JP6436616B2 - 計測装置、計測方法、および処理装置 - Google Patents

計測装置、計測方法、および処理装置 Download PDF

Info

Publication number
JP6436616B2
JP6436616B2 JP2013123379A JP2013123379A JP6436616B2 JP 6436616 B2 JP6436616 B2 JP 6436616B2 JP 2013123379 A JP2013123379 A JP 2013123379A JP 2013123379 A JP2013123379 A JP 2013123379A JP 6436616 B2 JP6436616 B2 JP 6436616B2
Authority
JP
Japan
Prior art keywords
signal
period
position data
output
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013123379A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014240790A (ja
JP2014240790A5 (enExample
Inventor
貴文 伊藤
貴文 伊藤
芳幸 岡田
芳幸 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013123379A priority Critical patent/JP6436616B2/ja
Priority to US14/299,581 priority patent/US9488501B2/en
Priority to EP14171884.1A priority patent/EP2813820B1/en
Publication of JP2014240790A publication Critical patent/JP2014240790A/ja
Publication of JP2014240790A5 publication Critical patent/JP2014240790A5/ja
Application granted granted Critical
Publication of JP6436616B2 publication Critical patent/JP6436616B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2013123379A 2013-06-12 2013-06-12 計測装置、計測方法、および処理装置 Expired - Fee Related JP6436616B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013123379A JP6436616B2 (ja) 2013-06-12 2013-06-12 計測装置、計測方法、および処理装置
US14/299,581 US9488501B2 (en) 2013-06-12 2014-06-09 Measuring apparatus, measuring method, and processing apparatus thereof that obtain displacement amount of an object using clock in synchronization with data request signal
EP14171884.1A EP2813820B1 (en) 2013-06-12 2014-06-11 Measuring apparatus, measuring method, and processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013123379A JP6436616B2 (ja) 2013-06-12 2013-06-12 計測装置、計測方法、および処理装置

Publications (3)

Publication Number Publication Date
JP2014240790A JP2014240790A (ja) 2014-12-25
JP2014240790A5 JP2014240790A5 (enExample) 2016-07-28
JP6436616B2 true JP6436616B2 (ja) 2018-12-12

Family

ID=50927970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013123379A Expired - Fee Related JP6436616B2 (ja) 2013-06-12 2013-06-12 計測装置、計測方法、および処理装置

Country Status (3)

