JP2015514304A5 - - Google Patents
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- Publication number
- JP2015514304A5 JP2015514304A5 JP2014550223A JP2014550223A JP2015514304A5 JP 2015514304 A5 JP2015514304 A5 JP 2015514304A5 JP 2014550223 A JP2014550223 A JP 2014550223A JP 2014550223 A JP2014550223 A JP 2014550223A JP 2015514304 A5 JP2015514304 A5 JP 2015514304A5
- Authority
- JP
- Japan
- Prior art keywords
- facing
- optical
- liquid
- optical path
- immersion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261622182P | 2012-04-10 | 2012-04-10 | |
| US61/622,182 | 2012-04-10 | ||
| US13/800,448 | 2013-03-13 | ||
| US13/800,448 US9268231B2 (en) | 2012-04-10 | 2013-03-13 | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
| PCT/JP2013/059432 WO2013153965A1 (en) | 2012-04-10 | 2013-03-22 | Liquid immersion member and exposure apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018109154A Division JP6593493B2 (ja) | 2012-04-10 | 2018-06-07 | 露光装置、及びデバイス製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015514304A JP2015514304A (ja) | 2015-05-18 |
| JP2015514304A5 true JP2015514304A5 (https=) | 2016-04-14 |
| JP6447131B2 JP6447131B2 (ja) | 2019-01-09 |
Family
ID=49292051
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014550223A Active JP6447131B2 (ja) | 2012-04-10 | 2013-03-22 | 露光装置、露光方法、及びデバイス製造方法 |
| JP2018109154A Active JP6593493B2 (ja) | 2012-04-10 | 2018-06-07 | 露光装置、及びデバイス製造方法 |
| JP2019175377A Pending JP2019215586A (ja) | 2012-04-10 | 2019-09-26 | 液浸部材、及び、露光装置 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018109154A Active JP6593493B2 (ja) | 2012-04-10 | 2018-06-07 | 露光装置、及びデバイス製造方法 |
| JP2019175377A Pending JP2019215586A (ja) | 2012-04-10 | 2019-09-26 | 液浸部材、及び、露光装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (5) | US9268231B2 (https=) |
| EP (1) | EP2836876B1 (https=) |
| JP (3) | JP6447131B2 (https=) |
| KR (1) | KR102147071B1 (https=) |
| CN (2) | CN108614393A (https=) |
| HK (2) | HK1205279A1 (https=) |
| TW (3) | TWI606305B (https=) |
| WO (1) | WO2013153965A1 (https=) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2009692A (en) | 2011-12-07 | 2013-06-10 | Asml Netherlands Bv | A lithographic apparatus and a device manufacturing method. |
| US9323160B2 (en) | 2012-04-10 | 2016-04-26 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium |
| US9823580B2 (en) | 2012-07-20 | 2017-11-21 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
| US9494870B2 (en) * | 2012-10-12 | 2016-11-15 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
| US9568828B2 (en) | 2012-10-12 | 2017-02-14 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
| US9720331B2 (en) | 2012-12-27 | 2017-08-01 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
| US9651873B2 (en) * | 2012-12-27 | 2017-05-16 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
| JP6369472B2 (ja) | 2013-10-08 | 2018-08-08 | 株式会社ニコン | 液浸部材、露光装置及び露光方法、並びにデバイス製造方法 |
| CN108139683B (zh) * | 2015-09-30 | 2021-11-05 | 株式会社尼康 | 曝光装置及曝光方法、以及平面显示器制造方法 |
| CN118584764A (zh) | 2017-12-15 | 2024-09-03 | Asml荷兰有限公司 | 流体处置结构、光刻设备、以及使用流体处置结构的方法 |
| JP6610726B2 (ja) * | 2018-07-11 | 2019-11-27 | 株式会社ニコン | 液浸部材、露光装置及び露光方法、並びにデバイス製造方法 |
Family Cites Families (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG102627A1 (en) | 1996-11-28 | 2004-03-26 | Nikon Corp | Lithographic device |
