JP6464662B2 - 物理量検出振動素子、物理量センサー、電子機器および移動体 - Google Patents

物理量検出振動素子、物理量センサー、電子機器および移動体 Download PDF

Info

Publication number
JP6464662B2
JP6464662B2 JP2014219771A JP2014219771A JP6464662B2 JP 6464662 B2 JP6464662 B2 JP 6464662B2 JP 2014219771 A JP2014219771 A JP 2014219771A JP 2014219771 A JP2014219771 A JP 2014219771A JP 6464662 B2 JP6464662 B2 JP 6464662B2
Authority
JP
Japan
Prior art keywords
detection
physical quantity
terminal
support portion
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014219771A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016085178A5 (enrdf_load_stackoverflow
JP2016085178A (ja
Inventor
誠一郎 小倉
誠一郎 小倉
竜太 西澤
竜太 西澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2014219771A priority Critical patent/JP6464662B2/ja
Priority to US14/886,681 priority patent/US10295346B2/en
Publication of JP2016085178A publication Critical patent/JP2016085178A/ja
Publication of JP2016085178A5 publication Critical patent/JP2016085178A5/ja
Application granted granted Critical
Publication of JP6464662B2 publication Critical patent/JP6464662B2/ja
Priority to US16/378,967 priority patent/US10520312B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Gyroscopes (AREA)
JP2014219771A 2014-10-28 2014-10-28 物理量検出振動素子、物理量センサー、電子機器および移動体 Active JP6464662B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014219771A JP6464662B2 (ja) 2014-10-28 2014-10-28 物理量検出振動素子、物理量センサー、電子機器および移動体
US14/886,681 US10295346B2 (en) 2014-10-28 2015-10-19 Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object
US16/378,967 US10520312B2 (en) 2014-10-28 2019-04-09 Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014219771A JP6464662B2 (ja) 2014-10-28 2014-10-28 物理量検出振動素子、物理量センサー、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016085178A JP2016085178A (ja) 2016-05-19
JP2016085178A5 JP2016085178A5 (enrdf_load_stackoverflow) 2017-12-14
JP6464662B2 true JP6464662B2 (ja) 2019-02-06

Family

ID=55972887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014219771A Active JP6464662B2 (ja) 2014-10-28 2014-10-28 物理量検出振動素子、物理量センサー、電子機器および移動体

Country Status (1)

Country Link
JP (1) JP6464662B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6957921B2 (ja) 2017-03-23 2021-11-02 セイコーエプソン株式会社 振動デバイス、角速度センサー、電子機器および移動体

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2851040B1 (fr) * 2003-02-06 2005-03-18 Sagem Resonateur hemispherique a electrode de garde divisee
JP2013181856A (ja) * 2012-03-02 2013-09-12 Seiko Epson Corp 振動片、振動デバイス、物理量検出装置、および電子機器

Also Published As

Publication number Publication date
JP2016085178A (ja) 2016-05-19

Similar Documents

Publication Publication Date Title
JP6957921B2 (ja) 振動デバイス、角速度センサー、電子機器および移動体
US10520312B2 (en) Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object
JP6318590B2 (ja) 振動素子、振動子、振動デバイス、電子機器および移動体
US9568313B2 (en) Electronic device, electronic apparatus, and moving object
JP2017078669A (ja) 物理量センサー、電子機器および移動体
JP6318550B2 (ja) 振動片、角速度センサー、電子機器および移動体
CN112311348A (zh) 振动器件、电子设备以及移动体
JP6167474B2 (ja) センサーデバイスおよび電子機器
CN105424018A (zh) 物理量检测装置、电子设备、移动体
JP6442984B2 (ja) 物理量検出振動素子、物理量センサー、電子機器および移動体
JP2016176891A (ja) 角速度検出素子、角速度検出デバイス、電子機器および移動体
JP2016176892A (ja) 角速度検出素子、角速度検出デバイス、電子機器および移動体
CN105548597B (zh) 电子装置、电子设备以及移动体
JP6488640B2 (ja) 電子デバイス、電子機器および移動体
JP6464662B2 (ja) 物理量検出振動素子、物理量センサー、電子機器および移動体
JP2016176893A (ja) 角速度検出素子、角速度検出デバイス、電子機器および移動体
JP6492535B2 (ja) 物理量センサー、電子機器および移動体
JP6488639B2 (ja) 電子デバイス、電子機器および移動体
JP6766644B2 (ja) センサー素子、物理量センサー、電子機器および移動体
JP6492536B2 (ja) センサー素子、物理量センサー、電子機器および移動体
JP2015099061A (ja) 物理検出装置の製造方法、振動素子、物理検出装置および電子機器
JP2018169406A (ja) 電子部品搭載パッケージ、物理量センサー、電子機器および移動体
JP2016085185A (ja) センサー素子、物理量センサー、電子機器および移動体
JP6492537B2 (ja) センサー素子、物理量センサー、電子機器および移動体
JP2016178588A (ja) 振動素子、振動子、電子機器および移動体

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171027

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20171027

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180920

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180925

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20181122

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20181211

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20181224

R150 Certificate of patent or registration of utility model

Ref document number: 6464662

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150