CN113394157B - Chip suction tool - Google Patents
Chip suction tool Download PDFInfo
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- CN113394157B CN113394157B CN202110945878.2A CN202110945878A CN113394157B CN 113394157 B CN113394157 B CN 113394157B CN 202110945878 A CN202110945878 A CN 202110945878A CN 113394157 B CN113394157 B CN 113394157B
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- telescopic rod
- inner hole
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- shaped inner
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
Abstract
The application provides a chip suction tool, includes: the shell comprises a step-shaped inner hole which penetrates along the axis; the telescopic rod penetrates through the step-shaped inner hole, a first end of the telescopic rod extends out of the large-diameter end of the step-shaped inner hole, a second end of the telescopic rod extends out of the small-diameter end of the step-shaped inner hole, and the telescopic rod can move along the axial direction of the shell; the elastic sucker is arranged outside the small-diameter end of the step-shaped inner hole, is connected with the second end of the telescopic rod and can move along the axial direction of the shell along with the telescopic rod; and the elastic limiting device is arranged in the step-shaped inner hole, and the ring sleeve is sleeved outside the telescopic rod and fixes or releases the elastic limiting device in the movement process of the telescopic rod. By pressing the telescopic rod, the head of the sucking disc of the telescopic rod extends outwards, so that the sucking disc is tightly attached to the chip to suck the chip; and pressing the telescopic rod again, retracting the telescopic rod, and releasing the chip after the sucking disc is blocked and deformed by the end part of the shell of the chip sucking tool. Simple operation and good repeatability.
Description
Technical Field
The application relates to the technical field of radio frequency chip debugging, in particular to a chip suction tool.
Background
With the development of wireless communication technology, mobile phones, wireless local area networks, bluetooth and the like have become an indispensable part of social life. Advances in wireless communication technology are not consistent with the development of radio frequency and microwave technologies. One of the cores of radio frequency technology is a radio frequency chip. In the production process of the radio frequency chip, various debugging needs to be performed.
At present, in the radio frequency chip debugging process, after a wafer is cut, the wafer is clamped by using tools such as tweezers, silver paste is welded on a test substrate, the test chip is connected through a gold wire, and whether the selected chip meets the design requirement or not is judged through the test output performance. When performance is not satisfactory, a different version of the circuit structure needs to be replaced for retesting.
The rf chip is very thin and fragile, and the chip needs to be picked up again each time it is replaced. In the process of clamping the chip by using tools such as tweezers and the like, the integrity and the function of the chip can be damaged by excessive force, and the operator is difficult to control the force and inconvenient to operate.
Disclosure of Invention
In order to solve the process of using instrument anchor clamps chips such as tweezers, the operation dynamics is difficult to control, destroy chip integrality scheduling problem easily, and this application provides a new chip and absorbs the instrument, can easily absorb or release the chip through pressing down the operation to install fast and survey on the test panel and guarantee the safety of chip.
The application provides a chip suction means includes:
the shell comprises a step-shaped inner hole which penetrates along the axis;
the telescopic rod penetrates through the step-shaped inner hole, a first end of the telescopic rod extends out of the large-diameter end of the step-shaped inner hole, a second end of the telescopic rod extends out of the small-diameter end of the step-shaped inner hole, and the telescopic rod can move along the axial direction of the shell;
the elastic sucker is arranged outside the small-diameter end of the step-shaped inner hole, is connected with the second end of the telescopic rod and can move along the axial direction of the shell along with the telescopic rod;
and the elastic limiting device is arranged inside the step-shaped inner hole, is sleeved outside the telescopic rod and fixes or releases the inner hole in the movement process of the telescopic rod.
According to some embodiments of the application, the diameter of the suction cup is larger than the diameter of the small diameter end of the stepped inner bore.
According to some embodiments of the application, the housing includes a groove outside the small diameter end of the stepped bore, the groove having a width less than the diameter of the resilient suction cup.
According to some embodiments of the application, the telescopic rod comprises:
the first rod part is connected with the elastic sucker;
and the second rod part is connected with the first rod part, and the diameter of the second rod part is larger than that of the first rod part.
According to some embodiments of the application, the resilient limiting means comprises:
the elastic component is sleeved outside the first rod part in a sleeving manner, one end of the elastic component is connected with the joint of the first rod part and the second rod part, and the other end of the elastic component is connected with the step surface of the step-shaped inner hole;
and the rotation limiting part is connected with the second rod part.
