WO2021033375A1

WO2021033375A1 - Firing rack and firing tool

Info

Publication number: WO2021033375A1
Application number: PCT/JP2020/018991
Authority: WO
Inventors: 常夫古宮山; 浩臣松葉
Original assignee: 日本碍子株式会社; エヌジーケイ・アドレック株式会社
Priority date: 2019-08-16
Filing date: 2020-05-12
Publication date: 2021-02-25
Also published as: TW202108956A; TWI828927B; JP7285271B2; KR20210023996A; CN114207372A; KR102476035B1; JPWO2021033375A1

Abstract

A firing rack according to the present invention comprises a frame, a pillar part, a plurality of enclosed parts, and a plurality of auxiliary pillar parts. The frame has a tabular setter disposed on the surface thereof and has an opening. The pillar part extends across the frame so as to pass through the center of the frame. The enclosed parts are areas surrounded by the frame and the pillar part. The auxiliary pillar parts extend toward the frame or the pillar part from the center of the respective enclosed parts.

Description

Baking rack and firing jig

This specification discloses techniques related to firing racks and firing jigs. In particular, a technique relating to a firing rack for arranging a flat plate setter on which an object to be fired is loaded is disclosed.

In the firing process of an object to be fired such as a ceramic product, a technique of loading the object to be fired on a setter and firing it is known. International Publication WO2015 / 008503 (hereinafter referred to as Patent Document 1) discloses a technique for laminating a plurality of flat plate-shaped setters using a firing rack. The firing rack of Patent Document 1 is provided with a cross-shaped column portion (crosslinked portion) so as to connect the frames to the opening portion surrounded by the frame body to prevent the flat plate setter from being deformed in the firing process. doing.

In the firing rack of Patent Document 1, the center of the flat plate setter is supported by the pillar portion, and the flat plate setter is prevented from being deformed. However, when the firing rack of Patent Document 1 is used, the portion supported by the pillar portion (the portion in contact with the pillar portion) and the portion not supported by the pillar portion (the portion not in contact with the pillar portion). The temperature of the flat plate setter may differ from that of. For example, in the temperature raising step, the temperature of the flat plate setter may be higher in the portion not in contact with the pillar portion than in the portion in contact with the pillar portion. On the other hand, in the temperature lowering step, the temperature of the flat plate setter may be lower in the portion not in contact with the pillar portion than in the portion in contact with the pillar portion. If temperature unevenness occurs in the plane of the flat plate setter, firing unevenness may occur in the object to be fired. An object of the present specification is to provide a firing rack capable of reducing the in-plane temperature distribution of a flat plate setter to be loaded.

The firing rack disclosed in the present specification is configured to arrange a flat plate-shaped setter on which the object to be fired is loaded. The firing rack is surrounded by a frame body having a flat plate-shaped setter arranged on the surface and an opening, a pillar portion extending between the frame bodies so as to pass through the center of the frame body, and the frame body and the pillar portion. It may be provided with a plurality of surrounding parts and a plurality of auxiliary pillars extending from the center of the surroundings toward the frame or pillar.

This specification also discloses the above-mentioned firing rack and a firing jig including a flat plate-shaped setter arranged on the surface of the firing rack. In the firing jig, the firing rack and the flat plate setter may be made of the same material.

The plan view of the firing rack of 1st Example is shown. The cross-sectional view of the firing jig using the firing rack of the first embodiment is shown. The perspective view of the state in which the firing jigs are laminated is shown. The plan view of the firing rack of the 2nd Example is shown. The plan view of the firing rack of the 3rd Example is shown. The plan view of the firing rack of 4th Example is shown.

The features of the technology disclosed in this specification are summarized below. The items described below have technical usefulness independently.

(Baking jig)
The firing jig disclosed in the present specification is used, for example, in the firing step of a material to be fired such as a ceramic product. The firing jig may include a flat plate-shaped setter for laminating the objects to be fired and a firing rack configured to arrange the flat plate-shaped setters. That is, the firing jig may include a firing rack and a flat plate-shaped setter that is a separate component from the firing rack. The flat plate setter and the firing rack may be made of a material such as alumina, mullite, zirconia, silicon nitride, and silicon carbide. The flat plate setter and the firing rack may be made of the same material or may be made of different materials. The flat plate setter and the firing rack are made of the same material in order to improve the temperature followability during firing (the temperature change of the flat plate setter and the firing rack due to the change in the ambient temperature in the furnace). It is preferable to have.

