CN105914122B - 用于带电粒子显微术的样本的制备 - Google Patents
用于带电粒子显微术的样本的制备 Download PDFInfo
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- CN105914122B CN105914122B CN201610103111.4A CN201610103111A CN105914122B CN 105914122 B CN105914122 B CN 105914122B CN 201610103111 A CN201610103111 A CN 201610103111A CN 105914122 B CN105914122 B CN 105914122B
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/2813—Producing thin layers of samples on a substrate, e.g. smearing, spinning-on
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/42—Low-temperature sample treatment, e.g. cryofixation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
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- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP15156546.2 | 2015-02-25 | ||
| EP15156546.2A EP3062082B1 (en) | 2015-02-25 | 2015-02-25 | Preparation of sample for charged-particle microscopy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105914122A CN105914122A (zh) | 2016-08-31 |
| CN105914122B true CN105914122B (zh) | 2019-03-19 |
Family
ID=52574076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610103111.4A Active CN105914122B (zh) | 2015-02-25 | 2016-02-25 | 用于带电粒子显微术的样本的制备 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9772265B2 (enExample) |
| EP (1) | EP3062082B1 (enExample) |
| JP (1) | JP6416809B2 (enExample) |
| CN (1) | CN105914122B (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3062082B1 (en) * | 2015-02-25 | 2018-04-18 | Fei Company | Preparation of sample for charged-particle microscopy |
| EP3486633B1 (en) | 2015-12-11 | 2021-11-24 | FEI Company | Preparation of cryogenic sample for charged-particle microscopy |
| DK3260839T3 (da) * | 2016-06-22 | 2021-04-19 | Univ Maastricht | Fremgangsmåde til forberedelse af prøver til billeddannelses- eller diffraktionseksperimenter under kyrogene betingelser |
| US10879034B2 (en) | 2017-06-21 | 2020-12-29 | King Abdullah University Of Science And Technology | Membraneless platform for correlated analysis of nanomaterials |
| WO2019010436A1 (en) * | 2017-07-07 | 2019-01-10 | Wisconsin Alumni Research Foundation | PREPARATION OF GAS PHASE SAMPLE FOR CRYOELECTRONIC MICROSCOPY |
| JP6433550B1 (ja) * | 2017-07-19 | 2018-12-05 | 株式会社日立製作所 | 試料保持機構、及び荷電粒子線装置 |
| EP3477679B1 (en) | 2017-10-26 | 2025-01-08 | FEI Company | Improved cryogenic cell for mounting a specimen in a charged particle microscope |
| EP3495798B1 (en) | 2017-12-08 | 2021-01-20 | FEI Company | Improved preparation of cryogenic sample, e.g. for charged particle microscopy |
| EP3531439B1 (en) | 2018-02-22 | 2020-06-24 | FEI Company | Intelligent pre-scan in scanning transmission charged particle microscopy |
| US11322334B2 (en) * | 2018-07-12 | 2022-05-03 | XTEM Biolab Co., Ltd. | Grid sample production apparatus for electron microscope |
| KR102201993B1 (ko) * | 2018-07-12 | 2021-01-12 | 주식회사 엑스템바이오랩 | 전자현미경용 그리드 샘플 제작장치 |
| EP3647763B1 (en) * | 2018-10-29 | 2021-07-14 | FEI Company | A method of preparing a biological sample for study in an analysis device |
| US11703429B2 (en) | 2019-02-14 | 2023-07-18 | Nanosoft, LLC | Cryogenic transmission electron microscopy sample preparation |
| US11035766B2 (en) * | 2019-02-14 | 2021-06-15 | Nanosoft, Llc. | Cryogenic transmission electron microscopy sample preparation |
| EP3840011A1 (en) * | 2019-12-19 | 2021-06-23 | Universiteit Leiden | Methods and system for fabricating thin film liquid cells |
| WO2021217274A1 (en) * | 2020-04-30 | 2021-11-04 | The Hospital For Sick Children | High-speed cryoem specimen preparation using through-grid wicking |
