JP6416809B2 - 荷電粒子顕微鏡用のサンプルの調製 - Google Patents

荷電粒子顕微鏡用のサンプルの調製 Download PDF

Info

Publication number
JP6416809B2
JP6416809B2 JP2016031701A JP2016031701A JP6416809B2 JP 6416809 B2 JP6416809 B2 JP 6416809B2 JP 2016031701 A JP2016031701 A JP 2016031701A JP 2016031701 A JP2016031701 A JP 2016031701A JP 6416809 B2 JP6416809 B2 JP 6416809B2
Authority
JP
Japan
Prior art keywords
sample
sample holder
aqueous liquid
membrane
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016031701A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016156823A (ja
JP2016156823A5 (enExample
Inventor
レミジー エルヴェ−ウィリアム
レミジー エルヴェ−ウィリアム
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Publication of JP2016156823A publication Critical patent/JP2016156823A/ja
Publication of JP2016156823A5 publication Critical patent/JP2016156823A5/ja
Application granted granted Critical
Publication of JP6416809B2 publication Critical patent/JP6416809B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/2813—Producing thin layers of samples on a substrate, e.g. smearing, spinning-on
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/42—Low-temperature sample treatment, e.g. cryofixation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/002—Cooling arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2001—Maintaining constant desired temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2016031701A 2015-02-25 2016-02-23 荷電粒子顕微鏡用のサンプルの調製 Active JP6416809B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP15156546.2 2015-02-25
EP15156546.2A EP3062082B1 (en) 2015-02-25 2015-02-25 Preparation of sample for charged-particle microscopy

Publications (3)

Publication Number Publication Date
JP2016156823A JP2016156823A (ja) 2016-09-01
JP2016156823A5 JP2016156823A5 (enExample) 2018-03-15
JP6416809B2 true JP6416809B2 (ja) 2018-10-31

Family

ID=52574076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016031701A Active JP6416809B2 (ja) 2015-02-25 2016-02-23 荷電粒子顕微鏡用のサンプルの調製

Country Status (4)

Country Link
US (1) US9772265B2 (enExample)
EP (1) EP3062082B1 (enExample)
JP (1) JP6416809B2 (enExample)
CN (1) CN105914122B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220121448A (ko) * 2021-02-25 2022-09-01 주식회사 코엠에스 투광성 용기의 액체유무 확인 검사장치

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3062082B1 (en) * 2015-02-25 2018-04-18 Fei Company Preparation of sample for charged-particle microscopy
EP3486633B1 (en) 2015-12-11 2021-11-24 FEI Company Preparation of cryogenic sample for charged-particle microscopy
DK3260839T3 (da) * 2016-06-22 2021-04-19 Univ Maastricht Fremgangsmåde til forberedelse af prøver til billeddannelses- eller diffraktionseksperimenter under kyrogene betingelser
US10879034B2 (en) 2017-06-21 2020-12-29 King Abdullah University Of Science And Technology Membraneless platform for correlated analysis of nanomaterials
WO2019010436A1 (en) * 2017-07-07 2019-01-10 Wisconsin Alumni Research Foundation PREPARATION OF GAS PHASE SAMPLE FOR CRYOELECTRONIC MICROSCOPY
JP6433550B1 (ja) * 2017-07-19 2018-12-05 株式会社日立製作所 試料保持機構、及び荷電粒子線装置
EP3477679B1 (en) 2017-10-26 2025-01-08 FEI Company Improved cryogenic cell for mounting a specimen in a charged particle microscope
EP3495798B1 (en) 2017-12-08 2021-01-20 FEI Company Improved preparation of cryogenic sample, e.g. for charged particle microscopy
EP3531439B1 (en) 2018-02-22 2020-06-24 FEI Company Intelligent pre-scan in scanning transmission charged particle microscopy
US11322334B2 (en) * 2018-07-12 2022-05-03 XTEM Biolab Co., Ltd. Grid sample production apparatus for electron microscope
KR102201993B1 (ko) * 2018-07-12 2021-01-12 주식회사 엑스템바이오랩 전자현미경용 그리드 샘플 제작장치
EP3647763B1 (en) * 2018-10-29 2021-07-14 FEI Company A method of preparing a biological sample for study in an analysis device
US11703429B2 (en) 2019-02-14 2023-07-18 Nanosoft, LLC Cryogenic transmission electron microscopy sample preparation
US11035766B2 (en) * 2019-02-14 2021-06-15 Nanosoft, Llc. Cryogenic transmission electron microscopy sample preparation
EP3840011A1 (en) * 2019-12-19 2021-06-23 Universiteit Leiden Methods and system for fabricating thin film liquid cells
WO2021217274A1 (en) * 2020-04-30 2021-11-04 The Hospital For Sick Children High-speed cryoem specimen preparation using through-grid wicking
JP7407483B2 (ja) * 2020-09-29 2024-01-04 国立研究開発法人物質・材料研究機構 水素透過検出用試料ホルダー及び水素透過拡散経路観測装置
US11728146B2 (en) 2021-01-13 2023-08-15 Wisconsin Alumni Research Foundation Retractable ion guide, grid holder, and technology for removal of cryogenic sample from vacuum
US20220252514A1 (en) * 2021-02-10 2022-08-11 Star Voltaic, LLC Fluorescent solid-state materials for optical calibration and methods thereof
EP4067860B1 (en) 2021-03-31 2024-07-24 FEI Company Method of preparing a cryogenic sample with improved cooling characteristics
EP4105632B1 (en) * 2021-06-14 2025-09-24 Nanosoft, LLC Cryogenic transmission electron microscopy sample preparation
EP4109069A1 (en) * 2021-06-25 2022-12-28 FEI Company Blotting material with profiled region, method of manufacturing same, and uses thereof
US20240011885A1 (en) * 2021-09-13 2024-01-11 Gregory Hirsch Vacuum Ultraviolet Cryo-EM Grid Screening Tool
WO2023168406A2 (en) * 2022-03-04 2023-09-07 Wisconsin Alumni Research Foundation Surface hydration with an ion beam
EP4368963A1 (en) 2022-11-08 2024-05-15 Fei Company Method of preparing a cryogenic sample with improved cooling characteristics

