JP6528581B2 - ブレーク装置、基板のブレーク方法、および、ブレーク装置の基板載置部用部材 - Google Patents

ブレーク装置、基板のブレーク方法、および、ブレーク装置の基板載置部用部材

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Publication number
JP6528581B2
JP6528581B2 JP2015148437A JP2015148437A JP6528581B2 JP 6528581 B2 JP6528581 B2 JP 6528581B2 JP 2015148437 A JP2015148437 A JP 2015148437A JP 2015148437 A JP2015148437 A JP 2015148437A JP 6528581 B2 JP6528581 B2 JP 6528581B2
Authority
JP
Japan
Prior art keywords
substrate
elastic body
main surface
break
breaking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015148437A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017024375A (ja
Inventor
佑磨 岩坪
佑磨 岩坪
雄一 金平
雄一 金平
村上　健二
健二 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to JP2015148437A priority Critical patent/JP6528581B2/ja
Priority to KR1020160087243A priority patent/KR102511164B1/ko
Priority to CN201610562421.2A priority patent/CN106393453B/zh
Priority to TW105122685A priority patent/TWI678344B/zh
Publication of JP2017024375A publication Critical patent/JP2017024375A/ja
Application granted granted Critical
Publication of JP6528581B2 publication Critical patent/JP6528581B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/20—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by planing, e.g. channelling by means of planing tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/20—Cutting beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F3/00—Severing by means other than cutting; Apparatus therefor
    • B26F3/002—Precutting and tensioning or breaking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037—Controlling or regulating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Mining & Mineral Resources (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2015148437A 2015-07-28 2015-07-28 ブレーク装置、基板のブレーク方法、および、ブレーク装置の基板載置部用部材 Active JP6528581B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015148437A JP6528581B2 (ja) 2015-07-28 2015-07-28 ブレーク装置、基板のブレーク方法、および、ブレーク装置の基板載置部用部材
KR1020160087243A KR102511164B1 (ko) 2015-07-28 2016-07-11 브레이크장치, 기판의 브레이크방법, 및 브레이크장치의 기판 재치부용 부재
CN201610562421.2A CN106393453B (zh) 2015-07-28 2016-07-18 切断装置、基板的切断方法及切断装置的基板载置部用构件
TW105122685A TWI678344B (zh) 2015-07-28 2016-07-19 裂斷裝置、基板之裂斷方法、及裂斷裝置之基板載置部用構件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015148437A JP6528581B2 (ja) 2015-07-28 2015-07-28 ブレーク装置、基板のブレーク方法、および、ブレーク装置の基板載置部用部材

Publications (2)

Publication Number Publication Date
JP2017024375A JP2017024375A (ja) 2017-02-02
JP6528581B2 true JP6528581B2 (ja) 2019-06-12

Family

ID=57946241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015148437A Active JP6528581B2 (ja) 2015-07-28 2015-07-28 ブレーク装置、基板のブレーク方法、および、ブレーク装置の基板載置部用部材

Country Status (4)

Country Link
JP (1) JP6528581B2 (ko)
KR (1) KR102511164B1 (ko)
CN (1) CN106393453B (ko)
TW (1) TWI678344B (ko)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000124537A (ja) * 1998-10-21 2000-04-28 Sharp Corp 半導体レーザチップの製造方法とその方法に用いられる製造装置
JP4762671B2 (ja) * 2005-10-26 2011-08-31 古河電気工業株式会社 ダイシングテープ、および半導体ウェハダイシング方法
DE102007001133B4 (de) * 2007-01-05 2008-09-04 Mdi Schott Advanced Processing Gmbh Verfahren und Vorrichtung zum Brechen von Dünnglasscheiben
EP2261954B1 (en) * 2008-04-01 2020-01-22 Shin-Etsu Chemical Co., Ltd. Method for producing soi substrate
TWI529790B (zh) * 2010-07-05 2016-04-11 Mitsuboshi Diamond Ind Co Ltd Breaking device
KR101751046B1 (ko) * 2011-02-01 2017-06-26 삼성전자 주식회사 웨이퍼 다이싱 프레스 및 그의 반도체 웨이퍼 다이싱 시스템
JP5824365B2 (ja) * 2012-01-16 2015-11-25 三星ダイヤモンド工業株式会社 脆性材料基板のブレイク方法
JP6039363B2 (ja) 2012-10-26 2016-12-07 三星ダイヤモンド工業株式会社 脆性材料基板の分断方法並びに分断装置
JP2015030661A (ja) * 2013-08-07 2015-02-16 株式会社レミ ガラス基板のブレーク方法
JP6119551B2 (ja) * 2013-10-16 2017-04-26 三星ダイヤモンド工業株式会社 弾性支持板、破断装置及び分断方法
JP6243699B2 (ja) * 2013-10-25 2017-12-06 三星ダイヤモンド工業株式会社 脆性材料基板の分断装置
JP6268917B2 (ja) * 2013-10-25 2018-01-31 三星ダイヤモンド工業株式会社 ブレイク装置

Also Published As

Publication number Publication date
TW201710197A (zh) 2017-03-16
CN106393453A (zh) 2017-02-15
CN106393453B (zh) 2019-12-10
JP2017024375A (ja) 2017-02-02
KR102511164B1 (ko) 2023-03-17
TWI678344B (zh) 2019-12-01
KR20170013807A (ko) 2017-02-07

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