According to some embodiments of the application, the rotation limiting member comprises:
the guide rail is arranged on the side wall of the large-diameter end of the step-shaped inner hole;
the push rod is arranged in the large diameter of the step-shaped inner hole, one end of the push rod extends out of the step-shaped inner hole, and the push rod can linearly move along the guide rail;
one end of the sliding sleeve is connected with the second rod part, the other end of the sliding sleeve is matched with the push rod, and the sliding sleeve can rotate and linearly move in the step-shaped inner hole under the action of the push rod and the elastic part.
According to some embodiments of the application, when the rotation limiting part is pressed by an external force, the telescopic rod moves towards the second end along the first end, and the elastic part is compressed; when the external force is removed, the rotation limiting component rotates to lock the telescopic rod under the action of the resilience force of the elastic component.
According to some embodiments of the present application, the rotation limiting member continues to rotate and unlock when the rotation limiting member continues to be pressed; the telescopic rod moves along the second end to the direction of the first end under the action of the resilience force of the elastic component.
According to some embodiments of the application, the housing shape of the first rod exterior is conical and the housing shape of the second rod exterior is cylindrical.
According to some embodiments of the application, the material of the housing or the telescopic rod comprises: carbon fibers.
The chip suction tool provided by the application is provided with the sucker at the head part, when a chip is sucked, the telescopic rod of the chip suction tool is pressed, the sucker head part of the telescopic rod extends outwards, and the sucker can be tightly attached to the chip so as to suck the chip; and the telescopic rod of the chip sucking tool is pressed again, the telescopic rod retracts towards the inside of the shell, the sucking disc is blocked by the end part of the shell of the chip sucking tool to deform, and the chip is released after a gap is formed between the sucking disc and the chip. Simple operation and good repeatability.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without exceeding the protection scope of the present application.
FIG. 1 shows a schematic view of a chip pick-up tool according to an example embodiment of the present application;
FIG. 2 shows a schematic view of a housing according to an example embodiment of the present application;
FIG. 3 shows a schematic view of a telescoping rod and an elastic stop according to an exemplary embodiment of the present application;
FIG. 4 shows a schematic view of a resilient suction cup according to an exemplary embodiment of the present application;
FIG. 5 shows a partial schematic view of a chip pick-up tool according to an example embodiment of the present application;
FIG. 6A shows a schematic view of a rotation limiting component according to an example embodiment of the present application;
FIG. 6B shows a sliding sleeve schematic view according to an example embodiment of the present application;
FIG. 6C shows a schematic illustration of a putter in accordance with an example embodiment of the present application;
fig. 7 is a schematic view illustrating a state where a chip is sucked by a chip sucking tool according to an exemplary embodiment of the present application;
fig. 8 illustrates a chip suction tool releasing a chip state diagram according to an example embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of embodiments of the application. One skilled in the relevant art will recognize, however, that the subject matter of the present application can be practiced without one or more of the specific details, or with other methods, components, devices, steps, and so forth. In other instances, well-known methods, devices, implementations, or operations have not been shown or described in detail to avoid obscuring aspects of the application.
It will be understood that, although the terms first, second, etc. may be used herein to describe various components, these components should not be limited by these terms. These terms are used to distinguish one element from another. Thus, a first component discussed below may be termed a second component without departing from the teachings of the present concepts. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Those skilled in the art will appreciate that the drawings are merely schematic representations of exemplary embodiments, which may not be to scale. The blocks or flows in the drawings are not necessarily required to practice the present application and therefore should not be used to limit the scope of the present application.
The inventor finds that the radio frequency chip is small in size, thin and fragile, and can only be clamped by tweezers at present. However, when the tweezers are used manually to clamp the chip, the chip is damaged due to too large force, and the chip may slip off due to too small force. For this reason, the application itself intends to provide a chip suction tool that can quickly suck or release a chip by a suction cup.
The technical solution of the present application will be described in detail below with reference to the accompanying drawings.
FIG. 1 shows a schematic view of a chip pick-up tool according to an example embodiment of the present application; FIG. 2 shows a schematic view of a housing according to an example embodiment of the present application; FIG. 3 shows a schematic view of a telescoping rod and an elastic stop according to an exemplary embodiment of the present application; FIG. 4 shows a schematic view of a resilient suction cup according to an exemplary embodiment of the present application; fig. 5 shows a partial schematic view of a chip pick-up tool according to an example embodiment of the present application.
As shown in fig. 1 to 4, the chip testing tool 1000 provided by the present application includes a housing 100, a telescopic rod 200, and an elastic limiting device. The housing 100 is a hollow casing, and a stepped inner hole penetrating along an axis is provided inside the hollow casing. According to some embodiments of the present application, to facilitate handling by an operator, the housing 100 may include a tapered section 110 and a circular section 120. The large diameter portion 121 of the stepped bore is distributed within the circular section 120 and the small diameter portion 111 of the stepped bore is distributed within the tapered section 110.