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001074621A (ja) * 1999-09-08 2001-03-23 Toshiba Microelectronics Corp 電子顕微鏡用試料の作製方法
JP2005114578A (ja) * 2003-10-08 2005-04-28 Jeol Ltd 試料作製方法および試料作製装置ならびに試料観察装置
JP2005249414A (ja) * 2004-03-01 2005-09-15 Toyota Motor Corp カーボンナノチューブの断面観察方法
JP2005345422A (ja) * 2004-06-07 2005-12-15 Canon Inc 試料物質の観察方法および観察装置
JP4891830B2 (ja) * 2007-04-18 2012-03-07 日本電子株式会社 電子顕微鏡用試料ホルダおよび観察方法
EP2458354A1 (en) * 2010-11-24 2012-05-30 Fei Company Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus
JP5951223B2 (ja) * 2011-11-02 2016-07-13 株式会社日立ハイテクノロジーズ 電子顕微法、電子顕微鏡および観察標体作製装置
US8884248B2 (en) * 2012-02-13 2014-11-11 Fei Company Forming a vitrified sample for electron microscopy
EP2853847B1 (en) 2013-09-30 2016-02-03 Fei Company Preparation of cryogenic sample for charged-particle microscopy
EP3032564A1 (en) 2014-12-11 2016-06-15 FEI Company Improved cryogenic specimen holder for a charged particle microscope
EP3062082B1 (en) * 2015-02-25 2018-04-18 Fei Company Preparation of sample for charged-particle microscopy

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220121448A (ko) * 2021-02-25 2022-09-01 주식회사 코엠에스 투광성 용기의 액체유무 확인 검사장치
KR102636920B1 (ko) * 2021-02-25 2024-02-16 주식회사 코엠에스 투광성 용기의 액체유무 확인 검사장치

Also Published As

Publication number Publication date
CN105914122B (zh) 2019-03-19
US9772265B2 (en) 2017-09-26
EP3062082A1 (en) 2016-08-31
US20160245732A1 (en) 2016-08-25
EP3062082B1 (en) 2018-04-18
CN105914122A (zh) 2016-08-31
JP2016156823A (ja) 2016-09-01

Similar Documents

Publication Publication Date Title
JP6416809B2 (ja) 荷電粒子顕微鏡用のサンプルの調製
US9116091B2 (en) Preparation of cryogenic sample for charged-particle microscopy
JP6434944B2 (ja) 荷電粒子顕微鏡用の極低温サンプルの調製
JP6239246B2 (ja) 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材
JP6143487B2 (ja) 電子顕微鏡用のガラス化された試料を作製する方法
CN105143846B (zh) 带电粒子束装置以及使用该装置的试样制作方法
JP2010230417A (ja) 試料の検査装置及び検査方法
JP7145776B2 (ja) 走査透過荷電粒子顕微鏡におけるインテリジェントプレスキャン
JP5215701B2 (ja) 試料検査装置及び試料検査方法
CN109900729B (zh) 用于带电粒子显微镜等冷冻样品的改良型制备
US12270602B2 (en) Method of preparing a cryogenic sample with improved cooling characteristic
JP5314317B2 (ja) 検査方法及び試液
CN110361413B (zh) 在透射带电粒子显微镜中研究动态试样
de Jonge et al. Practical aspects of transmission electron microscopy in liquid
JP2024068654A (ja) 改善された冷却特性を有する極低温試料の調製方法
US10651007B2 (en) Cryogenic cell for mounting a specimen in a charged particle microscope

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180129

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180129

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20180129

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20180413

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180424

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180710

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180918

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20181004

R150 Certificate of patent or registration of utility model

Ref document number: 6416809

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250