JP6325589B2 - Suction pad - Google Patents

Suction pad Download PDF

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Publication number
JP6325589B2
JP6325589B2 JP2016043610A JP2016043610A JP6325589B2 JP 6325589 B2 JP6325589 B2 JP 6325589B2 JP 2016043610 A JP2016043610 A JP 2016043610A JP 2016043610 A JP2016043610 A JP 2016043610A JP 6325589 B2 JP6325589 B2 JP 6325589B2
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Prior art keywords
shaft
pad
air
guide
vacuum
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JP2017159378A (en
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達也 北澤
達也 北澤
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Nihon Pisco Co Ltd
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Nihon Pisco Co Ltd
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Priority to JP2016043610A priority Critical patent/JP6325589B2/en
Priority to KR1020170026062A priority patent/KR102535641B1/en
Priority to TW106106933A priority patent/TWI705037B/en
Priority to CN201710128425.4A priority patent/CN107165923B/en
Publication of JP2017159378A publication Critical patent/JP2017159378A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B47/00—Suction cups for attaching purposes; Equivalent means using adhesives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Description

本発明は、吸着用パッドに適用して有効な技術に関する。   The present invention relates to a technique effective when applied to a suction pad.

韓国公開特許第１０−２００６−００８２２１３号公報（以下「特許文献１」という）には、イジェクタピンと、イジェクタピンを指弾するスプリングとを備える機械式の真空パッドが記載されている。この真空パッドでは、フリー状態において本体部からスプリングで指弾されたシャフトがパッド部から飛び出している。   Korean Published Patent Application No. 10-2006-0082213 (hereinafter referred to as “Patent Document 1”) describes a mechanical vacuum pad including an ejector pin and a spring for fingering the ejector pin. In this vacuum pad, in a free state, a shaft fingered by a spring from the main body protrudes from the pad.

韓国公開特許第１０−２００６−００８２２１３号公報Korean Published Patent No. 10-2006-0082213

吸着用パッド（真空パッドともいう）の内部空間が真空であるとき、その内部空間にエア（以下「真空破壊エア」という）を供給することで真空が破壊される。真空吸引によりワークを吸着している吸着用パッドからワークの離脱を確実に行うためには、例えば圧力、流量といった吐出力、吐出時間などによる真空破壊エアを強くすることが考えられる。また、ワークと接触するパッド部に貼り付き防止加工（例えば、粗化、コーティング）を施して、パッド部の貼り付き力を下げることで、真空破壊エアを弱くすることも考えられる。   When the internal space of the suction pad (also referred to as a vacuum pad) is vacuum, the vacuum is broken by supplying air (hereinafter referred to as “vacuum breaking air”) to the internal space. In order to reliably remove the workpiece from the suction pad that is sucking the workpiece by vacuum suction, for example, it is conceivable to increase the vacuum breaking air due to the discharge force such as pressure and flow rate, the discharge time, and the like. It is also conceivable that the vacuum breaking air can be weakened by applying an anti-sticking process (for example, roughening or coating) to the pad part that comes into contact with the workpiece to reduce the sticking force of the pad part.

しかしながら、真空破壊エアを強くした場合、離脱後のワークが吹き飛ばされるおそれがある。他方、真空破壊エアを弱くした場合、例えば一部が貼り付いたままでワークを持ち帰ってしまうなどワークの離脱が不安定になるおそれがある。特に、ワークが小型化、軽量化された半導体チップのときに離脱が不安定になりやすい。このため、真空破壊エアの圧力と流量と吐出時間を微調整することが考えられるが、微調整のために工程数が増え、そのための制御機器が必要となってしまう。   However, when the vacuum breaking air is strengthened, the workpiece after separation may be blown away. On the other hand, when the vacuum breaking air is weakened, for example, the workpiece may be brought home with a part attached, and the workpiece may be unsettled. In particular, detachment tends to be unstable when the workpiece is a semiconductor chip that is reduced in size and weight. For this reason, it is conceivable to finely adjust the pressure, flow rate, and discharge time of the vacuum breaking air. However, the number of processes increases for fine adjustment, and a control device for that is required.

また、特許文献１に記載のような真空パッドでは、パッド部にワークを接触させる際に問題が生じてしまう。具体的には、パッド部にワークが接触するまで、ワーク自身で飛び出しているシャフトを押し上げて、シャフトを本体部へ引っ込めなければならず、その際にワークがダメージを受けるおそれがある。   Moreover, in the vacuum pad as described in Patent Document 1, a problem occurs when a work is brought into contact with the pad portion. Specifically, the shaft protruding from the workpiece itself must be pushed up until the workpiece contacts the pad portion, and the shaft must be retracted into the main body portion. In this case, the workpiece may be damaged.

本発明の目的は、吸着されるワークを保護し、離脱を安定して行うことのできる吸着用パッドを提供することにある。本発明の前記ならびにその他の目的と新規な特徴は、本明細書の記述および添付図面から明らかになるであろう。   An object of the present invention is to provide a suction pad that protects a work to be sucked and can be stably detached. The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

本願において開示される発明のうち、代表的なものの概要を簡単に説明すれば、次のとおりである。   Of the inventions disclosed in the present application, the outline of typical ones will be briefly described as follows.

