JP6404474B2 - 太陽電池および太陽電池モジュール - Google Patents
太陽電池および太陽電池モジュール Download PDFInfo
- Publication number
- JP6404474B2 JP6404474B2 JP2017526436A JP2017526436A JP6404474B2 JP 6404474 B2 JP6404474 B2 JP 6404474B2 JP 2017526436 A JP2017526436 A JP 2017526436A JP 2017526436 A JP2017526436 A JP 2017526436A JP 6404474 B2 JP6404474 B2 JP 6404474B2
- Authority
- JP
- Japan
- Prior art keywords
- back surface
- solar cell
- electrode
- metal film
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052751 metal Inorganic materials 0.000 claims description 166
- 239000002184 metal Substances 0.000 claims description 166
- 210000004027 cell Anatomy 0.000 claims description 153
- 239000000463 material Substances 0.000 claims description 62
- 238000006243 chemical reaction Methods 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 37
- 210000005056 cell body Anatomy 0.000 claims description 24
- 239000003566 sealing material Substances 0.000 claims description 16
- 230000001681 protective effect Effects 0.000 claims description 13
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 12
- 239000010408 film Substances 0.000 description 120
- 239000010410 layer Substances 0.000 description 59
- 229910052710 silicon Inorganic materials 0.000 description 38
- 239000010703 silicon Substances 0.000 description 38
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 37
- 239000010409 thin film Substances 0.000 description 34
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 20
- 229910021417 amorphous silicon Inorganic materials 0.000 description 19
- 238000000034 method Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 239000011889 copper foil Substances 0.000 description 10
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 239000004332 silver Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 239000011888 foil Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- -1 ethylene-ethylene Chemical group 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910003437 indium oxide Inorganic materials 0.000 description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- 239000011135 tin Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000007865 diluting Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N isopropyl alcohol Natural products CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 241000269913 Pseudopleuronectes americanus Species 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
- H01L31/022475—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers composed of indium tin oxide [ITO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/048—Encapsulation of modules
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
- H01L31/0504—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells specially adapted for series or parallel connection of solar cells in a module
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/056—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means the light-reflecting means being of the back surface reflector [BSR] type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Sustainable Development (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Description