The material of the flat plate setter and / or the firing rack is particularly preferably silicon carbide. Silicon carbide is known to have high strength and excellent impact resistance. Therefore, if a flat plate setter and / or a firing rack is produced using silicon carbide, the flat plate setter and / or the firing rack can be thinned. As a result, the weight of the firing jig can be reduced, and the heat capacity of the firing jig can be reduced. That is, by using silicon carbide as the material of the flat plate setter and / or the firing rack, a firing jig having good temperature followability can be realized. Further, the silicon carbide has a higher thermal conductivity than the other materials described above, which also contributes to the improvement of the temperature followability. In addition, the "silicon carbide" referred to in the present specification is substantially a single SiC (recrystallized SiC), Si ₃ N _4- SiC (Si ₃ N ₄ : 20 to 30 wt%, SiC:) excluding unavoidable impurities. 70 to 80 wt%), Si-containing SiC (Si: 1 to 30 wt%, SiC: 70 to 99 wt%).

(Baking rack)
The firing rack may include a frame body, a pillar portion, a surrounding portion, a sub pillar portion, and a protruding portion. The frame body, the pillar portion, the sub pillar portion, and the protruding portion may be integrally molded, or a part or all of them are separate parts, and a firing rack is formed by assembling each part. May be good. Further, as will be described in detail later, the surrounding portion is a region formed by the frame body and the pillar portion.

The frame may go around the outer circumference of the firing rack and form the outer edge of the firing rack. The inside of the frame may be open. That is, the frame may be ring-shaped. The shape of the frame (outer edge shape of the firing rack) may be a polygon such as a triangle or a quadrangle, or a circle. Although not particularly limited, the shape of the frame is preferably a quadrangle, and particularly preferably a square or a rectangle. When the shape of the frame is square or rectangular, the size of the frame (outer edge of the firing rack) may be 100 to 500 mm. The thickness of the frame may be 1 to 5 mm. The surface of the frame may form a part of the arrangement surface (setter arrangement surface) for arranging the flat plate-shaped setter.

A plurality of protrusions may be provided on the surface of the frame body. By providing a protrusion on the surface of the frame, when a flat plate setter is arranged on the firing rack, or when a firing jig on which the flat plate setter is arranged is used, the flat plate shape with respect to the firing rack. The placement position of the setter can be regulated. For example, when the firing jig is used in a continuous firing furnace, it is possible to prevent the position of the flat plate setter from being displaced with respect to the firing rack due to the vibration received when the firing jig is conveyed. Further, the protruding portion functions as a spacer for providing a gap between the firing jigs (between the flat plate-shaped setter and the upper firing rack) when the firing jigs are laminated. The thickness (protruding height) of the protruding portion may be appropriately adjusted according to the size of the flat plate-shaped setter and the object to be fired. For example, the thickness of the flat plate setter may be 0.3 to 10 mm, and the thickness of the protruding portion may be 1 to 20 mm. Inside the frame, a pillar portion connecting the frames may be provided.

The pillars may extend linearly so as to pass through the center of the frame and connect the frames, and connect the frames. The "center of the frame" means the center point of the frame with respect to the outer edge or the inner edge of the frame when the frame is viewed in a plan view (observed from the side where the flat plate setter is arranged). When the width and thickness are constant in the circumferential direction, it corresponds to the "center of gravity of the frame". The thickness of the pillar portion may be the same as the thickness of the frame body, and may be, for example, 1 to 10 mm or 1 to 5 mm. Further, when the frame body and the pillar portion are integrally molded, there is no clear boundary between the frame body (inner edge of the frame body) and the pillar portion at the connecting portion. In such a case, the "center of the frame" can be determined by connecting the inner edges of the frame of the portion to which the pillars are not connected and creating a virtual inner edge that makes a round. The pillars may extend in one direction (one pillar) or in multiple directions (multiple pillars) as long as they pass through the center of the frame. (There may be). In addition to the frame body, the pillar portion may also be provided with a protruding portion. By providing the projecting portion on the pillar portion, when a plurality of flat plate-shaped setters are arranged on the firing rack, the arrangement position of each flat plate-shaped setter can be regulated. The pillar portion divides the opening in the frame (the space surrounded by the inner edge of the frame) into a plurality of openings. That is, by providing the pillar portion in the frame body, a plurality of surrounding portions surrounded by the frame body and the pillar portion are formed.

The shape of the surrounding part depends on the shape of the frame and the pillar part. For example, when the frame body is a quadrangle, if one pillar portion is formed so as to connect opposite sides (sides that do not share vertices) of the frame body, the surrounding portion becomes a quadrangle. Further, if one or two pillars are formed so as to connect opposite vertices (vertices that do not share sides) of the frame body, the surrounding portion becomes a triangle. Further, when the frame is rectangular or in the positive direction, if one or two pillars are formed so as to be orthogonal to the sides of the frame, each surrounding part is a quadrangle having the same shape (same size). Become. Alternatively, when the frame body is rectangular or in the positive direction, if one pillar portion is formed so as to connect the opposing vertices of the frame body, each surrounding portion becomes a triangle having the same shape. Although not particularly limited, it is preferable that the shapes of the plurality of surrounding parts formed in the frame are all the same shape. When the shapes of the surrounding parts are the same, all the surrounding parts may have the same size or may be different.

The sub-pillar part is provided in the surrounding part and extends from the center of the surrounding part toward the frame or the pillar part. A plurality of sub-pillar portions are provided in the surrounding portion, and all the sub-pillar portions may be connected at the center of the surrounding portion. The "center of the surrounding portion" means the center point when the surrounding portion (firing rack) is viewed in a plan view, and when the width and thickness of the frame and pillars constituting the surrounding portion are constant, "center" is used. Corresponds to the "center of gravity of the surrounding area". Further, when the sub-pillar portion is integrally molded with the frame body and / or the pillar portion constituting the surrounding portion, the inner surface (inner side surface) of the portion to which the sub-pillar portion is not connected is connected to each other and the virtual surrounding portion makes a round. By creating the part, the "center of the surrounding part" can be determined. The sub-pillar portion may extend radially (straight line) from the center of the surrounding portion, or may extend in a curved shape (non-linear shape). Further, when the sub-pillars extend radially from the center of the surrounding area, the angles formed by the adjacent sub-pillars may be the same. Further, the direction in which the pillar portion (members constituting the surrounding portion) extends and the direction in which the sub-pillar portion extends may be the same or different. The surfaces of the frame body, the column portion, and the sub-column portion may be included in the same plane. Thereby, the arrangement surface of the flat plate-shaped setter can be formed by the whole of the frame body, the column portion and the sub-column portion. The thickness of the sub-column portion may be the same as the thickness of the column portion and the frame body, and may be, for example, 1 to 5 mm.

(First Example)
The firing rack 50 and the firing jig 60 will be described with reference to FIGS. 1 and 2. FIG. 1 shows a firing rack 50, and FIG. 2 shows a firing jig 60 in which a flat plate-shaped setter 32 is arranged on the firing rack 50. Note that FIG. 2 corresponds to a cross section taken along the line II-II of FIG. The firing rack 50 and the setter 32 are made of SiC material. The firing jig 60 is formed by arranging two setters 32 in one firing rack 50. The firing jig 60 is used to load the ceramic products to be fired in the firing process of the ceramic products and the like.

As shown in FIG. 1, the firing rack 50 includes a frame body 2, a pillar portion 4 passing through the center 6 of the frame body 2, and surrounding

portions

10a and 10b surrounded by the frame body 2 and the pillar portion 4. It is provided with

sub-pillar portions

14a and 14b passing through the

centers

12a and 12b of the above, and projecting portions (ribs) 24 and 26 provided in a part of the frame body 2 and the pillar portion 4. The frame body 2 is composed of two first frame portions 2a extending in the X direction and two second frame portions 2b extending in the Y direction orthogonal to the X direction, and has a ring shape having a substantially rectangular outer shape. is there. Therefore, an opening is formed inside the frame body 2. The pillar portion 4 extends in the Y direction (parallel to the second frame portion 2b) so as to connect the

first frame portions

2a and 2a. As a result, the pillar portion 4 separates the openings in the frame body 2 into two. Further, the

sub-column portions

14a and 14b separate the two separated openings into four, respectively, and a total of eight

triangular openings

20a and 20b are formed in the frame body 2. The width of the frame body 2 (the length of the first frame portion 2a in the Y direction and the length of the second frame portion 2b in the X direction) is constant.

