JP6476202B2 - 差異化されたp型及びn型領域構造を有する太陽電池エミッタ領域の製造 - Google Patents
差異化されたp型及びn型領域構造を有する太陽電池エミッタ領域の製造 Download PDFInfo
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- JP6476202B2 JP6476202B2 JP2016560623A JP2016560623A JP6476202B2 JP 6476202 B2 JP6476202 B2 JP 6476202B2 JP 2016560623 A JP2016560623 A JP 2016560623A JP 2016560623 A JP2016560623 A JP 2016560623A JP 6476202 B2 JP6476202 B2 JP 6476202B2
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- 238000004519 manufacturing process Methods 0.000 title description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 167
- 229910052710 silicon Inorganic materials 0.000 claims description 167
- 239000010703 silicon Substances 0.000 claims description 167
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 129
- 229910052751 metal Inorganic materials 0.000 claims description 76
- 239000002184 metal Substances 0.000 claims description 76
- 239000000758 substrate Substances 0.000 claims description 75
- 238000000034 method Methods 0.000 claims description 66
- 229910021332 silicide Inorganic materials 0.000 claims description 42
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 42
- 230000008569 process Effects 0.000 claims description 35
- 229920005591 polysilicon Polymers 0.000 claims description 30
- 239000006117 anti-reflective coating Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 229910021341 titanium silicide Inorganic materials 0.000 claims description 7
- 229910005883 NiSi Inorganic materials 0.000 claims description 5
- 239000010941 cobalt Substances 0.000 claims description 5
- 229910017052 cobalt Inorganic materials 0.000 claims description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 5
- 229910021334 nickel silicide Inorganic materials 0.000 claims description 5
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims description 5
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 claims description 5
- 229910021342 tungsten silicide Inorganic materials 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 229910012990 NiSi2 Inorganic materials 0.000 claims description 2
- 229910008814 WSi2 Inorganic materials 0.000 claims description 2
- 238000000059 patterning Methods 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 229910021417 amorphous silicon Inorganic materials 0.000 description 12
- 238000002513 implantation Methods 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000000151 deposition Methods 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 6
- 238000000608 laser ablation Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 229910019001 CoSi Inorganic materials 0.000 description 3
- 229910005881 NiSi 2 Inorganic materials 0.000 description 3