セル本体部は、光電変換部と電極とを備える。図2では、光電変換部50として、単結晶シリコン基板1の一方の面(光入射側の面)に、導電型シリコン系薄膜3aを有し、単結晶シリコン基板1の他方の面(光入射側の反対面。裏面とも記す)に、導電型シリコン系薄膜3bを有するヘテロ接合太陽電池が図示されている。単結晶シリコン基板1と導電型シリコン系薄膜3a,3bとの間には、真性シリコン系薄膜2a,2bが設けられている。光電変換部50の光入射面には、透明電極層6aおよび金属集電極7が設けられ、光電変換部50の裏面には、裏面電極9が設けられている。
ヘテロ接合太陽電池では、シリコン基板1として一導電型単結晶シリコン基板が用いられる。「一導電型」とは、n型またはp型のどちらか一方であることを意味する。
ヘテロ接合太陽電池は、光電変換部50の光入射面(導電型シリコン系薄膜3a上)に透明電極層6aを備え、光電変換部50の裏面(導電型シリコン系薄膜3b上)に透明電極層6bを備えることが好ましい。透明電極層6a,6bは、導電性酸化物を主成分とする。導電性酸化物としては、例えば、酸化亜鉛や酸化インジウム、酸化錫を単独または混合して用いることができる。中でも酸化インジウムを主成分とするインジウム系酸化物が好ましく、酸化インジウム錫(ITO)が特に好ましい。
光入射側透明電極層6a上には、パターン状の金属集電極7が形成される。集電極7の材料としては、例えば、金、銀、銅、アルミニウム等が用いられる。電気導電率の点から、銀または銅を用いることが好ましい。集電極7は、インクジェット法、スクリーン印刷法、導線接着法、スプレー法、真空蒸着法、スパッタ法等により形成できる。生産性の観点から、パターン状の金属集電極は、銀ペーストを用いたスクリーン印刷法や、電解銅メッキ等のメッキ法により形成することが好ましい。
裏面透明電極層6b上には裏面金属電極8が設けられることが好ましい。裏面金属電極8が設けられることにより、セル本体部100と金属フィルム17との接触抵抗を低減できる。裏面金属電極8は、裏面透明電極層6b上の全面に設けられてもよく、光入射側の金属電極と同様にパターン状でもよい。
本発明の太陽電池は、セル本体部100の裏面電極9に接する金属フィルム17を備える。金属フィルム17としては、単層の金属箔を用いてもよく、複数の金属箔の積層体を用いてもよい。また、PETフィルム等の絶縁性の支持体上に、金属箔を積層したものを用いてもよい。この場合は、金属箔側がセル本体部に接するように金属フィルムが配置される。金属フィルムの金属材料としては、アルミニウム、銅、銀、錫、チタン、ニッケル、およびこれらの合金等が適用可能である。導電率の観点から、銅やアルミニウム等の低抵抗金属が好ましい。
図1に示すように、セル本体部100の裏面に配線材16が接続され、光入射面封止材14と裏面封止材15との間に、配線材16が接続されたセル本体部100および金属フィルム17を配置して封止することにより、太陽電池がモジュール化される。
(光電変換部の作製)
入射面の面方位が(100)で、厚みが200μmのn型単結晶シリコンウェハを、2重量%のHF水溶液に3分間浸漬し、表面の酸化シリコン膜を除去後、超純水によるリンスを2回行った。このシリコン基板を、70℃に保持された5/15重量%のKOH/イソプロピルアルコール水溶液に15分間浸漬し、ウェハの表面をエッチングすることによりテクスチャを形成した。その後、超純水によるリンスを2回行った。原子間力顕微鏡(AFM パシフィックナノテクノロジー社製)により、ウェハの表面観察を行ったところ、(111)面が露出したピラミッド状の凹凸構造(テクスチャ)が確認された。ウェハ両面の算術平均粗さは、約2μmであった。
光電変換部の光入射面および裏面のそれぞれに、透明電極層として、酸化インジウム錫(ITO、屈折率:1.9)を100nmの膜厚で製膜した。ターゲットとして酸化インジウムを用い、基板温度:室温、圧力:0.2Paのアルゴン雰囲気中で、0.5W/cm2のパワー密度を印加して透明電極層の製膜を行った。
集電極のバスバー電極上および裏面電極上に、導電性フィルムを介して配線材を配置し、温度180℃で、2MPaの圧力を15秒間加え、太陽電池の電極と配線材とを接続して、複数の太陽電池が直列接続された太陽電池ストリングを作製した。導電性フィルムとしては、エポキシ樹脂を主成分とする樹脂マトリクス中に、平均粒子径約10μmのNi粒子を10質量%含有するものを用いた。
金属フィルム幅を小さくして、裏面側の30%の領域を覆うように配置した点を除いて実施例1と同様に太陽電池モジュールを作製した。
化学エッチングの条件を変更して、粗化面の算術平均粗さRa2を0.8μmとした銅箔を用いた点を除いて、実施例1と同様に太陽電池モジュールを作製した。
銅箔をプレス加工することにより、表面の算術平均粗さRa2を12μmとした銅箔を用いた点を除いて、実施例1と同様に太陽電池モジュールを作製した。
セル本体部の電極の形成において、裏面側の透明電極層上に金属電極を形成せず、透明電極層をセル本体部の裏面の最表面層とした。このセル本体部を用い、裏面透明電極層上に導電性フィルムを介して配線材を接続し、その上に金属箔を載置した点を除いて、実施例1と同様に太陽電池モジュールを作製した。
表面が粗化されていない平坦な銅箔(算術平均粗さRa2<0.01μm)を用いた点を除いて、実施例1と同様に太陽電池モジュールを作製し特性を評価した。
実施例1と同様に配線材を接続後、金属フィルムを導入せずに、白板ガラス、EVA、太陽電池ストリング、EVA、PETの順に積層して封止を行い、太陽電池モジュールを得た。
AM1.5のスペクトル分布を有するソーラーシミュレータを用いて、25℃の下で擬似太陽光を100mW/cm2のエネルギー密度で照射して、上記の実施例および比較例の太陽電池モジュールの発電特性を測定した。実施例および比較例の太陽電池モジュールの構成および発電特性を表1に示す。なお、太陽電池モジュールの開放電圧Vocおよび短絡電流Iscは、いずれの実施例および比較例も明確な差がみられなかったため、表1では、曲線因子FFのみを比較している。表1のFFは、比較例1の値を1とした相対値で示されている。
2a,2b 真性シリコン系薄膜
3a,3b 導電型シリコン系薄膜
6a,6b 透明電極層
7 金属集電極
8 裏面金属電極
9 裏面電極
11 太陽電池モジュール
12 光入射面側保護材
13 裏面保護材
14,15 封止材
16 配線材
17 金属フィルム
50 光電変換部
100 セル本体部
Claims (4)
- 光電変換部の裏面に裏面電極を有するセル本体部と、前記セル本体部の裏面電極に接するように配置された金属フィルムと、を有する太陽電池であって、
前記裏面電極には、算術平均粗さが0.1μmよりも大きく5μm以下の凹凸構造が設けられており、
前記金属フィルムは、前記裏面電極との接触面の算術平均粗さが、0.1μmよりも大きく10μm以下であり、
