JP6453882B2 - 熱処理チャンバのための支持シリンダー - Google Patents

熱処理チャンバのための支持シリンダー Download PDF

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Publication number
JP6453882B2
JP6453882B2 JP2016534576A JP2016534576A JP6453882B2 JP 6453882 B2 JP6453882 B2 JP 6453882B2 JP 2016534576 A JP2016534576 A JP 2016534576A JP 2016534576 A JP2016534576 A JP 2016534576A JP 6453882 B2 JP6453882 B2 JP 6453882B2
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Japan
Prior art keywords
support cylinder
peripheral surface
inner peripheral
substrate
optically transparent
Prior art date
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JP2016534576A
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Japanese (ja)
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JP2016534558A (ja
JP2016534558A5 (enExample
Inventor
メヘラン ベジャット，
メヘラン ベジャット，
アーロン ミュアー ハンター，
アーロン ミュアー ハンター，
ジョゼフ エム． ラニッシュ，
ジョゼフ エム． ラニッシュ，
ノーマン エル． タム，
ノーマン エル． タム，
ジェフリー トビン，
ジェフリー トビン，
ジーピン リー，
ジーピン リー，
マーティン トラン，
マーティン トラン，
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Applied Materials Inc
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Applied Materials Inc
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Publication of JP2016534558A5 publication Critical patent/JP2016534558A5/ja
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Publication of JP6453882B2 publication Critical patent/JP6453882B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Vapour Deposition (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Mechanical Engineering (AREA)
JP2016534576A 2013-08-15 2014-06-12 熱処理チャンバのための支持シリンダー Active JP6453882B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361866379P 2013-08-15 2013-08-15
US61/866,379 2013-08-15
US14/298,389 US9385004B2 (en) 2013-08-15 2014-06-06 Support cylinder for thermal processing chamber
US14/298,389 2014-06-06
PCT/US2014/042025 WO2015023352A1 (en) 2013-08-15 2014-06-12 Support cylinder for thermal processing chamber

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018233391A Division JP6688865B2 (ja) 2013-08-15 2018-12-13 熱処理チャンバのための支持シリンダー

Publications (3)

Publication Number Publication Date
JP2016534558A JP2016534558A (ja) 2016-11-04
JP2016534558A5 JP2016534558A5 (enExample) 2017-07-27
JP6453882B2 true JP6453882B2 (ja) 2019-01-16

Family

ID=52467142

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016534576A Active JP6453882B2 (ja) 2013-08-15 2014-06-12 熱処理チャンバのための支持シリンダー
JP2018233391A Active JP6688865B2 (ja) 2013-08-15 2018-12-13 熱処理チャンバのための支持シリンダー

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018233391A Active JP6688865B2 (ja) 2013-08-15 2018-12-13 熱処理チャンバのための支持シリンダー

Country Status (6)

Country Link
US (3) US9385004B2 (enExample)
JP (2) JP6453882B2 (enExample)
KR (2) KR101966566B1 (enExample)
CN (3) CN105453248B (enExample)
TW (3) TWI688040B (enExample)
WO (1) WO2015023352A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11201508512PA (en) * 2013-05-23 2015-12-30 Applied Materials Inc A coated liner assembly for a semiconductor processing chamber
US9385004B2 (en) * 2013-08-15 2016-07-05 Applied Materials, Inc. Support cylinder for thermal processing chamber
US9330955B2 (en) * 2013-12-31 2016-05-03 Applied Materials, Inc. Support ring with masked edge
KR102709229B1 (ko) * 2015-12-07 2024-09-23 어플라이드 머티어리얼스, 인코포레이티드 병합형 커버 링
TWM573071U (zh) * 2017-03-06 2019-01-11 美商應用材料股份有限公司 用於熱處理腔室的旋轉器蓋與用於處理基板的設備
US11004704B2 (en) 2017-03-17 2021-05-11 Applied Materials, Inc. Finned rotor cover
CN110071064A (zh) * 2018-01-22 2019-07-30 上海新昇半导体科技有限公司 一种改善外延片污染印记的方法
KR102723235B1 (ko) 2018-03-13 2024-10-31 어플라이드 머티어리얼스, 인코포레이티드 플라즈마 분무 코팅을 갖는 지지 링
CN109148353A (zh) * 2018-08-15 2019-01-04 深圳市华星光电技术有限公司 一种基板承托盘
JP7178823B2 (ja) * 2018-08-17 2022-11-28 東京応化工業株式会社 基板加熱装置および基板処理システム
DE102019104433A1 (de) * 2019-02-21 2020-08-27 Aixtron Se CVD-Reaktor mit Mitteln zur lokalen Beeinflussung der Suszeptortemperatur
JP7461214B2 (ja) * 2020-05-19 2024-04-03 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置
KR102787323B1 (ko) 2020-09-24 2025-03-27 삼성전자주식회사 플라즈마 처리 장치 및 플라즈마 처리 방법
US20240247404A1 (en) * 2023-01-25 2024-07-25 Applied Materials, Inc. Pre-heat rings and processing chambers including black quartz, and related methods

