JP6468521B2 - 誘導結合型アンテナユニット及びプラズマ処理装置 - Google Patents

誘導結合型アンテナユニット及びプラズマ処理装置 Download PDF

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JP6468521B2
JP6468521B2 JP2016245036A JP2016245036A JP6468521B2 JP 6468521 B2 JP6468521 B2 JP 6468521B2 JP 2016245036 A JP2016245036 A JP 2016245036A JP 2016245036 A JP2016245036 A JP 2016245036A JP 6468521 B2 JP6468521 B2 JP 6468521B2
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inductively coupled
antenna conductor
coupled antenna
antenna
antenna unit
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JP2018101463A (ja
JP2018101463A5 (https=
Inventor
鈴木　泰雄
泰雄 鈴木
正則 渡邉
正則 渡邉
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Plasma Ion Assist Co Ltd
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Plasma Ion Assist Co Ltd
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JP2016245036A 2016-12-19 2016-12-19 誘導結合型アンテナユニット及びプラズマ処理装置 Active JP6468521B2 (ja)

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JP2018101463A JP2018101463A (ja) 2018-06-28
JP2018101463A5 JP2018101463A5 (https=) 2018-08-30
JP6468521B2 true JP6468521B2 (ja) 2019-02-13

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6708887B2 (ja) * 2018-09-25 2020-06-10 株式会社プラズマイオンアシスト プラズマ処理装置、アンテナ導体又は／及び導電性部材の製造方法
JP7202641B2 (ja) * 2019-03-26 2023-01-12 株式会社プラズマイオンアシスト プラズマ処理装置およびプラズマ処理方法
JP7426709B2 (ja) * 2019-10-23 2024-02-02 株式会社イー・エム・ディー プラズマ源
EP3813092A1 (en) * 2019-10-23 2021-04-28 EMD Corporation Plasma source

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007220594A (ja) * 2006-02-20 2007-08-30 Nissin Electric Co Ltd プラズマ生成方法及びプラズマ生成装置並びにプラズマ処理装置
US8917022B2 (en) * 2008-05-22 2014-12-23 Emd Corporation Plasma generation device and plasma processing device
JP4621287B2 (ja) * 2009-03-11 2011-01-26 株式会社イー・エム・ディー プラズマ処理装置
JP2010225296A (ja) * 2009-03-19 2010-10-07 Emd:Kk 誘導結合型アンテナユニット及びプラズマ処理装置
JP6418543B2 (ja) * 2014-03-27 2018-11-07 株式会社プラズマイオンアシスト プラズマ処理装置及びプラズマ処理装置用アンテナユニット
JP6580830B2 (ja) * 2015-01-22 2019-09-25 株式会社Ｓｃｒｅｅｎホールディングス プラズマ処理装置

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