JP6447131B2 - 露光装置、露光方法、及びデバイス製造方法 - Google Patents

露光装置、露光方法、及びデバイス製造方法 Download PDF

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Publication number
JP6447131B2
JP6447131B2 JP2014550223A JP2014550223A JP6447131B2 JP 6447131 B2 JP6447131 B2 JP 6447131B2 JP 2014550223 A JP2014550223 A JP 2014550223A JP 2014550223 A JP2014550223 A JP 2014550223A JP 6447131 B2 JP6447131 B2 JP 6447131B2
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Prior art keywords
substrate
liquid
space
exposure
optical
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Japanese (ja)
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JP2015514304A (ja
JP2015514304A5 (https=
Inventor
真路 佐藤
真路 佐藤
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Nikon Corp
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Nikon Corp
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2014550223A 2012-04-10 2013-03-22 露光装置、露光方法、及びデバイス製造方法 Active JP6447131B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261622182P 2012-04-10 2012-04-10
US61/622,182 2012-04-10
US13/800,448 2013-03-13
US13/800,448 US9268231B2 (en) 2012-04-10 2013-03-13 Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium
PCT/JP2013/059432 WO2013153965A1 (en) 2012-04-10 2013-03-22 Liquid immersion member and exposure apparatus

Related Child Applications (1)

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JP2018109154A Division JP6593493B2 (ja) 2012-04-10 2018-06-07 露光装置、及びデバイス製造方法

Publications (3)

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JP2015514304A JP2015514304A (ja) 2015-05-18
JP2015514304A5 JP2015514304A5 (https=) 2016-04-14
JP6447131B2 true JP6447131B2 (ja) 2019-01-09

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JP2014550223A Active JP6447131B2 (ja) 2012-04-10 2013-03-22 露光装置、露光方法、及びデバイス製造方法
JP2018109154A Active JP6593493B2 (ja) 2012-04-10 2018-06-07 露光装置、及びデバイス製造方法
JP2019175377A Pending JP2019215586A (ja) 2012-04-10 2019-09-26 液浸部材、及び、露光装置

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JP2019175377A Pending JP2019215586A (ja) 2012-04-10 2019-09-26 液浸部材、及び、露光装置

Country Status (8)

Country Link
US (5) US9268231B2 (https=)
EP (1) EP2836876B1 (https=)
JP (3) JP6447131B2 (https=)
KR (1) KR102147071B1 (https=)
CN (2) CN108614393A (https=)
HK (2) HK1205279A1 (https=)
TW (3) TWI606305B (https=)
WO (1) WO2013153965A1 (https=)

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Also Published As

Publication number Publication date
TWI668520B (zh) 2019-08-11
HK1205279A1 (zh) 2015-12-11
US10768537B2 (en) 2020-09-08
TW201740219A (zh) 2017-11-16
JP2015514304A (ja) 2015-05-18
US9927724B2 (en) 2018-03-27
TWI606305B (zh) 2017-11-21
WO2013153965A1 (en) 2013-10-17
HK1257550A1 (zh) 2019-10-25
US20190391503A1 (en) 2019-12-26
CN104508560A (zh) 2015-04-08
US9557654B2 (en) 2017-01-31
CN104508560B (zh) 2018-05-22
JP2018136581A (ja) 2018-08-30
US20160161860A1 (en) 2016-06-09
KR102147071B1 (ko) 2020-08-24
HK1207908A1 (en) 2016-02-12
US9268231B2 (en) 2016-02-23
US20170108786A1 (en) 2017-04-20
EP2836876A1 (en) 2015-02-18
US10409177B2 (en) 2019-09-10
KR20150003276A (ko) 2015-01-08
US20130265556A1 (en) 2013-10-10
JP6593493B2 (ja) 2019-10-23
CN108614393A (zh) 2018-10-02
TW201348890A (zh) 2013-12-01
US20180217511A1 (en) 2018-08-02
TW201935146A (zh) 2019-09-01
JP2019215586A (ja) 2019-12-19
EP2836876B1 (en) 2020-08-05

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