JP6541037B2 - 誘導型位置検出装置 - Google Patents
誘導型位置検出装置 Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims description 139
- 230000006698 induction Effects 0.000 title description 18
- 230000001939 inductive effect Effects 0.000 claims description 26
- 230000004044 response Effects 0.000 claims description 25
- 230000010355 oscillation Effects 0.000 claims description 17
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 239000004020 conductor Substances 0.000 claims description 9
- 239000003990 capacitor Substances 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 description 35
- 239000000758 substrate Substances 0.000 description 26
- 238000010586 diagram Methods 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000004907 flux Effects 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000000284 extract Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000001747 exhibiting effect Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000032261 response to magnetism Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/225—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils
- G01D5/2258—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils by a movable ferromagnetic element, e.g. core
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
- G01D5/2216—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils by a movable ferromagnetic element, e.g. a core
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/225—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils
- G01D5/2275—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the mutual induction between the two coils by a movable non-ferromagnetic conductive element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
- G01D5/2291—Linear or rotary variable differential transformers (LVDTs/RVDTs) having a single primary coil and two secondary coils
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/243—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the phase or frequency of ac
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2611—Measuring inductance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
A(θ)=P0+Psinθ (2次コイル12)
B(θ)=P0+Pcosθ (2次コイル14)
C(θ)=P0−Psinθ (2次コイル13)
D(θ)=P0−Pcosθ (2次コイル15)
ここで、P0はインダクタンス変化の振れの中点、Pは振れの振幅であり、Pは1とみなして省略しても説明上不都合はないので、以下の説明ではこれを省略することにする。
Claims (11)
- 交流信号で励磁される1次コイルと、前記1次コイルによる誘導出力を生じるように配置された2次コイルとを含むコイル部と、
前記コイル部に含まれる前記1次コイルとコンデンサによって構成された自励発振回路であって、該自励発振回路は、前記1次コイルを自励発振のためのインダクタンス要素として組み込んでなり、かつ、その発振周波数を数百kHz以上の高周波数帯域に設定してなり、自励発振による高周波交流磁場を前記1次コイルに生じさせるものと、
検出対象位置に応じて前記コイル部との相対的位置が変位するよう配置されたターゲット部であって、この相対的位置に応じて前記コイル部内の前記2次コイルのインダクタンスを変化させるように構成された磁気応答部材からなる前記ターゲット部と、
前記2次コイルの出力信号の振幅レベルに基づき前記検出対象の位置データを出力する出力回路と
を具え、前記1次及び2次コイルは、プリント基板上に渦巻き状に形成されたフラットコイルからなる誘導型位置検出装置。 - 前記出力回路は、前記2次コイルの出力信号を整流する整流回路と、前記整流回路の出力直流信号のレベルをオフセット調整すると共に、そのゲインを調整する回路を含む、請求項1の位置検出装置。
- 1つの前記1次又は2次コイルを構成する前記フラットコイルは多層状に重ねて配列された複数フラットコイル部分を直列接続したものからなる、請求項1の誘導型位置検出装置。
- 前記2次コイルは、少なくとも1対の2次コイルを含み、該1対の2次コイルにおける各コイルは所定の間隔で離隔されて配置されており、
前記ターゲット部は、該1対の2次コイルにおける各コイルのインダクタンス変化が互いに逆特性を示すように構成してなり、
前記1対の2次コイルの出力信号を差動的に合成して1つの出力信号を形成するように構成された、請求項1乃至3のいずれかの誘導型位置検出装置。 - 前記2次コイルは、2対の2次コイルを含み、
一方の1対の2次コイルに基づく合成出力信号が検出対象位置に対してサイン関数特性を示し、他方の1対の2次コイルに基づく合成出力信号が検出対象位置に対してコサイン関数特性を示す、請求項4の誘導型位置検出装置。 - 前記検出対象は回転方向に変位し、回転位置検出装置として構成された請求項1乃至5のいずれかの誘導型位置検出装置。
- 請求項1乃至6のいずれかの誘導型位置検出装置で構成される第1の回転位置検出装置と、
請求項1乃至6のいずれかの誘導型位置検出装置で構成される第2の回転位置検出装置と、
前記検出対象の回転変位を前記第1及び第2の回転位置検出装置に対して異なる伝達比で伝達する伝達手段と
を具備し、前記第1及び第2の回転位置検出装置の検出出力の組み合わせにより多回転にわたるアブソリュート位置検出が可能な多回転誘導型位置検出装置。 - 前記検出対象は直線方向に変位し、直線位置検出装置として構成された請求項1乃至5のいずれかの誘導型位置検出装置。
- 前記検出対象は円弧状に変位し、傾き検出装置として構成された請求項1乃至5のいずれかの誘導型位置検出装置。
- 前記ターゲット部の前記磁気応答部材は、非磁性良導電体からなる湾曲又は屈曲した線状を成している、請求項1乃至9のいずれかの誘導型位置検出装置。
- 前記線状を成している前記磁気応答部材は、前記1次コイルの磁界による誘導電流が流れるように、閉ループを形成している請求項10の誘導型位置検出装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013125057 | 2013-06-13 | ||
JP2013125057 | 2013-06-13 | ||
PCT/JP2014/065809 WO2014200105A1 (ja) | 2013-06-13 | 2014-06-13 | 誘導型位置検出装置 |
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JPWO2014200105A1 JPWO2014200105A1 (ja) | 2017-02-23 |
JP6541037B2 true JP6541037B2 (ja) | 2019-07-10 |
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US (1) | US9752899B2 (ja) |
EP (1) | EP3009804B1 (ja) |
JP (1) | JP6541037B2 (ja) |
CN (1) | CN105308418B (ja) |
WO (1) | WO2014200105A1 (ja) |
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DE102016202402A1 (de) | 2016-02-17 | 2017-08-17 | Continental Teves Ag & Co. Ohg | Sensor |
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2014
- 2014-06-13 US US14/897,348 patent/US9752899B2/en active Active
- 2014-06-13 JP JP2015522893A patent/JP6541037B2/ja active Active
- 2014-06-13 CN CN201480033193.9A patent/CN105308418B/zh active Active
- 2014-06-13 WO PCT/JP2014/065809 patent/WO2014200105A1/ja active Application Filing
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CN105308418A (zh) | 2016-02-03 |
CN105308418B (zh) | 2018-05-08 |
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WO2014200105A1 (ja) | 2014-12-18 |
US9752899B2 (en) | 2017-09-05 |
EP3009804B1 (en) | 2018-08-01 |
JPWO2014200105A1 (ja) | 2017-02-23 |
US20160131503A1 (en) | 2016-05-12 |
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