JP4283311B2 - 反射鏡装置 - Google Patents
反射鏡装置 Download PDFInfo
- Publication number
- JP4283311B2 JP4283311B2 JP2006524533A JP2006524533A JP4283311B2 JP 4283311 B2 JP4283311 B2 JP 4283311B2 JP 2006524533 A JP2006524533 A JP 2006524533A JP 2006524533 A JP2006524533 A JP 2006524533A JP 4283311 B2 JP4283311 B2 JP 4283311B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- cell
- reference cell
- reflecting mirror
- support mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 56
- 239000012530 fluid Substances 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000013519 translation Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
- G02B23/06—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors having a focussing action, e.g. parabolic mirror
Landscapes
- Physics & Mathematics (AREA)
- Astronomy & Astrophysics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Telescopes (AREA)
- Optical Elements Other Than Lenses (AREA)
Description
3 サブミラーセル
5 ミラーセル
6 規準セル
7 規準セル支持機構
8 力支持機構
13 アキシャルてこ
15 ラテラルてこ
19 アクチュエータ
23 流体圧支持機構
Claims (6)
- 複数の分割鏡を配置して形成する反射鏡と、この反射鏡を支持するミラーセルと、上記反射鏡と上記ミラーセルとの間に設けられた剛体であって、上記反射鏡の位置制御の基準面となる規準セルとを備えたことを特徴とする反射鏡装置。
- 請求項1に記載の反射鏡装置において、さらに上記規準セルと上記ミラーセルとの間に3つの規準セル支持機構を備え、この規準セル支持機構は、上記反射鏡のアキシャル軸方向及び円周方向について上記規準セルを拘束することを特徴とする反射鏡装置。
- 請求項2に記載の反射鏡装置において、さらに上記規準セルと上記ミラーセルとの間に、上記規準セルの自重変形をキャンセルするための力支持機構を備え、上記力支持機構は、ミラーセル上の支点に設けたアキシャルてこと、このアキシャルてこの端部を支点とし、一端を規準セルに連結したラテラルてことを具備したことを特徴とする反射鏡装置。
- 請求項1に記載の反射鏡装置において、上記規準セルはハニカム構造を有し、このハニカム構造の各セル毎に、複数の分割鏡を支持するサブミラーセルを備えたことを特徴とする反射鏡装置。
- 請求項4に記載の反射鏡装置において、さらに、上記サブミラーセルと上記分割鏡との間に、上記分割鏡を位置決めするアクチュエータを備えたたことを特徴とする反射鏡装置。
- 請求項1に記載の反射鏡装置において、さらに上記規準セルと上記ミラーセルとの間に、上記規準セルを支持する流体圧支持機構を備えたことを特徴とする反射鏡装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2004/010032 WO2006006240A1 (ja) | 2004-07-14 | 2004-07-14 | 反射鏡装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2006006240A1 JPWO2006006240A1 (ja) | 2008-04-24 |
JP4283311B2 true JP4283311B2 (ja) | 2009-06-24 |
Family
ID=35783606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006524533A Expired - Lifetime JP4283311B2 (ja) | 2004-07-14 | 2004-07-14 | 反射鏡装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7232232B2 (ja) |
EP (1) | EP1767972B1 (ja) |
JP (1) | JP4283311B2 (ja) |
WO (1) | WO2006006240A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2165231A2 (en) * | 2007-07-11 | 2010-03-24 | Université Libre de Bruxelles | Deformable mirror |
JP5862384B2 (ja) | 2012-03-14 | 2016-02-16 | 三菱電機株式会社 | 主鏡支持構造及び望遠鏡装置 |
DE102013204305A1 (de) * | 2013-03-13 | 2014-09-18 | Carl Zeiss Smt Gmbh | Anordnung zur Aktuierung wenigstens eines Elementes in einem optischen System |
US9314980B2 (en) * | 2013-03-19 | 2016-04-19 | Goodrich Corporation | High correctability deformable mirror |
JP7193397B2 (ja) * | 2019-03-27 | 2022-12-20 | 三菱電機株式会社 | 連結機構、反射鏡装置および支持ユニット |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4218114A (en) * | 1975-12-19 | 1980-08-19 | Bunch Jesse C | Heliostat apparatus |
DE3642128A1 (de) * | 1986-12-10 | 1988-06-16 | Zeiss Carl Fa | Unterstuetzungssystem fuer teleskopspiegel |
US4825062A (en) * | 1987-10-29 | 1989-04-25 | Kaman Aerospace Corporation | Extendable large aperture phased array mirror system |
JP3039607B2 (ja) * | 1994-12-20 | 2000-05-08 | 三菱電機株式会社 | 反射鏡支持機構 |
JP2002182124A (ja) | 2000-12-13 | 2002-06-26 | Mitsubishi Electric Corp | 副鏡揺動装置 |
FR2823573B1 (fr) * | 2001-04-13 | 2003-08-08 | Centre Nat Etd Spatiales | Dispositif de montage et de correction de la position d'un miroir s'etendant dans l'ombre du miroir et systeme optique equipe de ce dispositif |
JP3676294B2 (ja) * | 2001-12-17 | 2005-07-27 | 三菱電機株式会社 | 反射鏡アンテナの鏡面精度測定装置および鏡面制御システム |
JP4134566B2 (ja) | 2002-02-04 | 2008-08-20 | 株式会社ニコン | 光学要素の位置決め方法及び装置、投影光学系、並びに露光装置 |
-
2004
- 2004-07-14 EP EP04747498A patent/EP1767972B1/en not_active Expired - Fee Related
- 2004-07-14 WO PCT/JP2004/010032 patent/WO2006006240A1/ja not_active Application Discontinuation
- 2004-07-14 US US10/569,272 patent/US7232232B2/en not_active Expired - Lifetime
- 2004-07-14 JP JP2006524533A patent/JP4283311B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPWO2006006240A1 (ja) | 2008-04-24 |
US7232232B2 (en) | 2007-06-19 |
WO2006006240A1 (ja) | 2006-01-19 |
EP1767972B1 (en) | 2011-11-02 |
US20060221473A1 (en) | 2006-10-05 |
EP1767972A1 (en) | 2007-03-28 |
EP1767972A4 (en) | 2009-07-01 |
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