- 229910008484 TiSi Inorganic materials 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000011112 process operation Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052990 silicon hydride Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 230000001146 hypoxic effect Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Description
(項目1)
バックコンタクト型太陽電池であって、
受光表面及び裏面を有する基板と、
上記基板の上記裏面上に配設された第1の薄い誘電体層上に配設された、第1導電型の第1多結晶シリコンエミッタ領域と、
上記基板の上記裏面上に配設された第2の薄い誘電体層上に配設された、異なる第2導電型の第2多結晶シリコンエミッタ領域と、
上記第1及び第2多結晶シリコンエミッタ領域の間に直接側方に配設された第3の薄い誘電体層と、
上記第1多結晶シリコンエミッタ領域上に配設された第1導電接点構造体と、
上記第2多結晶シリコンエミッタ領域上に配設された第2導電接点構造体と、
を備える
バックコンタクト型太陽電池。
(項目2)
上記第1多結晶シリコンエミッタ領域上に配設された絶縁層を更に備え、
上記第1導電接点構造体は上記絶縁層を貫通して配設され、上記第2多結晶シリコンエミッタ領域の一部分は上記絶縁層と重なり合っているが、上記第1導電接点構造体とは離れている、
項目1に記載のバックコンタクト型太陽電池。
(項目3)
上記第1多結晶シリコンエミッタ領域上に配設された絶縁層と、
上記絶縁層上に配設された上記第2導電型の多結晶シリコン層と、を更に備え、
上記第1導電接点構造体は上記第2導電型の上記多結晶シリコン層を貫通及び上記絶縁層を貫通して配設されている、
項目1に記載のバックコンタクト型太陽電池。
(項目4)
上記第2多結晶シリコンエミッタ領域及び上記第2の薄い誘電体層は、上記基板内に配設された陥没部内に配設されている、項目1に記載のバックコンタクト型太陽電池。
(項目5)
上記陥没部はテクスチャ化された表面を有する、項目に記載のバックコンタクト型太陽電池。
(項目6)
上記第1多結晶シリコンエミッタ領域及び上記第1の薄い誘電体層は、上記基板の上記裏面の平坦部分上に配設され、上記第2多結晶シリコンエミッタ領域及び上記第2の薄い誘電体層は上記基板の上記裏面のテクスチャ化された部分上に配設されている、項目1に記載のバックコンタクト型太陽電池。
(項目7)
上記第1及び上記第2導電接点構造体は、各々、上記第1及び上記第2多結晶シリコンエミッタ領域上にそれぞれ配設されたアルミニウムベースの金属シード層を備え、各々は、上記アルミニウムベースの金属シード層上に配設された金属層を更に備える、項目1に記載のバックコンタクト型太陽電池。
(項目8)
上記第1及び上記第2導電接点構造体は、各々、上記第1及び上記第2多結晶シリコンエミッタ領域上にそれぞれ配設された金属シリサイド層を備え、各々は、上記金属シリサイド層上に配設された金属層を更に備える、項目1に記載のバックコンタクト型太陽電池。
(項目9)
上記金属シリサイド層は、チタンシリサイド(TiSi2)、コバルトシリサイド(CoSi2)、タングステンシリサイド(WSi2)、及びニッケルシリサイド(NiSi又はNiSi2)からなる群から選択された材料を含む、項目8に記載のバックコンタクト型太陽電池。
(項目10)
上記基板の上記受光表面上に配設された第4の薄い誘電体層と、
上記第4の薄い誘電体層上に配設された、上記第2導電型の多結晶シリコン層と、
上記第2導電型の上記多結晶シリコン層上に配設された反射防止コーティング(ARC)層と、
を更に備える
項目1に記載のバックコンタクト型太陽電池。
(項目11)
上記基板は、N型単結晶シリコン基板であり、上記第1導電型はP型であり、上記第2導電型はN型である、項目1に記載のバックコンタクト型太陽電池。
(項目12)
上記第1、上記第2、及び上記第3の薄い誘電体層のすべては、二酸化ケイ素を含む、項目1に記載のバックコンタクト型太陽電池。
(項目13)
太陽電池の交互のN型及びP型エミッタ領域の製造方法であって、
基板の裏面上に形成された第1の薄い誘電体層上に、第1導電型の第1シリコン層を形成することと、
上記第1シリコン層上に絶縁層を形成することと、
上記絶縁層及び上記第1シリコン層をパターニングして、絶縁キャップを有する、上記第1導電型の複数の第1シリコン領域を形成することと、
上記複数の第1シリコン領域の露出した複数の側面上に第2の薄い誘電体層を形成することと、
上記基板の上記裏面上に形成された第3の薄い誘電体層上、並びに上記複数の第1シリコン領域の上記第2の薄い誘電体層及び上記絶縁キャップ上に、異なる第2導電型の第2シリコン層を形成することと、
上記第2シリコン層をパターニングして、上記第2導電型の分離された複数の第2シリコン領域を形成し、及び上記複数の第1シリコン領域の上記絶縁キャップの上方の上記第2シリコン層の複数の領域内に複数の接点開口部を形成することと、
上記複数の接点開口部を貫通して上記絶縁キャップをパターニングして、上記複数の第1シリコン領域の複数の部分を露出させることと、
上記複数の第1シリコン領域の上記露出した複数の部分及び上記分離された複数の第2シリコン領域のみを露出させるようにマスクを形成することと、
上記複数の第1シリコン領域の上記露出した複数の部分上及び上記分離された複数の第2シリコン領域上に、金属シード層を形成することと、
上記金属シード層上に金属層をめっきして、上記複数の第1シリコン領域及び上記分離された複数の第2シリコン領域のための複数の導電接点を形成することと、
を備える
方法。
(項目14)
上記第1及び上記第2シリコン層はアモルファスシリコン層として形成され、
上記方法は、上記第1及び上記第2シリコン層をアニールして、第1及び第2多結晶シリコン層をそれぞれ形成すること、を更に備える、
項目13に記載の方法。
(項目15)