前記金属フィルムが前記セル本体部の裏面の面積の30%以上の領域を覆うように設けられている、太陽電池。 - 前記光電変換部は、裏面側の表面にピラミッド状の凹凸構造を有する結晶シリコン基板を含み、
前記裏面電極の凹凸構造が、前記結晶シリコン基板の裏面側表面の凹凸構造に追随するように形成されている、請求項1に記載の太陽電池。 - 請求項1または2に記載の太陽電池と、配線材と、裏面保護材と、封止材とを含み、
前記太陽電池のセル本体部の裏面に前記配線材が接続されており、
前記太陽電池の金属フィルムと前記裏面保護材との間に前記封止材が配置されている、
太陽電池モジュール。 - 前記金属フィルムが開口を有し、
前記封止材が、金属フィルムの開口を介して前記セル本体部の裏面と接している、請求項3に記載の太陽電池モジュール。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015131638 | 2015-06-30 | ||
JP2015131638 | 2015-06-30 | ||
PCT/JP2016/069471 WO2017002927A1 (ja) | 2015-06-30 | 2016-06-30 | 太陽電池および太陽電池モジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017002927A1 JPWO2017002927A1 (ja) | 2018-04-05 |
JP6404474B2 true JP6404474B2 (ja) | 2018-10-10 |
Family
ID=57608287
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017526436A Active JP6404474B2 (ja) | 2015-06-30 | 2016-06-30 | 太陽電池および太陽電池モジュール |
Country Status (4)
Country | Link |
---|---|
US (1) | US20180122964A1 (ja) |
JP (1) | JP6404474B2 (ja) |
CN (1) | CN107710419B (ja) |
WO (1) | WO2017002927A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9219174B2 (en) | 2013-01-11 | 2015-12-22 | Solarcity Corporation | Module fabrication of solar cells with low resistivity electrodes |
US10309012B2 (en) | 2014-07-03 | 2019-06-04 | Tesla, Inc. | Wafer carrier for reducing contamination from carbon particles and outgassing |
US9761744B2 (en) | 2015-10-22 | 2017-09-12 | Tesla, Inc. | System and method for manufacturing photovoltaic structures with a metal seed layer |
US11233162B2 (en) * | 2017-03-31 | 2022-01-25 | The Boeing Company | Method of processing inconsistencies in solar cell devices and devices formed thereby |
US10672919B2 (en) * | 2017-09-19 | 2020-06-02 | Tesla, Inc. | Moisture-resistant solar cells for solar roof tiles |
WO2019087918A1 (ja) * | 2017-10-31 | 2019-05-09 | 京セラ株式会社 | 太陽電池モジュール |
US11190128B2 (en) | 2018-02-27 | 2021-11-30 | Tesla, Inc. | Parallel-connected solar roof tile modules |
JP7206660B2 (ja) * | 2018-07-17 | 2023-01-18 | セイコーエプソン株式会社 | 光電変換素子、光電変換モジュールおよび電子機器 |
JP2021012118A (ja) | 2019-07-08 | 2021-02-04 | セイコーエプソン株式会社 | 時計用部品および時計 |
CN114038929B (zh) * | 2021-10-11 | 2023-12-05 | 泰州隆基乐叶光伏科技有限公司 | 一种背接触太阳能电池组件及其制造方法 |
CN116072739B (zh) * | 2022-08-05 | 2023-10-27 | 浙江晶科能源有限公司 | 太阳能电池及太阳能电池的制备方法、光伏组件 |
EP4318607A1 (en) | 2022-08-05 | 2024-02-07 | Zhejiang Jinko Solar Co., Ltd. | Solar cell and photovoltaic module |
CN117238987A (zh) | 2022-09-08 | 2023-12-15 | 浙江晶科能源有限公司 | 太阳能电池及光伏组件 |
CN117712199A (zh) | 2022-09-08 | 2024-03-15 | 浙江晶科能源有限公司 | 太阳能电池及光伏组件 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4059842B2 (ja) * | 2003-12-05 | 2008-03-12 | シャープ株式会社 | 太陽電池セルおよび太陽電池モジュール |
JP2007026694A (ja) * | 2005-07-12 | 2007-02-01 | Nisshin Steel Co Ltd | 固体高分子型燃料電池用セパレータ及び固体高分子型燃料電池 |
JP2008091225A (ja) * | 2006-10-03 | 2008-04-17 | Nisshin Steel Co Ltd | 固体高分子型燃料電池用セパレータ及びその製造方法 |
WO2008044357A1 (fr) * | 2006-10-10 | 2008-04-17 | Hitachi Chemical Company, Ltd. | Structure connectée et son procédé de fabrication |
CN102270669A (zh) * | 2007-05-09 | 2011-12-07 | 日立化成工业株式会社 | 导电体连接用部件、连接结构和太阳能电池组件 |