Country Link
US (1) US9488501B2 (enExample)
EP (1) EP2813820B1 (enExample)
JP (1) JP6436616B2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6168762B2 (ja) * 2012-12-14 2017-07-26 キヤノン株式会社 アブソリュートエンコーダ
EP3086126B1 (de) * 2015-04-23 2020-12-16 Siemens Healthcare Diagnostics Products GmbH Verfahren zur bestimmung der lage von messpositionen in einem messsystem
CN105119907A (zh) * 2015-07-22 2015-12-02 哈尔滨工业大学 一种基于FPGA的BiSS-C通信协议方法
CN106066837B (zh) * 2016-05-30 2018-12-18 哈工大机器人集团有限公司 一种基于fpga的biss-c协议通用控制器
JP6779081B2 (ja) * 2016-09-28 2020-11-04 キヤノン株式会社 記録素子基板、記録ヘッド、および記録装置
JP2018200666A (ja) * 2017-05-25 2018-12-20 ルネサスエレクトロニクス株式会社 検出システム、センサ及びマイクロコンピュータ
US20180340803A1 (en) * 2017-05-25 2018-11-29 Renesas Electronics Corporation Detection system, sensor and microcomputer
US9877042B1 (en) * 2017-05-26 2018-01-23 Mitutoyo Corporation Position encoder sample timing system
JP7277274B2 (ja) * 2019-06-12 2023-05-18 ファナック株式会社 エンコーダおよびデータ送信方法
JP7452330B2 (ja) * 2020-08-26 2024-03-19 ブラザー工業株式会社 モータ制御装置、及びモータ制御方法
CN112306112B (zh) * 2020-10-09 2023-11-24 武汉华之洋科技有限公司 一种带有高频测角机构的转台/摇摆台及测角方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05240631A (ja) * 1992-02-27 1993-09-17 Yokogawa Electric Corp 光学式エンコーダ
JP3072938B2 (ja) * 1992-05-15 2000-08-07 オークマ株式会社 位置検出装置
JP3367260B2 (ja) 1995-03-24 2003-01-14 三菱電機株式会社 エンコーダ装置及びサーボモーター制御装置
DE10054070A1 (de) 2000-10-31 2002-05-08 Heidenhain Gmbh Dr Johannes Positionsmeßgerät und Verfahren zur Bestimmung einer Position
DE10149174A1 (de) * 2001-10-04 2003-04-17 Heidenhain Gmbh Dr Johannes Verfahren und Vorrichtung zur Positionsbestimmung
US6639529B1 (en) * 2002-05-14 2003-10-28 Mitutoyo Corporation System and method for delay calibration in position encoders
US7094978B2 (en) * 2002-11-15 2006-08-22 Mitutoyo Corporation System and method for generating a high speed estimated position output for a position encoder
JP4179143B2 (ja) * 2003-11-25 2008-11-12 松下電器産業株式会社 アブソリュートエンコーダ
JP2006048380A (ja) * 2004-08-04 2006-02-16 Keyence Corp 光学式変位計のデータ伝送方法及び光学式変位計
JP4953714B2 (ja) 2005-08-11 2012-06-13 株式会社ミツトヨ エンコーダ出力の内挿方法及び内挿回路
JP2008032562A (ja) * 2006-07-28 2008-02-14 Ntn Corp 回転検出装置および回転検出装置付き軸受
JP5540224B2 (ja) * 2009-07-17 2014-07-02 エタニ電機株式会社 インパルス応答測定方法およびインパルス応答測定装置
JP5129224B2 (ja) * 2009-10-30 2013-01-30 オークマ株式会社 位置検出装置
JP2011209375A (ja) * 2010-03-29 2011-10-20 Dainippon Screen Mfg Co Ltd パターン描画装置およびパターン描画方法
JP5251960B2 (ja) 2010-11-05 2013-07-31 株式会社安川電機 エンコーダ、サーボユニット及び位置データ算出方法
DE102011079961A1 (de) * 2011-07-28 2013-01-31 Dr. Johannes Heidenhain Gmbh Vorrichtung und Verfahren zur Winkelmessung

Also Published As

Publication number Publication date
EP2813820A1 (en) 2014-12-17
JP2014240790A (ja) 2014-12-25
US20140367561A1 (en) 2014-12-18
EP2813820B1 (en) 2017-12-20
US9488501B2 (en) 2016-11-08

Similar Documents

Publication Publication Date Title
JP6436616B2 (ja) 計測装置、計測方法、および処理装置
US10072950B2 (en) Encoder and method of outputting measurement value of position or angle
US7945821B2 (en) Time lag measuring device, distance measuring apparatus and distance measuring method
JP5753449B2 (ja) 光波距離測定方法及び光波距離装置
JP5932285B2 (ja) エンコーダおよびこれを備えた装置
EP2581713B1 (en) Encoder and apparatus using the same
EP2343573B1 (en) Electro-optical distance measuring device
CN104101369A (zh) 位置检测设备
US7777865B2 (en) Time difference measuring device, measuring method, distance measuring device, and distance measuring method
WO2019176751A1 (ja) 光検出装置、光検出方法および光学式測距センサ
US10393550B2 (en) Encoder and apparatus having the same
JP2015161595A (ja) 光学式エンコーダ
KR101223953B1 (ko) 표준 시각 동기용 주파수를 이용한 자체 온도 보상 기능을 갖는 고 분해능 정밀 시각 측정 장치 및 방법
JP2013079915A (ja) 絶対測長型エンコーダ
CN114740459B (zh) 一种激光雷达校准方法及装置
JP4202751B2 (ja) 位置設定をするための方法及びこの方法を実施するための位置測定装置
JP2003254784A (ja) 変位校正方法及び装置
JP2014115203A (ja) 距離計測装置
JP4227352B2 (ja) 一致検出装置及び方法
JPH0933284A (ja) 光学式エンコーダ
KR101146218B1 (ko) 거리측정장치 및 방법
WO2012029778A1 (ja) エンコーダ用信号処理回路
KR20040047210A (ko) Ｉ/ｑ 헤테로다인 간섭계에 사용되는 이동 변위 산출 장치
JP2004251775A (ja) 形状測定装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160613

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160613

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20170215

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170307

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170427

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170919

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20171120

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180424

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180622

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20181016

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20181113

R151 Written notification of patent or utility model registration

Ref document number: 6436616

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees