JP6459503B2 - 真空バルブ - Google Patents

真空バルブ Download PDF

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Publication number
JP6459503B2
JP6459503B2 JP2014262032A JP2014262032A JP6459503B2 JP 6459503 B2 JP6459503 B2 JP 6459503B2 JP 2014262032 A JP2014262032 A JP 2014262032A JP 2014262032 A JP2014262032 A JP 2014262032A JP 6459503 B2 JP6459503 B2 JP 6459503B2
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JP
Japan
Prior art keywords
valve body
vacuum
input operation
command
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2014262032A
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English (en)
Japanese (ja)
Other versions
JP2016121751A (ja
Inventor
中村　雅哉
雅哉 中村
小崎　純一郎
純一郎 小崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2014262032A priority Critical patent/JP6459503B2/ja
Priority to CN201510837440.7A priority patent/CN105736793B/zh
Publication of JP2016121751A publication Critical patent/JP2016121751A/ja
Application granted granted Critical
Publication of JP6459503B2 publication Critical patent/JP6459503B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/046—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor with electric means, e.g. electric switches, to control the motor or to control a clutch between the valve and the motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
    • F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Details Of Valves (AREA)
  • Cold Air Circulating Systems And Constructional Details In Refrigerators (AREA)
  • Control Of Fluid Pressure (AREA)
JP2014262032A 2014-12-25 2014-12-25 真空バルブ Active JP6459503B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014262032A JP6459503B2 (ja) 2014-12-25 2014-12-25 真空バルブ
CN201510837440.7A CN105736793B (zh) 2014-12-25 2015-11-26 真空阀

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014262032A JP6459503B2 (ja) 2014-12-25 2014-12-25 真空バルブ

Publications (2)

Publication Number Publication Date
JP2016121751A JP2016121751A (ja) 2016-07-07
JP6459503B2 true JP6459503B2 (ja) 2019-01-30

Family

ID=56296237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014262032A Active JP6459503B2 (ja) 2014-12-25 2014-12-25 真空バルブ

Country Status (2)

Country Link
JP (1) JP6459503B2 (zh)
CN (1) CN105736793B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018013109A (ja) * 2016-07-22 2018-01-25 株式会社島津製作所 排気システムおよび制御装置
JP6921374B2 (ja) * 2016-12-20 2021-08-18 株式会社島津製作所 真空バルブ
JP6996289B2 (ja) * 2016-12-26 2022-01-17 株式会社島津製作所 バルブ装置
JP2018105374A (ja) * 2016-12-26 2018-07-05 株式会社島津製作所 真空バルブ
EP3372881A1 (de) * 2017-03-07 2018-09-12 VAT Holding AG Optimierte druckregelung für und mit einem vakuumventil
JP6969465B2 (ja) * 2018-03-20 2021-11-24 株式会社島津製作所 目標開度推定器および圧力調整真空バルブ
JP7173545B2 (ja) * 2018-12-27 2022-11-16 株式会社ほくつう 水栓装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4095733B2 (ja) * 1998-12-01 2008-06-04 シーケーディ株式会社 真空圧力制御システム
DE102007034927A1 (de) * 2007-07-24 2009-02-05 Vat Holding Ag Verfahren zur Steuerung oder Regelung eines Vakuumventils
US7731151B2 (en) * 2007-09-27 2010-06-08 Kenneth K L Lee Pendulum vacuum gate valve
JP5357679B2 (ja) * 2009-09-24 2013-12-04 入江工研株式会社 コンダクタンスバルブ及び真空ポンプ
JP4714835B1 (ja) * 2009-12-01 2011-06-29 プログレッシオ合同会社 真空用ゲートバルブ
JP3157483U (ja) * 2009-12-04 2010-02-18 島津エミット株式会社 電動バルブアクチュエータ
JP5515726B2 (ja) * 2009-12-24 2014-06-11 株式会社村田製作所 開閉バルブ
JP5602493B2 (ja) * 2010-05-19 2014-10-08 Ｃｋｄ株式会社 真空弁
CN202469147U (zh) * 2012-02-29 2012-10-03 天津祥嘉流体控制系统有限公司 全能型多转式电动执行机构
JP5044725B1 (ja) * 2012-04-27 2012-10-10 株式会社ブイテックス シール材のつぶし量が制御可能なゲートバルブ
CN102937206A (zh) * 2012-11-01 2013-02-20 青岛瑞丰气体有限公司 一种电子真空阀控制器

Also Published As

Publication number Publication date
CN105736793A (zh) 2016-07-06
CN105736793B (zh) 2019-01-22
JP2016121751A (ja) 2016-07-07

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