本発明の一解決手段に係る吸着用パッドは、内部空間を有する本体部と、前記内部空間と連通するパッド部と、先端部を有し、前記先端部を前記パッド部に向けて前記内部空間に設けられ、前記先端部が前記パッド部の内外へ往復動するシャフト部と、前記パッド部にエア出入がない状態において、前記先端部を前記パッド部内に引き込んで前記シャフト部を保持するシャフト弾性部と、前記内部空間と連通するエア出入部と、前記内部空間内で前記シャフト部と前記エア出入部との間に設けられるピストン部とを備え、前記本体部は、前記先端部が挿入されるガイド貫通部を有するガイド本体部を更に備え、前記ガイド貫通部は前記パッド部の開口と連通しており、前記シャフト部は、前記先端部の軸線方向に貫通するシャフト貫通部を有するとともに、前記先端部と反対側の所定部位が前記ガイド貫通部よりも大径となっており、前記パッド部にエア出入がない状態では、前記シャフト弾性部によって、前記シャフト部の前記所定部位における前記ガイド本体部と接離する側が、前記ガイド本体部から離れており、真空エアが吸引されると、前記シャフト部の前記所定部位における前記ピストン部と接離する側から前記ピストン部が離れることで、前記シャフト貫通部内、前記シャフト部の外周面と前記内部空間の内周面との間、前記ピストン部の内部、および前記エア出入部に、前記真空エアのエア流路が形成されて前記パッド部の開口に吸引力が発生し、ワークを吸着する構成であり、真空破壊エアが供給されると、前記シャフト部の前記所定部位における前記ピストン部と接離する側に前記ピストン部が接して前記シャフト部を押すことで、前記シャフト貫通部が閉じた状態で前記シャフト部が動いている期間、前記ガイド貫通部の内周面と前記シャフト部の外周面との間、前記ピストン部の内部、および前記エア出入部に、前記真空破壊エアのエア流路が形成されて前記パッド部の開口から前記真空破壊エアが吐出し、前記ワークが離脱する構成であり、引き続き前記真空破壊エアが供給されると、前記シャフト貫通部が閉じた状態で前記シャフト部が動くことで、前記先端部が前記パッド部の開口から飛び出した後に、前記シャフト部の前記所定部位における前記ガイド本体部と接離する側が、前記ガイド本体部に接して前記ガイド貫通部が閉じた状態となり、前記ガイド貫通部が閉じた状態となることで、前記真空破壊エアのエア流路が塞がって前記真空破壊エアの吐出が停止する構成であることを特徴とする。
この構成によれば、吸着されるワークを保護し、離脱を安定して行うことができる。 The suction pad according to one solution of the present invention has a main body portion having an internal space, a pad portion communicating with the internal space, a tip portion, and the tip space toward the pad portion. A shaft portion that reciprocates the inside and outside of the pad portion, and a shaft elasticity that holds the shaft portion by drawing the tip portion into the pad portion when there is no air in / out of the pad portion. And a piston part provided between the shaft part and the air inlet / outlet part in the inner space, and the body part is inserted with the tip part. that the guide penetrating portion further includes a guide body having a said guide penetrating portion is in communication with the opening of the pad portion, the shaft portion may have a shaft penetration portion penetrating in the axial direction of the tip Rutotomoni, wherein it is predetermined portion of the front end portion and the opposite side is a larger diameter than the guide penetrating portion, in the absence of air and from the said pad portion by the shaft elastic unit, the predetermined portion of the shaft portion The side of the shaft that contacts and separates from the guide body is separated from the guide body, and when vacuum air is sucked, the piston separates from the side of the shaft portion that contacts and separates from the piston. Thus, an air flow path for the vacuum air is formed in the shaft penetrating portion, between the outer peripheral surface of the shaft portion and the inner peripheral surface of the internal space, in the piston portion, and in the air inlet / outlet portion. When the suction force is generated at the opening of the pad portion and the workpiece is adsorbed, when the vacuum breaking air is supplied, the piston portion at the predetermined portion of the shaft portion Said piston portion is in contact with the side approaching and moving away from by pressing the shaft portion, the period in which the shaft penetration portion is moving the shaft portion in the closed state, the inner circumferential surface of the guide penetrating portion and said shaft portion An air flow path for the vacuum breaking air is formed between the outer peripheral surface, the inside of the piston portion, and the air inlet / outlet portion, and the vacuum breaking air is discharged from the opening of the pad portion, and the workpiece is detached. When the vacuum breaking air is continuously supplied, the shaft portion moves in a state where the shaft penetrating portion is closed, so that the tip portion protrudes from the opening of the pad portion , and then the shaft portion The side of the predetermined portion that is in contact with and away from the guide main body is in a state where the guide through portion is closed in contact with the guide main body , and the guide through portion is closed . The structure is characterized in that the discharge of the vacuum breaking air is stopped by closing the air flow path of the vacuum breaking air .
According to this structure, the workpiece | work attracted | sucked can be protected and detachment | leave can be performed stably.

ここで、前記シャフト部のストローク量が、前記シャフト部の前記先端部が前記パッド部外へ飛び出す最大飛び出し量よりも大きいことがより好ましい。これによれば、パッド部から真空破壊エアを吐出した状態の後に、仮にパッド部にワークが貼り付いていてもシャフト部を用いてワークの離脱を安定して行うことができる。   Here, it is more preferable that a stroke amount of the shaft portion is larger than a maximum protrusion amount at which the tip portion of the shaft portion protrudes out of the pad portion. According to this, after the vacuum breaking air is discharged from the pad portion, the workpiece can be stably detached using the shaft portion even if the workpiece is attached to the pad portion.

また、前記内部空間と連通するエア出入部と、前記内部空間内で前記シャフト部と前記エア出入部との間に設けられるピストン部を更に備えることがより好ましい。これによれば、シャフト部をシャフト弾性部に抗してパッド部側へ押し付けることができる。   It is more preferable to further include an air inlet / outlet portion communicating with the inner space and a piston portion provided between the shaft portion and the air inlet / outlet portion in the inner space. According to this, the shaft portion can be pressed against the pad portion side against the shaft elastic portion.

また、前記所定部位は、フランジ部であることがより好ましい。これによれば、ワークの離脱後にはフランジ部によりガイド貫通部（エア流路）が塞がれ、パッド部からのエアの吐出を停止することができる。 The predetermined portion is preferably a flange portion. According to this, after the workpiece is detached, the guide penetration portion (air flow path) is blocked by the flange portion, and the discharge of air from the pad portion can be stopped.

本願において開示される発明のうち、代表的なものによって得られる効果を簡単に説明すれば、次のとおりである。本発明の一解決手段に係る吸着用パッドによれば、吸着されるワークを保護し、離脱を安定して行うことができる。   Of the inventions disclosed in the present application, effects obtained by typical ones will be briefly described as follows. According to the suction pad according to the solving means of the present invention, it is possible to protect the work to be sucked and stably perform the separation.

本発明の一実施形態に係る吸着用パッドの断面図である。It is sectional drawing of the pad for adsorption | suction which concerns on one Embodiment of this invention. 図１に続く動作工程中の吸着用パッドの断面図である。It is sectional drawing of the pad for adsorption | suction in the operation | movement process following FIG. 図２に続く動作工程中の吸着用パッドの断面図である。FIG. 3 is a cross-sectional view of the suction pad during the operation process following FIG. 2. 図３に続く動作工程中の吸着用パッドの断面図である。FIG. 4 is a cross-sectional view of the suction pad during the operation process following FIG. 3. 図４に続く動作工程中の吸着用パッドの断面図である。FIG. 5 is a cross-sectional view of the suction pad during the operation process following FIG. 4. 吸着用パッドの動作状態を説明するための図表である。It is a chart for demonstrating the operation state of a suction pad.

以下の本発明における実施形態では、構成要素の数（個数、数値、量、範囲などを含む）については、特に明示した場合や原理的に明らかに特定の数に限定される場合などを除き、その特定の数に限定されるものではなく、特定の数以上でも以下でも良い。また、構成要素などの形状に言及するときは、特に明示した場合および原理的に明らかにそうではないと考えられる場合などを除き、実質的にその形状などに近似または類似するものなどを含むものとする。   In the following embodiments of the present invention, the number of components (including the number, numerical value, quantity, range, etc.), unless specifically specified or clearly limited to a specific number in principle, etc. It is not limited to the specific number, and it may be more or less than the specific number. In addition, when referring to the shape of a component, etc., it shall include substantially the same or similar to the shape, etc., unless explicitly stated or in principle otherwise considered otherwise .

本発明の一実施形態に係る吸着用パッド１０について、図面を参照して説明する。図１乃至図５は、動作工程中の吸着用パッド１０の断面図である。図６は、吸着用パッド１０の動作状態を説明するための図表であり、ポジション１乃至５はそれぞれ図１乃至５に対応している。   A suction pad 10 according to an embodiment of the present invention will be described with reference to the drawings. 1 to 5 are cross-sectional views of the suction pad 10 during the operation process. FIG. 6 is a chart for explaining the operating state of the suction pad 10, and positions 1 to 5 correspond to FIGS. 1 to 5, respectively.

まず、吸着用パッド１０の構成を概略して説明する。吸着用パッド１０は、例えば、真空を用いた吸着搬送の分野に適用され、例えばネジ機構や継手によってチューブ（エア流路）を介してエア供給源（図示せず）と連結される。エア供給源は、例えば、切替弁（ソレノイドバルブ等）、調圧装置、真空ポンプ、およびコンプレッサを備え、連結された吸着用パッド１０に対してエア吸引、供給可能な構成である。したがって、吸着用パッド１０は、エア供給源からの真空吸引（エア吸引ともいう）によってワークＷ（例えば半導体チップ）を吸着したり、エア供給によってワークＷを離脱させたりすることができる。   First, the configuration of the suction pad 10 will be schematically described. The suction pad 10 is applied to, for example, the field of suction conveyance using vacuum, and is connected to an air supply source (not shown) via a tube (air flow path) by, for example, a screw mechanism or a joint. The air supply source includes, for example, a switching valve (solenoid valve or the like), a pressure regulator, a vacuum pump, and a compressor, and has a configuration capable of sucking and supplying air to the connected suction pad 10. Therefore, the suction pad 10 can suck the workpiece W (for example, a semiconductor chip) by vacuum suction (also referred to as air suction) from an air supply source, or can release the workpiece W by air supply.