EP2153474B1 (en) * | 2007-05-28 | 2011-03-30 | Consiglio Nazionale delle Ricerche | Photovoltaic device with enhanced light harvesting |
JP5884077B2 (ja) * | 2010-12-29 | 2016-03-15 | パナソニックIpマネジメント株式会社 | 太陽電池及び太陽電池モジュール |
JP2012174735A (ja) * | 2011-02-17 | 2012-09-10 | Kaneka Corp | 薄膜太陽電池 |
JP2012204388A (ja) * | 2011-03-23 | 2012-10-22 | Sony Chemical & Information Device Corp | 太陽電池モジュール、太陽電池モジュールの製造方法、タブ線が巻装されたリール巻装体 |
US20120255603A1 (en) * | 2011-04-08 | 2012-10-11 | Young-June Yu | Photovoltaic structures and methods of fabricating them |
US9871152B2 (en) * | 2012-06-13 | 2018-01-16 | Mitsubishi Electric Corporation | Solar cell and manufacturing method thereof |
-
2016
- 2016-06-30 CN CN201680037919.5A patent/CN107710419B/zh active Active
- 2016-06-30 WO PCT/JP2016/069471 patent/WO2017002927A1/ja active Application Filing
- 2016-06-30 JP JP2017526436A patent/JP6404474B2/ja active Active
-
2017
- 2017-12-28 US US15/856,911 patent/US20180122964A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN107710419B (zh) | 2020-11-03 |
US20180122964A1 (en) | 2018-05-03 |
CN107710419A (zh) | 2018-02-16 |
WO2017002927A1 (ja) | 2017-01-05 |
JPWO2017002927A1 (ja) | 2018-04-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6404474B2 (ja) | 太陽電池および太陽電池モジュール | |
US10090428B2 (en) | Solar cell and method for manufacturing the same | |
JP6592447B2 (ja) | 太陽電池および太陽電池モジュール、ならびに太陽電池および太陽電池モジュールの製造方法 | |
JP2009135338A (ja) | 太陽電池及び太陽電池の製造方法 | |
JP2009152222A (ja) | 太陽電池素子の製造方法 | |
JP6568518B2 (ja) | 結晶シリコン系太陽電池の製造方法、および結晶シリコン系太陽電池モジュールの製造方法 | |
JP5739076B2 (ja) | 太陽電池モジュール及びその製造方法 | |
JPWO2014054600A1 (ja) | 結晶シリコン太陽電池の製造方法、太陽電池モジュールの製造方法、結晶シリコン太陽電池並びに太陽電池モジュール | |
JP6564874B2 (ja) | 結晶シリコン系太陽電池の製造方法および結晶シリコン系太陽電池モジュールの製造方法 | |
WO2017217219A1 (ja) | 太陽電池及びその製造方法、並びに太陽電池モジュール | |
JP2013161822A (ja) | 太陽電池およびその製造方法、太陽電池モジュール | |
JP2016122749A (ja) | 太陽電池素子および太陽電池モジュール | |
JPWO2016111339A1 (ja) | 太陽電池およびその製造方法、ならびに太陽電池モジュール | |
JP4902472B2 (ja) | 太陽電池及び太陽電池モジュール | |
JP6656225B2 (ja) | 太陽電池およびその製造方法、ならびに太陽電池モジュール | |
JP6141670B2 (ja) | 太陽電池の製造方法 | |
US9761752B2 (en) | Solar cell, solar cell module, method for manufacturing solar cell, and method for manufacturing solar cell module | |
JP6564219B2 (ja) | 結晶シリコン太陽電池およびその製造方法、ならびに太陽電池モジュール | |
JP6143520B2 (ja) | 結晶シリコン系太陽電池およびその製造方法 | |
WO2015145886A1 (ja) | 電極パターンの形成方法及び太陽電池の製造方法 | |
JP6294694B2 (ja) | 太陽電池およびその製造方法、ならびに太陽電池モジュール | |
WO2018055847A1 (ja) | 太陽電池及びその製造方法、並びに太陽電池モジュール | |
JP6474578B2 (ja) | 太陽電池モジュール及びその製造方法 | |
WO2017056370A1 (ja) | 太陽電池セルおよび太陽電池セルの製造方法 | |
WO2013128566A1 (ja) | 太陽電池及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20171220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180410 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20180612 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180809 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180821 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180912 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6404474 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |