JP6422318B2 - 液体吐出ヘッドおよび液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドおよび液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP6422318B2
JP6422318B2 JP2014244166A JP2014244166A JP6422318B2 JP 6422318 B2 JP6422318 B2 JP 6422318B2 JP 2014244166 A JP2014244166 A JP 2014244166A JP 2014244166 A JP2014244166 A JP 2014244166A JP 6422318 B2 JP6422318 B2 JP 6422318B2
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Japan
Prior art keywords
forming member
pressure chamber
discharge port
discharge head
liquid
Prior art date
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Expired - Fee Related
Application number
JP2014244166A
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English (en)
Japanese (ja)
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JP2016107420A (ja
JP2016107420A5 (enExample
Inventor
剛矢 宇山
剛矢 宇山
誠 櫻井
誠 櫻井
真 照井
真 照井
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2014244166A priority Critical patent/JP6422318B2/ja
Priority to US14/954,750 priority patent/US9623655B2/en
Publication of JP2016107420A publication Critical patent/JP2016107420A/ja
Publication of JP2016107420A5 publication Critical patent/JP2016107420A5/ja
Application granted granted Critical
Publication of JP6422318B2 publication Critical patent/JP6422318B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2014244166A 2014-12-02 2014-12-02 液体吐出ヘッドおよび液体吐出ヘッドの製造方法 Expired - Fee Related JP6422318B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014244166A JP6422318B2 (ja) 2014-12-02 2014-12-02 液体吐出ヘッドおよび液体吐出ヘッドの製造方法
US14/954,750 US9623655B2 (en) 2014-12-02 2015-11-30 Liquid discharge head and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014244166A JP6422318B2 (ja) 2014-12-02 2014-12-02 液体吐出ヘッドおよび液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2016107420A JP2016107420A (ja) 2016-06-20
JP2016107420A5 JP2016107420A5 (enExample) 2018-01-11
JP6422318B2 true JP6422318B2 (ja) 2018-11-14

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JP2014244166A Expired - Fee Related JP6422318B2 (ja) 2014-12-02 2014-12-02 液体吐出ヘッドおよび液体吐出ヘッドの製造方法

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Country Link
US (1) US9623655B2 (enExample)
JP (1) JP6422318B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108248219A (zh) * 2016-12-29 2018-07-06 上海新微技术研发中心有限公司 热泡喷墨打印头芯片及其制造方法
US10875321B2 (en) 2017-01-23 2020-12-29 Hewlett-Packard Development Company, L.P. Fluid ejection devices to dispense fluid of different sizes
JP6522040B2 (ja) * 2017-04-28 2019-05-29 キヤノン株式会社 積層体の製造方法および液体吐出ヘッドの製造方法
JP7086681B2 (ja) * 2018-04-04 2022-06-20 キヤノン株式会社 素子基板
JP7186540B2 (ja) * 2018-08-06 2022-12-09 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、および、液体吐出装置
JP7214468B2 (ja) * 2018-12-25 2023-01-30 キヤノン株式会社 液体吐出ヘッド
JP7328787B2 (ja) 2019-04-23 2023-08-17 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP7344669B2 (ja) * 2019-04-23 2023-09-14 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP2021041707A (ja) * 2020-11-30 2021-03-18 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 異なるサイズの流体を分配するための液体噴出装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4587417B2 (ja) * 1999-06-04 2010-11-24 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、及び前記液体吐出ヘッドの駆動方法
US6513896B1 (en) * 2000-03-10 2003-02-04 Hewlett-Packard Company Methods of fabricating fit firing chambers of different drop weights on a single printhead
JP3927854B2 (ja) 2002-04-23 2007-06-13 キヤノン株式会社 インクジェット記録ヘッド
JP2006103034A (ja) * 2004-10-01 2006-04-20 Ricoh Co Ltd 液滴吐出ヘッド、液体カートリッジ、液滴吐出装置及びプリンタ
KR100828360B1 (ko) * 2005-09-23 2008-05-08 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP2007216415A (ja) 2006-02-14 2007-08-30 Canon Inc 液体噴射記録ヘッド、およびその製造方法
JP2008149601A (ja) * 2006-12-19 2008-07-03 Canon Inc インクジェット記録方法
JP5171377B2 (ja) * 2008-04-28 2013-03-27 キヤノン株式会社 回路基板及び液体吐出装置
JP5586978B2 (ja) * 2010-02-09 2014-09-10 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5106601B2 (ja) * 2010-08-26 2012-12-26 キヤノン株式会社 液体吐出ヘッド用基板の製造方法、液体吐出ヘッドの製造方法、及び液体吐出ヘッド用基板の検査方法
JP5930812B2 (ja) * 2012-04-06 2016-06-08 キヤノン株式会社 液体吐出ヘッドの製造方法

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JP2016107420A (ja) 2016-06-20
US9623655B2 (en) 2017-04-18
US20160152027A1 (en) 2016-06-02

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