ここで、本実施形態では、エア供給源によって吸引されるエアを「真空エア」とし、供給されるエアを「真空破壊エア」として説明する。なお、真空吸引は、周囲の高い圧力に比較して低い圧力を発生させて吸引することであり、必ずしも１気圧以下の真空とは限らない。   Here, in this embodiment, the air sucked by the air supply source will be described as “vacuum air”, and the supplied air will be described as “vacuum breaking air”. Note that the vacuum suction is suction by generating a lower pressure than the surrounding high pressure, and is not necessarily a vacuum of 1 atm or less.

吸着用パッド１０は、本体部１１と、パッド部１２と、シャフト部１３と、シャフト弾性部１４と、ピストン部１５と、を備えて構成される。本実施形態では、吸着用パッド１０が軸線Ｘを有しており、図に示す軸線Ｘの一方を上方、他方を下方として説明する場合がある。   The suction pad 10 includes a main body part 11, a pad part 12, a shaft part 13, a shaft elastic part 14, and a piston part 15. In the present embodiment, the suction pad 10 has an axis X, and in some cases, one of the axes X shown in the figure is described as the upper side and the other as the lower side.

本体部１１は、内部空間１６を有する。内部空間１６は、主にシャフト部１３が存在するシャフト室１６Ａと、主にピストン部１５が存在するピストン室１６Ｂと、を有する。シャフト室１６Ａとピストン室１６Ｂは隣接して連通している。このような内部空間１６は、真空エアによって真空状態となる。真空状態は、真空破壊エアによって破壊される。このため、内部空間１６は、真空エアおよび真空破壊エアが流れるエア流路ともいえる。   The main body 11 has an internal space 16. The internal space 16 has a shaft chamber 16A in which the shaft portion 13 mainly exists and a piston chamber 16B in which the piston portion 15 mainly exists. The shaft chamber 16A and the piston chamber 16B communicate with each other adjacently. Such an internal space 16 is brought into a vacuum state by the vacuum air. The vacuum state is broken by the vacuum breaking air. For this reason, the internal space 16 can be said to be an air flow path through which vacuum air and vacuum breaking air flow.

本体部１１は、上方側に内部空間１６のピストン室１６Ｂと連通するエア出入部１１Ａを有する。エア出入部１１Ａは、エア流路となるエア貫通部１６Ｃを有する。エア出入部１１Ａで吸着用パッド１０はエア供給源と連結される。また、本体部１１は、パッド部１２と連通し、シャフト部１３の先端部１３Ａが挿入されるガイド貫通部１６Ｄを有する。このガイド貫通部１６Ｄは、内部空間１６のシャフト室１６Ａと連通し、エア流路となる。なお、エア貫通部１６Ｃおよびガイド貫通部１６Ｄもエア流路となるので、内部空間１６に含まれる。   The main body 11 has an air inlet / outlet portion 11 </ b> A communicating with the piston chamber 16 </ b> B of the internal space 16 on the upper side. The air inlet / outlet portion 11A has an air penetration portion 16C serving as an air flow path. The suction pad 10 is connected to an air supply source at the air inlet / outlet portion 11A. Further, the main body portion 11 communicates with the pad portion 12 and has a guide through portion 16D into which the tip portion 13A of the shaft portion 13 is inserted. The guide penetration portion 16D communicates with the shaft chamber 16A of the internal space 16 and serves as an air flow path. Note that the air penetration portion 16C and the guide penetration portion 16D are also air flow paths and are included in the internal space 16.

パッド部１２は、リップ１２Ａ（開口）を有し、内部空間１６と連通して本体部１１の下方側に設けられる。すなわち、パッド部１２と内部空間１６とが連通している。このため、本体部１１の内部空間１６に限らずパッド部１２の内部空間を含めて、吸着用パッド１０全体の内部空間であるといえる。   The pad portion 12 has a lip 12 </ b> A (opening), communicates with the internal space 16, and is provided below the main body portion 11. That is, the pad portion 12 and the internal space 16 communicate with each other. For this reason, it can be said that it is not only the internal space 16 of the main body part 11 but also the internal space of the pad 10 for suction including the internal space of the pad part 12.

シャフト部１３は、先端部１３Ａおよび保持部１３Ｂを有し、先端部１３Ａをパッド部１２に向けて、内部空間１６に設けられる。また、シャフト部１３は、先端部１３Ａと反対側にガイド貫通部１６Ｄよりも大径のフランジ部１３Ｃを有する。このため、フランジ部１３Ｃは、ガイド貫通部１６Ｄを塞ぐことができる。   The shaft portion 13 has a tip portion 13A and a holding portion 13B, and is provided in the internal space 16 with the tip portion 13A facing the pad portion 12. The shaft portion 13 has a flange portion 13C having a diameter larger than that of the guide penetration portion 16D on the side opposite to the tip portion 13A. For this reason, the flange part 13C can block the guide penetration part 16D.

シャフト部１３は、先端部１３Ａがパッド部１２の内外へ往復動する。本実施形態では、シャフト部１３が往復動する際に、シャフト部１３の先端部１３Ａおよび保持部１３Ｂが本体部１１（ガイド本体部１１Ｂ）のガイド貫通部１６Ｄ内で摺動する。なお、ガイド貫通部１６Ｄのエア流路を明確にするために、図１などでは、軸線Ｘの左側に対して右側の先端部１３Ａおよび保持部１３Ｂを細く図示している。   The shaft portion 13 reciprocates at the tip portion 13 </ b> A in and out of the pad portion 12. In the present embodiment, when the shaft portion 13 reciprocates, the distal end portion 13A and the holding portion 13B of the shaft portion 13 slide in the guide penetration portion 16D of the main body portion 11 (guide main body portion 11B). In order to clarify the air flow path of the guide penetration portion 16D, in FIG. 1 and the like, the right end portion 13A and the holding portion 13B are illustrated with respect to the left side of the axis X.

シャフト弾性部１４は、吸着用パッド１０がフリー状態（エア出入がない状態）において、先端部１３Ａをパッド部１２内（内部空間１６内）に引き込んでシャフト部１３を保持するように設けられる（図１参照）。具体的には、シャフト弾性部１４は、ガイド貫通部１６Ｄ内において、本体部１１の保持部１１Ｄ（段付部）と、シャフト部１３の保持部１３Ｂ（段付部）との間に設けられる。   The shaft elastic portion 14 is provided so as to hold the shaft portion 13 by drawing the tip portion 13A into the pad portion 12 (inside the internal space 16) when the suction pad 10 is in a free state (a state where there is no air in / out). (See FIG. 1). Specifically, the shaft elastic portion 14 is provided between the holding portion 11D (stepped portion) of the main body portion 11 and the holding portion 13B (stepped portion) of the shaft portion 13 in the guide penetration portion 16D. .