The firing rack 50 has two

setter arrangement areas

30a and 30b. That is, two setters 32 can be arranged in one firing rack 50. The

setter arrangement areas

30a and 30b are composed of a frame body 2, a pillar portion 4, and

sub-pillar portions

14a and 14b. Specifically, the setter arrangement area 30a is composed of a part of the frame body 2, a part of the pillar portion 4, and a sub-pillar portion 14a. Further, the setter arrangement area 30b is composed of a part of the frame body 2, a part of the pillar portion 4, and a sub pillar portion 14b. The

protrusions

24 and 26 are arranged so as to surround the

setter arrangement areas

30a and 30b. The projecting portions 24 are provided at the four corners of the firing rack 50, and the projecting portions 26 are provided at both ends of the column portion 4 (center of the first frame portion 2a in the longitudinal direction (X direction)). The projecting portion 24 is arranged so as to surround both the

setter arrangement areas

30a and 30b, and the projecting portion 26 is provided so as to separate the

setter arrangement areas

30a and 30b. That is, the

setter arrangement regions

30a and 30b are formed by the

protrusions

24 and 26.

It should be noted that the structures of the setter arrangement area 30a and the setter arrangement area 30b are substantially the same. Therefore, in the following description, when substantially the same structure such as the component of the setter arrangement area 30a and the component of the setter arrangement area 30b is described, the alphabet of the reference number may be omitted.

The surfaces of the frame body 2, the column portion 4, and the sub-column portion 14 (arrangement surface on which the setter 32 is arranged) are included in the same plane (XY plane). That is, the surface of the setter arrangement region 30 is flat. Therefore, the setter 32 is supported by all of the frame body 2, the column portion 4, and the sub-column portion 14. Since the projecting

portions

24 and 26 are arranged so as to surround the setter arrangement area 30, the projecting

portions

24 and 26 are located on the back surface of the setter 32 when the setter 32 is arranged in the firing rack 50. There is no.

As shown in FIG. 1, the pillar portion 4 passes through the center 6 of the frame body 2 and extends in the Y direction between the first frame portions 2a. That is, the pillar portion 4 is parallel to the second frame portion 2b and is orthogonal to the first frame portion 2a. The pillar portion 4 is integrally molded with the frame body 2 (first frame portion 2a). The width (length in the X direction) of the pillar portion 4 is constant in the Y direction (excluding the portion integrated with the frame body 2). By providing the pillar portion 4 in the frame body 2, surrounding portions 10 (10a, 10b) are formed on both sides (both sides in the X direction) of the pillar portion 4. The surrounding

portions

10a and 10b are square, and their sizes are the same.

In the surrounding portion 10, four sub-pillar portions 14 extend from the center 12 of the surrounding portion 10 toward the frame body 2 or the pillar portion 4 (toward the outside of the surrounding portion 10). In the surrounding portion 10 shown in FIG. 1, the inner side surface of the frame body 2 (the portion where the pillar portion 4 and the sub-pillar portion 14 are not connected) and the side surface of the pillar portion 4 (the frame body 2 and the sub-pillar portion 14 are connected). It is a virtual range (virtual surrounding area) that is extended and connected to the unconnected part). The sub-pillar portion 14 extends radially from the center 12 toward the apex of the surrounding portion 10. Therefore, the sub-column portion 14 is non-parallel to the frame body 2 and the column portion 4 (extending in different directions). The angle formed by the adjacent sub-pillar portions 14 is 90 degrees. Each sub-pillar portion 14, the frame body 2, and the pillar portion 4 are integrally molded. Therefore, it can be considered that one sub-pillar portion 14 connecting the center 12 of the surrounding portion 10 and the four vertices is provided in the quadrangular (square) surrounding portion 10.