上記絶縁層及び上記第1シリコン層をパターニングすることは、上記第1の薄い誘電体層をパターニングすることを更に含み、上記絶縁層、上記第1シリコン層及び上記第1の薄い誘電体層のパターニング、上記第2シリコン層のパターニング、及び上記絶縁キャップのパターニングは、すべてレーザアブレーションの使用を含む、項目13に記載の方法。
(項目16)
項目13に記載の方法により製造される太陽電池。
(項目17)
太陽電池の交互のN型及びP型エミッタ領域の製造方法であって、
基板の裏面上に形成された第1の薄い誘電体層上に、第1導電型の第1シリコン層を形成することと、
上記第1シリコン層上に絶縁層を形成することと、
上記絶縁層及び上記第1シリコン層をパターニングして、絶縁キャップを有する、上記第1導電型の複数の第1シリコン領域を形成することと、
上記複数の第1シリコン領域の露出した複数の側面上に第2の薄い誘電体層を形成することと、
上記基板の上記裏面上に形成された第3の薄い誘電体層上、並びに上記複数の第1シリコン領域の上記第2の薄い誘電体層及び上記絶縁キャップ上に、異なる第2導電型の第2シリコン層を形成することと、
上記第2シリコン層をパターニングして、上記第2導電型の分離された複数の第2シリコン領域を形成し、及び上記複数の第1シリコン領域の上記絶縁キャップの上方の上記第2シリコン層の複数の領域内に複数の接点開口部を形成することと、
上記複数の接点開口部を貫通して上記絶縁キャップをパターニングして、上記複数の第1シリコン領域の複数の部分を露出させることと、
上記複数の第2シリコン領域と上記絶縁キャップのパターニングに続いて、上記第2シリコン層から及び上記複数の第1シリコン領域の上記露出した複数の部分から、金属シリサイド層を形成することと、
上記金属シリサイド層上に金属層をめっきして、上記複数の第1シリコン領域及び上記分離された複数の第2シリコン領域のための複数の導電接点を形成することと、
を備える
方法。
(項目18)
上記金属シリサイド層を形成することは、ブランケット金属層を形成すること、上記ブランケット金属層を加熱すること、及び上記ブランケット金属層の複数の反応しなかった部分を除去することを含む、項目17に記載の方法。
(項目19)
上記第1及び上記第2シリコン層はアモルファスシリコン層として形成され、
上記方法は、上記第1及び上記第2シリコン層をアニールして、第1及び第2多結晶シリコン層をそれぞれ形成することを更に備える、
項目17に記載の方法。
(項目20)
項目17に記載の方法により製造される太陽電池。
Claims (10)
- バックコンタクト型太陽電池であって、
受光表面及び裏面を有する基板と、
前記基板の前記裏面上に配設された第1の薄い誘電体層上に配設された、第1導電型の第1多結晶シリコンエミッタ領域と、
前記基板の前記裏面上に配設された第2の薄い誘電体層上に配設された、異なる第2導電型の第2多結晶シリコンエミッタ領域と、
前記第1多結晶シリコンエミッタ領域及び前記第2多結晶シリコンエミッタ領域の間に直接側方に配設された第3の薄い誘電体層と、
前記第1多結晶シリコンエミッタ領域上に配設された第1導電接点構造体と、
前記第2多結晶シリコンエミッタ領域上に配設された第2導電接点構造体と、
を備え、
前記第3の薄い誘電体層は、前記第1多結晶シリコンエミッタ領域または前記第2多結晶シリコンエミッタ領域の一面に、酸化工程及び/または窒化工程中に形成される、酸化ケイ素層、または窒化ケイ素層、または酸窒化ケイ素層である、
バックコンタクト型太陽電池。 - 前記第1多結晶シリコンエミッタ領域上に配設された絶縁層を更に備え、
前記第1導電接点構造体は前記絶縁層を貫通して配設され、
前記第2多結晶シリコンエミッタ領域の一部分は前記絶縁層と重なり合っているが、
前記第1導電接点構造体とは離れている、
請求項1に記載のバックコンタクト型太陽電池。 - 前記第1多結晶シリコンエミッタ領域上に配設された絶縁層と、
前記絶縁層上に配設された前記第2導電型の多結晶シリコン層と、
を更に備え、
前記第1導電接点構造体は前記第2導電型の前記多結晶シリコン層を貫通及び前記絶縁層を貫通して配設されている、
請求項1に記載のバックコンタクト型太陽電池。 - 前記第2多結晶シリコンエミッタ領域及び前記第2の薄い誘電体層は、前記基板内に配設された陥没部内に配設されている、
請求項1から3のいずれか一項に記載のバックコンタクト型太陽電池。 - 前記陥没部はテクスチャ化された表面を有する、
請求項4に記載のバックコンタクト型太陽電池。 - 前記第1多結晶シリコンエミッタ領域及び前記第1の薄い誘電体層は、前記基板の前記裏面の平坦部分上に配設され、
前記第2多結晶シリコンエミッタ領域及び前記第2の薄い誘電体層は前記基板の前記裏面のテクスチャ化された部分上に配設されている、
請求項1から5のいずれか一項に記載のバックコンタクト型太陽電池。 - 前記第1導電接点構造体及び前記第2導電接点構造体は、各々、前記第1多結晶シリコンエミッタ領域及び前記第2多結晶シリコンエミッタ領域上にそれぞれ配設されたアルミニウムベースの金属シード層を備え、
各々は、前記アルミニウムベースの金属シード層上に配設された金属層を更に備える、
請求項1から6のいずれか一項に記載のバックコンタクト型太陽電池。 - 前記第1導電接点構造体及び前記第2導電接点構造体は、各々、前記第1多結晶シリコンエミッタ領域及び前記第2多結晶シリコンエミッタ領域上にそれぞれ配設された金属シリサイド層を備え、
各々は、前記金属シリサイド層上に配設された金属層を更に備える、
請求項1から7のいずれか一項に記載のバックコンタクト型太陽電池。 - 前記金属シリサイド層は、チタンシリサイド(TiSi2)、コバルトシリサイド(CoSi2)、タングステンシリサイド(WSi2)、及びニッケルシリサイド(NiSi又はNiSi2)からなる群から選択された材料を含む、
請求項8に記載のバックコンタクト型太陽電池。 - 前記基板の前記受光表面上に配設された第4の薄い誘電体層と、
前記第4の薄い誘電体層上に配設された、前記第2導電型の多結晶シリコン層と、
前記第2導電型の前記多結晶シリコン層上に配設された反射防止コーティング(ARC)層と、
を更に備える
請求項1から9のいずれか一項に記載のバックコンタクト型太陽電池。
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