このような吸着用パッド１０によれば、シャフト部１３の先端部１３Ａをパッド部１２内に引き込んだ状態で、パッド部１２にワークＷを吸着させることができる（図３参照）。すなわち、シャフト部１３によるワークＷのダメージをなくして、吸着されるワークＷを保護することができる。   According to such a suction pad 10, the work W can be sucked to the pad portion 12 in a state where the tip portion 13 </ b> A of the shaft portion 13 is drawn into the pad portion 12 (see FIG. 3). That is, the workpiece W is prevented from being damaged by the shaft portion 13 and can be protected.

また、吸着用パッド１０は、シャフト弾性部１４の伸縮動（上下動）に伴って、シャフト部１３が往復動（上下動）するように構成される。本実施形態では、シャフト部１３とエア出入部１１Ａとの間であって内部空間１６に設けられるピストン部１５によって、シャフト部１３をシャフト弾性部１４に抗してパッド部１２側へ押し付けることができる。このピストン部１５は、推力によって、往復動（上下動）する。例えば、シャフト部１３の先端部１３Ａがパッド部１２から飛び出すときは、真空破壊エアの作用（シャフト室１６Ａとピストン室１６Ｂとの間で発生する圧力差）によりピストン部１５を介してシャフト部１３が押し出されて下動し、シャフト弾性部１４が縮んだ状態となる。   Further, the suction pad 10 is configured such that the shaft portion 13 reciprocates (up-and-down movement) as the shaft elastic portion 14 expands and contracts (up-and-down movement). In the present embodiment, the piston portion 15 provided between the shaft portion 13 and the air inlet / outlet portion 11A and provided in the internal space 16 can press the shaft portion 13 against the shaft elastic portion 14 toward the pad portion 12 side. it can. The piston portion 15 reciprocates (vertically moves) by thrust. For example, when the tip portion 13A of the shaft portion 13 jumps out of the pad portion 12, the shaft portion 13 is interposed via the piston portion 15 by the action of vacuum breaking air (pressure difference generated between the shaft chamber 16A and the piston chamber 16B). Is pushed down and the shaft elastic portion 14 is contracted.

また、吸着用パッド１０は、内部空間１６内でのシャフト部１３のストローク量ｘ１（図１参照）が、シャフト部１３の先端部１３Ａがパッド部１２外へ飛び出す最大飛び出し量ｘ２（図５参照）よりも大きくなるように構成される。これにより、ワークＷを離脱させる際には、パッド部１２から真空破壊エアを吐出した状態（図４参照）の後に、仮にパッド部１２にワークＷが貼り付いていてもシャフト部１３を用いて機械的にワークＷを押し出す（図５参照）こともでき、ワークＷの離脱を安定して行うことができる。このため、シャフト部１３は、吸着しているワークＷの離脱を補助するものとして用いられる。   Further, the suction pad 10 has a stroke amount x1 (see FIG. 1) of the shaft portion 13 in the internal space 16, and a maximum protrusion amount x2 (see FIG. 5) in which the tip portion 13A of the shaft portion 13 protrudes out of the pad portion 12. ) Is configured to be larger than. Thus, when the workpiece W is detached, the shaft portion 13 is used even if the workpiece W is stuck to the pad portion 12 after the vacuum breaking air is discharged from the pad portion 12 (see FIG. 4). The workpiece W can be mechanically pushed out (see FIG. 5), and the workpiece W can be detached stably. For this reason, the shaft portion 13 is used as an aid to detach the adsorbed workpiece W.

また、ワークＷの離脱後、すなわち、パッド部１２からシャフト部１３が飛び出した後に、フランジ部１３Ｃによってガイド貫通部１６Ｄが塞がれるため（図５参照）、真空破壊エアの吐出を停止させることができる。また、真空破壊エアの吐出を停止することにより、ワークＷの吹き飛ばしを防止することができる。このため、軽量のワークＷの離脱を安定的にでき、ワークＷの生産性向上（サイクルタイム向上、機械稼働率向上）となる。   Further, after the workpiece W is detached, that is, after the shaft portion 13 protrudes from the pad portion 12, the guide penetration portion 16D is blocked by the flange portion 13C (see FIG. 5), so that the discharge of the vacuum breaking air is stopped. Can do. Further, by stopping the discharge of the vacuum breaking air, it is possible to prevent the workpiece W from being blown off. For this reason, the separation of the lightweight workpiece W can be stably performed, and the productivity of the workpiece W can be improved (cycle time improvement, machine operation rate improvement).

また、真空破壊エアの停止をフランジ部１３Ｃによってガイド貫通部１６Ｄを塞ぐことにより行うので、真空破壊エアの圧力、流量、吐出時間の設定をラフに行うことができ、調整工数を削減することができる。また、吹き飛ばし防止のために、真空破壊エアを制御する制御機器を用いる必要がなくなるため、吸着用パッド１０を用いた吸着システムのコストを低減することができる。   Moreover, since the vacuum break air is stopped by closing the guide penetration 16D with the flange portion 13C, the pressure, flow rate, and discharge time of the vacuum break air can be set roughly, and the adjustment man-hours can be reduced. it can. Further, since it is not necessary to use a control device that controls the vacuum breaking air in order to prevent blowing away, the cost of the suction system using the suction pad 10 can be reduced.

次に、吸着用パッド１０の構成を具体的に説明する。吸着用パッド１０は、内部空間１６を有する本体部１１を備える。本体部１１は、例えば金属などの導電性部材から構成される。導電性部材によれば、ワークＷとしての半導体チップなどの電子部品が静電破壊するのを防止することができる。   Next, the configuration of the suction pad 10 will be specifically described. The suction pad 10 includes a main body 11 having an internal space 16. The main body 11 is made of a conductive member such as metal. According to the conductive member, electronic components such as a semiconductor chip as the workpiece W can be prevented from being electrostatically broken.

内部空間１６は、軸線Ｘ方向において上方側から下方側へエア貫通部１６Ｃ、ピストン室１６Ｂ、シャフト室１６Ａ、ガイド貫通部１６Ｄがこの順で連通して構成されている。ここで、シャフト室１６Ａの内径がピストン室１６Ｂの内径よりも大きくなって、シャフト室１６Ａとピストン室１６Ｂとの間が段付きとなる。この段付部は、シャフト部１３の上方側への移動を規制するストッパ部１１Ｆとなる。また、ピストン室１６Ｂの内径がエア貫通部１６Ｃの内径よりも大きくなって、ピストン室１６Ｂとエア貫通部１６Ｃとの間が段付きとなる。この段付部は、ピストン部１５の上方側への移動を規制するストッパ部１１Ｇとなる。   The internal space 16 includes an air penetrating portion 16C, a piston chamber 16B, a shaft chamber 16A, and a guide penetrating portion 16D communicating in this order from the upper side to the lower side in the axis X direction. Here, the inner diameter of the shaft chamber 16A is larger than the inner diameter of the piston chamber 16B, and a step is formed between the shaft chamber 16A and the piston chamber 16B. This stepped portion serves as a stopper portion 11F that restricts the upward movement of the shaft portion 13. Further, the inner diameter of the piston chamber 16B is larger than the inner diameter of the air penetration portion 16C, and a step is formed between the piston chamber 16B and the air penetration portion 16C. This stepped portion serves as a stopper portion 11G that restricts the upward movement of the piston portion 15.

