CN106452169A - 压电驱动装置、机器人以及压电驱动装置的驱动方法 - Google Patents

压电驱动装置、机器人以及压电驱动装置的驱动方法 Download PDF

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Publication number
CN106452169A
CN106452169A CN201610528478.0A CN201610528478A CN106452169A CN 106452169 A CN106452169 A CN 106452169A CN 201610528478 A CN201610528478 A CN 201610528478A CN 106452169 A CN106452169 A CN 106452169A
Authority
CN
China
Prior art keywords
piezoelectric
mentioned
vibrating
drive device
piexoelectric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610528478.0A
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English (en)
Chinese (zh)
Inventor
荒川丰
岩崎友寿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN106452169A publication Critical patent/CN106452169A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H02N2/006—Elastic elements, e.g. springs
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/009—Thermal details, e.g. cooling means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
CN201610528478.0A 2015-07-08 2016-07-06 压电驱动装置、机器人以及压电驱动装置的驱动方法 Pending CN106452169A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-136780 2015-07-08
JP2015136780A JP6503940B2 (ja) 2015-07-08 2015-07-08 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法

Publications (1)

Publication Number Publication Date
CN106452169A true CN106452169A (zh) 2017-02-22

Family

ID=57729968

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610528478.0A Pending CN106452169A (zh) 2015-07-08 2016-07-06 压电驱动装置、机器人以及压电驱动装置的驱动方法

Country Status (3)

Country Link
US (1) US20170008167A1 (https=)
JP (1) JP6503940B2 (https=)
CN (1) CN106452169A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109787507A (zh) * 2017-11-14 2019-05-21 精工爱普生株式会社 压电驱动装置、电子元件输送装置以及机器人
CN113224973A (zh) * 2020-01-21 2021-08-06 精工爱普生株式会社 压电电机及机器人

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108656091B (zh) * 2018-07-20 2024-05-03 上海理工大学 一种基于压电复合材料可实现振动控制的工业机器人
JP7272177B2 (ja) * 2019-08-27 2023-05-12 セイコーエプソン株式会社 圧電駆動装置およびロボット

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005318723A (ja) * 2004-04-28 2005-11-10 Nsk Ltd 超音波モータ
CN1819294A (zh) * 2005-02-10 2006-08-16 精工爱普生株式会社 压电振动体、压电振动体的调节方法、压电致动器、钟表、电子设备
CN102201756A (zh) * 2010-03-23 2011-09-28 佳能株式会社 振动波马达
JP5067727B2 (ja) * 2005-04-05 2012-11-07 株式会社フコク 超音波振動ユニット
CN103151957A (zh) * 2011-12-06 2013-06-12 精工爱普生株式会社 压电马达、驱动装置、电子部件检查装置及输送装置
CN104094429A (zh) * 2012-01-31 2014-10-08 松下电器产业株式会社 压电致动器器件和其制造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03253271A (ja) * 1990-03-01 1991-11-12 Canon Inc 振動波モータ
JP3481842B2 (ja) * 1997-12-24 2003-12-22 京セラ株式会社 超音波駆動装置
JP4152098B2 (ja) * 2001-12-06 2008-09-17 遠山 茂樹 球面アクチュエータ
JP2004273608A (ja) * 2003-03-06 2004-09-30 Taiheiyo Cement Corp 圧電トランス
JP2005027402A (ja) * 2003-06-30 2005-01-27 Kyocera Corp 圧電アクチュエータ及び液体吐出装置
JP2005304147A (ja) * 2004-04-08 2005-10-27 Seiko Epson Corp 圧電アクチュエータおよび装置
JP2006073447A (ja) * 2004-09-06 2006-03-16 Sony Corp ランプの冷却装置及び電子機器
CN106877733B (zh) * 2015-12-03 2020-12-04 精工爱普生株式会社 压电驱动装置、马达、机器人、以及泵

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005318723A (ja) * 2004-04-28 2005-11-10 Nsk Ltd 超音波モータ
CN1819294A (zh) * 2005-02-10 2006-08-16 精工爱普生株式会社 压电振动体、压电振动体的调节方法、压电致动器、钟表、电子设备
JP5067727B2 (ja) * 2005-04-05 2012-11-07 株式会社フコク 超音波振動ユニット
CN102201756A (zh) * 2010-03-23 2011-09-28 佳能株式会社 振动波马达
CN103151957A (zh) * 2011-12-06 2013-06-12 精工爱普生株式会社 压电马达、驱动装置、电子部件检查装置及输送装置
CN104094429A (zh) * 2012-01-31 2014-10-08 松下电器产业株式会社 压电致动器器件和其制造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109787507A (zh) * 2017-11-14 2019-05-21 精工爱普生株式会社 压电驱动装置、电子元件输送装置以及机器人
CN109787507B (zh) * 2017-11-14 2023-11-17 精工爱普生株式会社 压电驱动装置、电子元件输送装置以及机器人
CN113224973A (zh) * 2020-01-21 2021-08-06 精工爱普生株式会社 压电电机及机器人
CN113224973B (zh) * 2020-01-21 2024-01-05 精工爱普生株式会社 压电电机及机器人

Also Published As

Publication number Publication date
US20170008167A1 (en) 2017-01-12
JP6503940B2 (ja) 2019-04-24
JP2017022814A (ja) 2017-01-26

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Application publication date: 20170222