Accordingly, the telescopic rod 200 is also stepped in shape to fit into the stepped inner hole of the housing 100. The telescopic rod 200 includes a first rod part 210 and a second rod part 220, and the second rod part 220 is connected to the first rod part 210 and has a diameter larger than that of the first rod part 210. The telescopic rod 200 passes through the stepped inner hole of the housing 100, the second rod part 220 protrudes outside the large diameter end 121 of the stepped inner hole, and the first rod part 210 protrudes outside the small diameter end 111 of the stepped inner hole. The telescopic rod 200 is movable in the axial direction within the housing 100. The elastic limiting device is arranged in the step-shaped inner hole and connected with the telescopic rod 200, and the elastic limiting device is fixed or released in the movement process of the telescopic rod 200.
An elastic suction cup 240 is disposed at an end of the telescopic rod 200, connected to the first rod portion 210, and disposed outside the tapered section 110 of the housing 100 to be movable along the axial direction of the housing 100 along with the telescopic rod 200. The diameter of the elastic suction cup 240 is larger than the diameter of the small-diameter end 111 of the stepped inner hole of the housing 100.
As shown in fig. 2, the housing 100 includes a recess 130 outside the small diameter end 111 of the stepped bore. The width of the groove 130 is smaller than the diameter of the elastic suction cup 240, so that the elastic suction cup 240 is blocked when the elastic suction cup 240 moves from the small diameter end 111 of the stepped inner hole to the large diameter end 121 of the stepped inner hole following the telescopic rod 200, thereby deforming the elastic suction cup 240, and finally causing the chip to be separated from the elastic suction cup 240.
As shown in fig. 3, the elastic stopper includes an elastic member 310 and a rotation stopper. The elastic member 310 is sleeved outside the first rod portion 210, and has one end connected to the connection portion of the first rod portion 210 and the second rod portion 220 and the other end connected to the step surface of the stepped inner hole. The resilient member 310 is compressed between the junction of the first and second rod sections 210 and 220 and the step surface of the stepped bore. According to an example embodiment of the present application, the elastic member 310 may be a spring, which is not limited by the present application.
The rotation limiting member includes a guide rail (not shown), a sliding sleeve 320 and a push rod 330. The guide rail is fixedly arranged on the side wall of the large-diameter end of the step-shaped inner hole. The push rod 330 is disposed in the large diameter of the stepped inner hole, and one end of the push rod extends out of the stepped inner hole and can move linearly along the guide rail. The sliding sleeve 320 has one end connected to the second rod part 220 and the other end engaged with the push rod 330, and can rotate and move linearly in the stepped inner bore under the action of the push rod 330 and the elastic member 310. Under the action of the elastic member 310, the sliding sleeve 320 and the push rod 330 are in close contact.
The end of the push rod 330 extending out of the stepped inner hole can be further provided with a pressing part. After the push rod 330 is installed in the housing 100, the pressing portion is located outside the large-diameter end 121 of the stepped inner hole of the housing 100. For convenience of pressing operation, the pressing portion may be in a shape of a disc as shown in the drawings, or may be in other shapes, such as a spherical shape, and the like, which is not limited in the present application.
FIG. 6A shows a schematic view of a rotation limiting component according to an example embodiment of the present application; FIG. 6B shows a sliding sleeve schematic view according to an example embodiment of the present application; FIG. 6C shows a schematic illustration of a putter according to an example embodiment of the present application.
As shown in fig. 6A, 6B, and 6C, the guide rail 340 of the rotation limiting member is fixedly disposed on the large-diameter end side wall of the stepped inner bore (i.e., within the circle segment 120). One end of the push rod 330 extends out of the stepped inner hole and can move linearly along the guide rail 340. One end of the sliding sleeve 320 is in close contact with the second rod part 220 under the elastic force of the elastic component, and the other end of the sliding sleeve is matched with the push rod 330, and can rotate and linearly move in the stepped inner hole under the action of the push rod 330 and the elastic component.
