TWI606305B - 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體 - Google Patents
液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體 Download PDFInfo
- Publication number
- TWI606305B TWI606305B TW102109844A TW102109844A TWI606305B TW I606305 B TWI606305 B TW I606305B TW 102109844 A TW102109844 A TW 102109844A TW 102109844 A TW102109844 A TW 102109844A TW I606305 B TWI606305 B TW I606305B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- liquid
- liquid immersion
- path
- space
- Prior art date
Links
- 239000007788 liquid Substances 0.000 title claims description 472
- 238000007654 immersion Methods 0.000 title claims description 206
- 238000000034 method Methods 0.000 title claims description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims description 486
- 230000003287 optical effect Effects 0.000 claims description 306
- 238000011084 recovery Methods 0.000 claims description 217
- 238000004064 recycling Methods 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000009471 action Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 35
- 238000005286 illumination Methods 0.000 description 18
- 230000001133 acceleration Effects 0.000 description 16
- 239000010408 film Substances 0.000 description 16
- 238000012545 processing Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261622182P | 2012-04-10 | 2012-04-10 | |
| US13/800,448 US9268231B2 (en) | 2012-04-10 | 2013-03-13 | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201348890A TW201348890A (zh) | 2013-12-01 |
| TWI606305B true TWI606305B (zh) | 2017-11-21 |
Family
ID=49292051
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW102109844A TWI606305B (zh) | 2012-04-10 | 2013-03-20 | 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體 |
| TW108118244A TW201935146A (zh) | 2012-04-10 | 2013-03-20 | 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體 |
| TW106123571A TWI668520B (zh) | 2012-04-10 | 2013-03-20 | 液浸曝光裝置、曝光方法及元件製造方法 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108118244A TW201935146A (zh) | 2012-04-10 | 2013-03-20 | 液浸構件、曝光裝置、曝光方法、元件製造方法、程式、及記錄媒體 |
| TW106123571A TWI668520B (zh) | 2012-04-10 | 2013-03-20 | 液浸曝光裝置、曝光方法及元件製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (5) | US9268231B2 (https=) |
| EP (1) | EP2836876B1 (https=) |
| JP (3) | JP6447131B2 (https=) |
| KR (1) | KR102147071B1 (https=) |
| CN (2) | CN108614393A (https=) |
| HK (2) | HK1205279A1 (https=) |
| TW (3) | TWI606305B (https=) |
| WO (1) | WO2013153965A1 (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2009692A (en) | 2011-12-07 | 2013-06-10 | Asml Netherlands Bv | A lithographic apparatus and a device manufacturing method. |
| US9323160B2 (en) | 2012-04-10 | 2016-04-26 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium |
| US9823580B2 (en) | 2012-07-20 | 2017-11-21 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
| US9568828B2 (en) | 2012-10-12 | 2017-02-14 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
| US9494870B2 (en) | 2012-10-12 | 2016-11-15 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
| US9720331B2 (en) | 2012-12-27 | 2017-08-01 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
| US9651873B2 (en) | 2012-12-27 | 2017-05-16 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
| WO2015052781A1 (ja) | 2013-10-08 | 2015-04-16 | 株式会社ニコン | 液浸部材、露光装置及び露光方法、並びにデバイス製造方法 |
| US10268121B2 (en) * | 2015-09-30 | 2019-04-23 | Nikon Corporation | Exposure apparatus and exposure method, and flat panel display manufacturing method |
| KR102649164B1 (ko) | 2017-12-15 | 2024-03-20 | 에이에스엠엘 네델란즈 비.브이. | 유체 핸들링 구조체, 리소그래피 장치, 유체 핸들링 구조체를 사용하는 방법 및 리소그래피 장치를 사용하는 방법 |
| JP6610726B2 (ja) * | 2018-07-11 | 2019-11-27 | 株式会社ニコン | 液浸部材、露光装置及び露光方法、並びにデバイス製造方法 |
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| EP1944654A3 (en) | 1996-11-28 | 2010-06-02 | Nikon Corporation | An exposure apparatus and an exposure method |
