JP6461367B2 - 光センシング応用のための安全なレーザデバイス - Google Patents
光センシング応用のための安全なレーザデバイス Download PDFInfo
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- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18322—Position of the structure
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- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
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- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
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- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
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Description
1の半導体チップ上に2から6のメサを設けるステップ;
規定入力電力がメサへ供給される場合に、メサが同時にレーザ光を発するようにメサを電気的に並列に接続するステップと;
少なくとも1のメサの劣化が、規定入力電力で駆動されるときにレーザデバイスにより発せられるレーザパワーの減少をもたらすようにレーザデバイスを適応させるステップ。
110 半導体チップ
120 メサ
125 レーザファセット
131 第1のコンタクトエリア
132 第2のコンタクトエリア
135 絶縁層
140 トレンチ
160 ボンディングエリア
210 ボトム電極
220 リング電極
230 ボトムDBR
240 トップDBR
250 閉じ込め層
260 アクティブ層
270 基板
280 保護コーティング
300 光学センサ
310 透過窓
315 放射レーザ光
317 反射レーザ光
319 制御信号
320 駆動回路
350 光検出器
360 評価器
400 モバイル通信デバイス
510 メサを設けるステップ
520 メサを電気的に接続するステップ
530 レーザデバイスを適応させるステップ
Claims (12)
- 1の半導体チップ上に設けられる2から6のメサを有するレーザデバイスであって、前記メサの各々は、規定入力電力で駆動されるときに発光波長のレーザ光を発するように構成される垂直キャビティ面発光レーザの光学共振器を埋め込み、前記メサは電気的に並列に接続され、各メサは半導体空気界面を有し、前記半導体空気界面は、前記規定入力電力で駆動されるときのレーザキャビティにおける光学場の定常波パターンの波節に配置される、レーザ装置。
- 1の半導体チップ上に設けられる2から6のメサを有するレーザデバイスであって、前記メサの各々は、規定入力電力で駆動されるときに発光波長のレーザ光を発するように構成される垂直キャビティ面発光レーザの光学共振器を埋め込み、前記メサは電気的に並列に接続され、各メサが保護コーティングを有し、前記垂直キャビティ面発光レーザのアウトカップリング誘電体ブラッグ反射器の上層と前記保護コーティングの間の界面は、前記規定入力電力で駆動されるときのレーザキャビティにおける光学場の定常波パターンの波節に配置され、前記保護コーティングが前記アウトカップリング誘電体ブラッグ反射器の反射性を低減する、レーザデバイス。
- 前記メサは、前記規定入力電力で駆動されるときにリング状レーザモードが選択されるように構成される、請求項1に記載のレーザデバイス。
- 前記メサは、前記規定入力電力で駆動されるときにリング状の電流が注入される半導体層構造を有する、請求項3に記載のレーザデバイス。
- 前記保護コーティングは、前記規定入力電力で駆動されるときにリング状レーザモードが選択される構造を有する、請求項2に記載のレーザデバイス。
- 各メサは、トレンチにより囲まれる、請求項1から請求項5に記載のレーザデバイス。
- 前記レーザデバイスが前記メサを電気的に駆動するための駆動回路をさらに有し、前記駆動回路が前記メサへ前記規定入力電力を供給するように適応される、請求項1から6のいずれか一項に記載のレーザデバイスを有するレーザモジュール。
- 請求項7に記載のレーザモジュールを有する光学センサ。
- 前記レーザデバイスにより発せられるレーザパルスの反射レーザ光を受光するように適応される少なくとも1の光検出器を有する、請求項8に記載の光学センサであって、前記光学センサが、前記レーザパルスの反射レーザ光を識別するように適応される評価器をさらに有し、前記評価器がさらに、前記レーザパルスの放射時点と当該レーザパルスがオブジェクトにより反射された反射レーザ光の受光時点との間の差である飛行時間を決定するように適応される、光学センサ。
- 請求項8又は9に記載の少なくとも1の光学センサを有するモバイル通信デバイス。
- レーザデバイスを製造する方法であって、
1の半導体チップ上に2から6のメサを設けるステップと、
前記メサを電気的に並列に接続するステップであって、前記メサの各々は、規定入力電力で駆動されるときに発光波長のレーザ光を発するように構成される垂直キャビティ面発光レーザの光学共振器を埋め込み、各メサが半導体空気界面を有する、ステップと、
を有し、
前記規定入力電力で駆動されるときのレーザキャビティにおける光学場の定常波パターンの波節に前記半導体空気界面を配置するステップを特徴とする、
方法。 - レーザデバイスを製造する方法であって、
1の半導体チップ上に2から6のメサを設けるステップであって、前記メサの各々は、規定入力電力で駆動されるときに発光波長のレーザ光を発するように構成される垂直キャビティ面発光レーザの光学共振器を埋め込み、各メサが保護コーティングを有する、ステップと、
前記メサを電気的に並列に接続するステップと、
を有し、
前記メサを設けるステップが、前記規定入力電力で駆動されるときのレーザキャビティにおける光学場の定常波パターンの波節に、前記垂直キャビティ面発光レーザのアウトカップリング誘電体ブラッグ反射器の上層と前記保護コーティングの間の界面を配置するステップを有し、
前記保護コーティングが前記アウトカップリング誘電体ブラッグ反射器の反射性を低減する、
方法。
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PCT/EP2016/056752 WO2016162236A1 (en) | 2015-04-10 | 2016-03-29 | Safe laser device for optical sensing applications |
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EP3382828A1 (en) * | 2017-03-31 | 2018-10-03 | Koninklijke Philips N.V. | Inherently safe laser arrangement comprising a vertical cavity surface emitting laser |
EP3447862A1 (en) * | 2017-08-23 | 2019-02-27 | Koninklijke Philips N.V. | Vcsel array with common wafer level integrated optical device |
