JP2015513272A5 - - Google Patents

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Publication number
JP2015513272A5
JP2015513272A5 JP2014561548A JP2014561548A JP2015513272A5 JP 2015513272 A5 JP2015513272 A5 JP 2015513272A5 JP 2014561548 A JP2014561548 A JP 2014561548A JP 2014561548 A JP2014561548 A JP 2014561548A JP 2015513272 A5 JP2015513272 A5 JP 2015513272A5
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JP
Japan
Prior art keywords
cmut
voltage source
dielectric layer
cmut device
control unit
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JP2014561548A
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English (en)
Japanese (ja)
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JP6329491B2 (ja
JP2015513272A (ja
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Priority claimed from PCT/IB2013/051631 external-priority patent/WO2013136212A1/en
Publication of JP2015513272A publication Critical patent/JP2015513272A/ja
Publication of JP2015513272A5 publication Critical patent/JP2015513272A5/ja
Application granted granted Critical
Publication of JP6329491B2 publication Critical patent/JP6329491B2/ja
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JP2014561548A 2012-03-13 2013-03-01 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置 Active JP6329491B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261610130P 2012-03-13 2012-03-13
US61/610,130 2012-03-13
PCT/IB2013/051631 WO2013136212A1 (en) 2012-03-13 2013-03-01 Capacitive micro-machined ultrasound transducer device with charging voltage source

Publications (3)

Publication Number Publication Date
JP2015513272A JP2015513272A (ja) 2015-04-30
JP2015513272A5 true JP2015513272A5 (https=) 2016-04-21
JP6329491B2 JP6329491B2 (ja) 2018-05-23

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ID=48142836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014561548A Active JP6329491B2 (ja) 2012-03-13 2013-03-01 荷電電圧源を有する容量性マイクロマシン加工超音波トランスデューサ装置

Country Status (5)

Country Link
US (1) US9950342B2 (https=)
EP (1) EP2825856B1 (https=)
JP (1) JP6329491B2 (https=)
CN (1) CN104160250B (https=)
WO (1) WO2013136212A1 (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6011235B2 (ja) * 2012-10-17 2016-10-19 セイコーエプソン株式会社 超音波測定装置、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
US10743840B2 (en) * 2013-09-27 2020-08-18 Koninklijke Philips N.V. Ultrasound transducer assembly and method for transmitting and receiving ultrasound waves
WO2016083273A1 (en) * 2014-11-25 2016-06-02 Koninklijke Philips N.V. Ultrasound system and method
US11766237B2 (en) 2015-07-02 2023-09-26 Philips Image Guided Therapy Corporation Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods for multiple different intravascular sensing capabilities
US11097312B2 (en) 2015-08-11 2021-08-24 Koninklijke Philips N.V. Capacitive micromachined ultrasonic transducers with increased lifetime
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
CN110100294B (zh) * 2016-12-22 2022-03-29 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
CN110325293B (zh) * 2016-12-22 2021-06-22 皇家飞利浦有限公司 电容式射频微机电开关的系统和操作方法
US10986435B2 (en) * 2017-04-18 2021-04-20 Massachusetts Institute Of Technology Electrostatic acoustic transducer utilized in a hearing aid or audio processing system
US11026662B2 (en) * 2018-01-11 2021-06-08 Siemens Medical Solutions Usa, Inc. Ultrasound transmit/receive for pulse inversion
FR3077162B1 (fr) * 2018-01-22 2020-02-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Transducteur piezoelectrique
US12226799B2 (en) 2019-07-26 2025-02-18 Vermon Sa Method of manufacturing capacitive micromachined ultrasonic transducer (CMUT)
JP2021038981A (ja) * 2019-09-02 2021-03-11 株式会社日立製作所 容量検出型超音波トランスデューサを使用した計測方法
US11738369B2 (en) * 2020-02-17 2023-08-29 GE Precision Healthcare LLC Capactive micromachined transducer having a high contact resistance part
DE102021200003A1 (de) * 2021-01-04 2022-07-07 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zur Verwendung eines Halbleiterbauelements
CN116709965B (zh) * 2021-01-12 2026-03-24 富士胶片株式会社 超声波内窥镜及超声波内窥镜的组装方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6443901B1 (en) * 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
JP4746291B2 (ja) 2004-08-05 2011-08-10 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
WO2007029357A1 (ja) * 2005-09-05 2007-03-15 Hitachi Medical Corporation 超音波撮像装置
JP4434109B2 (ja) * 2005-09-05 2010-03-17 株式会社日立製作所 電気・音響変換素子
US8517948B2 (en) * 2005-11-18 2013-08-27 Hitachi Medical Corporation Ultrasound diagnostic apparatus and method of calibrating the same
US7599254B2 (en) * 2005-12-20 2009-10-06 Siemens Medical Solutions Usa, Inc. Transducer static discharge methods and apparatus
JP4852356B2 (ja) 2006-06-27 2012-01-11 株式会社日立メディコ 超音波診断装置
JP4839176B2 (ja) 2006-10-12 2011-12-21 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ及び超音波診断装置
WO2008054395A1 (en) 2006-11-03 2008-05-08 Research Triangle Institute Enhanced ultrasound imaging probes using flexure mode piezoelectric transducers
US8559274B2 (en) 2007-12-03 2013-10-15 Kolo Technologies, Inc. Dual-mode operation micromachined ultrasonic transducer
JP2009272824A (ja) 2008-05-02 2009-11-19 Olympus Medical Systems Corp 超音波振動子セル、超音波振動子および超音波内視鏡
WO2010000020A1 (en) 2008-06-30 2010-01-07 Cathrx Ltd A catheter
US8315125B2 (en) * 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
JP6482558B2 (ja) * 2013-12-12 2019-03-13 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． モノリシックに集積された三電極ｃｍｕｔ装置

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