JP6512579B2 - 燃料電池の製造方法および燃料電池の製造装置 - Google Patents
燃料電池の製造方法および燃料電池の製造装置 Download PDFInfo
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Fuel Cell (AREA)
- Physical Vapour Deposition (AREA)
Description
100 表面処理装置、
101 真空炉、
104 基材、
105 ロール(一のロール)、
106 ロール(他のロール)、
110 電極、
111 スパッタ源、
112 スパッタ源、
113 分光計、
114 電源、
115 電源、
116 制御装置、
117 駆動装置、
118 膜厚の計測軌跡、
120 ロール、
121 成膜された基材、
122 セパレータ、
123 セパレータ接合体、
124 膜電極接合体(MEA)、
125 モジュール、
126 単セル、
127 スタック、
130 エンドプレート、
131 集電板、
132 スペーサ、
133 出力端子、
134 側板、
140 成形装置、
150 溶接装置、
160 洗浄装置、
170 接着剤塗布装置、
180 モジュール化装置、
190 乾燥炉。
Claims (8)
- 長尺な基材が巻回された一のロールと当該一のロールから前記基材を巻き取る他のロールとの間で搬送される前記基材に膜を形成する表面処理工程と、前記基材に形状を付与する成形工程と、を有し、
前記表面処理工程は前記成形工程前に行われ、前記表面処理工程において、前記膜の形成は、前記一のロールおよび前記他のロール、ならびにこれらの間で搬送される前記基材が真空炉内に収容された状態で連続的に行われ、
前記表面処理工程において、前記基材が前記一のロールから前記他のロールに搬送される間に、前記膜の厚みが、真空引きされた前記真空炉内で分光計によって計測され、
計測された前記膜の厚みが規格外の場合、前記表面処理工程を中止する、燃料電池の製造方法。 - 長手方向に搬送される前記基材に対し前記分光計を前記基材の短手方向に移動させ、前記基材の長手方向に対し斜めに前記膜の厚みを計測する、請求項1に記載の燃料電池の製造方法。
- 計測された前記膜の厚みが修正範囲内にある場合、前記表面処理工程における成膜条件を変更する、請求項1または請求項2に記載の燃料電池の製造方法。
- 前記表面処理工程において、前記基材は、前記膜の形成前に電圧を印加されつつボンバード処理される、請求項1〜請求項3のうちのいずれか1つに記載の燃料電池の製造方法。
- 長尺な基材が巻回された一のロールと当該一のロールから前記基材を巻き取る他のロールとの間で前記基材を搬送しつつ、前記基材に膜を形成する表面処理装置と、前記基材に形状を付与する成形装置と、を有し、
前記表面処理装置は、真空炉と、当該真空炉内に配置された分光計とを有し、前記真空炉内に、前記一のロールおよび前記他のロール、ならびにこれらの間で搬送される前記基材を収容した状態で連続的に前記膜を形成するとともに、前記基材が前記一のロールから前記他のロールに搬送される間に、真空引きされた前記真空炉内で、前記分光計によって前記膜の厚みを計測し、計測された前記膜の厚みが規格外の場合、前記膜の形成を中止し、
前記成形装置は、前記表面処理装置によって成膜された前記基材に形状を付与する、燃料電池の製造装置。 - 前記分光計は、長手方向に搬送される前記基材に対し前記基材の短手方向に移動し、前記膜の厚みは、前記基材の長手方向に対し斜めに計測される、請求項5に記載の燃料電池の製造装置。
- 計測された前記膜の厚みが修正範囲内にある場合、前記表面処理装置は、成膜条件を変更する、請求項5または請求項6に記載の燃料電池の製造装置。
- 前記表面処理装置は、前記基材に前記膜を形成する成膜位置よりも前記基材の搬送方向上流側において、前記基材に電圧を印加しつつボンバード処理を施す、請求項5〜請求項7のうちのいずれか1つに記載の燃料電池の製造装置。
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JP6512579B2 true JP6512579B2 (ja) | 2019-05-15 |
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Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3871112B2 (ja) * | 2001-06-21 | 2007-01-24 | 株式会社日立国際電気 | 基板処理装置 |
WO2010005382A1 (en) * | 2008-07-07 | 2010-01-14 | Sandvik Intellectual Property Ab | Anti- tarnish silver alloy |
JP5490462B2 (ja) * | 2009-08-17 | 2014-05-14 | 横河電機株式会社 | 膜厚測定装置 |
JP5999190B2 (ja) * | 2012-10-01 | 2016-09-28 | 日産自動車株式会社 | インライン式コーティング装置、インライン式コーティング方法、およびセパレータ |
JP2015073021A (ja) * | 2013-10-03 | 2015-04-16 | 三井造船株式会社 | 原子層堆積装置および原子層堆積方法 |
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