JP2016085178A5 - - Google Patents
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- Publication number
- JP2016085178A5 JP2016085178A5 JP2014219771A JP2014219771A JP2016085178A5 JP 2016085178 A5 JP2016085178 A5 JP 2016085178A5 JP 2014219771 A JP2014219771 A JP 2014219771A JP 2014219771 A JP2014219771 A JP 2014219771A JP 2016085178 A5 JP2016085178 A5 JP 2016085178A5
- Authority
- JP
- Japan
- Prior art keywords
- physical quantity
- element according
- constant potential
- detection
- quantity detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 38
- 239000013078 crystal Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014219771A JP6464662B2 (ja) | 2014-10-28 | 2014-10-28 | 物理量検出振動素子、物理量センサー、電子機器および移動体 |
| US14/886,681 US10295346B2 (en) | 2014-10-28 | 2015-10-19 | Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object |
| US16/378,967 US10520312B2 (en) | 2014-10-28 | 2019-04-09 | Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014219771A JP6464662B2 (ja) | 2014-10-28 | 2014-10-28 | 物理量検出振動素子、物理量センサー、電子機器および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016085178A JP2016085178A (ja) | 2016-05-19 |
| JP2016085178A5 true JP2016085178A5 (enrdf_load_stackoverflow) | 2017-12-14 |
| JP6464662B2 JP6464662B2 (ja) | 2019-02-06 |
Family
ID=55972887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014219771A Active JP6464662B2 (ja) | 2014-10-28 | 2014-10-28 | 物理量検出振動素子、物理量センサー、電子機器および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6464662B2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6957921B2 (ja) | 2017-03-23 | 2021-11-02 | セイコーエプソン株式会社 | 振動デバイス、角速度センサー、電子機器および移動体 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2851040B1 (fr) * | 2003-02-06 | 2005-03-18 | Sagem | Resonateur hemispherique a electrode de garde divisee |
| JP2013181856A (ja) * | 2012-03-02 | 2013-09-12 | Seiko Epson Corp | 振動片、振動デバイス、物理量検出装置、および電子機器 |
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2014
- 2014-10-28 JP JP2014219771A patent/JP6464662B2/ja active Active