In the initial state, the elastic member is in a contracted state, and when the end of the push rod 330 is pressed, the push rod 330 pushes the sliding sleeve 320 to move to the bottom tip position (critical point) of the guide rail 340 along the direction from the first end (i.e. the large diameter end 121 of the stepped inner bore of the housing 100) to the second end (i.e. the small diameter end 111 of the stepped inner bore of the housing 100). When the external force is removed, the sliding sleeve 320 rotates under the pushing of the elastic component. The push rod 330 is linearly moved in a reverse direction by the reverse force of the sliding sleeve 320. After the push rod 330 passes through the critical point, the sliding sleeve 320 continues to rotate and is clamped at the guide rail 340, so that the locking is realized. The telescopic rod extends out of the shell at the moment.
When the push rod 33 is pressed again, the rotation restricting member 320 continues to rotate, is separated from the guide rail 340, and is unlocked. After the external force is removed, the telescopic rod moves along the second end to the first end under the action of the elastic force of the elastic component 310, and returns to the initial state, and the telescopic rod retracts into the shell. The above-described pressing process of the rotation restricting member is similar to the structure of a ball point pen, and the present application will not be described in detail.
Fig. 7 is a schematic view illustrating a state where a chip is sucked by a chip sucking tool according to an exemplary embodiment of the present application; fig. 8 illustrates a chip suction tool releasing a chip state diagram according to an example embodiment of the present application.
As shown in fig. 7, when the chip needs to be sucked, the elastic suction cup 240 extends out of the tapered section 110 of the housing along with the telescopic rod by pressing the telescopic rod, and is closely attached to the chip 400, so as to suck the chip. When the telescopic rod is pressed again, the elastic suction cup 240 retracts into the tapered section 110 of the housing along with the telescopic rod, as shown in fig. 8, the elastic suction cup 240 is blocked by the groove 130 at the end of the housing and deforms, so that a gap is formed between the elastic suction cup and the chip, and the chip is released, thereby ensuring the integrity of the chip.
According to some embodiments of the application, the material of shell, telescopic link can be carbon fiber, has characteristics such as high temperature resistant, corrosion-resistant, intensity height, insulation, is applicable to the operational environment of chip debugging.
The chip suction tool provided by the application is provided with the sucker at the head part, when a chip is sucked, the telescopic rod of the chip suction tool is pressed, the sucker head part of the telescopic rod extends outwards, and the sucker can be tightly attached to the chip so as to suck the chip; and the telescopic rod of the chip sucking tool is pressed again, the telescopic rod retracts towards the inside of the shell, the sucking disc is blocked by the end part of the shell of the chip sucking tool to deform, and the chip is released after a gap is formed between the sucking disc and the chip. Simple operation and good repeatability.
The foregoing detailed description of the embodiments of the present application has been presented to illustrate the principles and implementations of the present application, and the description of the embodiments is only intended to facilitate the understanding of the methods and their core concepts of the present application. Meanwhile, a person skilled in the art should, according to the idea of the present application, change or modify the embodiments and applications of the present application based on the scope of the present application. In view of the above, the description should not be taken as limiting the application.
Claims (9)
1. A chip suction tool, comprising:
the shell comprises a step-shaped inner hole which penetrates along the axis;
the telescopic rod penetrates through the step-shaped inner hole, a first end of the telescopic rod extends out of the large-diameter end of the step-shaped inner hole, a second end of the telescopic rod extends out of the small-diameter end of the step-shaped inner hole, and the telescopic rod can move along the axial direction of the shell;
the elastic sucker is arranged outside the small-diameter end of the step-shaped inner hole, is connected with the second end of the telescopic rod and can move along the axial direction of the shell along with the telescopic rod;
the elastic limiting device is arranged in the step-shaped inner hole, is sleeved outside the telescopic rod, and is locked and fixed in the movement process of the telescopic rod after the telescopic rod is pressed for the first time and the external force is removed; after the telescopic rod is pressed for the second time and the external force is removed, the telescopic rod is released in the motion process of the telescopic rod;
the shell is in the minor diameter end outside of step form hole includes a recess, the width of recess is less than the diameter of elastic sucker, the recess is in the elastic sucker blocks when moving makes elastic sucker takes place to warp, thereby leads to the chip breaks away from elastic sucker.
2. The die pick tool of claim 1, wherein the resilient suction cup has a diameter greater than a diameter of the small diameter end of the stepped bore.
3. The chip suction tool of claim 1, wherein the telescoping rod comprises:
the first rod part is connected with the elastic sucker;
and the second rod part is connected with the first rod part, and the diameter of the second rod part is larger than that of the first rod part.
4. The chip suction tool according to claim 3, wherein the elastic stopper comprises:
the elastic component is sleeved outside the first rod part in a sleeving manner, one end of the elastic component is connected with the joint of the first rod part and the second rod part, and the other end of the elastic component is connected with the step surface of the step-shaped inner hole;
and the rotation limiting part is connected with the second rod part.
