JP6431687B2 - ３端子デバイスの端子間容量測定方法及びその装置 - Google Patents

３端子デバイスの端子間容量測定方法及びその装置 Download PDF

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JP6431687B2
JP6431687B2 JP2014090325A JP2014090325A JP6431687B2 JP 6431687 B2 JP6431687 B2 JP 6431687B2 JP 2014090325 A JP2014090325 A JP 2014090325A JP 2014090325 A JP2014090325 A JP 2014090325A JP 6431687 B2 JP6431687 B2 JP 6431687B2
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terminal
path selector
terminals
impedance
lcr meter
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JP2015210120A (ja
JP2015210120A5 (https=
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幸史 得納
幸史 得納
好 永井
好 永井
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キーサイト テクノロジーズ， インク．
キーサイト テクノロジーズ， インク．
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Priority to JP2014090325A priority Critical patent/JP6431687B2/ja
Priority to US14/691,799 priority patent/US10197618B2/en
Priority to DE102015207513.3A priority patent/DE102015207513A1/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP2014090325A 2014-04-24 2014-04-24 ３端子デバイスの端子間容量測定方法及びその装置 Active JP6431687B2 (ja)

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Application Number Priority Date Filing Date Title
JP2014090325A JP6431687B2 (ja) 2014-04-24 2014-04-24 ３端子デバイスの端子間容量測定方法及びその装置
US14/691,799 US10197618B2 (en) 2014-04-24 2015-04-21 Inter-terminal capacitance measurement method for three-terminal device and apparatus for the same
DE102015207513.3A DE102015207513A1 (de) 2014-04-24 2015-04-23 Zwischen-Anschluss-Kapazitätsmessverfahren für ein Bauelement mit drei Anschlüssen und Vorrichtung hierfür

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JP2014090325A JP6431687B2 (ja) 2014-04-24 2014-04-24 ３端子デバイスの端子間容量測定方法及びその装置

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JP2015210120A JP2015210120A (ja) 2015-11-24
JP2015210120A5 JP2015210120A5 (https=) 2017-06-01
JP6431687B2 true JP6431687B2 (ja) 2018-11-28

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6431687B2 (ja) 2014-04-24 2018-11-28 キーサイト テクノロジーズ， インク． ３端子デバイスの端子間容量測定方法及びその装置
JP6422424B2 (ja) * 2015-11-11 2018-11-14 三菱電機株式会社 半導体デバイスの寄生容量測定システムにおける共振装置、半導体デバイスの寄生容量測定システム、および半導体デバイスの寄生容量の測定方法
US10436827B2 (en) * 2016-11-15 2019-10-08 Rohde & Schwarz Gmbh & Co. Kg Measurement device and method for measuring the impedance of a device under test
JP7466502B2 (ja) 2021-06-25 2024-04-12 三菱電機株式会社 測定装置
JP7479335B2 (ja) 2021-08-03 2024-05-08 三菱電機株式会社 入力容量測定回路および半導体装置の製造方法
JP2025018056A (ja) 2023-07-26 2025-02-06 三菱電機株式会社 半導体デバイスの容量の測定装置および測定治具

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
JPS63275965A (ja) * 1987-05-07 1988-11-14 Fujitsu Ltd Ｍｏｓ型トランジスタの測定方法
JPH0730933A (ja) * 1993-06-24 1995-01-31 Hitachi Ltd 通話路スイッチ
JP3289167B2 (ja) 1994-04-28 2002-06-04 清水建設株式会社 ハーフｐｃ型枠およびコンクリートスラブの施工方法
JP2850200B2 (ja) 1994-10-28 1999-01-27 株式会社トーキン 積層セラミック電子部品
JPH08130749A (ja) * 1994-11-02 1996-05-21 Olympus Optical Co Ltd マトリックス演算回路及び色補正回路
JP2001330634A (ja) * 2000-05-23 2001-11-30 Konica Corp 容量測定方法及び容量測定装置
US6731129B1 (en) * 2002-12-17 2004-05-04 International Business Machines Corporation Apparatus for measuring capacitance of a semiconductor device
JP2005300495A (ja) * 2004-04-16 2005-10-27 Agilent Technol Inc 半導体特性測定装置および接続装置
JP2005331520A (ja) * 2005-06-01 2005-12-02 Agilent Technol Inc フィクスチャの電気長を求める方法、フィクスチャの電気長を求めるプログラム、および、電子測定装置
JP4906978B2 (ja) 2010-04-15 2012-03-28 オリンパスメディカルシステムズ株式会社 超音波診断システム
JP6431687B2 (ja) 2014-04-24 2018-11-28 キーサイト テクノロジーズ， インク． ３端子デバイスの端子間容量測定方法及びその装置

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JP2015210120A (ja) 2015-11-24
US20150309109A1 (en) 2015-10-29
US10197618B2 (en) 2019-02-05

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