JP6560138B2 - 粒子計測装置 - Google Patents
粒子計測装置 Download PDFInfo
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- JP6560138B2 JP6560138B2 JP2016022649A JP2016022649A JP6560138B2 JP 6560138 B2 JP6560138 B2 JP 6560138B2 JP 2016022649 A JP2016022649 A JP 2016022649A JP 2016022649 A JP2016022649 A JP 2016022649A JP 6560138 B2 JP6560138 B2 JP 6560138B2
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- 239000002245 particle Substances 0.000 title claims description 538
- 238000001514 detection method Methods 0.000 claims description 132
- 238000004364 calculation method Methods 0.000 claims description 83
- 238000005259 measurement Methods 0.000 claims description 57
- 238000003860 storage Methods 0.000 claims description 40
- 239000007788 liquid Substances 0.000 description 126
- 230000005494 condensation Effects 0.000 description 43
- 238000009833 condensation Methods 0.000 description 43
- 238000010586 diagram Methods 0.000 description 6
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 206010020880 Hypertrophy Diseases 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1429—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
- G01N15/0211—Investigating a scatter or diffraction pattern
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1434—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
- G01N15/1436—Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement the optical arrangement forming an integrated apparatus with the sample container, e.g. a flow cell
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N15/1456—Electro-optical investigation, e.g. flow cytometers without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
- G01N15/1459—Electro-optical investigation, e.g. flow cytometers without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
-
- G01N15/075—
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N2015/0042—Investigating dispersion of solids
- G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Electro-optical investigation, e.g. flow cytometers
- G01N2015/1486—Counting the particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/12—Circuits of general importance; Signal processing
Description
図1は、第1の実施形態による粒子計測装置1の構成の一例を示すブロック図である。粒子計測装置1は、気体供給部10と、計測室20と、光源30と、光検知部40と、ポンプ50と、演算部80と、ユーザインタフェース83と、記憶部85と、表示部87と、フィルタ95と、排気管99とを備えている。
図4は、第2の実施形態による粒子計測装置2の構成の一例を示すブロック図である。第2の実施形態は、第2光検知部45をさらに備えている点で第1の実施形態と異なる。
図8は、第3の実施形態による核凝縮型粒子計測装置3(以下、粒子計測装置3)の構成の一例を示す図である。粒子計測装置3は、液体含有部110と、温度調節管115と、計測室120と、光源130と、光検知部140と、ポンプ150と、温度センサ160と、温度コントローラ170と、データベース175と、演算部180と、記憶部185と、ユーザインタフェース183と、表示部187と、液体供給部190と、排気管199とを備えている。
図12は、第4の実施形態による核凝縮型粒子計測装置4(以下、粒子計測装置4)の構成の一例を示す図である。粒子計測装置4は、第2液体含有部112と、第2温度調節管117と、第2計測室122と、第2光源132と、第2光検知部142と、第2温度センサ162とをさらに備えている点で第3の実施形態の粒子計測装置4と異なる。第4の実施形態のその他の構成は、第3の実施形態の対応する構成と同様でよい。従って、液体含有部と、温度調節管と、計測室と、光源と、光検知部と、温度センサは、それぞれ複数設けられているが、その他の構成要素は共通でよい。
Claims (3)
- 気体に光を照射する光源と、
前記気体に含まれる粒子からの反射光の強度を検知し、前記反射光の強度を示す第1パラメータを出力する第1光検知部と、
前記第1パラメータと前記粒子の成分との対応関係を示す第1データを格納する記憶部と、
前記第1光検知部からの前記第1パラメータを前記記憶部からの前記第1データと比較して、前記気体に含まれる粒子の成分を判断する演算部と、を備え、
前記記憶部は、前記第1パラメータと前記粒子の大きさとの対応関係を示す第2データを格納し、
前記演算部は、前記第1光検知部からの前記第1パラメータを前記記憶部からの前記第2データと比較して、前記気体に含まれる粒子の大きさを決定する、粒子計測装置。 - 前記第1パラメータは、前記反射光の強度を示す電圧であり、
前記第1データは、前記反射光の強度を示す電圧範囲と該電圧範囲に対応する前記粒子の成分とを対応させたデータである、請求項1に記載の粒子計測装置。 - 前記気体に含まれる粒子からの反射光の強度を、前記第1光検知部とは異なる方向から検知し、前記反射光の強度を示す第2パラメータを出力する第2光検知部をさらに備え、 前記記憶部は、前記第2パラメータと前記粒子の成分との対応関係を示す第3データを格納する、請求項1または請求項2に記載の粒子計測装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2016022649A JP6560138B2 (ja) | 2016-02-09 | 2016-02-09 | 粒子計測装置 |
US15/254,065 US10317330B2 (en) | 2016-02-09 | 2016-09-01 | Particle measuring apparatus |
Applications Claiming Priority (1)
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JP2016022649A JP6560138B2 (ja) | 2016-02-09 | 2016-02-09 | 粒子計測装置 |
Publications (2)
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JP2017142116A JP2017142116A (ja) | 2017-08-17 |
JP6560138B2 true JP6560138B2 (ja) | 2019-08-14 |
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JP2016022649A Active JP6560138B2 (ja) | 2016-02-09 | 2016-02-09 | 粒子計測装置 |
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US (1) | US10317330B2 (ja) |
JP (1) | JP6560138B2 (ja) |
Families Citing this family (4)
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WO2016205495A1 (en) * | 2015-06-16 | 2016-12-22 | Multicore Photonics, Inc. | System and method for determining one or more fluid concentrations in a fluid stream |
US20210247289A1 (en) * | 2018-06-13 | 2021-08-12 | Sony Corporation | Environmental measurement apparatus, information processing apparatus, information processing system, information processing method, and program |
US20200029133A1 (en) * | 2018-07-23 | 2020-01-23 | NRS Systems | Camera Capture in an Organization Information Distribution System |
CN108709848A (zh) * | 2018-07-25 | 2018-10-26 | 佛山融芯智感科技有限公司 | 一种空气颗粒计数方法及装置 |
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US2438865A (en) * | 1946-04-06 | 1948-03-30 | Leonard A Rehard | Rapid electric fluid heater |
US3790760A (en) * | 1971-09-27 | 1974-02-05 | Cornell Aeronautical Labor Inc | Apparatus for counting, differentiating and sorting particles according to their microstructure variations |
FR2420726A1 (fr) * | 1978-03-21 | 1979-10-19 | Commissariat Energie Atomique | Dispositif pour porter un liquide a une temperature donnee |
US4521521A (en) * | 1983-03-11 | 1985-06-04 | E. I. Du Pont De Nemours And Company | Particle reagent size distribution measurements for immunoassay |
US5275787A (en) * | 1989-10-04 | 1994-01-04 | Canon Kabushiki Kaisha | Apparatus for separating or measuring particles to be examined in a sample fluid |
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JP2000019095A (ja) | 1998-06-30 | 2000-01-21 | Nec Kyushu Ltd | クリーンルームの清浄度測定装置およびクリーンルームの清浄度測定方法 |
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JP6207722B2 (ja) | 2014-04-08 | 2017-10-04 | 三菱電機株式会社 | 浮遊粒子検出装置 |
EP3169987A1 (en) * | 2014-07-18 | 2017-05-24 | THE UNITED STATES OF AMERICA, represented by the S | Aerosol particle growth systems using polymer electrolyte membranes |
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2016
- 2016-02-09 JP JP2016022649A patent/JP6560138B2/ja active Active
- 2016-09-01 US US15/254,065 patent/US10317330B2/en active Active
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JP2017142116A (ja) | 2017-08-17 |
US10317330B2 (en) | 2019-06-11 |
US20170227443A1 (en) | 2017-08-10 |
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