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US960555A (en) * 1906-02-08 1910-06-07 Joseph Johnson Basket.
US5960555A (en) 1996-07-24 1999-10-05 Applied Materials, Inc. Method and apparatus for purging the back side of a substrate during chemical vapor processing
US6395363B1 (en) * 1996-11-05 2002-05-28 Applied Materials, Inc. Sloped substrate support
US6133152A (en) 1997-05-16 2000-10-17 Applied Materials, Inc. Co-rotating edge ring extension for use in a semiconductor processing chamber
US6200388B1 (en) 1998-02-11 2001-03-13 Applied Materials, Inc. Substrate support for a thermal processing chamber
US6048403A (en) * 1998-04-01 2000-04-11 Applied Materials, Inc. Multi-ledge substrate support for a thermal processing chamber
JP2000256037A (ja) * 1999-03-05 2000-09-19 Tosoh Corp 透明部を有する黒色石英ガラス及びその製造方法
JP4969732B2 (ja) * 2001-03-14 2012-07-04 東京エレクトロン株式会社 加熱装置、熱処理装置及びランプ冷却方法
TW200307652A (en) 2002-04-04 2003-12-16 Tosoh Corp Quartz glass thermal sprayed parts and method for producing the same
US7704327B2 (en) * 2002-09-30 2010-04-27 Applied Materials, Inc. High temperature anneal with improved substrate support
US7241345B2 (en) 2003-06-16 2007-07-10 Applied Materials, Inc. Cylinder for thermal processing chamber
JP4348542B2 (ja) * 2004-08-24 2009-10-21 信越半導体株式会社 石英治具及び半導体製造装置
JP2007042844A (ja) * 2005-08-03 2007-02-15 Furukawa Co Ltd 気相成長装置及びサセプタ
US10843954B2 (en) 2006-12-05 2020-11-24 Shin-Etsu Quartz Products Co., Ltd. Synthetic opaque quartz glass and method for producing the same
US7378618B1 (en) * 2006-12-14 2008-05-27 Applied Materials, Inc. Rapid conductive cooling using a secondary process plane
JP5048445B2 (ja) * 2007-10-11 2012-10-17 信越石英株式会社 透明層付き黒色合成石英ガラス
US8434937B2 (en) * 2008-05-30 2013-05-07 Applied Materials, Inc. Method and apparatus for detecting the substrate temperature in a laser anneal system
JP5441243B2 (ja) * 2009-02-24 2014-03-12 信越石英株式会社 赤外線透過性部材の熱処理用石英ガラス治具
JP5545090B2 (ja) * 2010-07-13 2014-07-09 株式会社Ｓｕｍｃｏ ウェーハ支持治具及び軸状部材並びにシリコンウェーハの熱処理方法
JP5583082B2 (ja) * 2011-06-21 2014-09-03 信越石英株式会社 透明層付き黒色合成石英ガラスの製造方法
US9385004B2 (en) * 2013-08-15 2016-07-05 Applied Materials, Inc. Support cylinder for thermal processing chamber

Also Published As

Publication number Publication date
TW201816932A (zh) 2018-05-01
US20150050819A1 (en) 2015-02-19
US20160300752A1 (en) 2016-10-13
US10128144B2 (en) 2018-11-13
TWI688040B (zh) 2020-03-11
CN107342253A (zh) 2017-11-10
TWI656598B (zh) 2019-04-11
WO2015023352A1 (en) 2015-02-19
KR101713078B1 (ko) 2017-03-09
CN105453248B (zh) 2019-12-10
TW201507056A (zh) 2015-02-16
JP2016534558A (ja) 2016-11-04
TW201931516A (zh) 2019-08-01
JP2019071439A (ja) 2019-05-09
CN107342253B (zh) 2021-12-28
TWI604559B (zh) 2017-11-01
KR101966566B1 (ko) 2019-04-05
US9659809B2 (en) 2017-05-23
KR20160044002A (ko) 2016-04-22
US9385004B2 (en) 2016-07-05
US20170263493A1 (en) 2017-09-14
JP6688865B2 (ja) 2020-04-28
CN105453248A (zh) 2016-03-30
KR20170026647A (ko) 2017-03-08
CN107731718B (zh) 2022-05-17
CN107731718A (zh) 2018-02-23

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