5. The chip suction tool according to claim 4, wherein the rotation limiting member comprises:
the guide rail is arranged on the side wall of the large-diameter end of the step-shaped inner hole;
the push rod is arranged in the large diameter of the step-shaped inner hole, one end of the push rod extends out of the step-shaped inner hole, and the push rod can linearly move along the guide rail;
one end of the sliding sleeve is connected with the second rod part, the other end of the sliding sleeve is matched with the push rod, and the sliding sleeve can rotate and linearly move in the step-shaped inner hole under the action of the push rod and the elastic part.
6. The chip suction tool according to claim 4, wherein the elastic member is compressed when the rotation limiting member is pressed by an external force so that the telescopic rod moves along the first end toward the second end;
when the external force is removed, the rotation limiting component rotates to lock the telescopic rod under the action of the resilience force of the elastic component.
7. The chip suction tool according to claim 6, wherein the rotation limiting member continues to rotate and unlock while the rotation limiting member continues to be pressed;
the telescopic rod moves along the second end to the direction of the first end under the action of the resilience force of the elastic component.
8. The die pick tool of claim 3, wherein the housing shape outside the first stem is conical and the housing shape outside the second stem is cylindrical.
9. The chip suction tool according to claim 1, wherein the material of the housing or the telescoping rod comprises: carbon fibers.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110945878.2A CN113394157B (en) | 2021-08-18 | 2021-08-18 | Chip suction tool |
| PCT/CN2022/099461 WO2023020102A1 (en) | 2021-08-18 | 2022-06-17 | Chip suction tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110945878.2A CN113394157B (en) | 2021-08-18 | 2021-08-18 | Chip suction tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113394157A CN113394157A (en) | 2021-09-14 |
| CN113394157B true CN113394157B (en) | 2021-12-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110945878.2A Active CN113394157B (en) | 2021-08-18 | 2021-08-18 | Chip suction tool |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113394157B (en) |
| WO (1) | WO2023020102A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113394157B (en) * | 2021-08-18 | 2021-12-03 | 深圳飞骧科技股份有限公司 | Chip suction tool |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006315101A (en) * | 2005-05-10 | 2006-11-24 | Kansai Electric Power Co Inc:The | Attaching/detaching tool for alarm window frame |
| WO2017101014A1 (en) * | 2015-12-15 | 2017-06-22 | 上海金禾实业发展有限公司 | Packaging box shaping device and shaping method therefor |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005317615A (en) * | 2004-04-27 | 2005-11-10 | Toshiba Corp | Manufacturing method of semiconductor device |
| JP4991637B2 (en) * | 2008-06-12 | 2012-08-01 | ルネサスエレクトロニクス株式会社 | Semiconductor device and manufacturing method thereof |
| JP6325589B2 (en) * | 2016-03-07 | 2018-05-16 | 株式会社日本ピスコ | Suction pad |
| CN207015018U (en) * | 2017-03-28 | 2018-02-16 | 青岛点石文具用品有限公司 | By starting writing |
| CN109327267B (en) * | 2018-10-11 | 2021-09-17 | 深圳飞骧科技股份有限公司 | SMD debugger |
| CN109860094A (en) * | 2019-04-16 | 2019-06-07 | 德淮半导体有限公司 | Chip absorption device and its chip pick-up method |
| US20210001378A1 (en) * | 2019-07-02 | 2021-01-07 | International Test Solutions, Inc. | Pick and place machine cleaning system and method |
| CN110217018B (en) * | 2019-07-14 | 2023-11-14 | 杭州简弈科技有限公司 | Hand-held telescopic pen |
| CN110561949B (en) * | 2019-08-02 | 2020-10-16 | 桐庐优德文化创意有限公司 | Pressing type writing pen |
| CN113394157B (en) * | 2021-08-18 | 2021-12-03 | 深圳飞骧科技股份有限公司 | Chip suction tool |
-
2021
- 2021-08-18 CN CN202110945878.2A patent/CN113394157B/en active Active
-
2022
- 2022-06-17 WO PCT/CN2022/099461 patent/WO2023020102A1/en active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006315101A (en) * | 2005-05-10 | 2006-11-24 | Kansai Electric Power Co Inc:The | Attaching/detaching tool for alarm window frame |
| WO2017101014A1 (en) * | 2015-12-15 | 2017-06-22 | 上海金禾实业发展有限公司 | Packaging box shaping device and shaping method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023020102A1 (en) | 2023-02-23 |
| CN113394157A (en) | 2021-09-14 |
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