本体部１１は、エア貫通部１６Ｃを有する部分がエア出入部１１Ａとして構成されている。このエア出入部１１Ａでは例えばネジ機構や継手によって、チューブを介してエア供給源と連結される。本体部１１の内部空間１６には、エア出入部１１Ａのエア貫通部１６Ｃを介してエア供給源によってエアが吸引されたり、エアが供給されたりする。そして、吸着用パッド１０は、エア出入部１１Ａとエア供給源との連結箇所に設けられ、エアリークの発生を防止するためのシール部２２（例えば、ガスケット）を備える。   As for the main-body part 11, the part which has 16 C of air penetration parts is comprised as 11 A of air in / out parts. The air inlet / outlet portion 11A is connected to an air supply source via a tube, for example, by a screw mechanism or a joint. Air is sucked or supplied to the internal space 16 of the main body 11 by an air supply source through the air penetration part 16C of the air inlet / outlet part 11A. The suction pad 10 includes a seal portion 22 (for example, a gasket) that is provided at a connection portion between the air inlet / outlet portion 11A and the air supply source and prevents the occurrence of air leak.

また、本体部１１は、ガイド貫通部１６Ｄを有する部分がガイド本体部１１Ｂとして構成されている。ガイド本体部１１Ｂは、ガイド貫通部１６Ｄに挿入されているシャフト部１３の先端部１３Ａおよび先端部１３Ａよりも大径の保持部１３Ｂ（大径部）の往復動をガイドする。このため、先端部１３Ａのみが挿入される小径のものと、先端部１３Ａおよび保持部１３Ｂが挿入される大径のものとの間で段付きとなる。なお、この段付部は、シャフト弾性部１４を保持する保持部１１Ｄとなる。   Further, the main body 11 is configured such that the portion having the guide penetration 16D is a guide main body 11B. The guide main body part 11B guides the reciprocation of the tip part 13A of the shaft part 13 inserted into the guide penetration part 16D and the holding part 13B (large diameter part) having a larger diameter than the tip part 13A. For this reason, there is a step between a small diameter member into which only the tip portion 13A is inserted and a large diameter member into which the tip portion 13A and the holding portion 13B are inserted. The stepped portion serves as a holding portion 11D that holds the shaft elastic portion 14.

ガイド本体部１１Ｂは、内部空間１６にシャフト部１３やピストン部１５などの部品を組み込むために、キャップとしてネジ機構によって着脱可能となっている。そして、吸着用パッド１０は、本体部１１の主たる部分と、キャップ部分であるガイド本体部１１Ｂとの連結箇所に設けられ、内部空間１６からのエアリークを防止するためのシール部２３（例えば、Ｏリング）を備える。   The guide main body portion 11B is detachable as a cap by a screw mechanism in order to incorporate components such as the shaft portion 13 and the piston portion 15 into the internal space 16. The suction pad 10 is provided at a connecting portion between the main portion of the main body portion 11 and the guide main body portion 11B which is a cap portion, and a seal portion 23 (for example, O) for preventing air leakage from the internal space 16. Ring).

また、吸着用パッド１０は、パッド部１２を備える。パッド部１２は、例えばニトリルゴム、シリコーンゴム、導電性ゴムなどゴム部材から構成される。ゴム部材によれば、ワークＷと接する際にワークＷを保護することができる。パッド部１２は、本体部１１（ガイド本体部１１Ｂ）が有するキャップ保持部１１Ｃによって保持される。本実施形態では、フランジ状のキャップ保持部１１Ｃに嵌め合わさるようにパッド部１２の内部に周溝が形成され、本体部１１にパッド部１２が取り付けられる（保持される）。ゴム部材で構成されるパッド部１２であれば、本体部１１とパッド部１２との連結箇所のシール性は確保される。なお、本実施形態では、本体部１１とパッド部１２とは別体とし、本体部１１にパッド部１２を取り付けているが、本体部１１とパッド部１２が例えば樹脂材によって一体成形されてもよい。   Further, the suction pad 10 includes a pad portion 12. The pad portion 12 is made of a rubber member such as nitrile rubber, silicone rubber, or conductive rubber. According to the rubber member, the workpiece W can be protected when contacting the workpiece W. The pad portion 12 is held by a cap holding portion 11C included in the main body portion 11 (guide main body portion 11B). In the present embodiment, a circumferential groove is formed inside the pad portion 12 so as to be fitted to the flange-shaped cap holding portion 11C, and the pad portion 12 is attached (held) to the main body portion 11. If it is the pad part 12 comprised with a rubber member, the sealing performance of the connection location of the main-body part 11 and the pad part 12 will be ensured. In the present embodiment, the main body part 11 and the pad part 12 are separated from each other, and the pad part 12 is attached to the main body part 11. However, even if the main body part 11 and the pad part 12 are integrally formed of a resin material, for example. Good.

本体部１１に取り付けられたパッド部１２は、内部空間１６（ガイド貫通部１６Ｄ）と連通するパッド貫通部１２Ｂを有する。このパッド貫通部１２Ｂは、ワークＷを吸着するための面積を確保するためのリップ１２Ａで末広がって開口する。リップ１２Ａの径は、例えばワークＷが数ｍｍ角の小型化、軽量化された半導体チップの場合、３ｍｍ程度となるが、ワークＷの大きさ、重さによっては２００ｍｍ程度となる。このようなパッド貫通部１２Ｂは、ワークＷがパッド部１２で吸着されている場合、真空状態となる（図３参照）。   The pad part 12 attached to the main body part 11 has a pad penetration part 12B communicating with the internal space 16 (guide penetration part 16D). The pad penetrating portion 12B opens and opens at the lip 12A for securing an area for attracting the workpiece W. The diameter of the lip 12A is, for example, about 3 mm when the work W is a small and lightweight semiconductor chip of several mm square, but is about 200 mm depending on the size and weight of the work W. Such pad penetration part 12B will be in a vacuum state, when the workpiece | work W is adsorb | sucked by the pad part 12 (refer FIG. 3).

また、吸着用パッド１０は、シャフト部１３を備える。シャフト部１３は、本体部１１と同様に、例えば金属などの導電性部材から構成される。シャフト部１３は、長さ方向（軸線Ｘ方向）において下方側から上方側へ、先端部１３Ａ、保持部１３Ｂ、フランジ部１３Ｃがこの順で構成されている。保持部１３Ｂは先端部１３Ａよりも大径とし、フランジ部１３Ｃは保持部１３Ｂよりも更に大径としている。   The suction pad 10 includes a shaft portion 13. The shaft portion 13 is made of a conductive member such as metal, for example, like the main body portion 11. The shaft portion 13 includes a tip portion 13A, a holding portion 13B, and a flange portion 13C in this order from the lower side to the upper side in the length direction (axis X direction). The holding portion 13B has a larger diameter than the tip portion 13A, and the flange portion 13C has a larger diameter than the holding portion 13B.

このようなシャフト部１３は、長さ方向（軸線Ｘ方向）に貫通するシャフト貫通部１３Ｄを有する。シャフト貫通部１３Ｄは、ワークＷを吸着する際にエア流路として用いられる（図２参照）。また、シャフト貫通部１３Ｄは、ピストン部１５によって開閉される。シャフト貫通部１３Ｄがピストン部１５によって閉塞される場合には、ピストン部１５がシャフト部１３のフランジ部１３Ｃと接することとなる。本実施形態では、シャフト部１３のフランジ部１３Ｃにピストン部１５が接触する箇所をポートＡとし、フランジ部１３Ｃがガイド本体部１１Ｂに接触する箇所をポートＢとして説明する。   Such a shaft portion 13 has a shaft penetration portion 13D that penetrates in the length direction (axis X direction). The shaft penetrating portion 13D is used as an air flow path when adsorbing the workpiece W (see FIG. 2). Further, the shaft penetration part 13 </ b> D is opened and closed by the piston part 15. When the shaft penetration part 13 </ b> D is closed by the piston part 15, the piston part 15 comes into contact with the flange part 13 </ b> C of the shaft part 13. In this embodiment, a location where the piston portion 15 contacts the flange portion 13C of the shaft portion 13 will be described as a port A, and a location where the flange portion 13C will contact the guide main body portion 11B will be described as a port B.