The advantages of the firing rack 50 will be explained. Since the firing rack 50 is formed by a frame body 2 having an opening on the inside, for example, a temperature difference between the center portion of the setter and the end portion of the setter (in-plane) as compared with a firing rack having a flat plate-shaped setter arrangement surface. Temperature distribution) can be reduced. In other words, the firing rack 50 can improve the temperature followability of the central portion of the setter. Further, since the pillar portion 4 passes through the center 6 of the frame body 2 and connects the frame bodies 2, it is possible to prevent the frame body 2 itself or the setter from being deformed during firing. Further, since the strength of the firing rack 50 is improved by providing the pillar portion 4, the thickness of the firing rack 50 (thickness of the setter arrangement surface) can be reduced, and a lightweight firing rack 50 can be realized. Can be done. As the thickness of the setter arrangement surface becomes thinner, the heat capacity of the setter arrangement surface decreases, and the temperature followability of the setter improves.

In the firing rack 50, the in-plane temperature distribution of the setter can be further reduced during firing by providing the sub-pillar portion 14 in the surrounding portion 10 surrounded by the frame body 2 and the pillar portion 4. As described above, by forming the firing rack 50 using the frame body 2, the temperature followability of the central portion of the setter can be improved. However, when the sub-pillar portion is not provided in the surrounding portion 10, between the portion corresponding to the center of the surrounding portion of the setter and the portion corresponding to the outside of the surrounding portion (the portion where the setter and the frame or the pillar portion are in contact with each other). Therefore, a temperature difference is likely to occur. Specifically, the temperature of the setter is high in the portion corresponding to the center of the surrounding portion, and the temperature of the setter is low in the portion corresponding to the outside of the surrounding portion. When the sub-pillar portion 14 is provided in the surrounding portion 10 as in the firing rack 50, a thermal bridge is formed in the center 12 of the surrounding portion 10 and the outside of the surrounding portion 10, and the in-plane temperature distribution of the setter can be reduced. it can.

As shown in FIG. 3, a plurality of firing jigs 60 (firing racks 50) may be laminated during firing. In this case, by providing the

protrusions

24 and 26 on the surface of the frame body 2, when the firing racks 50 are laminated, a gap is provided between the setter 32 and the firing racks 50 laminated on the upper stage of the setter 32. Can be provided. A space (a space for arranging the object to be fired) can be secured on the surface of the setter 32 simply by laminating the firing rack 50 without using a spacer or the like separate from the firing rack 50. The firing rack 50 is provided on the back surface of the frame body 2 (the surface opposite to the surface on which the

protrusions

24 and 26 are provided) at the tip of the protrusions 24 and 26 (the end in the protrusion direction (Z + direction)). It may have a recess for accommodating the part). By accommodating the tips of the

protrusions

24 and 26 in the recess, it is possible to prevent the firing racks 50 from being displaced from each other.

Further, by providing the

protrusions

24 and 26, the setter 32 can be positioned on the surface of the firing rack 50. That is, it is possible to suppress the movement of the setter 32 with respect to the firing rack 50, such as the setter 32 falling from the firing rack 50. Even if the protruding portion is provided on the back surface of the frame body 2, a gap can be provided between the firing jigs. However, in this case, the setter 32 cannot be positioned on the surface of the firing rack, and the setter 32 may be displaced from the firing rack due to vibration or the like. Therefore, the firing rack provided with the protruding portion on the back surface of the frame 2 is not suitable for use in, for example, a continuous firing furnace in which vibration is easily applied to the firing rack. Since the setter 32 is positioned by the

protrusions

24 and 26 provided on the surface of the frame 2, the firing rack 50 can be used in various types of firing furnaces. When a setter having a size larger than that of the setter 32 (for example, twice the size of the setter 32) is used, the protruding portion 26 may be deleted. Even in this case, if the projecting portions 24 are provided at the four corners of the frame body 2, a space can be secured on the surface of the setter, and the setter can be positioned on the surface of the firing rack.