| EP0900412B1 (en) | 1997-03-10 | 2005-04-06 | ASML Netherlands B.V. | Lithographic apparatus comprising a positioning device having two object holders |
| US6897963B1 (en) | 1997-12-18 | 2005-05-24 | Nikon Corporation | Stage device and exposure apparatus |
| US6208407B1 (en) | 1997-12-22 | 2001-03-27 | Asm Lithography B.V. | Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement |
| WO1999049504A1 (fr) * | 1998-03-26 | 1999-09-30 | Nikon Corporation | Procede et systeme d'exposition par projection |
| WO2001035168A1 (en) | 1999-11-10 | 2001-05-17 | Massachusetts Institute Of Technology | Interference lithography utilizing phase-locked scanning beams |
| US6452292B1 (en) | 2000-06-26 | 2002-09-17 | Nikon Corporation | Planar motor with linear coil arrays |
| EP1364257A1 (en) | 2001-02-27 | 2003-11-26 | ASML US, Inc. | Simultaneous imaging of two reticles |
| TW529172B (en) | 2001-07-24 | 2003-04-21 | Asml Netherlands Bv | Imaging apparatus |
| JP2005536775A (ja) | 2002-08-23 | 2005-12-02 | 株式会社ニコン | 投影光学系、フォトリソグラフィ方法および露光装置、並びに露光装置を用いた方法 |
| KR101177330B1 (ko) * | 2003-04-10 | 2012-08-30 | 가부시키가이샤 니콘 | 액침 리소그래피 장치 |
| WO2004090634A2 (en) * | 2003-04-10 | 2004-10-21 | Nikon Corporation | Environmental system including vaccum scavange for an immersion lithography apparatus |
| TWI295414B (en) * | 2003-05-13 | 2008-04-01 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
| EP1503244A1 (en) * | 2003-07-28 | 2005-02-02 | ASML Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
| EP1519230A1 (en) * | 2003-09-29 | 2005-03-30 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7589822B2 (en) | 2004-02-02 | 2009-09-15 | Nikon Corporation | Stage drive method and stage unit, exposure apparatus, and device manufacturing method |
| JP4797984B2 (ja) * | 2004-02-19 | 2011-10-19 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
| SG186621A1 (en) | 2004-06-09 | 2013-01-30 | Nikon Corp | Substrate holding device, exposure apparatus having same, exposure method, method for producing device, and liquid repellent plate |
| WO2006080516A1 (ja) * | 2005-01-31 | 2006-08-03 | Nikon Corporation | 露光装置及びデバイス製造方法 |
| JP2011258999A (ja) * | 2005-01-31 | 2011-12-22 | Nikon Corp | 露光装置及びデバイス製造方法 |
| TWI424260B (zh) | 2005-03-18 | 2014-01-21 | 尼康股份有限公司 | A board member, a substrate holding device, an exposure apparatus and an exposure method, and a device manufacturing method |
| WO2006118108A1 (ja) * | 2005-04-27 | 2006-11-09 | Nikon Corporation | 露光方法、露光装置、デバイス製造方法、及び膜の評価方法 |
| JP4984747B2 (ja) * | 2005-08-31 | 2012-07-25 | 株式会社ニコン | 光学素子、それを用いた露光装置及びマイクロデバイスの製造方法 |
| KR100651579B1 (ko) * | 2005-11-15 | 2006-11-29 | 매그나칩 반도체 유한회사 | 이에스디 보호회로 |
| US7864292B2 (en) * | 2005-11-16 | 2011-01-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7656501B2 (en) * | 2005-11-16 | 2010-02-02 | Asml Netherlands B.V. | Lithographic apparatus |
| US7804577B2 (en) * | 2005-11-16 | 2010-09-28 | Asml Netherlands B.V. | Lithographic apparatus |
| KR101323565B1 (ko) | 2006-01-19 | 2013-10-29 | 가부시키가이샤 니콘 | 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법및 패턴 형성 장치, 노광 방법 및 노광 장치, 그리고디바이스 제조 방법 |
| US8477283B2 (en) * | 2006-05-10 | 2013-07-02 | Nikon Corporation | Exposure apparatus and device manufacturing method |
| US8004651B2 (en) | 2007-01-23 | 2011-08-23 | Nikon Corporation | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
| US8237911B2 (en) | 2007-03-15 | 2012-08-07 | Nikon Corporation | Apparatus and methods for keeping immersion fluid adjacent to an optical assembly during wafer exchange in an immersion lithography machine |
