter is placed on the base plate,
here,
The area within the contour of the proximity surface S of the setter (excluding the area of the region that protrudes from the contour of the sole plate when the proximity surface S is viewed vertically when the setter is placed on the sole plate) is b,
When the setter is placed on the base plate, the total projected area of the convex portion accommodated in the groove portion (wherein the projected area here refers to the maximum cross-sectional area of the convex portion in a plane parallel to the adjacent surface S of the setter) is a,
The relationship of 0.5≦(a/b)*100≦90 (Formula A) is satisfied.
Firing fixture.
[2]
The firing jig described in item [1] above, wherein the setter has two or more convex portions formed approximately parallel to each other, and the base plate has two or more groove portions formed approximately parallel to each other, and the convex portions and the groove portions are formed so that when the setter is placed on the base plate, the majority of the convex portions are accommodated in the groove portions of the base plate.
[3]
The firing jig described in item [2] above, wherein when the setter has three or more convex portions, these convex portions are formed at approximately equal intervals, and/or when the base plate has three or more groove portions, these groove portions are formed at approximately equal intervals.
[4]
A firing jig described in any one of items [1] to [3] above, in which the ratio Wc/Wp of the maximum width Wc in a direction parallel to the proximity surface S of a cross section perpendicular to the longitudinal direction of at least one of the convex portions of the setter to the maximum width Wp in a direction parallel to the proximity surface P of a cross section perpendicular to the longitudinal direction of the groove portion in which the convex portion is accommodated when the setter is placed on the base plate is 2 or less.
[5]
The firing jig described in item [2] or [3] above, in which the ratio Ig/Dg・av of the vertical shortest distance Ig between the groove portions (if three or more groove portions are formed, this refers to the average value of multiple vertical shortest distances) to the average depth Dg・av of the groove portions of the base plate (which refers to the average value of each groove portion for the length from the adjacent surface P to the lowest vertical position in a cross section perpendicular to the longitudinal direction of the groove portions) is 0.05 or more and 600 or less.
[6]
The firing tool according to any one of items [1] to [5] above, wherein for at least one of the convex portions of the setter, the aspect ratio Lc/Wc of the length Lc between both ends in the longitudinal direction to the maximum width Wc in a direction parallel to the adjacent surface S of a cross section perpendicular to the longitudinal direction is 10 or more.
[7]
A firing jig described in any one of items [1] to [6] above, wherein the ratio Dg/Hc of the depth Dg from the proximity surface P to the lowest vertical position of a cross section perpendicular to the longitudinal direction of the groove portion in which the convex portion is accommodated when the setter is placed on the base plate to the maximum height Hc in the direction perpendicular to the proximity surface S of at least one of the convex portions of the setter is 0.1 or more.
[8]
A firing jig as described in any one of items [1] to [7] above, wherein the ratio Wc/Hc of the maximum height Hc of at least one of the convex portions of the setter in a direction perpendicular to the longitudinal direction of the convex portion in a direction perpendicular to the adjacent surface S to the maximum width Wc of the cross section perpendicular to the longitudinal direction of the convex portion in a direction parallel to the adjacent surface S is 0.3 or more and 4 or less.
[9]
the setter includes a mesh-like ceramic sheet in at least a portion thereof,
This mesh-like ceramic sheet includes a first linear portion layer composed of a plurality of first linear portions, each of which is arranged at a given interval and extends in one direction, and a second linear portion layer composed of a plurality of second linear portions, each of which is arranged at a given interval so as to be in contact with and intersect with each of the first linear portions, and is a ceramic sheet sintered body in which the first linear portion layer and the second linear portion layer are integrally formed,
A contact surface of the second filamentary portion layer with respect to the first filamentary portion layer forms a proximity surface S of the setter, and a first filamentary portion constituting the first filamentary portion layer forms a convex portion of the setter.
The firing jig according to any one of the above items [1] to [8].

C: object to be fired A: setter B: base plates stacked in multiple layers M: multi-layer firing jig (the above symbols C, A, B, and M refer to FIG. 1 showing a known example).
1: Firing jig (combination)
2: Mesh-like ceramic sheet setter 2S: Close surface of the setter to the base plate (back side of the paper in FIG. 2)
3: Sole plate 3P: Surface of sole plate adjacent to setter 4: Base material of sole plate 5: Peripheral wall of sole plate (rib)
6: A groove portion of the bottom plate corresponding to the convex portion of the setter (not shown in FIG. 2) HL: An opening portion of the bottom plate 7: A main body (base) of the setter
7S: surface of the setter adjacent to the sole plate 8: protruding part of the setter 9: main body (base) of the sole plate
9P: surface of the base plate adjacent to the setter 10: grooved portion of the base plate a1: projected area of the convex portion on the left side in FIG. 3 a2: projected area of the convex portion on the right side in FIG. 3 Σa _x : total projected area a _x of the convex portions b: area within the contour of the surface of the setter adjacent to the base plate Wc: maximum width of the convex portion of the setter Wp: maximum width of the grooved portion of the base plate Dg·av: average depth of the grooved portion of the base plate Ig: shortest vertical distance between the grooved portions of the base plate Lc: length between both ends of the convex portion of the setter in the longitudinal direction Hc: maximum height of the convex portion of the setter Dg: depth of the grooved portion of the base plate 11: mesh-like portion 12: first linear portion 13: second linear portion 7e: main body (base) of the setter
7Se: surface of the setter adjacent to the sole plate 8e: protruding portion of the setter 9e: main body (base) of the sole plate
9Pe: surface of the base plate adjacent to the setter 10e: groove portion of the base plate (V-shaped groove)
Hce: maximum height of the convex part of the setter Dge: depth of the groove part of the sole plate Dg': distance from the surface of the sole plate close to the setter to the lowest position of the convex part (7e and the following are schematic diagrams of the examples).

