JP6457707B1 - プラズマ処理装置 - Google Patents
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- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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Abstract
Description
本発明の1つの側面は、プラズマ処理装置に係り、前記プラズマ処理装置は、第1入力端子、第2入力端子、第1出力端子および第2出力端子を有するバランと、真空容器と、前記第1出力端子に電気的に接続された第1電極と、前記第2出力端子に電気的に接続された第2電極と、前記真空容器と接地とを電気的に接続する接続部と、を備え、前記接続部は、インダクタを含む。
図3A、3B、4A、4B、5A、5B、6Aおよび6Bにおいて、Rp−jXp(符号160で示されている)は、真空容器110の内部空間にプラズマが発生している状態で第1出力端子211および第2出力端子212の側から第1電極106および第2電極111の側(本体10の側)を見たときのインピーダンス(ブロッキングキャパシタ104のリアクタンスを含む)を示している。Rpは抵抗成分、−Xpはリアクタンス成分を示している。また、図3A、3B、4A、4B、5A、5B、6Aおよび6Bにおいて、Xは、バラン103の第1コイル221のインピーダンスのリアクタンス成分(インダクタンス成分)を示している。
第1接続部155を設けることによって高いアイソレーション性能が得られる。一方、上記のように、アイソレーション性能が高いと、高周波によって形成される電界が第1電極106と第2電極111との間の空間に集中するので、プラズマを着火しにくい場合がある。図5B、6A、6Bを参照して説明する接続部155の第2構成例、第3構成例、第4構成例は、プラズマの着火を考慮したものである。
Claims (17)
- 第1入力端子、第2入力端子、第1出力端子および第2出力端子を有するバランと、
真空容器と、
前記第1出力端子に電気的に接続された第1電極と、
前記第2出力端子に電気的に接続された第2電極と、
前記真空容器と接地とを電気的に接続する接続部と、を備え、
前記接続部は、インダクタを含む、
ことを特徴とするプラズマ処理装置。 - 第1入力端子、第2入力端子、第1出力端子および第2出力端子を有するバランと、
接地された真空容器と、
前記第1出力端子に電気的に接続された第1電極と、
前記第2出力端子に電気的に接続された第2電極と、
前記第2入力端子と接地とを電気的に接続する接続部と、を備え、
前記接続部は、インダクタを含む、
ことを特徴とするプラズマ処理装置。 - 第1入力端子、第2入力端子、第1出力端子および第2出力端子を有するバランと、
真空容器と、
前記第1出力端子に電気的に接続された第1電極と、
前記第2出力端子に電気的に接続された第2電極と、
前記真空容器と前記第2入力端子とを電気的に接続する接続部と、を備え、
前記接続部は、インダクタを含む、
ことを特徴とするプラズマ処理装置。 - 前記接続部は、前記インダクタの2つの端子間を短絡可能なスイッチを更に含む、
ことを特徴とする請求項1乃至3のいずれか1項に記載のプラズマ処理装置。 - 前記スイッチは、リレーを含む、
ことを特徴とする請求項4に記載のプラズマ処理装置。 - プラズマを着火する際に前記スイッチを導通状態にし、プラズマが着火した後に前記スイッチを非導通状態にするコントローラを更に備える、
ことを特徴とする請求項4又は5に記載のプラズマ処理装置。 - 前記インダクタのインダクタンスが可変である、
ことを特徴とする請求項1乃至6のいずれか1項に記載のプラズマ処理装置。 - 前記インダクタのインダクタンスが可変であり、
前記プラズマ処理装置は、プラズマの着火後にプラズマの着火前よりも前記インダクタンスを大きくするコントローラを更に備える、
ことを特徴とする請求項1乃至3のいずれか1項に記載のプラズマ処理装置。 - 前記第2電極は、前記第1電極を全周にわたって取り囲むように配置されている、
ことを特徴とする請求項1乃至8のいずれか1項に記載のプラズマ処理装置。 - 前記第2電極は、筒形状を有する、
ことを特徴とする請求項9に記載のプラズマ処理装置。 - 前記第1電極および前記第2電極は、同軸構造を構成するように配置されている、
ことを特徴とする請求項10に記載のプラズマ処理装置。 - 前記第2電極は、前記第1電極の表面および側面に対向する部分を含み、前記第1電極の前記表面および前記側面を取り囲むように配置されている、
ことを特徴とする請求項1乃至11のいずれか1項に記載のプラズマ処理装置。 - 前記第1電極は、カソードであり、前記第2電極は、アノードである、
ことを特徴とする請求項1乃至12のいずれか1項に記載のプラズマ処理装置。 - 前記第1出力端子と前記第1電極とがブロッキングキャパシタを介して電気的に接続されている、
ことを特徴とする請求項1乃至13のいずれか1項に記載のプラズマ処理装置。 - エッチング装置として構成されている、
ことを特徴とする請求項1乃至14のいずれか1項に記載のプラズマ処理装置。 - スパッタリング装置として構成されている、
ことを特徴とする請求項1乃至14のいずれか1項に記載のプラズマ処理装置。 - 高周波電源と、
前記高周波電源と前記バランとの間に配置されたインピーダンス整合回路と、
を更に備えることを特徴とする請求項1乃至16のいずれか1項に記載のプラズマ処理装置。