| DE69829614T2 (de) | 1997-03-10 | 2006-03-09 | Asml Netherlands B.V. | Lithographiegerät mit einer positioniervorrichtung mit zwei objekthaltern |
| US6897963B1 (en) | 1997-12-18 | 2005-05-24 | Nikon Corporation | Stage device and exposure apparatus |
| US6208407B1 (en) | 1997-12-22 | 2001-03-27 | Asm Lithography B.V. | Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement |
| WO1999049504A1 (fr) * | 1998-03-26 | 1999-09-30 | Nikon Corporation | Procede et systeme d'exposition par projection |
| WO2001035168A1 (en) | 1999-11-10 | 2001-05-17 | Massachusetts Institute Of Technology | Interference lithography utilizing phase-locked scanning beams |
| US6452292B1 (en) | 2000-06-26 | 2002-09-17 | Nikon Corporation | Planar motor with linear coil arrays |
| KR100815222B1 (ko) | 2001-02-27 | 2008-03-19 | 에이에스엠엘 유에스, 인크. | 리소그래피 장치 및 적어도 하나의 레티클 상에 형성된 적어도 두 개의 패턴으로부터의 이미지로 기판 스테이지 상의 필드를 노출시키는 방법 |
| TW529172B (en) | 2001-07-24 | 2003-04-21 | Asml Netherlands Bv | Imaging apparatus |
| KR20050035890A (ko) | 2002-08-23 | 2005-04-19 | 가부시키가이샤 니콘 | 투영 광학계, 포토리소그래피 방법, 노광 장치 및 그 이용방법 |
| SG141426A1 (en) * | 2003-04-10 | 2008-04-28 | Nikon Corp | Environmental system including vacuum scavange for an immersion lithography apparatus |
| KR101431938B1 (ko) * | 2003-04-10 | 2014-08-19 | 가부시키가이샤 니콘 | 액침 리소그래피 장치용 운반 영역을 포함하는 환경 시스템 |
| TWI295414B (en) * | 2003-05-13 | 2008-04-01 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
| EP1503244A1 (en) * | 2003-07-28 | 2005-02-02 | ASML Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
| EP1519230A1 (en) * | 2003-09-29 | 2005-03-30 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7589822B2 (en) | 2004-02-02 | 2009-09-15 | Nikon Corporation | Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
| JP4797984B2 (ja) * | 2004-02-19 | 2011-10-19 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
| CN103558737A (zh) | 2004-06-09 | 2014-02-05 | 尼康股份有限公司 | 基板保持装置、具备其之曝光装置、方法 |
| KR20180125636A (ko) * | 2005-01-31 | 2018-11-23 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
| JP2011258999A (ja) * | 2005-01-31 | 2011-12-22 | Nikon Corp | 露光装置及びデバイス製造方法 |
| TWI424260B (zh) | 2005-03-18 | 2014-01-21 | 尼康股份有限公司 | A board member, a substrate holding device, an exposure apparatus and an exposure method, and a device manufacturing method |
| EP1879219A4 (en) * | 2005-04-27 | 2012-08-08 | Nikon Corp | EXPOSURE METHOD, EXPOSURE DEVICE, METHOD FOR MANUFACTURING COMPONENTS AND FILM EVALUATION METHOD |
| JP4984747B2 (ja) * | 2005-08-31 | 2012-07-25 | 株式会社ニコン | 光学素子、それを用いた露光装置及びマイクロデバイスの製造方法 |
| KR100651579B1 (ko) * | 2005-11-15 | 2006-11-29 | 매그나칩 반도체 유한회사 | 이에스디 보호회로 |
| US7804577B2 (en) * | 2005-11-16 | 2010-09-28 | Asml Netherlands B.V. | Lithographic apparatus |
| US7656501B2 (en) * | 2005-11-16 | 2010-02-02 | Asml Netherlands B.V. | Lithographic apparatus |
| US7864292B2 (en) * | 2005-11-16 | 2011-01-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| TWI605491B (zh) | 2006-01-19 | 2017-11-11 | 尼康股份有限公司 | 曝光裝置及曝光方法、以及元件製造方法 |
| TWI439813B (zh) * | 2006-05-10 | 2014-06-01 | 尼康股份有限公司 | A method of manufacturing an exposure apparatus and an element |
| US8004651B2 (en) | 2007-01-23 | 2011-08-23 | Nikon Corporation | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
| US8237911B2 (en) | 2007-03-15 | 2012-08-07 | Nikon Corporation | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
| US8134685B2 (en) | 2007-03-23 | 2012-03-13 | Nikon Corporation | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
| US8068209B2 (en) | 2007-03-23 | 2011-11-29 | Nikon Corporation | Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool |
| JP2009088037A (ja) * | 2007-09-28 | 2009-04-23 | Nikon Corp | 露光方法及びデバイス製造方法、並びに露光装置 |
| JP5084432B2 (ja) * | 2007-10-05 | 2012-11-28 | キヤノン株式会社 | 露光方法、露光装置およびデバイス製造方法 |
| US8610873B2 (en) | 2008-03-17 | 2013-12-17 | Nikon Corporation | Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate |
| US8289497B2 (en) | 2008-03-18 | 2012-10-16 | Nikon Corporation | Apparatus and methods for recovering fluid in immersion lithography |
| KR20090124179A (ko) * | 2008-05-29 | 2009-12-03 | 삼성전자주식회사 | 노광 장치의 빔위치 오차 측정 방법 및 이를 이용한 노광장치 |
| JP2010016166A (ja) * | 2008-07-03 | 2010-01-21 | Canon Inc | 走査型露光装置および露光方法、ならびにデバイス製造方法 |
| NL2003835A (en) * | 2008-12-22 | 2010-06-23 | Asml Netherlands Bv | Lithographic apparatus and control method. |
| US8896806B2 (en) * | 2008-12-29 | 2014-11-25 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
| JP2010157726A (ja) * | 2008-12-29 | 2010-07-15 | Nikon Corp | 露光装置、露光方法、及びデバイス製造方法 |
| US9223225B2 (en) * | 2010-01-08 | 2015-12-29 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposure method, and device manufacturing method |
| JP5495948B2 (ja) * | 2010-05-27 | 2014-05-21 | キヤノン株式会社 | ステージ装置、露光装置及びデバイスの製造方法 |
| US9323160B2 (en) | 2012-04-10 | 2016-04-26 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium |
| US9823580B2 (en) | 2012-07-20 | 2017-11-21 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
| US9568828B2 (en) | 2012-10-12 | 2017-02-14 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
| US9494870B2 (en) | 2012-10-12 | 2016-11-15 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
| US9720331B2 (en) | 2012-12-27 | 2017-08-01 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
| US9651873B2 (en) | 2012-12-27 | 2017-05-16 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
-
2013
- 2013-03-13 US US13/800,448 patent/US9268231B2/en active Active
- 2013-03-20 TW TW102109844A patent/TWI606305B/zh active
- 2013-03-20 TW TW108118244A patent/TW201935146A/zh unknown
- 2013-03-20 TW TW106123571A patent/TWI668520B/zh active
- 2013-03-22 HK HK15105595.1A patent/HK1205279A1/xx unknown
- 2013-03-22 CN CN201810331789.7A patent/CN108614393A/zh active Pending
- 2013-03-22 EP EP13718236.6A patent/EP2836876B1/en active Active
- 2013-03-22 KR KR1020147031172A patent/KR102147071B1/ko active Active
- 2013-03-22 WO PCT/JP2013/059432 patent/WO2013153965A1/en not_active Ceased
- 2013-03-22 CN CN201380029828.3A patent/CN104508560B/zh active Active
- 2013-03-22 JP JP2014550223A patent/JP6447131B2/ja active Active
-
2016
- 2016-02-04 US US15/015,704 patent/US9557654B2/en active Active
- 2016-12-29 US US15/394,373 patent/US9927724B2/en active Active
-
2018
- 2018-03-26 US US15/935,661 patent/US10409177B2/en active Active
- 2018-06-07 JP JP2018109154A patent/JP6593493B2/ja active Active
- 2018-12-24 HK HK18116511.6A patent/HK1257550A1/zh unknown
-
2019
- 2019-09-09 US US16/564,583 patent/US10768537B2/en active Active
- 2019-09-26 JP JP2019175377A patent/JP2019215586A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| TWI668520B (zh) | 2019-08-11 |
| HK1205279A1 (zh) | 2015-12-11 |
| US10768537B2 (en) | 2020-09-08 |
| TW201740219A (zh) | 2017-11-16 |
| JP2015514304A (ja) | 2015-05-18 |
| US9927724B2 (en) | 2018-03-27 |
| WO2013153965A1 (en) | 2013-10-17 |
| HK1257550A1 (zh) | 2019-10-25 |
| US20190391503A1 (en) | 2019-12-26 |
| CN104508560A (zh) | 2015-04-08 |
| US9557654B2 (en) | 2017-01-31 |
| CN104508560B (zh) | 2018-05-22 |
| JP2018136581A (ja) | 2018-08-30 |
| US20160161860A1 (en) | 2016-06-09 |
| KR102147071B1 (ko) | 2020-08-24 |
| HK1207908A1 (en) | 2016-02-12 |
| US9268231B2 (en) | 2016-02-23 |
| US20170108786A1 (en) | 2017-04-20 |
| EP2836876A1 (en) | 2015-02-18 |
| US10409177B2 (en) | 2019-09-10 |
| KR20150003276A (ko) | 2015-01-08 |
| US20130265556A1 (en) | 2013-10-10 |
| JP6447131B2 (ja) | 2019-01-09 |
| JP6593493B2 (ja) | 2019-10-23 |
| CN108614393A (zh) | 2018-10-02 |
| TW201348890A (zh) | 2013-12-01 |
| US20180217511A1 (en) | 2018-08-02 |
| TW201935146A (zh) | 2019-09-01 |
| JP2019215586A (ja) | 2019-12-19 |
| EP2836876B1 (en) | 2020-08-05 |
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