Claims

A firing jig consisting of a setter and a base plate on which the setter is placed,
The setter includes one or more linear protrusions having a substantially uniform cross section in the longitudinal direction on a portion of a surface S adjacent to the base plate,
The base plate includes one or more grooves having a substantially uniform cross section in the longitudinal direction on a portion of a surface P adjacent to the setter,
the protrusions and the grooves are formed so that at least one of the protrusions of the setter is received in at least one of the grooves of the base plate when the setter is placed on the base plate,
here,
The area within the contour of the proximity surface S of the setter (excluding the area of the region that protrudes from the contour of the sole plate when the proximity surface S is viewed vertically when the setter is placed on the sole plate) is b,
When the setter is placed on the base plate, the total projected area of the convex portion accommodated in the groove portion (wherein the projected area here refers to the maximum cross-sectional area of the convex portion in a plane parallel to the adjacent surface S of the setter) is a,
The relationship of 0.5≦(a/b)*100≦90 (Formula A) is satisfied.
Firing fixture.
The firing jig according to claim 1, wherein the setter has two or more generally parallel convex portions, the base plate has two or more generally parallel groove portions, and the convex portions and the groove portions are formed so that the majority of the convex portions are accommodated in the groove portions of the base plate when the setter is placed on the base plate.
The firing jig according to claim 2, wherein when the setter has three or more protruding portions, these protruding portions are formed at approximately equal intervals, and/or when the base plate has three or more grooved portions, these grooved portions are formed at approximately equal intervals.
The firing jig according to any one of claims 1 to 3, wherein the ratio Wc/Wp between the maximum width Wc of at least one of the protruding parts of the setter in a direction parallel to the adjacent surface S of a cross section perpendicular to the longitudinal direction of the setter and the maximum width Wp of the groove part in which the protruding part is accommodated in a cross section perpendicular to the longitudinal direction of the setter when the setter is placed on the base plate, in a direction parallel to the adjacent surface P, is 2 or less.
The firing jig according to claim 2 or 3, in which the ratio Ig/Dg・av of the shortest vertical distance Ig between the groove sections (if three or more groove sections are formed, the average of the shortest vertical distances) to the average depth Dg・av of the groove sections of the base plate (the average value of each groove section for the length from the adjacent surface P to the lowest vertical position in a cross section perpendicular to the longitudinal direction of the groove sections) is 0.05 or more and 600 or less.
The firing jig according to any one of claims 1 to 3, wherein for at least one of the convex parts of the setter, the aspect ratio Lc/Wc of the length Lc between both ends in the longitudinal direction to the maximum width Wc in the direction parallel to the adjacent surface S of the cross section perpendicular to the longitudinal direction is 10 or more.
The firing jig according to any one of claims 1 to 3, wherein the ratio Dg/Hc of the depth Dg from the proximity surface P to the lowest position in the vertical direction of the cross section perpendicular to the longitudinal direction of the groove portion in which the protrusion is housed when the setter is placed on the base plate to the maximum height Hc in the direction perpendicular to the proximity surface S of at least one of the protrusions of the setter in the longitudinal direction of the cross section, is 0.1 or more.
The firing jig according to any one of claims 1 to 3, wherein the ratio Wc/Hc of the maximum height Hc of at least one of the protruding parts of the setter in a direction perpendicular to the longitudinal direction of the protruding part in a cross section perpendicular to the longitudinal direction of the protruding part in a direction parallel to the adjacent surface S to the maximum height Hc in a direction perpendicular to the longitudinal direction of the protruding part is 0.3 or more and 4 or less.
the setter includes a mesh-like ceramic sheet in at least a portion thereof,
This mesh-like ceramic sheet includes a first linear portion layer composed of a plurality of first linear portions, each of which is arranged at a given interval and extends in one direction, and a second linear portion layer composed of a plurality of second linear portions, each of which is arranged at a given interval so as to be in contact with and intersect with each of the first linear portions, and is a ceramic sheet sintered body in which the first linear portion layer and the second linear portion layer are integrally formed,
A contact surface of the second filamentary portion layer with respect to the first filamentary portion layer forms a proximity surface S of the setter, and a first filamentary portion constituting the first filamentary portion layer forms a convex portion of the setter.
The firing jig according to any one of claims 1 to 3.