JP6481897B2 - 表面被覆切削工具 - Google Patents

表面被覆切削工具 Download PDF

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Publication number
JP6481897B2
JP6481897B2 JP2016181280A JP2016181280A JP6481897B2 JP 6481897 B2 JP6481897 B2 JP 6481897B2 JP 2016181280 A JP2016181280 A JP 2016181280A JP 2016181280 A JP2016181280 A JP 2016181280A JP 6481897 B2 JP6481897 B2 JP 6481897B2
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Japan
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composition
average
component
region
layer
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JP2016181280A
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English (en)
Japanese (ja)
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JP2018043326A (ja
JP2018043326A5 (fr
Inventor
峻 佐藤
峻 佐藤
強 大上
強 大上
健志 山口
健志 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
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Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP2016181280A priority Critical patent/JP6481897B2/ja
Priority to PCT/JP2017/032635 priority patent/WO2018051939A1/fr
Priority to US16/331,040 priority patent/US11007578B2/en
Priority to EP17850841.2A priority patent/EP3513890B1/fr
Priority to CN201780053725.9A priority patent/CN109661286B/zh
Publication of JP2018043326A publication Critical patent/JP2018043326A/ja
Publication of JP2018043326A5 publication Critical patent/JP2018043326A5/ja
Application granted granted Critical
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B51/00—Tools for drilling machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23C—MILLING
    • B23C5/00—Milling-cutters
    • B23C5/16—Milling-cutters characterised by physical features other than shape
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/24—Titanium aluminium nitride
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2224/00—Materials of tools or workpieces composed of a compound including a metal
    • B23B2224/32—Titanium carbide nitride (TiCN)
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2226/00—Materials of tools or workpieces not comprising a metal
    • B23B2226/12—Boron nitride
    • B23B2226/125—Boron nitride cubic [CBN]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings
    • B23B2228/105—Coatings with specified thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/24—Hard, i.e. after being hardened
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23F—MAKING GEARS OR TOOTHED RACKS
    • B23F21/00—Tools specially adapted for use in machines for manufacturing gear teeth
    • B23F21/04—Planing or slotting tools
    • B23F21/10—Gear-shaper cutters having a shape similar to a spur wheel or part thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23F—MAKING GEARS OR TOOTHED RACKS
    • B23F21/00—Tools specially adapted for use in machines for manufacturing gear teeth
    • B23F21/12—Milling tools
    • B23F21/16—Hobs

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Gear Processing (AREA)
  • Drilling Tools (AREA)
JP2016181280A 2016-09-16 2016-09-16 表面被覆切削工具 Active JP6481897B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2016181280A JP6481897B2 (ja) 2016-09-16 2016-09-16 表面被覆切削工具
PCT/JP2017/032635 WO2018051939A1 (fr) 2016-09-16 2017-09-11 Outil de coupe revêtu en surface
US16/331,040 US11007578B2 (en) 2016-09-16 2017-09-11 Surface-coated cutting tool
EP17850841.2A EP3513890B1 (fr) 2016-09-16 2017-09-11 Outil de coupe revêtu en surface
CN201780053725.9A CN109661286B (zh) 2016-09-16 2017-09-11 表面包覆切削工具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016181280A JP6481897B2 (ja) 2016-09-16 2016-09-16 表面被覆切削工具

Publications (3)

Publication Number Publication Date
JP2018043326A JP2018043326A (ja) 2018-03-22
JP2018043326A5 JP2018043326A5 (fr) 2018-11-22
JP6481897B2 true JP6481897B2 (ja) 2019-03-13

Family

ID=61619987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016181280A Active JP6481897B2 (ja) 2016-09-16 2016-09-16 表面被覆切削工具

Country Status (5)