また、フランジ部１３Ｃは、上面側（ピストン部１５側）から窪む窪み部２４を有する。シャフト貫通部１３Ｄは、この窪み部２４の奥側で開口している。窪み部２４を設けることで、シャフト部１３およびピストン部１５を本体部１１へ容易に組み付けることができる。なお、窪み部２４を設けずに、フランジ部１３Ｃの上面を平坦面とし、シャフト貫通部１３Ｄを開口する構成であってもよい。   Further, the flange portion 13C has a recessed portion 24 that is recessed from the upper surface side (piston portion 15 side). The shaft penetrating portion 13 </ b> D opens at the back side of the recessed portion 24. By providing the recess 24, the shaft 13 and the piston 15 can be easily assembled to the main body 11. In addition, the structure which makes the upper surface of the flange part 13C a flat surface, and provides the shaft penetration part 13D without providing the hollow part 24 may be sufficient.

また、吸着用パッド１０は、シャフト弾性部１４を備える。シャフト弾性部１４は例えばステンレス材から構成されるコイル状のスプリングであり、これにシャフト部１３が挿入される。シャフト弾性部１４は、ガイド貫通部１６Ｄ内で本体部１１（ガイド本体部１１Ｂ）の保持部１１Ｄと、シャフト部１３の保持部１３Ｂとの間に設けられる。そして、シャフト弾性部１４は、フリー状態では、先端部１３Ａをパッド部１２内に引き込んでシャフト部１３を保持する（図１参照）。   Further, the suction pad 10 includes a shaft elastic portion 14. The shaft elastic portion 14 is a coiled spring made of, for example, stainless steel, and the shaft portion 13 is inserted into the spring. The shaft elastic portion 14 is provided between the holding portion 11D of the main body portion 11 (guide main body portion 11B) and the holding portion 13B of the shaft portion 13 in the guide penetration portion 16D. In the free state, the shaft elastic portion 14 holds the shaft portion 13 by drawing the tip portion 13A into the pad portion 12 (see FIG. 1).

本実施形態では、内部空間１６内でのシャフト部１３のストローク量ｘ１（図１参照）が、シャフト部１３の先端部１３Ａがパッド部１２外へ飛び出す最大飛び出し量ｘ２（図５参照）よりも大きくなるように構成される。ここで、ストローク量ｘ１は、シャフト部１３のフランジ部１３Ｃがストッパ部１１Ｆに接した状態から、シャフト部１３のフランジ部１３Ｃがガイド本体部１１Ｂに接する（ポートＢ）までの距離である。   In this embodiment, the stroke amount x1 (see FIG. 1) of the shaft portion 13 in the internal space 16 is larger than the maximum protrusion amount x2 (see FIG. 5) that the tip portion 13A of the shaft portion 13 protrudes out of the pad portion 12. Configured to be large. Here, the stroke amount x1 is a distance from the state in which the flange portion 13C of the shaft portion 13 is in contact with the stopper portion 11F to the flange portion 13C of the shaft portion 13 is in contact with the guide main body portion 11B (port B).

また、吸着用パッド１０は、ピストン部１５を備える。このピストン部１５は、内部空間１６内でシャフト部１３とエア出入部１１Ａとの間に設けられる。このピストン部１５は、推力によって往復動（上下動）する。具体的には、ピストン部１５は、真空エアによって上方に、真空破壊エアによって下方に移動する。   Further, the suction pad 10 includes a piston portion 15. The piston portion 15 is provided in the internal space 16 between the shaft portion 13 and the air inlet / outlet portion 11A. The piston portion 15 reciprocates (vertically moves) by thrust. Specifically, the piston part 15 moves upward by the vacuum air and moves downward by the vacuum breaking air.

このピストン部１５は、エア出入部１１Ａ側の窪み部１５Ａと、窪み部１５Ａの深さ方向（軸線Ｘ方向）と交差する方向に延びて窪み部１５Ａと連通する交差貫通部１５Ｂ（図１では軸線Ｙを示す）と、を有する。吸着用パッド１０へ供給されてきた真空破壊エアによりピストン部１５およびシャフト部１３が押し下げられる。この押し下げ動作中に交差貫通部１５Ｂおよびエア流路（シャフト部１３の外周面と内部空間１６の内周面との間で形成される）により真空破壊エアをパッド部１２へ向かって送り出すことができる。なお、窪み部１５Ａの底部にはシャフト部１３側へ軸線Ｘ方向に沿って貫通する小さな孔（エア流量が小さいもの）を設けておくこともできる。   The piston portion 15 includes a hollow portion 15A on the air inlet / outlet portion 11A side, and an intersecting through portion 15B extending in a direction intersecting the depth direction (axis X direction) of the hollow portion 15A and communicating with the hollow portion 15A (in FIG. 1). An axis Y is shown). The piston portion 15 and the shaft portion 13 are pushed down by the vacuum breaking air supplied to the suction pad 10. During this push-down operation, the vacuum breaking air can be sent out toward the pad portion 12 by the crossing through portion 15B and the air flow path (formed between the outer peripheral surface of the shaft portion 13 and the inner peripheral surface of the internal space 16). it can. A small hole (with a small air flow rate) penetrating along the axis X direction toward the shaft portion 13 can also be provided at the bottom of the hollow portion 15A.

また、吸着用パッド１０は、ピストン弾性部２５を備える。ピストン弾性部２５は、例えばステンレス材から構成されるコイル状のスプリングである。このピストン弾性部２５は、本体部１１の保持部１１Ｅ（窪み部）と、ピストン部１５の窪み部１５Ａとに係るようにして保持される（嵌め込まれる）。本実施形態では、ピストン弾性部２５としてシャフト弾性部１４よりも推力（ばね荷重）が小さいものを用いている。   Further, the suction pad 10 includes a piston elastic portion 25. The piston elastic part 25 is a coiled spring made of, for example, a stainless material. The piston elastic portion 25 is held (fitted) in a manner related to the holding portion 11E (recessed portion) of the main body portion 11 and the recessed portion 15A of the piston portion 15. In the present embodiment, a piston elastic portion 25 having a smaller thrust (spring load) than the shaft elastic portion 14 is used.

次に、吸着用パッド１０の動作方法を説明する。フリー状態（エア出入がない状態）の吸着用パッド１０は、図１（図６のポジション１に対応）に示すように、シャフト部１３の先端部１３Ａがパッド部１２内に引き込んだ状態となる。フリー状態であるので、真空エアおよび真空破壊エアがオフ状態である。また、ワークＷも未吸着となる。また、ポートＡが閉状態、ポートＢが開状態となる。   Next, an operation method of the suction pad 10 will be described. As shown in FIG. 1 (corresponding to position 1 in FIG. 6), the suction pad 10 in the free state (the state where there is no air in / out) is in a state where the tip portion 13A of the shaft portion 13 is drawn into the pad portion 12. . Since it is in the free state, the vacuum air and the vacuum breaking air are in the off state. Moreover, the workpiece | work W is also non-adsorbed. Also, port A is closed and port B is open.