| JP7407483B2 (ja) * | 2020-09-29 | 2024-01-04 | 国立研究開発法人物質・材料研究機構 | 水素透過検出用試料ホルダー及び水素透過拡散経路観測装置 |
| US11728146B2 (en) | 2021-01-13 | 2023-08-15 | Wisconsin Alumni Research Foundation | Retractable ion guide, grid holder, and technology for removal of cryogenic sample from vacuum |
| US20220252514A1 (en) * | 2021-02-10 | 2022-08-11 | Star Voltaic, LLC | Fluorescent solid-state materials for optical calibration and methods thereof |
| KR102636920B1 (ko) * | 2021-02-25 | 2024-02-16 | 주식회사 코엠에스 | 투광성 용기의 액체유무 확인 검사장치 |
| EP4067860B1 (en) | 2021-03-31 | 2024-07-24 | FEI Company | Method of preparing a cryogenic sample with improved cooling characteristics |
| EP4105632B1 (en) * | 2021-06-14 | 2025-09-24 | Nanosoft, LLC | Cryogenic transmission electron microscopy sample preparation |
| EP4109069A1 (en) * | 2021-06-25 | 2022-12-28 | FEI Company | Blotting material with profiled region, method of manufacturing same, and uses thereof |
| US20240011885A1 (en) * | 2021-09-13 | 2024-01-11 | Gregory Hirsch | Vacuum Ultraviolet Cryo-EM Grid Screening Tool |
| WO2023168406A2 (en) * | 2022-03-04 | 2023-09-07 | Wisconsin Alumni Research Foundation | Surface hydration with an ion beam |
| EP4368963A1 (en) | 2022-11-08 | 2024-05-15 | Fei Company | Method of preparing a cryogenic sample with improved cooling characteristics |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005114578A (ja) * | 2003-10-08 | 2005-04-28 | Jeol Ltd | 試料作製方法および試料作製装置ならびに試料観察装置 |
| JP2013096890A (ja) * | 2011-11-02 | 2013-05-20 | Hitachi High-Technologies Corp | 電子顕微法の観察標体、電子顕微法、電子顕微鏡および観察標体作製装置 |
| US8884248B2 (en) * | 2012-02-13 | 2014-11-11 | Fei Company | Forming a vitrified sample for electron microscopy |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001074621A (ja) * | 1999-09-08 | 2001-03-23 | Toshiba Microelectronics Corp | 電子顕微鏡用試料の作製方法 |
| JP2005249414A (ja) * | 2004-03-01 | 2005-09-15 | Toyota Motor Corp | カーボンナノチューブの断面観察方法 |
| JP2005345422A (ja) * | 2004-06-07 | 2005-12-15 | Canon Inc | 試料物質の観察方法および観察装置 |
| JP4891830B2 (ja) * | 2007-04-18 | 2012-03-07 | 日本電子株式会社 | 電子顕微鏡用試料ホルダおよび観察方法 |
| EP2458354A1 (en) * | 2010-11-24 | 2012-05-30 | Fei Company | Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus |
| EP2853847B1 (en) | 2013-09-30 | 2016-02-03 | Fei Company | Preparation of cryogenic sample for charged-particle microscopy |
| EP3032564A1 (en) | 2014-12-11 | 2016-06-15 | FEI Company | Improved cryogenic specimen holder for a charged particle microscope |
| EP3062082B1 (en) * | 2015-02-25 | 2018-04-18 | Fei Company | Preparation of sample for charged-particle microscopy |
-
2015
- 2015-02-25 EP EP15156546.2A patent/EP3062082B1/en active Active
-
2016
- 2016-02-23 JP JP2016031701A patent/JP6416809B2/ja active Active
- 2016-02-24 US US15/052,313 patent/US9772265B2/en active Active
- 2016-02-25 CN CN201610103111.4A patent/CN105914122B/zh active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005114578A (ja) * | 2003-10-08 | 2005-04-28 | Jeol Ltd | 試料作製方法および試料作製装置ならびに試料観察装置 |
| JP2013096890A (ja) * | 2011-11-02 | 2013-05-20 | Hitachi High-Technologies Corp | 電子顕微法の観察標体、電子顕微法、電子顕微鏡および観察標体作製装置 |
| US8884248B2 (en) * | 2012-02-13 | 2014-11-11 | Fei Company | Forming a vitrified sample for electron microscopy |
Also Published As
| Publication number | Publication date |
|---|---|
| US9772265B2 (en) | 2017-09-26 |
| EP3062082A1 (en) | 2016-08-31 |
| US20160245732A1 (en) | 2016-08-25 |
| EP3062082B1 (en) | 2018-04-18 |
| CN105914122A (zh) | 2016-08-31 |
| JP2016156823A (ja) | 2016-09-01 |
| JP6416809B2 (ja) | 2018-10-31 |
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