JP6514338B2 - 半導体装置、パワーモジュール、電力変換装置、自動車および鉄道車両 - Google Patents
半導体装置、パワーモジュール、電力変換装置、自動車および鉄道車両 Download PDFInfo
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- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Description
(実施の形態1)
<変形例について>
(実施の形態2)
(実施の形態3)
(実施の形態4)
(実施の形態5)
(実施の形態6)
(実施の形態7)
(実施の形態8)
(実施の形態9)
2 エピタキシャル層
3 ドレイン領域
4 ボディ領域
7 ソース領域
9 電位固定領域
10 開口部
11 絶縁膜
12 ゲート電極
14 層間絶縁膜
16 パッシベーション膜
17 ドレイン電極
20 ユニットセル
GP ゲートパッド
PP 突出部(延在部、第1部分)
SP ソースパッド
Claims (12)
- 第1基板と、
前記第1基板上に第1絶縁膜を介して形成された導電膜からなるゲート電極と、
前記ゲート電極の横の前記第1基板の主面に形成されたソース領域と、
前記第1基板の底面に形成されたドレイン領域と、
前記ゲート電極上に形成され、前記ゲート電極に電気的に接続されたゲートパッドと、
前記ゲート電極上に形成され、前記ソース領域に電気的に接続されたソースパッドと、
前記ゲートパッドの直下に形成され、前記ゲート電極を貫通する開口部と、
前記開口部の側壁から、前記第1基板の前記主面に沿う第1方向に延在する前記導電膜の一部である突出部と、
を有し、
前記ゲートパッドは、前記突出部に接続されたプラグを介して前記突出部に電気的に接続されており、
前記第1方向に直交する第2方向における前記突出部の幅は、前記第2方向における前記開口部の前記側壁の幅よりも小さく、
前記開口部の全体は、平面視において前記ゲートパッドと重なる、半導体装置。 - 請求項1に記載の半導体装置において、
前記ゲートパッドの直下において、前記開口部の側壁と前記突出部とが接続されている、半導体装置。 - 請求項1に記載の半導体装置において、
前記ゲート電極は、第1半導体層と、前記第1半導体層上に形成された第2半導体層との積層膜を含み、
前記第1半導体層および前記第2半導体層は、多結晶シリコンを含み、
前記第1半導体層の平均結晶粒径は、前記第2半導体層の平均結晶粒径と異なる、半導体装置。 - 請求項1に記載の半導体装置において、
前記第1基板は、炭化ケイ素を含む、半導体装置。 - 請求項1に記載の半導体装置において、
前記ゲート電極の上面および側壁は、第2絶縁膜により覆われ、前記ゲートパッドおよび前記ソースパッドは、前記第2絶縁膜上に形成されており、
前記ゲートパッドの直下において、前記第2絶縁膜の上面のうちの高さが最も高い面と最も低い面との高低差は、前記ゲートパッドと前記ソースパッドとの間の領域の直下における前記第2絶縁膜の上面のうちの高さが最も高い面と最も低い面との高低差よりも大きい、半導体装置。 - 請求項1に記載の半導体装置において、
前記ゲート電極、ソース領域およびドレイン領域は、トランジスタを構成する、半導体装置。 - 第2基板と、
前記第2基板の主面上に配置された、請求項1に記載の半導体装置と、
前記第2基板の前記主面上に形成されたゲート配線と、
一端が前記ゲート配線に接続され、他方の一端が前記ゲートパッドに接続された配線と、
前記ソース領域に電気的に接続された第1端子と、
前記ドレイン領域に電気的に接続された第2端子と、
を有する、パワーモジュール。 - 請求項7に記載のパワーモジュールにおいて、
前記第2基板の前記主面上に配置され、前記ゲート電極、ソース領域およびドレイン領域を含むトランジスタに対して逆並列に接続された第1ダイオードを含む半導体チップをさらに有する、パワーモジュール。 - 請求項7に記載のパワーモジュールにおいて、
前記第1基板の主面に形成され、前記ソースパッドに電気的に接続された、第1導電型を有する半導体領域をさらに有し、
前記ソース領域および前記ドレイン領域は、前記第1導電型と異なる第2導電型を有し、
前記半導体領域および前記ドレイン領域は、前記ゲート電極、ソース領域およびドレイン領域を含むトランジスタに対して逆並列に接続された第2ダイオードを構成する、パワーモジュール。 - 請求項7に記載のパワーモジュールを有し、
前記第1端子と前記第2端子間に印加される電力を変換する、電力変換装置。 - 請求項10に記載の電力変換装置の出力をモータに供給し、前記モータで車輪を駆動する、自動車。
- 請求項10に記載の電力変換装置の出力をモータに供給し、前記モータで車輪を駆動する、鉄道車両。
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