JP6503940B2 - 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法 - Google Patents

圧電駆動装置、ロボット及び圧電駆動装置の駆動方法 Download PDF

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JP6503940B2
JP6503940B2 JP2015136780A JP2015136780A JP6503940B2 JP 6503940 B2 JP6503940 B2 JP 6503940B2 JP 2015136780 A JP2015136780 A JP 2015136780A JP 2015136780 A JP2015136780 A JP 2015136780A JP 6503940 B2 JP6503940 B2 JP 6503940B2
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Prior art keywords
piezoelectric
drive device
piezoelectric drive
vibrating
electrode
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JP2015136780A
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Japanese (ja)
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JP2017022814A5 (https=
JP2017022814A (ja
Inventor
豊 荒川
豊 荒川
友寿 岩▲崎▼
友寿 岩▲崎▼
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2015136780A priority Critical patent/JP6503940B2/ja
Priority to CN201610528478.0A priority patent/CN106452169A/zh
Priority to US15/204,200 priority patent/US20170008167A1/en
Publication of JP2017022814A publication Critical patent/JP2017022814A/ja
Publication of JP2017022814A5 publication Critical patent/JP2017022814A5/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H02N2/006—Elastic elements, e.g. springs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/009—Thermal details, e.g. cooling means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP2015136780A 2015-07-08 2015-07-08 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法 Active JP6503940B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015136780A JP6503940B2 (ja) 2015-07-08 2015-07-08 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法
CN201610528478.0A CN106452169A (zh) 2015-07-08 2016-07-06 压电驱动装置、机器人以及压电驱动装置的驱动方法
US15/204,200 US20170008167A1 (en) 2015-07-08 2016-07-07 Piezoelectric drive device, robot, and method for driving piezoelectric drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015136780A JP6503940B2 (ja) 2015-07-08 2015-07-08 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法

Publications (3)

Publication Number Publication Date
JP2017022814A JP2017022814A (ja) 2017-01-26
JP2017022814A5 JP2017022814A5 (https=) 2018-07-12
JP6503940B2 true JP6503940B2 (ja) 2019-04-24

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JP2015136780A Active JP6503940B2 (ja) 2015-07-08 2015-07-08 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法

Country Status (3)

Country Link
US (1) US20170008167A1 (https=)
JP (1) JP6503940B2 (https=)
CN (1) CN106452169A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7027829B2 (ja) * 2017-11-14 2022-03-02 セイコーエプソン株式会社 圧電駆動装置および電子部品搬送装置
CN108656091B (zh) * 2018-07-20 2024-05-03 上海理工大学 一种基于压电复合材料可实现振动控制的工业机器人
JP7272177B2 (ja) * 2019-08-27 2023-05-12 セイコーエプソン株式会社 圧電駆動装置およびロボット
JP2021114867A (ja) * 2020-01-21 2021-08-05 セイコーエプソン株式会社 圧電モーター、およびロボット

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03253271A (ja) * 1990-03-01 1991-11-12 Canon Inc 振動波モータ
JP3481842B2 (ja) * 1997-12-24 2003-12-22 京セラ株式会社 超音波駆動装置
JP4152098B2 (ja) * 2001-12-06 2008-09-17 遠山 茂樹 球面アクチュエータ
JP2004273608A (ja) * 2003-03-06 2004-09-30 Taiheiyo Cement Corp 圧電トランス
JP2005027402A (ja) * 2003-06-30 2005-01-27 Kyocera Corp 圧電アクチュエータ及び液体吐出装置
JP2005304147A (ja) * 2004-04-08 2005-10-27 Seiko Epson Corp 圧電アクチュエータおよび装置
JP2005318723A (ja) * 2004-04-28 2005-11-10 Nsk Ltd 超音波モータ
JP2006073447A (ja) * 2004-09-06 2006-03-16 Sony Corp ランプの冷却装置及び電子機器
JP4529889B2 (ja) * 2005-02-10 2010-08-25 セイコーエプソン株式会社 圧電振動体、圧電振動体の調整方法、圧電アクチュエータ、時計、電子機器
JP5067727B2 (ja) * 2005-04-05 2012-11-07 株式会社フコク 超音波振動ユニット
JP5769380B2 (ja) * 2010-03-23 2015-08-26 キヤノン株式会社 振動波モータ
JP5942403B2 (ja) * 2011-12-06 2016-06-29 セイコーエプソン株式会社 圧電モーター、駆動装置、電子部品検査装置、電子部品搬送装置、印刷装置、ロボットハンド、およびロボット
CN106877733B (zh) * 2015-12-03 2020-12-04 精工爱普生株式会社 压电驱动装置、马达、机器人、以及泵

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US20170008167A1 (en) 2017-01-12
CN106452169A (zh) 2017-02-22
JP2017022814A (ja) 2017-01-26

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