EP3493337A1 (en) * | 2017-11-30 | 2019-06-05 | Koninklijke Philips N.V. | Vertical cavity surface emitting laser (vcsel) device with improved reliability |
EP3493339B1 (en) * | 2017-12-04 | 2022-11-09 | ams AG | Semiconductor device and method for time-of-flight and proximity measurements |
EP3496216A1 (en) * | 2017-12-08 | 2019-06-12 | Koninklijke Philips N.V. | Segmented vertical cavity surface emitting laser |
EP3540879A1 (en) * | 2018-03-15 | 2019-09-18 | Koninklijke Philips N.V. | Vertical cavity surface emitting laser device with integrated tunnel junction |
JP7021618B2 (ja) * | 2018-08-10 | 2022-02-17 | オムロン株式会社 | レーザダイオードアレイデバイスの製造方法、レーザ発光回路及び測距装置 |
JP6724961B2 (ja) * | 2018-09-25 | 2020-07-15 | 富士ゼロックス株式会社 | 発光素子アレイ |
US10581225B1 (en) * | 2018-09-27 | 2020-03-03 | Avago Technologies International Sales Pte. Limited | Optical devices with bandwidth enhancing structures |
CN111446345A (zh) | 2019-01-16 | 2020-07-24 | 隆达电子股份有限公司 | 发光元件的封装结构 |
JP7293697B2 (ja) * | 2019-02-06 | 2023-06-20 | 富士フイルムビジネスイノベーション株式会社 | 発光装置、光学装置および情報処理装置 |
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US11088510B2 (en) * | 2019-11-05 | 2021-08-10 | Ii-Vi Delaware, Inc. | Moisture control in oxide-confined vertical cavity surface-emitting lasers |
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JP2005191343A (ja) * | 2003-12-26 | 2005-07-14 | Ricoh Co Ltd | 面発光レーザの製造方法および面発光レーザおよび光伝送システム |
JP4821961B2 (ja) * | 2005-06-15 | 2011-11-24 | 富士ゼロックス株式会社 | 面発光半導体レーザ装置およびその製造方法 |
JP4919628B2 (ja) * | 2005-07-28 | 2012-04-18 | 株式会社リコー | 面発光レーザ及び面発光レーザアレイ及び光書き込みシステム及び光伝送システム |
GB2434914A (en) | 2006-02-03 | 2007-08-08 | Univ College Cork Nat Univ Ie | Vertical cavity surface emitting laser device |
RU80158U1 (ru) * | 2008-07-18 | 2009-01-27 | Закрытое акционерное общество "Межрегиональный центр инновационных технологий" (ЗАО "МЦИТ") | Лазерный маяк курсоглиссадной системы и лазерный излучатель |
US8995493B2 (en) | 2009-02-17 | 2015-03-31 | Trilumina Corp. | Microlenses for multibeam arrays of optoelectronic devices for high frequency operation |
US20130262326A1 (en) * | 2009-02-28 | 2013-10-03 | Thomson Reuters (Scientific) Inc. | Intellectual Property Annuity/Maintenance Payment and Mistaken Abandonment Prevention Systems |
JP5434421B2 (ja) * | 2009-09-16 | 2014-03-05 | 富士ゼロックス株式会社 | 面発光型半導体レーザ、面発光型半導体レーザ装置、光伝送装置および情報処理装置 |
EP2827791A1 (en) * | 2012-03-21 | 2015-01-28 | Tria Beauty, Inc. | Dermatological treatment device with one or more vertical cavity surface emitting laser (vcsel) |
JP2014017448A (ja) | 2012-07-11 | 2014-01-30 | Ricoh Co Ltd | 面発光レーザ、面発光レーザアレイ、光走査装置及び画像形成装置 |
JP2014022667A (ja) * | 2012-07-20 | 2014-02-03 | Ricoh Co Ltd | 面発光レーザ素子及び原子発振器 |
US9124061B2 (en) * | 2013-05-14 | 2015-09-01 | Spectralus Corporation | Projection RGB-laser light source with stabilized color balance |
WO2015055600A1 (en) * | 2013-10-16 | 2015-04-23 | Koninklijke Philips N.V. | Compact laser device |
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US10181701B2 (en) | 2019-01-15 |
JP2018508122A (ja) | 2018-03-22 |
EP3281262A1 (en) | 2018-02-14 |
RU2017134125A3 (ja) | 2019-08-01 |
EP3281262B1 (en) | 2019-06-26 |
RU2712939C2 (ru) | 2020-02-03 |
RU2017134125A (ru) | 2019-04-03 |
CN107466431A (zh) | 2017-12-12 |
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