| US8134685B2 (en) | 2007-03-23 | 2012-03-13 | Nikon Corporation | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
| US8068209B2 (en) | 2007-03-23 | 2011-11-29 | Nikon Corporation | Nozzle to help reduce the escape of immersion liquid from an immersion lithography tool |
| JP2009088037A (ja) * | 2007-09-28 | 2009-04-23 | Nikon Corp | 露光方法及びデバイス製造方法、並びに露光装置 |
| JP5084432B2 (ja) * | 2007-10-05 | 2012-11-28 | キヤノン株式会社 | 露光方法、露光装置およびデバイス製造方法 |
| US8610873B2 (en) | 2008-03-17 | 2013-12-17 | Nikon Corporation | Immersion lithography apparatus and method having movable liquid diverter between immersion liquid confinement member and substrate |
| US8289497B2 (en) | 2008-03-18 | 2012-10-16 | Nikon Corporation | Apparatus and methods for recovering fluid in immersion lithography |
| KR20090124179A (ko) * | 2008-05-29 | 2009-12-03 | 삼성전자주식회사 | 노광 장치의 빔위치 오차 측정 방법 및 이를 이용한 노광장치 |
| JP2010016166A (ja) * | 2008-07-03 | 2010-01-21 | Canon Inc | 走査型露光装置および露光方法、ならびにデバイス製造方法 |
| NL2003835A (en) * | 2008-12-22 | 2010-06-23 | Asml Netherlands Bv | Lithographic apparatus and control method. |
| JP2010157726A (ja) * | 2008-12-29 | 2010-07-15 | Nikon Corp | 露光装置、露光方法、及びデバイス製造方法 |
| US8896806B2 (en) * | 2008-12-29 | 2014-11-25 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
| KR20120113238A (ko) * | 2010-01-08 | 2012-10-12 | 가부시키가이샤 니콘 | 액침 부재, 노광 장치, 노광 방법, 및 디바이스 제조 방법 |
| JP5495948B2 (ja) * | 2010-05-27 | 2014-05-21 | キヤノン株式会社 | ステージ装置、露光装置及びデバイスの製造方法 |
| US9323160B2 (en) | 2012-04-10 | 2016-04-26 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium |
| US9823580B2 (en) | 2012-07-20 | 2017-11-21 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
| US9568828B2 (en) | 2012-10-12 | 2017-02-14 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
| US9494870B2 (en) | 2012-10-12 | 2016-11-15 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
| US9720331B2 (en) | 2012-12-27 | 2017-08-01 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
| US9651873B2 (en) | 2012-12-27 | 2017-05-16 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
-
2013
- 2013-03-13 US US13/800,448 patent/US9268231B2/en active Active
- 2013-03-20 TW TW102109844A patent/TWI606305B/zh active
- 2013-03-20 TW TW106123571A patent/TWI668520B/zh active
- 2013-03-20 TW TW108118244A patent/TW201935146A/zh unknown
- 2013-03-22 JP JP2014550223A patent/JP6447131B2/ja active Active
- 2013-03-22 WO PCT/JP2013/059432 patent/WO2013153965A1/en not_active Ceased
- 2013-03-22 HK HK15105595.1A patent/HK1205279A1/xx unknown
- 2013-03-22 KR KR1020147031172A patent/KR102147071B1/ko active Active
- 2013-03-22 EP EP13718236.6A patent/EP2836876B1/en active Active
- 2013-03-22 CN CN201810331789.7A patent/CN108614393A/zh active Pending
- 2013-03-22 CN CN201380029828.3A patent/CN104508560B/zh active Active
-
2016
- 2016-02-04 US US15/015,704 patent/US9557654B2/en active Active
- 2016-12-29 US US15/394,373 patent/US9927724B2/en active Active
-
2018
- 2018-03-26 US US15/935,661 patent/US10409177B2/en active Active
- 2018-06-07 JP JP2018109154A patent/JP6593493B2/ja active Active
- 2018-12-24 HK HK18116511.6A patent/HK1257550A1/zh unknown
-
2019
- 2019-09-09 US US16/564,583 patent/US10768537B2/en active Active
- 2019-09-26 JP JP2019175377A patent/JP2019215586A/ja active Pending
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