Country Link
US (1) US11007578B2 (fr)
EP (1) EP3513890B1 (fr)
JP (1) JP6481897B2 (fr)
CN (1) CN109661286B (fr)
WO (1) WO2018051939A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6701384B2 (ja) * 2016-12-28 2020-05-27 住友電気工業株式会社 被膜
JP7205709B2 (ja) * 2017-10-12 2023-01-17 三菱マテリアル株式会社 表面被覆切削工具
JP7132548B2 (ja) * 2019-01-31 2022-09-07 三菱マテリアル株式会社 表面被覆切削工具
JP7144747B2 (ja) * 2019-02-20 2022-09-30 三菱マテリアル株式会社 表面被覆切削工具
JP7274121B2 (ja) * 2019-03-05 2023-05-16 三菱マテリアル株式会社 硬質被覆層がすぐれた耐摩耗性および耐剥離性を発揮する表面被覆切削工具
WO2020213260A1 (fr) * 2019-04-17 2020-10-22 住友電工ハードメタル株式会社 Outil de coupe
JP7510108B2 (ja) * 2020-03-17 2024-07-03 三菱マテリアル株式会社 表面被覆切削工具
JP7510107B2 (ja) * 2020-03-17 2024-07-03 三菱マテリアル株式会社 表面被覆切削工具
JP2021146420A (ja) * 2020-03-17 2021-09-27 三菱マテリアル株式会社 表面被覆切削工具
CN112526663A (zh) * 2020-11-04 2021-03-19 浙江大学 一种基于原子层沉积的吸收膜及其制作方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3669334B2 (ja) 2002-01-21 2005-07-06 三菱マテリアル神戸ツールズ株式会社 高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆超硬合金製切削工具
SE527346C2 (sv) 2003-04-24 2006-02-14 Seco Tools Ab Skär med beläggning av skikt av MTCVD-Ti (C,N) med styrd kornstorlek och morfologi och metod för att belägga skäret
EP2247772B1 (fr) * 2008-02-21 2016-06-29 Seco Tools AB Outil de coupe revêtu multicouche
CN101698933B (zh) 2009-10-30 2012-02-01 华南理工大学 一种多元Ti-Al-N系纳米复合多层涂层及其制备方法
US20130087784A1 (en) * 2011-10-05 2013-04-11 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
CN103173761B (zh) * 2011-12-23 2015-08-19 株洲钻石切削刀具股份有限公司 改善涂层结构的切削刀具及其制备方法
JP5946017B2 (ja) * 2012-05-30 2016-07-05 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6037113B2 (ja) * 2012-11-13 2016-11-30 三菱マテリアル株式会社 高速断続切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6044322B2 (ja) * 2012-12-20 2016-12-14 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
JP5995087B2 (ja) * 2013-01-08 2016-09-21 三菱マテリアル株式会社 硬質被覆層がすぐれた耐酸化性、耐チッピング性、耐摩耗性を発揮する表面被覆切削工具
US9168664B2 (en) 2013-08-16 2015-10-27 Kennametal Inc. Low stress hard coatings and applications thereof
US9896767B2 (en) 2013-08-16 2018-02-20 Kennametal Inc Low stress hard coatings and applications thereof
WO2015085316A1 (fr) * 2013-12-07 2015-06-11 Bruker Nano, Inc. Mesure de force avec détermination de ligne de base en temps réel
JP2015160259A (ja) * 2014-02-26 2015-09-07 三菱マテリアル株式会社 耐摩耗性にすぐれた表面被覆切削工具
JP6402662B2 (ja) * 2014-03-26 2018-10-10 三菱マテリアル株式会社 表面被覆切削工具及びその製造方法
JP5924507B2 (ja) 2014-09-25 2016-05-25 三菱マテリアル株式会社 硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
JP6120229B2 (ja) * 2015-01-14 2017-04-26 住友電工ハードメタル株式会社 硬質被膜、切削工具および硬質被膜の製造方法
WO2016190332A1 (fr) * 2015-05-26 2016-12-01 三菱マテリアル株式会社 Outil de coupe à surface revêtue doté d'une couche de revêtement rigide présentant une excellente résistance à l'écaillage
CN107771225B (zh) * 2015-07-27 2020-10-30 瓦尔特公开股份有限公司 具有TiAlN涂层的刀具
JP6519795B2 (ja) * 2015-09-30 2019-05-29 三菱マテリアル株式会社 耐チッピング性、耐摩耗性にすぐれた表面被覆切削工具

Also Published As

Publication number Publication date
US20190232381A1 (en) 2019-08-01
JP2018043326A (ja) 2018-03-22
WO2018051939A1 (fr) 2018-03-22
CN109661286B (zh) 2020-10-16
EP3513890A4 (fr) 2020-04-15
CN109661286A (zh) 2019-04-19
EP3513890A1 (fr) 2019-07-24
US11007578B2 (en) 2021-05-18
EP3513890B1 (fr) 2021-12-22

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