JP6467187B2 - 支持装置および方法、計測装置、並びに物品の製造方法 - Google Patents

支持装置および方法、計測装置、並びに物品の製造方法 Download PDF

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Publication number
JP6467187B2
JP6467187B2 JP2014212884A JP2014212884A JP6467187B2 JP 6467187 B2 JP6467187 B2 JP 6467187B2 JP 2014212884 A JP2014212884 A JP 2014212884A JP 2014212884 A JP2014212884 A JP 2014212884A JP 6467187 B2 JP6467187 B2 JP 6467187B2
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Japan
Prior art keywords
support
actuators
portions
load
support device
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Expired - Fee Related
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JP2014212884A
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English (en)
Japanese (ja)
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JP2016080906A5 (enExample
JP2016080906A (ja
Inventor
哲二 太田
哲二 太田
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2014212884A priority Critical patent/JP6467187B2/ja
Priority to FR1559897A priority patent/FR3027445B1/fr
Publication of JP2016080906A publication Critical patent/JP2016080906A/ja
Publication of JP2016080906A5 publication Critical patent/JP2016080906A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators

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  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Astronomy & Astrophysics (AREA)
  • Sustainable Development (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Telescopes (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP2014212884A 2014-10-17 2014-10-17 支持装置および方法、計測装置、並びに物品の製造方法 Expired - Fee Related JP6467187B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014212884A JP6467187B2 (ja) 2014-10-17 2014-10-17 支持装置および方法、計測装置、並びに物品の製造方法
FR1559897A FR3027445B1 (fr) 2014-10-17 2015-10-16 Appareil et procede de support, appareil de mesure, et procede de fabrication d'article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014212884A JP6467187B2 (ja) 2014-10-17 2014-10-17 支持装置および方法、計測装置、並びに物品の製造方法

Publications (3)

Publication Number Publication Date
JP2016080906A JP2016080906A (ja) 2016-05-16
JP2016080906A5 JP2016080906A5 (enExample) 2017-11-30
JP6467187B2 true JP6467187B2 (ja) 2019-02-06

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JP2014212884A Expired - Fee Related JP6467187B2 (ja) 2014-10-17 2014-10-17 支持装置および方法、計測装置、並びに物品の製造方法

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JP (1) JP6467187B2 (enExample)
FR (1) FR3027445B1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10247907B2 (en) * 2016-05-25 2019-04-02 Northrop Grumman Systems Corporation Mirror mounting assembly
JP7093221B2 (ja) * 2018-04-26 2022-06-29 キヤノン株式会社 光学装置の調整方法、光学装置の製造方法、および、物品製造方法
JP7227810B2 (ja) * 2019-03-25 2023-02-22 キヤノン株式会社 光学装置、露光装置および物品製造方法
CN114047593B (zh) * 2022-01-14 2022-04-08 中国人民解放军63921部队 光学测量设备的轻量化SiC主镜支撑机构

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4080673B2 (ja) * 2000-07-06 2008-04-23 Ｈｏｙａ株式会社 眼鏡レンズの吸着方法およびその装置
JP4414856B2 (ja) * 2004-09-30 2010-02-10 大日本スクリーン製造株式会社 基板保管装置
US7221504B2 (en) * 2005-04-25 2007-05-22 Popil Nicholas B In-ground telescope with a stationary primary objective mirror having movable collectors
JP5501880B2 (ja) * 2010-07-13 2014-05-28 株式会社井口機工製作所 フリーボールベアリングおよびベアリング装置
JP5752165B2 (ja) * 2013-03-19 2015-07-22 キヤノン株式会社 支持装置および計測装置

Also Published As

Publication number Publication date
FR3027445B1 (fr) 2018-09-21
FR3027445A1 (enExample) 2016-04-22
JP2016080906A (ja) 2016-05-16

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