Hereinafter, the firing racks 150, 250, and 350 will be described. The firing racks 150, 250, and 350 are modifications of the firing rack 50. Therefore, regarding the firing racks 150, 250, and 350, the parts substantially the same as the firing rack 50 are described by assigning the same reference number as the reference number assigned to the firing rack 50 or the same reference number as the last two digits. May be omitted. For the firing racks 150, 250, and 350, a firing jig is formed by arranging a setter on the surface.

(Second Example)
In the firing rack 150 shown in FIG. 4, the directions in which the sub-pillar portions 16 and 18 extend are different from those of the sub-pillar portion 14 of the firing rack 50. Specifically, the sub-pillar portions 16 (16a, 16b) extend parallel to the second frame portion 2b (in the Y direction) and connect the

first frame portions

2a, 2a. Further, the sub-pillar portions 18 (18a, 18b) extend parallel to the first frame portion 2a (in the X direction) and connect the second frame portion 2b and the pillar portion 4. The surrounding

portions

10a and 10b are separated into four by the sub-pillar portions 16 and 18, and are separated into a total of eight

quadrangular openings

120a and 120b. Even in such a form, thermal bridges (sub-pillar portions 16 and 18) are formed from the center of the surrounding portion 10 to the end of the surrounding portion 10, and the in-plane temperature distribution of the setter can be reduced. In the firing rack 150, the structure inside the surrounding portion 10b may not be changed, and the auxiliary pillar portion 14a (see FIG. 1) may be provided instead of the

auxiliary pillar portions

16a and 18a in the surrounding portion 10a.

(Third Example)
The firing rack 250 shown in FIG. 5 has a ring shape in which the outer shape of the frame body 2 is substantially in the positive direction. The firing rack 250 includes a first pillar portion 4a connecting the

first frame portions

2a and 2a, and a second pillar portion 4b connecting the

second frame portions

2b and 2b. The first pillar portion 4a extends in the Y direction (parallel to the second frame portion 2b), and the second pillar portion 4b extends in the X direction (parallel to the first frame portion 2a). Four surrounding parts 10 (10a, 10b, 10c, 10d) are formed in the frame body 2 by the

pillar parts

4a and 4b. In each surrounding portion 10, four sub-pillar portions 14 (14a, 14b, 14c, 14d) are formed from the center 12 (12a, 12b, 12c, 12d) of each surrounding portion 10 toward the apex of each surrounding portion 10. Is provided. As a result, in the firing rack 250, a total of 16 triangular openings 20 (20a, 20b, 20c, 20d) are formed in the frame body 2. The structure of each surrounding portion 10 (the form of the frame body 2, the pillar portion 4, and the sub-pillar portion 14 constituting the surrounding portion 10) is the same.

In the firing rack 250, protrusions 24 are provided at the four corners of the firing rack 250, and the protrusions 26 include both ends of the pillar 4b and the center of the pillar 4b (the center 6 of the firing rack 250). , Which is also the center of the pillar 4a). As a result, the firing rack 250 is formed with four setter arrangement regions 30 (30a, 30b, 30c, 30d). That is, four setters can be arranged in one firing rack 250. Each setter arrangement area 30 includes one surrounding portion 10. As described above, the structure of each surrounding portion 10 (10a, 10b, 10c, 10d) is the same. Therefore, the structure of each setter arrangement region 30 (30a, 30b, 30c, 30d) is also the same. In the firing rack 250, the sub-pillar portions 16 and 18 (see FIG. 4) may be provided in place of the sub-pillar portion 14 for any or all of the surrounding

portions

10a, 10b, 10c, and 10d. Further, the protruding portion 26 may be deleted, and one or two setters may be arranged in one firing rack 250 (the setter arrangement area may be one or two).

