JP6329491B2 - 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 - Google Patents

荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 Download PDF

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JP6329491B2
JP6329491B2 JP2014561548A JP2014561548A JP6329491B2 JP 6329491 B2 JP6329491 B2 JP 6329491B2 JP 2014561548 A JP2014561548 A JP 2014561548A JP 2014561548 A JP2014561548 A JP 2014561548A JP 6329491 B2 JP6329491 B2 JP 6329491B2
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cmut
dielectric layer
charge
voltage
voltage source
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JP2015513272A (ja
JP2015513272A5 (https=
Inventor
フィッシェル ヘオルヘ アンソニー ブロック
フィッシェル ヘオルヘ アンソニー ブロック
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Koninklijke Philips NV
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Koninklijke Philips NV
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes

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  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Mechanical Engineering (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Pathology (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Micromachines (AREA)
  • Surgical Instruments (AREA)
JP2014561548A 2012-03-13 2013-03-01 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 Active JP6329491B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261610130P 2012-03-13 2012-03-13
US61/610,130 2012-03-13
PCT/IB2013/051631 WO2013136212A1 (en) 2012-03-13 2013-03-01 Capacitive micro-machined ultrasound transducer device with charging voltage source

Publications (3)

Publication Number Publication Date
JP2015513272A JP2015513272A (ja) 2015-04-30
JP2015513272A5 JP2015513272A5 (https=) 2016-04-21
JP6329491B2 true JP6329491B2 (ja) 2018-05-23

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JP2014561548A Active JP6329491B2 (ja) 2012-03-13 2013-03-01 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置

Country Status (5)

Country Link
US (1) US9950342B2 (https=)
EP (1) EP2825856B1 (https=)
JP (1) JP6329491B2 (https=)
CN (1) CN104160250B (https=)
WO (1) WO2013136212A1 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6011235B2 (ja) * 2012-10-17 2016-10-19 セイコーエプソン株式会社 超音波測定装置、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
EP3052250B1 (en) * 2013-09-27 2022-03-30 Koninklijke Philips N.V. Ultrasound transducer assembly and method for transmitting and receiving ultrasound waves
WO2016083273A1 (en) * 2014-11-25 2016-06-02 Koninklijke Philips N.V. Ultrasound system and method
WO2017001965A1 (en) 2015-07-02 2017-01-05 Koninklijke Philips N.V. Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods
US11097312B2 (en) 2015-08-11 2021-08-24 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
US9987661B2 (en) * 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US11864947B2 (en) 2016-12-22 2024-01-09 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
US11190868B2 (en) * 2017-04-18 2021-11-30 Massachusetts Institute Of Technology Electrostatic acoustic transducer utilized in a headphone device or an earbud
US11026662B2 (en) * 2018-01-11 2021-06-08 Siemens Medical Solutions Usa, Inc. Ultrasound transmit/receive for pulse inversion
FR3077162B1 (fr) * 2018-01-22 2020-02-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Transducteur piezoelectrique
CN114175682A (zh) * 2019-07-26 2022-03-11 维蒙股份公司 Cmut换能器和制造方法
JP2021038981A (ja) * 2019-09-02 2021-03-11 株式会社日立製作所 容量検出型超音波トランスデューサを使用した計測方法
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
DE102021200003A1 (de) * 2021-01-04 2022-07-07 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zur Verwendung eines Halbleiterbauelements
JP7791115B2 (ja) * 2021-01-12 2025-12-23 富士フイルム株式会社 超音波内視鏡及び超音波内視鏡の組み立て方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
JP4746291B2 (ja) 2004-08-05 2011-08-10 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
JP4434109B2 (ja) * 2005-09-05 2010-03-17 株式会社日立製作所 電気・音響変換素子
JP4676988B2 (ja) * 2005-09-05 2011-04-27 株式会社日立メディコ 超音波撮像装置
JP4812771B2 (ja) * 2005-11-18 2011-11-09 株式会社日立メディコ 超音波診断装置、超音波診断装置の較正方法
US7599254B2 (en) 2005-12-20 2009-10-06 Siemens Medical Solutions Usa, Inc. Transducer static discharge methods and apparatus
JP4852356B2 (ja) * 2006-06-27 2012-01-11 株式会社日立メディコ 超音波診断装置
JP4839176B2 (ja) 2006-10-12 2011-12-21 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ及び超音波診断装置
KR20130014618A (ko) * 2006-11-03 2013-02-07 리써치 트라이앵글 인스티튜트 굴곡 모드 압전 트랜스듀서를 사용하는 보강된 초음파 촬영 프로브
WO2009073562A1 (en) 2007-12-03 2009-06-11 Kolo Technologies, Inc. Dual-mode operation micromachined ultrasonic transducer
JP2009272824A (ja) * 2008-05-02 2009-11-19 Olympus Medical Systems Corp 超音波振動子セル、超音波振動子および超音波内視鏡
WO2010000020A1 (en) 2008-06-30 2010-01-07 Cathrx Ltd A catheter
US8315125B2 (en) * 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
EP3079837B1 (en) * 2013-12-12 2023-02-08 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device

Also Published As

Publication number Publication date
EP2825856B1 (en) 2023-09-27
JP2015513272A (ja) 2015-04-30
WO2013136212A1 (en) 2013-09-19
US20150016227A1 (en) 2015-01-15
CN104160250A (zh) 2014-11-19
CN104160250B (zh) 2017-10-27
EP2825856A1 (en) 2015-01-21
US9950342B2 (en) 2018-04-24

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