フリー状態の吸着用パッド１０に対して、真空エアをオン状態（真空破壊エアはオフ状態）とすると、図２（図６のポジション２に対応）に示すような状態となる。具体的には、先端部１３Ａをパッド部１２内に引き込んだ状態のまま、内部空間１６から真空エアの吸引を行う。これにより、ピストン部１５がストッパ部１１Ｇに接するまで上動し、ポートＡが開状態となる。このときエア流れ（真空流れ）は、パッド部１２のリップ１２Ａからシャフト貫通部１３Ｄ内、シャフト部１３の外周面と内部空間１６の内周面との間（ガイド貫通部１６Ｄおよびシャフト室１６Ａ）、ピストン部１５の内部を含むピストン室１６Ｂ、エア貫通部１６Ｃで発生する。このため、真空エアによってパッド部１２のリップ１２Ａには吸引力が発生する。   When the vacuum air is turned on (the vacuum breaking air is turned off) with respect to the suction pad 10 in the free state, a state as shown in FIG. 2 (corresponding to position 2 in FIG. 6) is obtained. Specifically, vacuum air is sucked from the internal space 16 while the tip portion 13A is drawn into the pad portion 12. As a result, the piston portion 15 moves upward until it comes into contact with the stopper portion 11G, and the port A is opened. At this time, the air flow (vacuum flow) is from the lip 12A of the pad portion 12 to the shaft through portion 13D, between the outer peripheral surface of the shaft portion 13 and the inner peripheral surface of the internal space 16 (guide through portion 16D and shaft chamber 16A). It occurs in the piston chamber 16B including the inside of the piston portion 15 and the air penetration portion 16C. For this reason, a suction force is generated on the lip 12A of the pad portion 12 by the vacuum air.

引き続き真空エアをオン状態として真空吸引をすると、図３（図６のポジション３に対応）に示すようなワークＷがパッド部１２のリップ１２Ａで吸着された状態となる。ワークＷを吸着した後は、エアの流れが無くなった真空状態となり、ポートＡが閉状態となる。この状態においてワークＷは搬送されることとなる。   When the vacuum air is subsequently turned on and vacuum suction is performed, the workpiece W as shown in FIG. 3 (corresponding to position 3 in FIG. 6) is attracted by the lip 12A of the pad portion 12. After the workpiece W is adsorbed, the air flow is eliminated and the port A is closed. In this state, the workpiece W is transported.

このように、吸着用パッド１０によれば、先端部１３Ａをパッド部１２内に引き込んだ状態のまま、内部空間１６から真空エアの吸引を行い、パッド部１２にワークＷを吸着させることができる。このため、吸着時にシャフト部１３がワークＷと接することなく、ワークＷが保護され、ワークＷへのダメージを軽減することができる。   Thus, according to the suction pad 10, vacuum air can be sucked from the internal space 16 while the tip portion 13 </ b> A is drawn into the pad portion 12, and the work W can be sucked to the pad portion 12. . For this reason, the workpiece | work W is protected and the damage to the workpiece | work W can be reduced, without the shaft part 13 contacting the workpiece | work W at the time of adsorption | suction.

真空状態の吸着用パッド１０に対して、真空破壊エアをオン状態（真空エアはオフ状態）とすると、図４（図６のポジション４に対応）に示すような状態となる。すなわち、真空破壊エアが供給されると吸着用パッド１０の内圧が上昇して、パッド部１２から真空破壊エアを吐出させることができる。   When the vacuum breaking air is turned on (vacuum air is turned off) with respect to the suction pad 10 in a vacuum state, a state as shown in FIG. 4 (corresponding to position 4 in FIG. 6) is obtained. That is, when the vacuum breaking air is supplied, the internal pressure of the suction pad 10 increases, and the vacuum breaking air can be discharged from the pad portion 12.

具体的には、真空破壊エアが供給されると、ピストン部１５を介してシャフト部１３を押し出す推力によりシャフト部１３が下方側へ動き出す。このとき、シャフト部１３のフランジ部１３Ｃにピストン部１５が接触してポートＡは閉状態となっている。シャフト部１３が動いている間は真空破壊エアがガイド貫通部１６Ｄの内周面とシャフト部１３の外周面との間（ポートＢ）でエア流れが発生し、パッド部１２のリップ１２Ａからは真空破壊エアが吐出する。この真空破壊エアによってパッド部１２のリップ１２ＡからはワークＷが離脱（未吸着）することとなる。なお、シャフト部１３のストローク量によって真空破壊エアの吐出時間の調整が可能である。   Specifically, when the vacuum breaking air is supplied, the shaft portion 13 starts to move downward due to the thrust that pushes the shaft portion 13 through the piston portion 15. At this time, the piston part 15 contacts the flange part 13C of the shaft part 13, and the port A is in a closed state. While the shaft portion 13 is moving, an air flow is generated between the inner peripheral surface of the guide penetrating portion 16D and the outer peripheral surface of the shaft portion 13 (port B) while the vacuum breaking air is moving, and from the lip 12A of the pad portion 12 Vacuum breaking air is discharged. The vacuum breaking air causes the workpiece W to be detached (not attracted) from the lip 12A of the pad portion 12. The discharge time of the vacuum breaking air can be adjusted by the stroke amount of the shaft portion 13.

パッド部１２のリップ１２Ａから真空破壊エアを吐出させた後も真空破壊エアを供給し続け、ピストン部１５（真空破壊エア）の押し付けによってシャフト部１３の先端部１３Ａをパッド部１２のリップ１２Ａから飛び出させる。これにより、パッド部１２のリップ１２ＡにワークＷが貼り付いたままの場合であっても（特にワークＷが軽量のときに起こり易い）、シャフト部１３の押し出しによってワークＷを離脱させることができる。   Even after the vacuum breaking air is discharged from the lip 12A of the pad portion 12, the vacuum breaking air is continuously supplied, and the tip portion 13A of the shaft portion 13 is pushed from the lip 12A of the pad portion 12 by pressing the piston portion 15 (vacuum breaking air). Jump out. Thereby, even if the workpiece W remains attached to the lip 12A of the pad portion 12 (particularly easily when the workpiece W is light), the workpiece W can be detached by pushing out the shaft portion 13. .

引き続き真空破壊エアをオン状態としてエア供給をすると、図５（図６のポジション５に対応）に示すような状態となる。すなわち、シャフト部１３の先端部１３Ａをパッド部１２から飛び出させた後に、パッド部１２からの真空破壊エアの吐出を停止することができる。ここでは、シャフト部１３の先端部１３Ａがパッド部１２外に完全に飛び出した状態（最大飛び出し量ｘ２）となる。具体的には、ピストン部１５の押し付けによってシャフト部１３のフランジ部１３Ｃがガイド本体部１１Ｂに接するまで下動し、ポートＢが閉状態となる。これにより、パッド部１２のリップ１２Ａからの真空破壊エアの吐出が遮断され、ワークＷの吹き飛ばしが無くなり、離脱を安定して行うことができる。   When the vacuum break air is continuously turned on and air is supplied, the state shown in FIG. 5 (corresponding to position 5 in FIG. 6) is obtained. That is, the discharge of the vacuum breaking air from the pad portion 12 can be stopped after the tip portion 13A of the shaft portion 13 is protruded from the pad portion 12. Here, the tip end portion 13A of the shaft portion 13 is in a state of completely protruding out of the pad portion 12 (maximum protrusion amount x2). Specifically, the piston portion 15 is pressed down until the flange portion 13C of the shaft portion 13 comes into contact with the guide main body portion 11B, and the port B is closed. As a result, the discharge of the vacuum breaking air from the lip 12A of the pad portion 12 is blocked, the work W is not blown away, and the separation can be performed stably.