(Fourth Example)
In the firing rack 350 shown in FIG. 6, the outer shape of the frame body 2 has a ring shape in a substantially positive direction, and the first frame portion 2a and the second frame portion 2b are connected to each other. The first pillar portion 304a and the second pillar portion 304b connecting vertices different from the vertices connected by the first pillar portion 304a are provided. That is, in the firing rack 350, the

column portions

304a and 304b extend in a direction different from that of the frame body 2 (first frame portion 2a and second frame portion 2b). In the firing rack 350, the

column portions

304a and 304b form four triangular surrounding portions 310 (310a, 310b, 310c, 310d) in the frame body 2. Within each surrounding portion 310, there are three sub-pillars (one sub-pillar 15 and 2) from the center 312 (312a, 312b, 312c, 312d) of each surrounding portion 310 toward the apex of each surrounding portion 310. The sub-pillars 17) are extended. The sub-column portion 15 extends from the center 312 toward the intersection of the

column portions

304a and 304b (toward the center 6 of the firing rack 350). The sub-column portion 17 extends from the center 312 toward the intersection of the column portion 304 and the frame body 2. Three

triangular openings

21, 22, 23 are formed in each surrounding portion 310, and a total of 12

openings

21, 22, 23 are formed in the frame body 2. The structure of each surrounding portion 310 (forms of the frame body 2, the pillar portion 304, and the sub-pillar portions 15 and 17) is the same.

In the firing rack 350, the protruding portion 24 and the protruding portion 26 are provided at substantially the same positions as the firing rack 250 (see FIG. 5 for comparison). Specifically, the projecting portions 24 are provided at the four corners of the firing rack 350, and the projecting portions 26 are the intersection of the

column portions

304a and 304b (the position including the center 6 of the firing rack 350) and the second frame portion 2b. It is provided at the midpoint in the longitudinal direction (Y direction) of. As a result, the firing rack 350 is formed with four setter arrangement regions 30 (30a, 30b, 30c, 30d) at the same positions as the firing rack 250 (FIG. 5). Therefore, in the firing rack 350, each setter arrangement region 30 is composed of a part of two surrounding portions 310. However, since the structure of each surrounding portion 310 is the same, as a result, the structure of each setter arrangement region 30 is also the same. In the firing rack 350, the protruding portion 26 may be deleted, and one or two setters may be arranged in one firing rack 350 (the setter arrangement area may be one or two). ..

In all of the above-mentioned

firing racks

50, 150, 250, and 350, pillars (pillars 4,304) that pass through the center 6 of the frame 2 and extend between the frames 2 are provided in the frame 2 having an opening. It is provided, and is provided from the center of the surrounding portion (centers 12, 312) to the end portion of the surrounding portion (center 12, 312) in the surrounding portion (surrounding portion 10,310) surrounded by the frame body 2 and the pillar portion (pillar portion 4,304). It has a common feature that it has a plurality of sub-pillars (

sub-pillars

14, 15, 16, 17, 18) extending toward the frame 2 and the pillars). As a result, during firing, the temperature difference between the center of the surrounding portion and the end portion of the surrounding portion (difference in temperature followability) is alleviated, and the in-plane temperature distribution of the setter can be reduced.

Although specific examples of the present invention have been described in detail above, these are merely examples and do not limit the scope of claims. The techniques described in the claims include various modifications and modifications of the specific examples illustrated above. In addition, the technical elements described in the present specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the techniques illustrated in the present specification or drawings can achieve a plurality of purposes at the same time, and achieving one of the purposes itself has technical usefulness.

2: Frame 4: Pillar part 6: Center of frame 10: Surrounding part 14: Sub-pillar part 32: Flat plate setter 50: Baking rack 60: Baking jig

Claims

A firing rack configured to arrange a flat plate setter on which the object to be fired is loaded.
A frame body having an opening as well as the flat plate-shaped setter arranged on the surface,
Pillars that pass through the center of the frame and extend between the frames,
A plurality of surrounding parts surrounded by the frame body and the pillar parts,
A plurality of sub-pillar portions extending from the center of the surrounding portion toward the frame body or the pillar portion,
A firing rack equipped with.
The firing rack according to claim 1, wherein each of the surrounding portions is a polygon having the same shape.
The firing rack according to claim 1 or 2, wherein the direction in which the pillar portion extends and the direction in which the sub-pillar portion extends are different.
The firing rack according to any one of claims 1 to 3, wherein a plurality of protrusions configured to regulate the arrangement position of the flat plate setter are provided on the surface of the frame.
The firing rack according to any one of claims 1 to 4, wherein the material of the firing rack is silicon carbide.
The firing rack according to any one of claims 1 to 5,
With a flat plate setter placed on the surface of the firing rack,
A firing jig in which the firing rack and the flat plate setter are made of the same material.