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PCT/JP2017/023603 WO2019003309A1 (ja) | 2017-06-27 | 2017-06-27 | プラズマ処理装置 |
PCT/JP2017/023611 WO2019003312A1 (ja) | 2017-06-27 | 2017-06-27 | プラズマ処理装置 |
JPPCT/JP2017/023611 | 2017-06-27 | ||
JPPCT/JP2017/023603 | 2017-06-27 | ||
JP2018017554 | 2018-02-02 | ||
JP2018017554 | 2018-02-02 | ||
PCT/JP2018/024150 WO2019004188A1 (ja) | 2017-06-27 | 2018-06-26 | プラズマ処理装置 |
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JPWO2019004188A1 JPWO2019004188A1 (ja) | 2019-06-27 |
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US (2) | US11569070B2 (ja) |
EP (2) | EP3648552B1 (ja) |
JP (1) | JP6457707B1 (ja) |
KR (1) | KR102257134B1 (ja) |
CN (1) | CN110800377B (ja) |
PL (1) | PL3648552T3 (ja) |
SG (1) | SG11201912569UA (ja) |
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PL3648551T3 (pl) | 2017-06-27 | 2021-12-06 | Canon Anelva Corporation | Urządzenie do obróbki plazmowej |
KR102257134B1 (ko) * | 2017-06-27 | 2021-05-26 | 캐논 아네르바 가부시키가이샤 | 플라스마 처리 장치 |
WO2019004192A1 (ja) * | 2017-06-27 | 2019-01-03 | キヤノンアネルバ株式会社 | プラズマ処理装置 |
EP3648550B1 (en) * | 2017-06-27 | 2021-06-02 | Canon Anelva Corporation | Plasma treatment device |
KR102439024B1 (ko) * | 2018-06-26 | 2022-09-02 | 캐논 아네르바 가부시키가이샤 | 플라스마 처리 장치, 플라스마 처리 방법, 프로그램, 및 메모리 매체 |
JP2023061727A (ja) * | 2021-10-20 | 2023-05-02 | 東京エレクトロン株式会社 | プラズマ処理装置 |
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JPH02156081A (ja) * | 1988-12-09 | 1990-06-15 | Tokuda Seisakusho Ltd | スパッタ装置 |
JPH02156083A (ja) * | 1988-12-09 | 1990-06-15 | Tokuda Seisakusho Ltd | スパッタ装置 |
JP2009302566A (ja) * | 2009-09-16 | 2009-12-24 | Masayoshi Murata | トランス型平衡不平衡変換装置を備えたプラズマ表面処理装置 |
JP2016225376A (ja) * | 2015-05-28 | 2016-12-28 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置およびプラズマ処理方法 |
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EP4017223A1 (en) | 2022-06-22 |
EP3648552B1 (en) | 2022-04-13 |
EP3648552A4 (en) | 2020-11-25 |
SG11201912569UA (en) | 2020-01-30 |
JPWO2019004188A1 (ja) | 2019-06-27 |
KR20200018658A (ko) | 2020-02-19 |
US11569070B2 (en) | 2023-01-31 |
US11756773B2 (en) | 2023-09-12 |
TW201906498A (zh) | 2019-02-01 |
TWI693860B (zh) | 2020-05-11 |
KR102257134B1 (ko) | 2021-05-26 |
CN110800377A (zh) | 2020-02-14 |
CN110800377B (zh) | 2022-04-29 |
WO2019004188A1 (ja) | 2019-01-03 |
US20220051878A1 (en) | 2022-02-17 |
PL3648552T3 (pl) | 2022-06-13 |
EP3648552A1 (en) | 2020-05-06 |
US20200126766A1 (en) | 2020-04-23 |
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