１０ 吸着用パッド； １１ 本体部； １１Ａ エア出入部；
１１Ｂ ガイド本体部； １１Ｃ キャップ保持部； １１Ｄ 保持部；
１１Ｅ 保持部； １１Ｆ、１１Ｇ ストッパ部；
１２ パッド部； １２Ａ リップ； １２Ｂ パッド貫通部；
１３ シャフト部； １３Ａ 先端部； １３Ｂ 保持部；
１３Ｃ フランジ部； １３Ｄ シャフト貫通部； １４ シャフト弾性部；
１５ ピストン部； １５Ａ 窪み部； １５Ｂ 交差貫通部；
１６ 内部空間； １６Ａ シャフト室； １６Ｂ ピストン室；
１６Ｃ エア貫通部； １６Ｄ ガイド貫通部； ２２、２３ シール部；
２４ 窪み部； ２５ ピストン弾性部； DESCRIPTION OF SYMBOLS 10 Adsorption pad; 11 Main-body part;
11B Guide body part; 11C Cap holding part; 11D Holding part;
11E holding part; 11F, 11G stopper part;
12 pad part; 12A lip; 12B pad penetration part;
13 shaft part; 13A tip part; 13B holding part;
13C flange part; 13D shaft penetration part; 14 shaft elastic part;
15 piston part; 15A hollow part; 15B cross penetration part;
16 internal space; 16A shaft chamber; 16B piston chamber;
16C Air penetration part; 16D Guide penetration part; 22, 23 Seal part;
24 depression part; 25 piston elastic part;

Claims (3)

内部空間を有する本体部と、
前記内部空間と連通するパッド部と、
先端部を有し、前記先端部を前記パッド部に向けて前記内部空間に設けられ、前記先端部が前記パッド部の内外へ往復動するシャフト部と、
前記パッド部にエア出入がない状態において、前記先端部を前記パッド部内に引き込んで前記シャフト部を保持するシャフト弾性部と、
前記内部空間と連通するエア出入部と、
前記内部空間内で前記シャフト部と前記エア出入部との間に設けられるピストン部とを備え、
前記本体部は、前記先端部が挿入されるガイド貫通部を有するガイド本体部を更に備え、前記ガイド貫通部は前記パッド部の開口と連通しており、
前記シャフト部は、前記先端部の軸線方向に貫通するシャフト貫通部を有するとともに、前記先端部と反対側の所定部位が前記ガイド貫通部よりも大径となっており、
前記パッド部にエア出入がない状態では、前記シャフト弾性部によって、前記シャフト部の前記所定部位における前記ガイド本体部と接離する側が、前記ガイド本体部から離れており、
真空エアが吸引されると、前記シャフト部の前記所定部位における前記ピストン部と接離する側から前記ピストン部が離れることで、前記シャフト貫通部内、前記シャフト部の外周面と前記内部空間の内周面との間、前記ピストン部の内部、および前記エア出入部に、前記真空エアのエア流路が形成されて前記パッド部の開口に吸引力が発生し、ワークを吸着する構成であり、
真空破壊エアが供給されると、前記シャフト部の前記所定部位における前記ピストン部と接離する側に前記ピストン部が接して前記シャフト部を押すことで、前記シャフト貫通部が閉じた状態で前記シャフト部が動いている期間、前記ガイド貫通部の内周面と前記シャフト部の外周面との間、前記ピストン部の内部、および前記エア出入部に、前記真空破壊エアのエア流路が形成されて前記パッド部の開口から前記真空破壊エアが吐出し、前記ワークが離脱する構成であり、
引き続き前記真空破壊エアが供給されると、前記シャフト貫通部が閉じた状態で前記シャフト部が動くことで、前記先端部が前記パッド部の開口から飛び出した後に、前記シャフト部の前記所定部位における前記ガイド本体部と接離する側が、前記ガイド本体部に接して前記ガイド貫通部が閉じた状態となり、前記ガイド貫通部が閉じた状態となることで、前記真空破壊エアのエア流路が塞がって前記真空破壊エアの吐出が停止する構成であることを特徴とする吸着用パッド。 A main body having an internal space;
A pad portion communicating with the internal space;
A shaft portion having a tip portion, provided in the internal space with the tip portion facing the pad portion, and the tip portion reciprocatingly moves in and out of the pad portion;
In a state where there is no air in / out of the pad portion, a shaft elastic portion that draws the tip portion into the pad portion and holds the shaft portion;
An air inlet / outlet portion communicating with the internal space;
A piston portion provided between the shaft portion and the air inlet / outlet portion in the inner space;
The body portion further includes a guide body portion having a guide penetration portion into which the tip portion is inserted, and the guide penetration portion communicates with an opening of the pad portion,
The shaft portion has a shaft penetration portion that penetrates in the axial direction of the tip portion, and a predetermined portion opposite to the tip portion has a larger diameter than the guide penetration portion,
In the state where there is no air in / out of the pad portion, the side of the shaft portion that comes in contact with and separates from the guide main body portion at the predetermined portion is separated from the guide main body portion by the shaft elastic portion.
When the vacuum air is sucked, the piston part moves away from the side of the predetermined part of the shaft part that is in contact with and separated from the piston part, so that the inside of the shaft through part, the outer peripheral surface of the shaft part, and the inner space An air flow path for the vacuum air is formed between the peripheral surface, the inside of the piston part, and the air inlet / outlet part, and suction force is generated at the opening of the pad part to adsorb the workpiece,
When the vacuum breaking air is supplied, the piston part comes into contact with the piston part at the predetermined part of the shaft part and presses the shaft part, so that the shaft penetrating part is closed . While the shaft portion is moving, an air flow path for the vacuum breaking air is formed between the inner peripheral surface of the guide penetration portion and the outer peripheral surface of the shaft portion, in the piston portion, and in the air inlet / outlet portion. The vacuum breaking air is discharged from the opening of the pad portion, and the workpiece is separated.
When the vacuum breaking air is continuously supplied, the shaft portion moves in a state where the shaft penetrating portion is closed, so that the tip portion protrudes from the opening of the pad portion , and then the predetermined portion of the shaft portion. side for contact and separation with the guide body portion, said guide body portion to contact with a state in which the guide penetrating portion is closed, the guide penetrating portion that is closed, the air flow path of the vacuum break air is blocked The suction pad is configured to stop the discharge of the vacuum breaking air . 請求項１記載の吸着用パッドにおいて、
前記シャフト部の前記所定部位は、フランジ部であることを特徴とする吸着用パッド。 The suction pad according to claim 1,
The suction pad , wherein the predetermined portion of the shaft portion is a flange portion. 請求項１または２記載の吸着用パッドにおいて、
前記シャフト部のストローク量は、前記シャフト部の前記先端部の前記パッド部からの最大飛び出し量よりも大きいことを特徴とする吸着用パッド。 The suction pad according to claim 1 or 2,
The suction pad according to claim 1, wherein a stroke amount of the shaft portion is larger than a maximum protrusion amount of the tip portion of the shaft portion from the pad portion.
JP2016043610A 2016-03-07 2016-03-07 Suction pad Active JP6325589B2 (en)

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JP2016043610A JP6325589B2 (en) 2016-03-07 2016-03-07 Suction pad
KR1020170026062A KR102535641B1 (en) 2016-03-07 2017-02-28 Absorption pad
TW106106933A TWI705037B (en) 2016-03-07 2017-03-03 Adsorption pad
CN201710128425.4A CN107165923B (en) 2016-03-07 2017-03-06 Sucking disc for adsorption

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